公开(公告)号：US20130077947A1

公开(公告)日：2013-03-28

申请号：US13247869

申请日：2011-09-28

Applicant: Robert J. Calvet ,  Roman C. Gutierrez

Inventor： Robert J. Calvet ,  Roman C. Gutierrez

IPC: G03B13/34 ,  B23P17/00 ,  F16H25/14 ,  B32B38/00 ,  B32B37/16 ,  B23P11/00 ,  B32B37/12

CPC classification number: H02N1/006 ,  B81B3/0037 ,  B81B2201/033 ,  B81B2203/053 ,  G03B2205/0084

Abstract: A method for making an actuator device includes forming a substantially planar structure, including an outer frame with a latch foot, a fixed frame coupled to the outer frame, a latch mass coupled to the fixed frame, a latch block coupled to the latch mass by a latch block flexure, a moveable frame coupled to the outer frame, and an actuator incorporating a plurality of interdigitated teeth alternately attached to the fixed and moving frames. For operation, the latch mass is rotated downward until an upper surface of the latch block is disposed below and held in latching contact with a lower surface of the latch foot by the latch block flexure.

Abstract translation: 用于制造致动器装置的方法包括形成基本上平面的结构，包括具有闩锁脚的外框架，耦合到外框架的固定框架，耦合到固定框架的闩锁块，通过 锁定块挠曲件，联接到外框架的可移动框架，以及包括交替地附接到固定和移动框架的多个叉指齿轮的致动器。 为了操作，闩锁块向下旋转直到闩锁块的上表面设置在下方并通过闩锁块弯曲保持与闩锁脚的下表面闩锁接触。

公开(公告)号：US08339014B2

公开(公告)日：2012-12-25

申请号：US12599688

申请日：2008-06-30

Applicant: Atsushi Kandori ,  Chienliu Chang ,  Makoto Takagi

Inventor： Atsushi Kandori ,  Chienliu Chang ,  Makoto Takagi

IPC: G02B26/08

CPC classification number: B81B3/0086 ,  B81B2201/0242 ,  B81B2201/033 ,  B81B2203/058 ,  G01C19/5719

Abstract: An oscillator device that includes a movable body oscillatably supported about a rotation axis, wherein the movable body is separated into plural electrically separated conductive regions in the thickness direction, and at least one of the plural electrically separated conductive regions in the thickness direction further has plural electrically separated conductive regions.

Abstract translation: 一种振荡器装置，包括围绕旋转轴可摆动地支撑的可移动体，其中所述可移动体在所述厚度方向上被分离为多个分离的导电区域，并且所述多个电分离的导电区域中的至少一个在所述厚度方向上还具有多个 电分离的导电区域。

公开(公告)号：US20120120507A1

公开(公告)日：2012-05-17

申请号：US12946466

申请日：2010-11-15

Applicant: Roman C. Gutierrez ,  Ankur Jain

Inventor： Roman C. Gutierrez ,  Ankur Jain

IPC: G02B7/02 ,  H01L21/762 ,  H02N11/00

CPC classification number: H02N2/005 ,  B81B7/0006 ,  B81B2201/033 ,  B81B2203/0154 ,  B81B2207/07

Abstract: A device may comprise a flexure formed of a first semiconductor material. A first trench may be formed in the flexure. The first trench may separate the first semiconductor material into a first portion and a second portion thereof. An oxide layer may be formed in the first trench. The oxide layer may extend over a top portion of the first semiconductor material. A second semiconductor material may be formed on the oxide layer. The first trench and the oxide layer may cooperate to electrically isolate the first portion and the second portion from one another.

