Transfer apparatus
    22.
    发明授权
    Transfer apparatus 有权
    转运设备

    公开(公告)号:US07508098B2

    公开(公告)日:2009-03-24

    申请号:US11057144

    申请日:2005-02-15

    CPC classification number: H02K41/0354 H02K2201/18

    Abstract: A transfer apparatus includes at least four fine actuators each having a coil assembly with a wound coil, and a pair of movable magnets having different polarities and spaced from each other to interpose the coil assembly therebetween, a coil supporter to support the at least four coil assemblies so that the fine actuators are arranged in a pair of groups thereof symmetrically with respect to a predetermined straight line, a magnet supporter to support the at least four movable magnets corresponding to the respective coil assemblies, and a controller to control the fine actuator to move one of the coil supporter and the magnet supporter with respect to the other one. With this configuration, a transfer apparatus can perform a super-precision positioning control by decreasing a positioning control error.

    Abstract translation: 传送装置包括至少四个细致的致动器,每个致动器具有卷绕线圈的线圈组件和一对具有不同极性并且彼此间隔开以将线圈组件插入其间的可动磁体,支撑至少四个线圈 组件,使得精细致动器相对于预定的直线对称地布置成一对组,用于支撑与各个线圈组件相对应的至少四个可动磁体的磁体支撑件,以及控制器,以将精细致动器控制为 相对于另一个移动线圈支撑件和磁体支撑件中的一个。 通过这种结构,转印装置可以通过降低定位控制误差来进行超精密定位控制。

    Confocal scanning microscope using two Nipkow disks
    24.
    发明授权
    Confocal scanning microscope using two Nipkow disks 有权
    共焦扫描显微镜使用两个Nipkow磁盘

    公开(公告)号:US07388712B2

    公开(公告)日:2008-06-17

    申请号:US11106569

    申请日:2005-04-15

    CPC classification number: G02B21/06 G02B21/0044

    Abstract: A confocal scanning microscope using a Nipkow disk prevents deterioration of performance in an optical axis direction while maintaining a high measurement speed. The confocal scanning microscope includes a light source, an illuminating device to pass the light from the light source toward a certain direction, and two Nipkow disks each having slit-shaped apertures formed thereon such that the light incident from the illuminating device travels in a form of light which passed through a single aperture. In addition, the confocal scanning microscope includes a first optical system to form an image on a sample by the light passed through the Nipkow disks, and a second optical system to form a second image by the light reflected from the sample and passed through the Nipkow disks.

    Abstract translation: 使用Nipkow盘的共焦扫描显微镜可以防止光轴方向的性能劣化,同时保持高测量速度。 共焦扫描显微镜包括光源,将来自光源的光朝向某一方向通过的照明装置,以及形成有狭缝状孔的两个Nipkow盘,使得从照明装置入射的光以形式 的光通过单个孔径。 此外,共聚焦扫描显微镜包括:第一光学系统,用于通过通过Nipkow盘的光在样品上形成图像;以及第二光学系统,通过从样品反射的光形成第二图像,并通过Nipkow 磁盘。

    Measurement and compensation system for thermal errors in machine tools
    25.
    发明授权
    Measurement and compensation system for thermal errors in machine tools 有权
    机床热误差测量补偿系统

    公开(公告)号:US06167634A

    公开(公告)日:2001-01-02

    申请号:US09280049

    申请日:1999-03-29

    Abstract: A measurement and compensation system for thermal errors in a machine tool is disclosed. A module is provided to compensate thermal errors of the machine tool. The module comprises an operating part, a data bank, an analog to digital converter, a counter and a digital input/output part. The data bank stores in all the coefficients applied to a thermal error modeling equation which governs a relation between temperatures and thermal errors at various operating conditions. The operating part determines all the coefficients of the thermal error modeling equation which are stored in the data bank and calculates the thermal errors corresponding to the temperatures of a plurality of the thermocouples by the temperatures of a plurality of thermocouples inputted from the A/D converter and the positional coordinates of the bed inputted from the counter. Then, digital data of the calculated thermal errors are inputted into the digital input/output part and the digital input/output part converts the digital data to digital signal to input the digital signals into the controller. A controller orders the machine tool to compensate the thermal errors at the positional coordinates of the bed and the feed of the spindle. Accordingly, since the machine tool compensates the thermal errors in advance, the machine tool processes precisely workpieces in spite of the occurrence of the thermal errors.

