公开(公告)号：US20060021433A1

公开(公告)日：2006-02-02

申请号：US11137977

申请日：2005-05-25

Applicant: Rainer Willig ,  Burkhard Kuhlmann ,  Udo-Martin Gomez ,  Wolfram Bauer ,  Christoph Lang

Inventor： Rainer Willig ,  Burkhard Kuhlmann ,  Udo-Martin Gomez ,  Wolfram Bauer ,  Christoph Lang

IPC: G01P15/14

CPC classification number: G01C19/56

Abstract: A yaw-rate sensor having a resonant driving frequency and a resonant Coriolis frequency. In addition, the yaw-rate sensor has at least one operating voltage, of which the resonant Coriolis frequency is a function. The resonant Coriolis frequency is adjusted to the resonant driving frequency with the aid of an adjustment voltage. A change in the resonant Coriolis frequency as a result of a change in the operating voltage may be compensated for, in that a suitably changed adjusting voltage may be produced from a compensation circuit.

Abstract translation: 具有谐振驱动频率和谐振科里奥利频率的偏航率传感器。 此外，偏航率传感器具有至少一个工作电压，其中共振科里奥利频率是函数。 谐振科里奥利频率通过调整电压调节到谐振驱动频率。 可以补偿作为工作电压变化的结果的共振科里奥利频率的变化，因为可以从补偿电路产生适当改变的调节电压。

公开(公告)号：US20120060604A1

公开(公告)日：2012-03-15

申请号：US12734228

申请日：2008-10-02

Applicant: Reinhard Neul ,  Johannes Classen ,  Torsten Ohms ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

Inventor： Reinhard Neul ,  Johannes Classen ,  Torsten Ohms ,  Burkhard Kuhlmann ,  Axel Franke ,  Oliver Kohn ,  Daniel Christoph Meisel ,  Joerg Hauer ,  Udo-Martin Gomez ,  Kersten Kehr

IPC: G01P3/44 ,  F16F3/00

CPC classification number: G01C19/574 ,  F16F1/025 ,  G01C19/5747 ,  G01P3/44

Abstract: A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.

Abstract translation: 具有基板和多个可移动子结构的偏转速率传感器，其安装在所述基板的表面上，所述可移动子结构联接到共享的，特别是中心的弹簧元件，所述装置用于将所述可移动子结构激励为 在平行于衬底表面延伸的平面中的耦合振荡，具有科里奥利元件的可移动子结构被提供用于检测由科里奥利力引起的科里奥利元件的偏转，第一科里奥利元件用于检测围绕 第一轴线，第二科里奥利元件被提供用于检测围绕第二轴线的横摆率，所述第二轴线垂直于所述第一轴线定向。

公开(公告)号：US20100116043A1

公开(公告)日：2010-05-13

申请号：US12611634

申请日：2009-11-03

Applicant: Thorsten PANNEK ,  Udo-Martin GOMEZ ,  Horst MUENZEL

Inventor： Thorsten PANNEK ,  Udo-Martin GOMEZ ,  Horst MUENZEL

IPC: B60C23/02 ,  G01P15/10 ,  H05K13/00

CPC classification number: G01P15/125 ,  B60C23/0408 ,  B60C23/0433 ,  B81B7/02 ,  B81B2201/0235 ,  B81B2201/0264 ,  B81B2201/0271 ,  G01P15/0802 ,  G01P2015/0814 ,  Y10T29/49002

Abstract: A component having an acceleration sensor having at least one freely oscillatory mass, and a resonator having at least one resonating structure, in which the at least one freely oscillatory mass of the acceleration sensor and the at least one resonating structure of the resonator are disposed on and/or in one chip. A corresponding production method for a component is also described.

Abstract translation: 具有至少一个自由振荡质量的加速度传感器的分量和具有至少一个谐振结构的谐振器，其中加速度传感器的至少一个自由振荡质量和谐振器的至少一个谐振结构设置在 和/或在一个芯片中。 还描述了相应的组件的制造方法。

公开(公告)号：US07531229B2

公开(公告)日：2009-05-12

申请号：US10618795

申请日：2003-07-14

Applicant: Udo-Martin Gomez ,  Franz Laermer

Inventor： Udo-Martin Gomez ,  Franz Laermer

IPC: B32B3/02 ,  B60T8/60 ,  B60T8/74 ,  H01L23/15 ,  G01P15/00

CPC classification number: B81B7/0077 ,  B81B2207/095 ,  B81C1/00301 ,  B81C2201/019 ,  B81C2203/0109 ,  B81C2203/031 ,  G01P15/0802 ,  G01P15/125 ,  Y10T428/239 ,  Y10T428/24917

Abstract: A microstructured component having a layered construction may allow implementation of component structures having a layer thickness of more than 50 μm, e.g., more than 100 μm. Capping of the component structure may allow vacuum enclosure of the component structure with a hermetically sealed electrical connection. The layered construction of the microstructured component includes a carrier including at least one glass layer, e.g., a PYREX™ layer, a component structure, arranged in a silicon layer, which is bonded to the glass layer, and a cap, which is positioned over the component structure and is also bonded to the glass layer.

