Abstract:
Disclosed is a biodegradable composition, including: 5 to 90 percent by weight of polylactic acid (PLA), 5 to 80 percent by weight of plant fiber, and 5 to 70 percent by weight of maleic anhydride-grafted polybutylene succinate (PBS-g-MA), acrylic acid-grafted polybutylene succinate (PBS-g-AA), or silane coupling agent-grafted polybutylene succinate (PBS-g-Silane). The article manufactured therefrom is not only biodegradable but also has an enhanced heat deformation temperature, impact resistance and tensile strength. Further, by so limiting the proportion of each component, compatibility between the components may be increased and crystallization of polylactic acid may be facilitated.
Abstract:
A method for clearing native oxide is described. A substrate is provided, including an exposed portion whereon a native oxide layer has been formed. A clearing process is performed to the substrate using nitrogen trifluoride (NF3) and ammonia (NH3) as a reactant gas, wherein the volumetric flow rate of NF3 is greater than that of NH3.
Abstract:
A damascene structure includes a conductive layer, a first dielectric layer, a first barrier metal layer, a barrier layer, and a second barrier metal layer sequentially formed on the conductive layer. The first dielectric layer having a via therein. The barrier layer is comprised of a material different with that of the first barrier metal layer. A bottom of the barrier layer disposed on the via bottom is not punched through. The accomplished barrier layers will have lower resistivity on the via bottom in the first dielectric layer and they are capable of preventing copper atoms from diffusing into the dielectric layer.
Abstract:
In a method of the present invention during a salicide process, before a second thermal process, a dopant is implanted at a place located in a region ranging from a NixSi layer at meddle height down to a front thereof, or before formation of the NixSi layer, located in a region ranging from a silicon layer at a depth ranging from a half of a predetermined thickness of a NiSi layer down to a depth where is a predetermined front of the NiSi layer. The dopant is allowed to be heated with the NixSi layer together during the second thermal process to form a Si/NiSi2/NiSi interface which may reduce SBH and improve series resistance to obtain a semiconductor device having an excellent performance.
Abstract translation:在本发明的方法中,在自对准硅化物工艺中,在第二热处理之前,将掺杂剂注入位于从中间高度的NixSi层到其前面的区域中,或者在形成NixSi层之前 位于从NiSi层的预定厚度的一半的深度到位于NiSi层的预定前方的深度的硅层的范围内。 在第二热处理期间允许掺杂剂与NixSi层一起加热以形成Si / NiSi 2 / NiSi界面,其可以降低SBH并提高串联电阻以获得具有优异性能的半导体器件。
Abstract:
A fabrication method of an ultra low-k dielectric layer is provided. A deposition process is performed, under the control of a temperature varying program or a pressure varying program, by reacting a dielectric matrix to form porous low-k dielectric layers with a gradient density on a barrier layer over a substrate.
Abstract:
A method of forming a metal-oxide-semiconductor (MOS) transistor device is disclosed. A semiconductor substrate is prepared first, and the semiconductor substrate has agate structure, a source region and a drain region. Subsequently, a stress buffer layer is formed on the semiconductor substrate, and covers the gate structure, the source region and the drain region. Thereafter, a stressed cap layer is formed on the stress buffer layer, and a tensile stress value of the stressed cap layer is higher than a tensile stress value of the stress buffer layer. Since the stress buffer layer can prevent the stressed cap layer from breaking, the MOS transistor device can be covered by a stressed cap layer having an extremely high tensile stress value in the present invention.
Abstract:
A method of forming a metal-oxide-semiconductor (MOS) transistor device is disclosed. A semiconductor substrate is prepared first, and the semiconductor substrate has a gate structure, a source region and a drain region. Subsequently, a stress buffer layer is formed on the semiconductor substrate, and covers the gate structure, the source region and the drain region. Thereafter, a stressed cap layer is formed on the stress buffer layer, and a tensile stress value of the stressed cap layer is higher than a tensile stress value of the stress buffer layer. Since the stress buffer layer can prevent the stressed cap layer from breaking, the MOS transistor device can be covered by a stressed cap layer having an extremely high tensile stress value in the present invention.
Abstract:
A method for fabricating an ultra-high tensile-stressed nitride film is disclosed. A PECVD process is first performed to deposit a transitional silicon nitride film over a substrate. The transitional silicon nitride film has a first concentration of hydrogen atoms. The transitional silicon nitride film is subjected to UV curing process for reducing the first concentration of hydrogen atoms to a second concentration of hydrogen atoms.
Abstract:
A metal-oxide-semiconductor (MOS) transistor device is disclosed. The MOS transistor device comprises a semiconductor substrate; a gate structure on the semiconductor substrate; source/drain regions on the semiconductor substrate adjacent to the gate structure; an ultra-high tensile-stressed nitride film having a hydrogen concentration of less than 1E22 atoms/cm3 covering the gate structure and the source/drain regions; and an inter-layer dielectric (ILD) film over the ultra-high tensile-stressed nitride film.
Abstract:
A dynamic radon access memory (DRAM) module includes a printed circuit board, a number of DRAM units, a number of flash memory units, a number connecting pins and an interface controller. The DRAM units and the flash memory units are distributed on the printed circuit board. The connecting pins are formed at an edge of the printed circuit board. The interface controller is electrically connected to the flash memory units and a portion of the connecting pins, wherein each of the interface controller provides at least one serial interface between the flash memory units and the portion of connecting pins thereby enabling data transmission through the portion of connecting pins in at least one serial mode. The flash memory units integrally constitute a flash disk drive in the DRAM module. Therefore, frequently installation and uninstallation of the flash memory drive can be avoided. A motherboard assembly including the aforementioned DRAM module can be developed.