公开(公告)号：US20070139599A1

公开(公告)日：2007-06-21

申请号：US11415097

申请日：2006-05-02

Applicant: Byeung-Ieul Lee

Inventor： Byeung-Ieul Lee

IPC: G02F1/1343

CPC classification number: B81B3/0037 ,  B81B2201/033 ,  B81B2201/047 ,  B81B2203/0136 ,  B81B2203/04

Abstract: A vertical comb-type electrode structure capable of a large linear-displacement motion. The vertical comb-electrode structure includes: a first substrate including a plurality of vertical static comb-electrodes; and a second substrate stacked on an upper surface of the first substrate, the second substrate including a plurality of vertical moving comb-electrodes, wherein the static comb-electrodes are vertically moved or positioned a predetermined distance toward the moving comb-electrodes in the initial state of the electrode structure so that no gaps between the static comb-electrodes and the moving comb-electrodes exist.

Abstract translation: 具有大的线性位移运动的垂直梳状电极结构。 垂直梳状电极结构包括：包括多个垂直静电梳电极的第一衬底; 以及堆叠在所述第一基板的上表面上的第二基板，所述第二基板包括多个垂直移动梳状电极，其中所述静态梳状电极在初始状态下垂直移动或定位成朝向移动的梳状电极预定的距离 电极结构的状态，使得存在静电梳电极与移动梳电极之间的间隙。

公开(公告)号：US07115437B2

公开(公告)日：2006-10-03

申请号：US10935947

申请日：2004-09-08

Applicant: Mark G. Allen ,  Charles C. Chung

Inventor： Mark G. Allen ,  Charles C. Chung

IPC: H01L21/00

CPC classification number: H01L21/761 ,  B81B3/0086 ,  B81B2201/033 ,  Y10S257/93

Abstract: A micromachined structure having electrically isolated components is formed by thermomigrating a dopant through a substrate to form a doped region within the substrate. The doped region separates two portions of the substrate. The dopant is selected such that the doped region electrically isolates the two portions of the substrate from each other via junction isolation.

公开(公告)号：US20060157807A1

公开(公告)日：2006-07-20

申请号：US11375860

申请日：2006-03-15

Applicant: Kanakasabapathi Subramanian ,  Xiaojun Huang ,  Noel MacDonald

Inventor： Kanakasabapathi Subramanian ,  Xiaojun Huang ,  Noel MacDonald

IPC: H01L29/84

CPC classification number: B81C1/00626 ,  B81B2201/033 ,  H01L21/3086

Abstract: Multi-level structures are formed in a semiconductor substrate by first forming a pattern of lines or structures of different widths. Width information on the pattern is decoded by processing steps into level information to form a MEMS structure. The pattern is etched to form structures having a first floor. The structures are oxidized until structures of thinner width are substantially fully oxidized. A portion of the oxide is then etched to expose the first floor. The first floor is then etched to form a second floor. The oxide is then optionally removed, leaving a multi-level structure. In one embodiment, high aspect ratio comb actuators are formed using the multi-level structure process.

公开(公告)号：US20060072180A1

公开(公告)日：2006-04-06

申请号：US10527731

申请日：2004-06-25

Applicant: Masaya Tamura ,  Shinji Kobayashi

Inventor： Masaya Tamura ,  Shinji Kobayashi

IPC: G02B26/08

CPC classification number: G02B6/358 ,  B81B3/0051 ,  B81B2201/033 ,  B81B2201/045 ,  G02B6/3514 ,  G02B6/3518 ,  G02B6/3544 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3584 ,  G02B26/0833 ,  H02N1/008

Abstract: A buckling actuator has a connecting section of a supporting beam that is provided with a rotatable supporter for allowing a movable member to be stably maintained at one of two switch positions. A substrate, stationary members, rotatable supporters, and supporting beams support a movable member in a shiftable manner in a y-axis direction, such that the movable member can be shifted between first and second switch positions. Moreover, the rotatable supporters are each provided with arm portions which extend in a radial fashion and support the corresponding supporting beam in a rotatable manner. When the movable member is being shifted, each supporting beam scan be rotated without having to bend a corresponding end by a significant amount. Thus, a large barrier ΔE of potential energy of the movable member is set between the first and second switch positions. The movable member can therefore be stably maintained at each of the switch positions even when electric power is not supplied to electrodes. Furthermore, each arm portion prevents the movable member from being displaced in an x-axis direction.