    Abstract translation: 公开了一种用于机床热误差的测量和补偿系统。 提供了一个模块来补偿机床的热误差。 模块包括操作部分,数据库,模数转换器,计数器和数字输入/输出部分。 数据库存储应用于热误差建模方程的所有系数,其控制各种操作条件下的温度和热误差之间的关系。 操作部分确定存储在数据库中的热误差建模方程的所有系数,并且通过从A / D转换器输入的多个热电偶的温度来计算与多个热电偶的温度相对应的热误差 以及从计数器输入的床的位置坐标。 然后,计算的热误差的数字数据被输入到数字输入/输出部分,数字输入/输出部分将数字数据转换为数字信号,以将数字信号输入到控制器中。 控制器命令机床来补偿床的位置坐标和主轴进给的热误差。 因此,由于机床预先补偿热误差,所以机床精密地处理工件,尽管发生了热误差。

    Nano-imprint lithography methods
    27.
    发明授权
    Nano-imprint lithography methods 有权
    纳米压印光刻方法

    公开(公告)号:US08557130B2

    公开(公告)日:2013-10-15

    申请号:US12654023

    申请日:2009-12-08

    CPC classification number: G03F7/0002 B82Y10/00 B82Y40/00

    Abstract: In forming a pattern on a substrate with reduced pattern error using a mold having an area smaller than an area of the substrate, a first resin pattern is formed on at least a first of a plurality of regions of an etching object layer by imprinting resin applied to the etching object layer using a first mold The etching object layer is then etched using the first resin pattern as an etching mask. A second resin pattern is formed on at least a second of the plurality of regions by imprinting resin applied to the etching object layer using a second mold. The etching object layer is again etched using the second resin pattern as an etching mask.

    Abstract translation: 在使用面积小于基板的面积的模具的基板上形成图案减少图案的情况下,通过印刷树脂施加在蚀刻对象层的多个区域的至少第一区域上形成第一树脂图案 使用第一模具到蚀刻对象层。然后使用第一树脂图案作为蚀刻掩模蚀刻蚀刻对象层。 通过使用第二模具将施加到蚀刻对象层的树脂压印,在多个区域中的至少一个区域上形成第二树脂图案。 使用第二树脂图案作为蚀刻掩模再次蚀刻蚀刻对象层。

    Method of manufacturing printed circuit board including outmost fine circuit pattern
    28.
    发明申请
    Method of manufacturing printed circuit board including outmost fine circuit pattern 审中-公开
    制造印刷电路板的方法包括最外面的精细电路图案

    公开(公告)号:US20120011716A1

    公开(公告)日:2012-01-19

    申请号:US13137695

    申请日:2011-09-02

    Abstract: A method of manufacturing a printed circuit board including: preparing a first double-sided substrate including a first insulating layer, a first lower copper layer, a second circuit layer including a first lower land, and a first via; preparing a second double-sided substrate including a second insulating layer, a third lower copper layer, a fourth circuit layer including a second lower land, and a second via; disposing a third insulating layer between the second circuit layer and the fourth circuit layer such that the first lower land and the second lower land are electrically connected to each other though a conductive bump; and forming a first circuit layer including a first circuit pattern connected to the first via on the first lower copper layer and forming a third circuit layer including a third circuit pattern connected to the second via on the third lower copper layer.

    Abstract translation: 一种制造印刷电路板的方法,包括:制备包括第一绝缘层,第一下铜层,包括第一下焊盘的第二电路层和第一通孔的第一双面基板; 制备包括第二绝缘层,第三下铜层,包括第二下焊盘的第四电路层和第二通孔的第二双面基板; 在所述第二电路层和所述第四电路层之间设置第三绝缘层,使得所述第一下焊盘和所述第二下焊盘通过导电凸块彼此电连接; 以及形成第一电路层,所述第一电路层包括在所述第一下铜层上连接到所述第一通孔的第一电路图案,并形成第三电路层,所述第三电路层包括在所述第三下铜层上连接到所述第二通孔的第三电路图案。

    Method for serving multimedia data on demand using dynamic channel and apparatus thereof
    30.
    发明申请
    Method for serving multimedia data on demand using dynamic channel and apparatus thereof 失效
    使用动态信道及其装置按需服务多媒体数据的方法

    公开(公告)号:US20060179464A1

    公开(公告)日:2006-08-10

    申请号:US11399117

    申请日:2006-04-06

    Abstract: A method of transmitting multimedia data on demand by using a dynamic channel and apparatus thereof are disclosed. In one embodiment, the method includes i) continuously transmitting the multimedia data from beginning to end via a first static channel at a first static channel transmission point, ii) transmitting a portion of the multimedia data from beginning via a first to dth (d is a natural number not less than 1) dynamic channel at a first to dth dynamic channel transmission point and iii) reusing kth (k is more than 1 and less than d) dynamic channel as another dynamic channel after releasing the kth dynamic channel to be available after Tk from the kth dynamic channel transmission point, wherein the Tk is not less than an elapsed time from the first static channel transmission point to the kth dynamic channel transmission point

    Abstract translation: 公开了一种通过使用动态信道及其装置按需传送多媒体数据的方法。 在一个实施例中,该方法包括:i)在第一静态信道传输点经由第一静态信道从头到尾连续地发送多媒体数据,ii)从开始经由第一静态信道传输到多媒体数据的一部分, (d是自然数不小于1)动态信道在第一至第D个动态信道传输点,以及iii)重新使用第k个(k 大于1且小于d)动态信道作为在从第k个动态信道传输点在Tk之后可用的第k个动态信道之后的另一个动态信道, 其中T k不小于从第一静态信道传输点到第k个动态信道传输点的经过时间

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