Abstract translation: 装置可以包括由第一半导体材料形成的挠曲。 可以在弯曲部中形成第一沟槽。 第一沟槽可以将第一半导体材料分离成第一部分和第二部分。 可以在第一沟槽中形成氧化物层。 氧化物层可以在第一半导体材料的顶部上延伸。 可以在氧化物层上形成第二半导体材料。 第一沟槽和氧化物层可以协作以将第一部分和第二部分彼此电隔离。

公开(公告)号：US20120081598A1

公开(公告)日：2012-04-05

申请号：US13247888

申请日：2011-09-28

Applicant: Robert J. Calvet ,  Xiaolei Liu ,  Ankur Jain ,  Lakshminarayan Hariharan ,  Roman C. Gutierrez

Inventor： Robert J. Calvet ,  Xiaolei Liu ,  Ankur Jain ,  Lakshminarayan Hariharan ,  Roman C. Gutierrez

IPC: H04N5/232 ,  F16H21/44 ,  H05K7/00 ,  B23P11/00

CPC classification number: G03B5/00 ,  B81B3/0037 ,  B81B2201/033 ,  B81B2203/053 ,  G03B3/10 ,  G03B2205/0007 ,  G03B2205/0084 ,  Y10T29/49826 ,  Y10T74/18992

Abstract: A method for making an actuator device includes forming a substantially planar structure having a stage resiliently supported for movement within a plane of the structure, an actuator coupled to an outer periphery of the stage and operable to apply a force acting in the plane and tangentially to the stage when actuated, the actuator comprising a fixed frame and a moving frame resiliently supported for reciprocal movement relative to the fixed frame by a motion control flexure, and an outer frame surrounding and supporting the stage and the actuator. The moving frame is moved to a deployed position that is coplanar with, parallel to and spaced apart from the fixed frame at a selected distance, and the moving frame is then fixed at the deployed position for substantially rectilinear, perpendicular movement relative to the fixed frame.

Abstract translation: 一种用于制造致动器装置的方法包括形成基本平坦的结构，其具有弹性支撑以在所述结构的平面内移动的台阶;致动器，其联接到所述平台的外周边并且可操作以施加作用在所述平面中的切向和切向地 致动器包括固定框架和弹性支撑的运动框架，用于通过运动控制挠曲件相对于固定框架往复运动，以及围绕并支撑平台和致动器的外框架。 移动框架被移动到展开位置，该展开位置与固定框架平行并间隔开一定距离，然后移动框架固定在展开位置，以相对于固定框架基本上直线，垂直移动 。

公开(公告)号：US20110279919A1

公开(公告)日：2011-11-17

申请号：US13057411

申请日：2009-07-06

Applicant: Stefan Finkbeiner ,  Tjalf Pirk ,  Christoph Friese

Inventor： Stefan Finkbeiner ,  Tjalf Pirk ,  Christoph Friese

IPC: G02B7/182 ,  B05D3/10

CPC classification number: B81C1/00166 ,  B81B2201/033 ,  B81C2201/014

Abstract: A method for manufacturing a micromechanical component is described, including the steps of: forming a first etch stop layer on a base substrate, the first etch stop layer being formed in such a way that it has a first pattern of through-cutouts; forming a first electrode-material layer on the first etch stop layer; forming a second etch stop layer on the first electrode-material layer, the second etch stop layer being formed in such a way that it has a second pattern of through-cutouts differing from the first pattern; forming a second electrode-material layer on the second etch stop layer; forming a patterned mask on the second electrode-material layer; and carrying out a first etching step in a first direction and a second etching step in a second direction counter to the first direction in order to etch at least one first electrode unit out of the first electrode-material layer and to etch at least one second electrode unit out of the second electrode-material layer. Also described are micromechanical components.

Abstract translation: 描述了一种用于制造微机械部件的方法，包括以下步骤：在基底基板上形成第一蚀刻停止层，第一蚀刻停止层以这样的方式形成：其具有第一图形的通孔; 在所述第一蚀刻停止层上形成第一电极材料层; 在所述第一电极材料层上形成第二蚀刻停止层，所述第二蚀刻停止层以这样的方式形成：其具有不同于所述第一图案的通孔的第二图案; 在所述第二蚀刻停止层上形成第二电极材料层; 在所述第二电极材料层上形成图案化掩模; 并且在与第一方向相反的第二方向上沿第一方向和第二蚀刻步骤进行第一蚀刻步骤，以便从第一电极材料层中蚀刻至少一个第一电极单元并蚀刻至少一个第二 电极单元排出第二电极材料层。 还描述了微机械部件。

