METHOD FOR CONFIGURING A SPECTROMETRY DEVICE

    公开(公告)号:US20220196476A1

    公开(公告)日:2022-06-23

    申请号:US17600754

    申请日:2020-04-03

    Applicant: GREENTROPISM

    Abstract: A method for configuring a target spectrometry device using a reference spectrometry device. The method involves: acquiring spectral measurements for a set of reference samples with the reference spectrometer and storing the spectral measurements in a reference database; acquiring target spectral measurements for a sub-set of reference samples with the target spectrometer and storing the spectral measurements in a target database; determining an average spectrum for each reference sample from the reference and target spectral measurements; determining a series of spectra for each average spectrum, which includes determining an optical transfer function of the target spectrometer and applying the optical transfer function to each average spectrum measured by the reference spectrometer; and storing the average spectrum and series of spectra of each reference sample in the target database. The determining steps use a computing module. Also, a spectrometry device configured for the method.

    Optical device
    283.
    发明授权

    公开(公告)号:US11366011B2

    公开(公告)日:2022-06-21

    申请号:US16784928

    申请日:2020-02-07

    Abstract: An optical device may comprise an array of sensor elements and an array of optical channels disposed on the array of sensor elements. At least one optical channel of the array of optical channels may be configured to pass bandpass filtered light to at least one sensor element of the array of sensor elements. At least one other optical channel of the array of optical channels may be configured to pass non-bandpass filtered light to at least one other sensor element of the array of sensor elements.

    SYSTEM AND METHOD FOR TESTING A SPECTRAL RESPONSE SPEED OF A TUNABLE FILTER

    公开(公告)号:US20220187127A1

    公开(公告)日:2022-06-16

    申请号:US17425644

    申请日:2020-07-09

    Abstract: A system for testing a spectral response speed of a tunable filter is disclosed, which includes a collimating light source, a beam splitting element, a focusing lens, and an image recording device of light spot position arranged successively. The tunable filter is disposed between the collimating light source and the beam splitting element and configured to be continuously tuned within a certain wavelength range during testing. The beam splitting element is used to form light beams of different wavelength bands passing through the tunable filter into diffracted beams or refracted beams corresponding to different wavelength bands. The focusing lens is used to perform focusing. The image recording device of light spot position is used to record change information about positions where the diffracted beams or refracted beams corresponding to different wavelength bands are imaged.

    Laser beam profiling system for use in laser processing systems

    公开(公告)号:US11359994B2

    公开(公告)日:2022-06-14

    申请号:US17226776

    申请日:2021-04-09

    Abstract: A testing apparatus for use with a laser processing system that includes a laser for generating a non-stationary laser beam and a work plane positioned at a working distance relative to the non-stationary laser beam, wherein the testing apparatus includes a support tube; a protective window mounted in the support tube for protecting components mounted within the support tube; a reimaging lens mounted in the support tube for enlarging the non-stationary laser beam for characterization thereof; a pin-hole defining structure mounted in the support tube for receiving laser light generated by the laser beam, wherein the pin-hole is located at a predetermined distance from the reimaging lens; a fiber optic cable disposed within the pin-hole defining structure that has a proximal end at which the laser light is received through the pin-hole and a distal end to which the laser light is delivered; and a photodetector located at the distal end of the fiber optic cable that converts the laser light delivered to the photodetector into electrical voltage output signals based on intensity of the laser light received through the pin-hole.

