公开(公告)号：US20220412801A1

公开(公告)日：2022-12-29

申请号：US17901384

申请日：2022-09-01

Applicant: HAMAMATSU PHOTONICS K.K

Inventor： Takafumi YOKINO ,  Katsuhiko KATO

IPC: G01J3/28 ,  G01J3/18 ,  H05K1/11 ,  H05K3/40

Abstract: A spectroscopic module includes a support body having a bottom wall portion and a side wall portion surrounding a space on one side of the bottom wall portion, a spectroscopic portion provided on the one side of the bottom wall portion and having a plurality of grating grooves, a photodetector attached to the side wall portion so as to face the spectroscopic portion via the space and having a plurality of photodetection channels, a plurality of first terminals provided on a surface of the support body on a side opposite to the space so as to be disposed along the surface of the support body and electrically connected to the photodetector, and a wiring unit having a plurality of second terminals respectively facing the plurality of first terminals and respectively joined to the plurality of first terminals and a plurality of third terminals respectively and electrically connected to the plurality of second terminals.

公开(公告)号：US20190154504A1

公开(公告)日：2019-05-23

申请号：US16250526

申请日：2019-01-17

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Takafumi YOKINO ,  Katsumi SHIBAYAMA ,  Katsuhiko KATO

IPC: G01J3/28 ,  G01J3/18 ,  G01J3/02

Abstract: A spectrometer 1A includes a package 2 having a stem 4 and a cap 5, an optical unit 10A disposed on the stem 4, and a lead pin 3 for securing the optical unit 10A to the stem 4. The optical unit 10A includes a dispersive part 21 for dispersing and reflecting light entering from a light entrance part 6 of the cap 5, a light detection element 30 having a light detection part 31 for detecting the light dispersed and reflected by the dispersive part 21, a support 40 for supporting the light detection element 30 such that a space is formed between the dispersive part 21 and the light detection element 30, and a projection 11 protruding from the support 40, the lead pin 3 being secured to the projection 11. The optical unit 10A is movable with respect to the stem 4 in a contact part of the optical unit 10A and the stem 4.

公开(公告)号：US20190056267A1

公开(公告)日：2019-02-21

申请号：US16166658

申请日：2018-10-22

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Takafumi YOKINO ,  Katsumi SHIBAYAMA ,  Katsuhiko KATO

IPC: G01J3/18 ,  G01J3/02 ,  G02B5/18 ,  G01J3/36

Abstract: A spectrometer includes a support having a bottom wall part in which a depression including a concave curved inner surface and a peripheral part adjacent to the depression are provided, and a side wall part disposed on a side on which the depression is open with respect to the bottom wall part, a light detection element supported by the side wall part while opposing the depression, and a dispersive part disposed on the inner surface of the depression. A length of the depression in a second direction in which a plurality of grating grooves included in the dispersive part is aligned is larger than a length of the depression in a third direction orthogonal to the second direction when viewed in a first direction in which the depression and the light detection element oppose each other. An area of the peripheral part adjacent to the depression in the second direction is larger than an area of the peripheral part adjacent to the depression in the third direction when viewed in the first direction.

公开(公告)号：US20170167917A1

公开(公告)日：2017-06-15

申请号：US15116893

申请日：2015-02-03

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Takafumi YOKINO ,  Katsumi SHIBAYAMA

IPC: G01J3/02 ,  G01J3/18

CPC classification number: G01J3/0256 ,  G01J3/021 ,  G01J3/0286 ,  G01J3/0289 ,  G01J3/0291 ,  G01J3/04 ,  G01J3/18 ,  G01J3/36

Abstract: A spectrometer includes a light detection element provided with a light passing part, a first light detection part, and a second light detection part, a support fixed to the light detection element such that a space is formed, a first reflection part provided in the support and configured to reflect light passing through the light passing part in the space, a second reflection part provided in the light detection element and configured to reflect the light reflected by the first reflection part in the space, and a dispersive part provided in the support and configured to disperse and reflect the light reflected by the second reflection part to the first light detection part in the space. A plurality of second light detection parts is disposed in a region surrounding the second reflection part.

公开(公告)号：US20160356649A1

公开(公告)日：2016-12-08

申请号：US15116990

申请日：2015-02-03

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Takafumi YOKINO ,  Katsumi SHIBAYAMA

IPC: G01J3/18 ,  G01J3/28 ,  G01J3/02

CPC classification number: G01J3/18 ,  G01J3/0256 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/2803 ,  G01J3/36

Abstract: A spectrometer includes a light detection element having a substrate made of a semiconductor material, a light passing part provided in the substrate, and a light detection part put in the substrate, a support having a base wall part opposing the light detection element, and side wall parts integrally formed with the base wall part, the light detection element being fixed to the side wall parts, the support being provided with a wiring electrically connected to the light detection part, and a dispersive part provided on a surface of the base wall part on a side of a space. An end part of the wiring is connected to a terminal of the light detection element. An end part of the wiring is positioned on a surface in the base wall part on an opposite side from the side of the space.

Abstract translation: 光谱仪包括具有由半导体材料制成的衬底的光检测元件，设置在衬底中的光通过部分和放置在衬底中的光检测部分，具有与光检测元件相对的基壁部分的支撑体和侧部 所述壁部与所述基壁部一体形成，所述光检测元件固定在所述侧壁部，所述支撑设置有与所述光检测部电连接的布线，以及分散部，设置在所述基壁部的表面上 在一个空间的一边。 布线的端部连接到光检测元件的端子。 布线的端部位于与该空间侧相反一侧的基壁部的表面。

公开(公告)号：US20150308894A1

公开(公告)日：2015-10-29

申请号：US14790784

申请日：2015-07-02

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Katsumi SHIBAYAMA ,  Takafumi YOKINO

IPC: G01J3/18 ,  G01J3/28

CPC classification number: G01J3/18 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0256 ,  G01J3/0259 ,  G01J3/2803 ,  G02B5/1814 ,  G02B5/1852 ,  G02B5/1861

Abstract: In a spectroscopic module 1, a flange 7 is formed integrally with a diffraction layer 6 along a periphery thereof so as to become thicker than the diffraction layer 6. As a consequence, at the time of releasing a master mold used for forming the diffraction layer 6 and flange 7, the diffraction layer 6 formed along a convex curved surface 3a of a main unit 3 can be prevented from peeling off from the curved surface 3a together with the master mold. A diffraction grating pattern 9 is formed so as to be eccentric with respect to the center of the diffraction layer 6 toward a predetermined side. Therefore, releasing the mold earlier from the opposite side of the diffraction layer 6 than the predetermined side thereof can prevent the diffraction layer 6 from peeling off and the diffraction grating pattern 9 from being damaged.

Abstract translation: 在分光模块1中，凸缘7沿着其周边与衍射层6一体地形成为比衍射层6厚。因此，在释放用于形成衍射层的母模时， 如图6和法兰7所示，可以防止沿着主单元3的凸曲面3a形成的衍射层6与母模一起从弯曲表面3a剥离。 衍射光栅图案9形成为相对于衍射层6的中心偏向预定侧。 因此，从衍射层6的与其规定侧相反的一侧较早地剥离模具可以防止衍射层6剥离，衍射光栅图案9受损。