公开(公告)号：US20110248601A1

公开(公告)日：2011-10-13

申请号：US13124468

申请日：2009-08-24

Applicant: Tjalf Pirk ,  Stefan Pinter ,  Joerg Muchow ,  Joachim Fritz ,  Christoph Friese

Inventor： Tjalf Pirk ,  Stefan Pinter ,  Joerg Muchow ,  Joachim Fritz ,  Christoph Friese

IPC: H02N1/00

CPC classification number: G02B26/0833 ,  B81B3/004 ,  B81B2201/033 ,  B81B2203/058 ,  G02B26/0841 ,  H02N1/006

Abstract: A cascaded micromechanical actuator structure for rotating a micromechanical component about a rotation axis is described. The structure includes a torsion spring device which, on the one hand, is attached to a mount and to which, on the other hand, the micromechanical component is attachable. The torsion spring device has a plurality of torsion springs which run along or parallel to the rotation axis. The structure includes a rotary drive device having a plurality of rotary drives which are connected to the torsion spring device in such a way that each rotary drive contributes a fraction to an overall rotation angle of a micromechanical component about the rotation axis.

Abstract translation: 描述了用于围绕旋转轴线旋转微机械部件的级联微机械致动器结构。 该结构包括一个扭力弹簧装置，一方面，该弹簧装置附接到安装件，另一方面，微型机械部件可附接到该扭力弹簧装置。 扭转弹簧装置具有沿旋转轴线或平行于旋转轴线延伸的多个扭转弹簧。 该结构包括具有多个旋转驱动器的旋转驱动装置，其连接到扭转弹簧装置，使得每个旋转驱动器对微机械部件围绕旋转轴线的整个旋转角贡献分数。

公开(公告)号：US20100264777A1

公开(公告)日：2010-10-21

申请号：US12761621

申请日：2010-04-16

Applicant: MOSTAFA MEDHAT ,  YASSEEN NADA ,  BASSEM MORTADA ,  BASSAM A. SAADANY

Inventor： MOSTAFA MEDHAT ,  YASSEEN NADA ,  BASSEM MORTADA ,  BASSAM A. SAADANY

IPC: H02N11/00 ,  G05G1/00

CPC classification number: B81B3/0051 ,  B81B3/0037 ,  B81B2201/033 ,  B81B2203/0136 ,  B81B2203/051 ,  H02N1/008 ,  Y10T74/20558

Abstract: An electrostatic comb drive actuator for a MEMS device includes a flexure spring assembly and first and second comb drive assemblies, each coupled to the flexure spring assembly on opposing sides thereof. Each of the first and second comb assemblies includes fixed comb drive fingers and moveable comb drive fingers coupled to the flexure spring assembly and extending towards the fixed comb drive fingers. The comb drive fingers are divided equally between the first and second comb drive assemblies and placed symmetrically about a symmetry axis of the flexure spring assembly. When electrically energized, the moveable comb drive fingers of both the first and second comb drive assemblies simultaneously move towards the fixed comb drive fingers of the first and second comb drive assemblies.

Abstract translation: 用于MEMS器件的静电梳驱动致动器包括挠曲弹簧组件和第一和第二梳子驱动组件，每个组合驱动组件在其相对侧上与挠曲弹簧组件相连。 第一和第二梳组件中的每一个包括固定梳状驱动指状物和可移动梳状驱动指状物，其联接到挠性弹簧组件并朝向固定梳状驱动指状物延伸。 梳齿驱动指状物在第一和第二梳状驱动组件之间被均等分配，并且围绕挠性弹簧组件的对称轴对称地放置。 当通电时，第一和第二梳状驱动组件的可移动梳状驱动指状物同时朝向第一和第二梳状驱动组件的固定梳状驱动指状物移动。

公开(公告)号：US07817331B2

公开(公告)日：2010-10-19

申请号：US12043202

申请日：2008-03-06

Applicant: Abdul Jaleel. K. Moidu

Inventor： Abdul Jaleel. K. Moidu

IPC: G02B26/00 ,  G02B26/08

CPC classification number: B81B3/004 ,  B81B2201/033

Abstract: A vertical comb electro-static actuator for rotating a micro-electro-mechanical micro-mirror device about a tilt axis or rotation. The rotor comb fingers of the comb drive extend from a sub-frame of the micro-mirror, which includes a prestressed layer for bending the rotor comb fingers at an angle to the substrate and mirrored platform, enabling the platform, the hinges, the rotor comb fingers and the stator comb fingers to be formed in the same layer, i.e. the same etching step.