Abstract translation: 具有分层结构的微结构部件可以允许实现层厚度大于50μm，例如大于100μm的组分结构。 组件结构的封盖可以允许具有气密密封的电连接的部件结构的真空外壳。 微结构化部件的分层结构包括载体，其包括至少一个玻璃层，例如PYREX TM层，布置在硅层中的部件结构，其结合到玻璃层，以及帽，其是 位于组件结构上方并且也结合到玻璃层。

公开(公告)号：US06691571B2

公开(公告)日：2004-02-17

申请号：US10258218

申请日：2003-05-29

Applicant: Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

Inventor： Rainer Willig ,  Andreas Thomae ,  Burkhard Kuhlmann ,  Joerg Hauer ,  Udo-Martin Gomez ,  Siegbert Goetz ,  Christian Doering ,  Michael Fehrenbach ,  Wolfram Bauer ,  Udo Bischof ,  Reinhard Neul ,  Karsten Funk ,  Markus Lutz ,  Gerhard Wucher ,  Jochen Franz

IPC: G01C1900

CPC classification number: G01C19/5747

Abstract: An rate-of-rotation sensor having a Coriolis element, which is arranged over a surface of a substrate, is described. The Coriolis element is induced to oscillate in parallel to a first axis. In response to a Coriolis force, the Coriolis element is deflected in a second axis, which is perpendicular to the first axis. A proof element is provided to prove the deflection.

Abstract translation: 描述了布置在基板的表面上的具有科里奥利元件的旋转速率传感器。 诱导科里奥利元件平行于第一轴振荡。 响应于科里奥利力，科里奥利元件在垂直于第一轴线的第二轴线上偏转。 提供证明元件以证明偏转。

公开(公告)号：US20110083507A1

公开(公告)日：2011-04-14

申请号：US12924772

申请日：2010-10-05

Applicant: Carsten Geckeler ,  Udo-Martin Gomez ,  Thorsten Balslink

Inventor： Carsten Geckeler ,  Udo-Martin Gomez ,  Thorsten Balslink

IPC: G01C19/56

CPC classification number: G01C19/5755

Abstract: A yaw rate sensor includes a substrate which has a main plane of extension and a Coriolis element which is movable relative to the substrate. The yaw rate sensor has an excitation arrangement for exciting a drive oscillation of the Coriolis element along a first direction parallel to the main plane of extension. The yaw rate sensor has a detection arrangement for detecting a Coriolis deflection of the Coriolis element along a third direction which is perpendicular to the main plane of extension. In addition, the yaw rate sensor has a quadrature compensation structure which includes a comb electrode structure and a plate capacitor structure.

Abstract translation: 横摆率传感器包括具有主平面延伸部的基板和可相对于基板移动的科里奥利斯元件。 横摆率传感器具有用于沿着平行于主平面延伸的第一方向激发科里奥利元件的驱动振荡的激励装置。 横摆率传感器具有用于检测科里奥利元件沿着与主延伸平面垂直的第三方向的科里奥利偏转的检测装置。 此外，横摆率传感器具有包括梳状电极结构和平板电容器结构的正交补偿结构。

公开(公告)号：US20100145660A1

公开(公告)日：2010-06-10

申请号：US12329823

申请日：2008-12-08

Applicant: Christoph Lang ,  Valdimir Petkov ,  Udo-Martin Gomez

Inventor： Christoph Lang ,  Valdimir Petkov ,  Udo-Martin Gomez

IPC: H03F1/26 ,  G01D18/00

CPC classification number: G01R31/31702 ,  G01D3/08 ,  G01P21/00

Abstract: A method and system for testing a MEMS sensor element during operation of a MEMS sensor system in one embodiment includes a test signal generator configured to generate a broad frequency band test signal, and a verification signal substantially identical to the test signal, a microelectrical-mechanical system (MEMS) sensor element operatively connected to the test signal generator for generating a sensor output in response to the test signal, a comparison component configured to generate an evaluation signal output based upon the verification signal and the test signal, and an evaluation circuit operatively connected to the comparison component and configured to identify a mismatch between the verification signal and the sensor output based upon the evaluation signal.