Abstract translation: 弯曲致动器具有支撑梁的连接部分，该连接部分设置有用于允许可动构件稳定地保持在两个开关位置之一的可旋转支撑件。 基板，固定构件，旋转支撑件和支撑梁在y轴方向上以可移动的方式支撑可移动构件，使得可移动构件能够在第一和第二开关位置之间移动。 此外，旋转的支撑件各自设置有以径向方式延伸并以可旋转方式支撑相应的支撑梁的臂部分。 当可移动部件正在移动时，每个支撑梁扫描被旋转，而不必将相应的端部弯曲大量。 因此，在第一和第二开关位置之间设置可动构件的势能的大阻挡DeltaE。 因此，即使不向电极供电，也可以将可动构件稳定地维持在开关位置的各个位置。 此外，每个臂部防止可动构件在x轴方向上移位。

公开(公告)号：US20060008934A1

公开(公告)日：2006-01-12

申请号：US11224119

申请日：2005-09-13

Applicant: Chang-Li Hung

Inventor： Chang-Li Hung

IPC: H01L21/00

CPC classification number: B81B3/0045 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/0109 ,  B81B2203/0154 ,  B81B2203/058 ,  G02B26/0841

Abstract: A micro-electro-mechanical component comprising a movable element with comb electrodes, and two stationary elements with comb electrodes aligned and stacked on each other but electrically insulated by a layer of insulation material. The movable element is supported by multiple torsional hinges and suspended over a cavity such that the element can oscillate about an axis defined by the hinges. The comb electrodes of the movable element are interdigitated with the comb electrodes of one stationary element in the same plane to form an in-plane comb actuator. The comb electrodes of the movable element are also interdigitated in an elevated plane with the comb electrodes of another stationary element to form a vertical comb actuator. As a result, the micro-electro-mechanical component is both an in-plane actuator and a vertical comb actuator, or a multiple-plane actuator. Methods of fabricating such actuator are also described.

Abstract translation: 一种微电子机械部件，包括具有梳状电极的可移动元件和具有梳状电极的两个固定元件，梳状电极彼此对准并堆叠，但是被绝缘材料层电绝缘。 可移动元件由多个扭转铰链支撑并悬挂在空腔上，使得元件可以围绕由铰链限定的轴线摆动。 可移动元件的梳状电极与同一平面中的一个固定元件的梳状电极相互交错，以形成平面内的梳状致动器。 可移动元件的梳状电极也在另一个固定元件的梳状电极的高架平面上交错形成垂直梳状致动器。 结果，微电子机械部件既是面内致动器，也是垂直梳状致动器，或者是多平面致动器。 还描述了制造这种致动器的方法。

公开(公告)号：US20050194650A1

公开(公告)日：2005-09-08

申请号：US10793877

申请日：2004-03-08

Applicant: Chang-Li Hung

Inventor： Chang-Li Hung

IPC: H01L27/14 ,  H01L29/82 ,  H01L29/84

CPC classification number: B81B3/0045 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/0109 ,  B81B2203/0154 ,  B81B2203/058 ,  G02B26/0841

Abstract: A micro-electro-mechanical component comprising a movable element with comb electrodes, and two stationary elements with comb electrodes aligned and stacked on each other but electrically insulated by a layer of insulation material. The movable element is supported by multiple torsional hinges and suspended over a cavity such that the element can oscillate about an axis defined by the hinges. The comb electrodes of the movable element are interdigitated with the comb electrodes of one stationary element in the same plane to form an in-plane comb actuator. The comb electrodes of the movable element are also interdigitated in an elevated plane with the comb electrodes of another stationary element to form a vertical comb actuator. As a result, the micro-electro-mechanical component is both an in-plane actuator and a vertical comb actuator, or a multiple-plane actuator. Methods of fabricating such actuator are also described.

Abstract translation: 一种微电子机械部件，包括具有梳状电极的可移动元件和具有梳状电极的两个固定元件，梳状电极彼此对准并堆叠，但是被绝缘材料层电绝缘。 可移动元件由多个扭转铰链支撑并悬挂在空腔上，使得元件可以围绕由铰链限定的轴线摆动。 可移动元件的梳状电极与同一平面中的一个固定元件的梳状电极相互交错，以形成平面内的梳状致动器。 可移动元件的梳状电极也在另一个固定元件的梳状电极的高架平面上交错形成垂直梳状致动器。 结果，微电子机械部件既是面内致动器，也是垂直梳状致动器，或者是多平面致动器。 还描述了制造这种致动器的方法。

公开(公告)号：US20050156481A1

公开(公告)日：2005-07-21

申请号：US11019519

申请日：2004-12-23

Applicant: Guangya Zhou ,  Logeeswaran Vj ,  Fook Siong Chau

Inventor： Guangya Zhou ,  Logeeswaran Vj ,  Fook Siong Chau

IPC: G02B26/08 ,  G02B26/10 ,  H02N1/00 ,  G02B5/32

CPC classification number: H02N1/008 ,  B33Y30/00 ,  B81B3/0062 ,  B81B2201/033 ,  B81B2201/047 ,  B81B2203/0109 ,  B81B2203/056 ,  G02B26/0808 ,  G02B26/106

Abstract: An optical scanning apparatus includes an in-plane vibratory mass platform having at least one diffraction grating formed thereon as the scanning element, at least one flexure structure that connects the mass platform to at least one fixed support, and at least one driving actuator that drives the mass platform into an in-plane vibratory motion which can be rotational and/or translational. The apparatus may also be formed by a mass platform having at least one diffraction grating formed thereon as the scanning element, at least one driving actuator connected to the mass platform through at least one flexure structure. The driving actuator drives the mass platform into an in-plane vibratory motion.