Abstract translation: 一种垂直梳状静电致动器，用于围绕倾斜轴线或旋转旋转微机电微反射镜装置。 梳子驱动器的转子梳齿从微反射镜的子框架延伸，微镜的子框架包括用于将转子梳齿与基板和镜像平台成一定角度弯曲的预应力层，使平台，铰链，转子 梳指和定子梳指形成在相同的层中，即相同的蚀刻步骤。

公开(公告)号：US20100207411A1

公开(公告)日：2010-08-19

申请号：US12305468

申请日：2007-06-21

Applicant: Yu Sun ,  Keekyoung Kim

Inventor： Yu Sun ,  Keekyoung Kim

IPC: B81B7/02 ,  B25J7/00 ,  B81B3/00 ,  H01R43/00

CPC classification number: B81C99/002 ,  B25J9/104 ,  B81B2201/0292 ,  B81B2201/031 ,  B81B2201/033

Abstract: The present invention relates to a design and microfabrication method for microgrippers that are capable of grasping micro and nano objects of a large range of sizes and two-axis force sensing capabilities. Gripping motion is produced by one or more electrothermal actuators. Integrated force sensors along x and y directions enable the measurement of gripping forces as well as the forces applied at the end of microgripper arms along the normal direction, both with a resolution down to nanoNewton. The microfabrication method enables monolithic integration of the actuators and the force sensors.

Abstract translation: 本发明涉及一种微抓爪的设计和微细加工方法，其能够抓住大范围尺寸和双轴力感测能力的微型和纳米物体。 夹持运动由一个或多个电热致动器产生。 沿x和y方向的集成力传感器可以测量夹紧力以及沿着法向方向施加在微夹臂末端的力，并且分辨率低至纳摩顿。 微加工方法可实现致动器和力传感器的整体集成。

公开(公告)号：US20100172612A1

公开(公告)日：2010-07-08

申请号：US12389399

申请日：2009-02-20

Applicant: Abdul Jaleel K. Moidu

Inventor： Abdul Jaleel K. Moidu

IPC: G02B6/26 ,  G02B26/08

CPC classification number: G02B26/0841 ,  B81B3/0062 ,  B81B2201/033 ,  B81B2201/045 ,  B81B2203/058 ,  G02B6/2931 ,  G02B6/3518 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3584

Abstract: A two-axis tiltable linear array of MEMS micromirrors is described. The individual micromirrors of the array are flexibly suspended over a common substrate by using two pairs of serpentine hinges coupled by a gimbal ring and are actuated by using tilt and roll electrodes. The tilt actuator regions of the micromirrors are disposed within the gimbal rings, the roll hinges connecting the tilt actuator regions to the micromirrors, which provides for decoupling of the tilt and the roll of the micromirror. The structure allows for considerable decoupling of the tilt and the roll and, or the pistoning effects observed upon micromirror actuation. The structure is suitable for application in a wavelength selective optical switch.

Abstract translation: 描述了MEMS微镜的两轴可倾斜线性阵列。 通过使用由万向环联接的两对蛇形铰链，阵列的各个微镜可以灵活地悬挂在共同的基板上，并通过使用倾斜和滚动电极来驱动。 微镜的倾斜致动器区域设置在万向环内，辊铰链将倾斜致动器区域连接到微镜，其提供微镜的倾斜和辊的解耦。 该结构允许倾斜和辊的显着解耦，或者在微镜驱动时观察到的活塞效应。 该结构适用于波长选择光开关。