Abstract:
A handle for a SMIF pod having a handle member with two arms, connected by a crosspiece, and two attachment members, connected respectively to the free ends of the arms, that are attached to two existing handles on the side of a SMIF pod, and wherein the arms are arranged at an angle of about 20.degree. outwardly from the plane of the side of the SMIF pod, and at an angle in the range from 15-45.degree., preferably about 40.degree., upwardly from the plane of the attachment means, so that the handle member, which may be of plastic, can be gripped in such a way that a technician's wrists may be kept straight while lifting the pod and reorienting it during handling, and the handle is compatible for use with existing SMIF pods without requiring their modification.
Abstract:
In a method of the present invention during a salicide process, before a second thermal process, a dopant is implanted at a place located in a region ranging from a NixSi layer at meddle height down to a front thereof, or before formation of the NixSi layer, located in a region ranging from a silicon layer at a depth ranging from a half of a predetermined thickness of a NiSi layer down to a depth where is a predetermined front of the NiSi layer. The dopant is allowed to be heated with the NixSi layer together during the second thermal process to form a Si/NiSi2/NiSi interface which may reduce SBH and improve series resistance to obtain a semiconductor device having an excellent performance.
Abstract translation:在本发明的方法中,在自对准硅化物工艺中,在第二热处理之前,将掺杂剂注入位于从中间高度的NixSi层到其前面的区域中,或者在形成NixSi层之前 位于从NiSi层的预定厚度的一半的深度到位于NiSi层的预定前方的深度的硅层的范围内。 在第二热处理期间允许掺杂剂与NixSi层一起加热以形成Si / NiSi 2 / NiSi界面,其可以降低SBH并提高串联电阻以获得具有优异性能的半导体器件。
Abstract:
A dynamic radon access memory (DRAM) module includes a printed circuit board, a number of DRAM units, a number of flash memory units, a number connecting pins and an interface controller. The DRAM units and the flash memory units are distributed on the printed circuit board. The connecting pins are formed at an edge of the printed circuit board. The interface controller is electrically connected to the flash memory units and a portion of the connecting pins, wherein each of the interface controller provides at least one serial interface between the flash memory units and the portion of connecting pins thereby enabling data transmission through the portion of connecting pins in at least one serial mode. The flash memory units integrally constitute a flash disk drive in the DRAM module. Therefore, frequently installation and uninstallation of the flash memory drive can be avoided. A motherboard assembly including the aforementioned DRAM module can be developed.
Abstract:
A method of forming a metal-oxide-semiconductor (MOS) transistor device is disclosed. A semiconductor substrate is prepared first, and the semiconductor substrate has agate structure, a source region and a drain region. Subsequently, a stress buffer layer is formed on the semiconductor substrate, and covers the gate structure, the source region and the drain region. Thereafter, a stressed cap layer is formed on the stress buffer layer, and a tensile stress value of the stressed cap layer is higher than a tensile stress value of the stress buffer layer. Since the stress buffer layer can prevent the stressed cap layer from breaking, the MOS transistor device can be covered by a stressed cap layer having an extremely high tensile stress value in the present invention.
Abstract:
A substrate having at least two metal oxide semiconductor devices of a same conductive type and a gap formed between the two devices is provided. A first stress layer is formed over the substrate to cover the metal-oxide semiconductor devices and the substrate, filling the gap. An etching back process is then performed to remove a portion of the stress material layer inside the gap. A second stress layer and a dielectric layer are sequentially formed on the first stress layer. The first stress layer and the second stress layer provide a same type of stress. A portion of the second stress layer is removed to form a contact opening. A second conductive layer is filled into the contact opening to form a contact.
Abstract:
A fabrication method of an ultra low-k dielectric layer is provided. A deposition process is performed, under the control of a temperature varying program or a pressure varying program, by reacting a dielectric matrix to form porous low-k dielectric layers with a gradient density on a barrier layer over a substrate.
Abstract:
A validation system includes: a source agent for storing a plurality of test patterns; a drain agent for performing a validation operation according to a test result; and a device under test (DUT). The device under test includes: a first interface electrically connected to the source agent for communicating with the source agent and receiving the test patterns outputted from the source agent; a target system electrically connected to the first interface for processing the test patterns to generate a plurality of test results; and a second interface electrically connected to the target system and the drain agent for communicating with the drain agent and transferring the plurality of test results to the drain agent.
Abstract:
A method is disclosed to make a strained-silicon PMOS or CMOS transistor, in which, a compressive stress film is formed by reacting a silane having at least one substituent selected from the group consisting of hydrocarbyl, hydrocarboxy, carbonyl, formyl, carboxylic group, ester group, and halo group and ammonia, or a conventional compressive stress film is implanted with fluorine atoms, oxygen atoms, or carbon atoms, so as to improve the properties of negative bias temperature instability (NBTI).
Abstract:
A metal-oxide-semiconductor (MOS) transistor device is disclosed. The MOS transistor device comprises a semiconductor substrate; a gate structure on the semiconductor substrate; source/drain regions on the semiconductor substrate adjacent to the gate structure; an ultra-high tensile-stressed nitride film having a hydrogen concentration of less than 1E22 atoms/cm3 covering the gate structure and the source/drain regions; and an inter-layer dielectric (ILD) film over the ultra-high tensile-stressed nitride film.
Abstract translation:公开了一种金属氧化物半导体(MOS)晶体管器件。 MOS晶体管器件包括半导体衬底; 半导体衬底上的栅极结构; 与栅极结构相邻的半导体衬底上的源/漏区; 具有覆盖栅极结构和源极/漏极区域的小于1E22原子/ cm 3的氢浓度的超高拉伸应力氮化物膜; 和超高拉伸应力氮化物膜上的层间电介质(ILD)膜。
Abstract:
A method of manufacturing a MOS transistor device. First, a semiconductor substrate having a gate structure is prepared. The gate structure has two sidewalls and a liner on the sidewalls. Subsequently, a stressed cap layer is formed on the semiconductor substrate, and covers the gate structure and the liner. Next, an activating process is performed. Furthermore, the stressed cap layer is etched to be a salicide block. Afterward, a salicide process is performed to form a silicide layer on the regions that are not covered by the stressed cap layer.