Abstract translation: 在一个实施例中，用于在MEMS传感器系统的操作期间测试MEMS传感器元件的方法和系统包括被配置为产生宽频带测试信号的测试信号发生器和与测试信号基本相同的验证信号，微机电 系统（MEMS）传感器元件，其可操作地连接到所述测试信号发生器，用于响应于所述测试信号产生传感器输出;比较部件，被配置为基于所述验证​​信号和所述测试信号生成评估信号输出;以及评估电路， 连接到比较部件并且被配置为基于评估信号来识别验证信号和传感器输出之间的不匹配。

公开(公告)号：US20100000321A1

公开(公告)日：2010-01-07

申请号：US12303443

申请日：2007-06-06

Applicant: Reinhard Neul ,  Johannes Classen ,  Axel Franke ,  Marco Quander ,  Udo-Martin Gomez ,  Kersten Kehr

Inventor： Reinhard Neul ,  Johannes Classen ,  Axel Franke ,  Marco Quander ,  Udo-Martin Gomez ,  Kersten Kehr

IPC: G01C19/56

CPC classification number: G01C19/5762 ,  G01C19/5747

Abstract: A yaw rate sensor includes a drive mass element which is situated above a surface of a substrate and is drivable to vibrate by a drive device along a first axis extending along the surface, having a detection mass element, which is deflectable under the influence of a Coriolis force along a second axis perpendicular to the surface, and having a detection device by which the deflection of the detection mass element along the second axis is detectable. Due to the arrangement of the second axis perpendicular to the surface, the yaw rate sensor may be integrated into a chip together with additional yaw rate sensors suitable for detection of rotations about axes of rotation in other directions.

Abstract translation: 偏航率传感器包括驱动质量元件，该驱动质量元件位于衬底的表面上方并且可被驱动装置驱动，沿着沿表面延伸的第一轴线振动，具有检测质量元件，该检测质量元件可在 科里奥利力沿着垂直于表面的第二轴线，并且具有检测装置，通过该检测装置可以检测检测质量元件沿着第二轴线的偏转。 由于垂直于表面的第二轴的布置，横摆角速度传感器可以与适合于检测围绕其它方向的旋转轴线的旋转的附加横摆速率传感器一体地集成到一个芯片中。

公开(公告)号：US07523663B2

公开(公告)日：2009-04-28

申请号：US11317819

申请日：2005-12-22

Applicant: Rainer Willig ,  Buckhard Kuhlmann ,  Udo-Martin Gomez ,  Wolfram Bauer ,  Johannes Classen ,  Christoph Lang ,  Michael Veith

Inventor： Rainer Willig ,  Buckhard Kuhlmann ,  Udo-Martin Gomez ,  Wolfram Bauer ,  Johannes Classen ,  Christoph Lang ,  Michael Veith

IPC: G01P15/08

CPC classification number: G01C19/5755 ,  G01C19/5726

Abstract: A micromechanical rotation rate sensor has a seismic mass and driving devices which cause a driving vibration of the seismic mass in a first direction x. The rotation rate sensor has measuring devices which measure a deflection of the seismic mass in a second direction y, and generate a deflection signal. The deflection includes a measurement deflection caused by a Coriolis force and an interference deflection, the interference deflection being phase-shifted with respect to the measurement deflection by 90°. Compensation devices are provided at the seismic mass to reduce the interference deflection. Regulation devices are provided, to which the deflection signal is supplied as an input variable, which demodulate an interference deflection signal from the deflection signal, and which generate a compensation signal from the interference deflection signal, which is supplied to the compensation devices.

Abstract translation: 微机械转速传感器具有地震质量和驱动装置，其引起地震块在第一方向x上的驱动振动。 旋转速率传感器具有测量在第二方向y上的地震质量的偏转的测量装置，并产生偏转信号。 偏转包括由科里奥利力和干涉偏转引起的测量偏转，干涉偏转相对于测量偏转相移90°。 在地震质量体上提供补偿装置以减少干涉偏转。 提供了偏转信号作为输入变量提供的调节装置，其解调来自偏转信号的干涉偏转信号，并从干涉偏转信号产生补偿信号，该补偿信号被提供给补偿装置。

公开(公告)号：US20080284628A1

公开(公告)日：2008-11-20

申请号：US11883093

申请日：2005-12-13

Applicant: Rainer Willig ,  Burkhard Kuhlmann ,  Udo-Martin Gomez ,  Wolfram Bauer ,  Reinhard Neul ,  Christoph Lang ,  Michael Veith

Inventor： Rainer Willig ,  Burkhard Kuhlmann ,  Udo-Martin Gomez ,  Wolfram Bauer ,  Reinhard Neul ,  Christoph Lang ,  Michael Veith

IPC: H03M3/02

CPC classification number: H03M3/404 ,  H03M3/424 ,  H03M3/464

Abstract: A delta sigma modulator includes an oscillatory system having a natural frequency and an electronics and a control loop which acts upon the electronics from the oscillatory system and again upon the oscillatory system from the electronics. The control loop provides that a gain in the control loop demonstrates a peaking in a frequency range around the natural frequency of the oscillatory system.

Abstract translation: ΔΣ调制器包括具有固有频率的振荡系统以及电子装置和控制回路，其从振荡系统作用于电子装置，并且再次来自电子装置的振荡系统。 控制回路提供控制回路中的增益表现在围绕振荡系统的固有频率的频率范围内的峰值。