Abstract translation: 一种光学扫描装置包括：具有形成在其上的至少一个衍射光栅作为扫描元件的平面内振动质量平台;将质量平台连接至至少一个固定支撑件的至少一个挠曲结构;以及至少一个驱动致动器，其驱动 质量平台成为可以旋转和/或平移的平面内的振动运动。 该装置还可以由其上形成有至少一个衍射光栅作为扫描元件的质量平台形成，至少一个驱动致动器通过至少一个弯曲结构连接到质量平台。 驱动执行器将质量平台驱动到平面内的振动运动中。

公开(公告)号：US20050134951A1

公开(公告)日：2005-06-23

申请号：US11053880

申请日：2005-02-10

Applicant: Xiaoyu Mi ,  Osamu Tsuboi ,  Satoshi Ueda ,  Ippei Sawaki

Inventor： Xiaoyu Mi ,  Osamu Tsuboi ,  Satoshi Ueda ,  Ippei Sawaki

IPC: B81B3/00 ,  B81B5/00 ,  G02B26/08 ,  G02B26/10

CPC classification number: G02B26/0841 ,  B81B3/007 ,  B81B2201/0235 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/0109 ,  B81B2203/0154 ,  B81B2203/058

Abstract: A micro-oscillating element is provided with a frame (113) and a oscillating member (111) connected with the frame (113) via a connector (112). Each connector (112) includes two torsion bars (112a), each torsion bar (112a) being constructed so that the rigidity becomes relatively high toward the frame (113) and relatively low toward the oscillating member (111) by forming a plurality of holes (112b).

Abstract translation: 微振动元件设置有经由连接器（112）与框架（113）连接的框架（113）和摆动构件（111）。 每个连接器（112）包括两个扭杆（112a），每个扭杆（112a）被构造成使得刚性通过形成多个相对于框架（113）而相对较低朝着摆动构件（111）变得相对较高 的孔（112b）。

公开(公告)号：US20050052723A1

公开(公告)日：2005-03-10

申请号：US10895290

申请日：2004-07-21

Applicant: Shin-Ichiro Watanabe ,  Koji Horio ,  Kenichi Muta ,  Masayoshi Esashi

Inventor： Shin-Ichiro Watanabe ,  Koji Horio ,  Kenichi Muta ,  Masayoshi Esashi

IPC: G02B26/02 ,  B81B3/00 ,  G02B26/00

CPC classification number: B81B3/0037 ,  B81B2201/033 ,  B81B2201/045 ,  B81B2203/0136 ,  B81B2203/051

Abstract: An electrostatic comb drive actuator, characterized in that plural outer suspended elastic beams 2a and 2b are disposed in parallel to and outside plural inner suspended elastic beams 1a and 1b disposed in parallel to each other; the ends of the inner suspended elastic beams and the outer suspended elastic beams on both sides are connected with end connecting beams 3a and 3b; the outer suspended elastic beams are supported at their centers on a board 5; the inner suspended elastic beams are connected with each other at their centers by means of a working section 6; a movable comb electrode 7 is supported on the working section; and a fixed comb electrode 8 is supported on the board.

Abstract translation: 一种静电梳驱动致动器，其特征在于，多个外悬置弹性梁2a和2b平行于彼此平行布置的多个内悬置弹性梁1a和1b平行设置; 内侧悬臂弹簧梁的端部和两侧的外侧悬臂弹性梁与末端连接梁3a，3b连接; 外侧悬臂弹性梁在其中心支撑在板5上; 内部悬吊弹性梁通过工作部分6在其中心处相互连接; 可动梳状电极7被支撑在工作部分上; 并且固定梳状电极8被支撑在板上。

公开(公告)号：US20040163226A1

公开(公告)日：2004-08-26

申请号：US10791756

申请日：2004-03-04

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jin-ho Lee ,  Young-chul Ko ,  Do-hyun Kong

IPC: H04R017/00

CPC classification number: B81C3/001 ,  B81B2201/033 ,  B81B2203/0136 ,  B81B2203/0181 ,  B81B2203/04 ,  B81B2203/058 ,  B81C1/00142 ,  B81C2201/0132 ,  B81C2203/038 ,  Y10T29/42 ,  Y10T29/435

Abstract: A micro-actuator having a stage capable of a see-saw motion and a method for its manufacture are disclosed. In the micro-actuator according to the present invention, a plurality of parallel driving comb-type electrodes are formed on the bottom of the stage, and a plurality of parallel fixed comb-type electrodes are formed on a base plate. At both sides of the stage is a torsion bar that enables the see-saw motion. The torsion bar is supported by a frame comprised of a first frame layer and a second frame layer. The torsion bar and the first frame layer form one body. The first and second frame layers are bonded by a metal eutectic bonding layer between metal layers.

Abstract translation: 公开了一种具有能够进行跷跷板运动的平台的微致动器及其制造方法。 在本发明的微型致动器中，在台架的底部形成多个平行的驱动梳状电极，在基板上形成多个平行的固定梳状电极。 在舞台的两侧是一个扭杆，可以实现跷跷板的动作。 扭杆由包括第一框架层和第二框架层的框架支撑。 扭杆和第一框架层形成一体。 第一和第二框架层通过在金属层之间的金属共晶接合层结合。