    COHERENT ANTI-STOKES RAMAN SCATTERING MICROSCOPE IMAGING APPARATUS

    公开(公告)号:US20220178750A1

    公开(公告)日:2022-06-09

    申请号:US17598211

    申请日:2019-11-21

    Inventor: Yan Xia Bin Yang Rui Li

    Abstract: A coherent anti-Stokes Raman scattering microscope imaging apparatus, comprising: a laser light source (21), a two-dimensional oscillating mirror assembly (22), a first light dichroic mirror plate (23), an objective lens (24), a sample translation platform (25), a collection device (26), and a data processing module; the laser light source (21) is used for producing a first laser beam and a second laser beam; the first laser beam and the second laser beam are coaxially emitted; the first laser beam and the second laser beam are incident on the two-dimensional oscillating mirror assembly (22), and the two-dimensional oscillating mirror assembly (22) adjusts the optical path of the first laser beam and the second laser beam; the first laser beam and the second laser beam leaving the two-dimensional oscillating mirror assembly pass in sequence through the first light dichroic mirror plate (23) and the objective lens (24); the objective lens (24) focuses the first laser beam and the second laser beam onto the sample translation platform; the signal light produced on the sample translation platform (25) passes through the objective lens (24), and the collection device (26) produces initial data on the basis of the signal light, and outputs the initial data to the data processing module; the need for beam splitting and wavelength adjustment of a single wavelength laser beam outputted by a laser is thereby avoided.

    Monolithic spectrometer
    287.
    发明授权

    公开(公告)号:US11353363B2

    公开(公告)日:2022-06-07

    申请号:US16584433

    申请日:2019-09-26

    Abstract: In some embodiments, a spectrometer is presented. In accordance with some embodiments, the spectrometer includes an optical sensor array, the optical sensor array including a substrate and an array of pixels formed on the substrate; a spectral filter array formed over the pixels of the optical sensor array, the spectral filter array filtering incident light such that each pixel receives light of a spectral transmission profile associated with the pixel; a transparent spacer formed over the spectral filter array; and an opaque mask having input apertures allowing light through the transparent spacer and onto a portion of the spectral filter array. The spectrometer can be formed from the optical sensor array using a combination of photolithographic techniques and bonding of certain layers.

    PLASMA PROCESSING APPARATUS AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING THE SAME

    公开(公告)号:US20220172928A1

    公开(公告)日:2022-06-02

    申请号:US17533507

    申请日:2021-11-23

    Abstract: A plasma processing apparatus is provided. A plasma processing apparatus includes a chamber, in which a plasma process is performed, a chuck disposed inside the chamber and provided with a wafer, a gas feeder disposed on the chuck and for providing process gas to the inside of the chamber, an OES port extending in a vertical direction along a sidewall of the chamber, and for receiving each of a first light emitted from plasma at a first position and a second light emitted from plasma at a second position closer to the gas feeder than the first position, an OES sensor for sensing the first light to measure first plasma data, and sensing the second light to measure second plasma data, and a control unit for controlling the plasma process using the first and second plasma data.

    AMPLIFIED MULTIPLEX ABSORPTION SPECTROSCOPY

    公开(公告)号:US20220170848A1

    公开(公告)日:2022-06-02

    申请号:US17535225

    申请日:2021-11-24

    Abstract: An optically thin sample of a sample material is analyzed by propagating probe electromagnetic radiation from a beam source along a plurality of different ray paths, directing each ray so that each ray path intersects upon the sample at a plurality of different locations where the rays interact with the sample material to cause a modification of the ray. The rays received at each of a plurality of detection spatial region are measured separately and the measurements analyzed to provide information about at least one property of the sample material at each interaction location. An analysis is carried out to trace the path of probe radiation from a location at the probe beam source to the detection spatial region on the detection surface so as to identify the interaction locations so as to provide information about the presence of target material at each interaction location.

    Standard reference material interface for Raman probe

    公开(公告)号:US11346715B2

    公开(公告)日:2022-05-31

    申请号:US16864786

    申请日:2020-05-01

    Abstract: A standard reference material interface for a Raman probe includes a locator including a housing having a first end and a second end, the first end including an attachment portion configured to mate with an attachment portion of the Raman probe. The locator defines a central axis that intersects the first end and the second end. The standard reference material interface also includes a hermetically sealed standard reference material enclosure positioned at the second end of the housing and enclosing a standard reference material. An optical port is positioned within the housing between the Raman probe and the standard reference material relative to the central axis. The optical port includes a window.

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