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公开(公告)号：US20210364681A1
公开(公告)日：2021-11-25
申请号：US16763859
申请日：2018-11-09
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Masaki HIROSE , Katsumi SHIBAYAMA , Takashi KASAHARA , Toshimitsu KAWAI , Hiroki OYAMA , Yumi KURAMOTO
IPC: G02B5/28
Abstract: A suction method is provided as a method of performing, by using a suction collet, suction of a Fabry-Perot interference filter including a substrate and a laminated structure that is provided on the substrate and that includes a main surface facing the side opposite to the substrate, the method including a first step of arranging the suction collet so as to face the main surface, a second step of bringing the suction collet into contact with the Fabry-Perot interference filter after the first step, and a third step of suctioning the Fabry-Perot interference filter by using the suction collet after the second step.
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公开(公告)号：US20200072677A1
公开(公告)日：2020-03-05
申请号：US16468070
申请日：2017-11-30
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Masahiro YAMAZAKI , Katsumi SHIBAYAMA , Ryusuke KITAURA
IPC: G01J5/24 , G01J5/02 , H01L31/0232 , H01L31/09
Abstract: A light detector includes: a substrate; and a membrane which is supported on a surface of the substrate so that a space is formed between the surface of the substrate and the membrane, in which the membrane includes a first wiring layer and a second wiring layer which are opposite each other with a gap extending along a line having a curved portion interposed therebetween and a resistance layer which is electrically connected to each of the first wiring layer and the second wiring layer and has an electric resistance depending on a temperature, and in which a first edge portion at the side of the line in the first wiring layer and a second edge portion at the side of the line in the second wiring layer respectively continuously extend.
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公开(公告)号：US20190186994A1
公开(公告)日：2019-06-20
申请号：US16322170
申请日：2017-07-05
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takashi KASAHARA , Katsumi SHIBAYAMA , Masaki HIROSE , Toshimitsu KAWAI , Hiroki OYAMA , Yumi KURAMOTO
Abstract: A Fabry-Perot interference filter includes a substrate that has a first surface, a first laminate that has a first mirror portion disposed on the first surface, a second laminate that has a second mirror portion facing the first mirror portion via a gap on a side opposite to the substrate with respect to the first mirror portion, and an intermediate layer that defines the gap between the first laminate and the second laminate. An outer surface of the intermediate layer is curved such that an edge portion of the intermediate layer on the substrate side is positioned on an outer side of an edge portion of the intermediate layer on the side opposite to the substrate in a direction parallel to the first surface. The second laminate covers the outer surface of the intermediate layer.
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公开(公告)号：US20190072430A1
公开(公告)日：2019-03-07
申请号：US16180328
申请日：2018-11-05
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takafumi YOKINO , Katsumi SHIBAYAMA
Abstract: A spectrometer includes a light detection element having a substrate made of a semiconductor material, a light passing part provided in the substrate, and a light detection part put in the substrate, a support having a base wall part opposing the light detection element, and side wall parts integrally formed with the base wall part, the light detection element being fixed to the side wall parts, the support being provided with a wiring electrically connected to the light detection part, and a dispersive part provided on a surface of the base wall part on a side of a space. An end part of the wiring is connected to a terminal of the light detection element. An end part of the wiring is positioned on a surface in the base wall part on an opposite side from the side of the space.
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公开(公告)号：US20180216997A1
公开(公告)日：2018-08-02
申请号：US15749539
申请日：2016-08-04
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Takafumi YOKINO , Katsumi SHIBAYAMA , Katsuhiko KATO
CPC classification number: G01J3/18 , B29C43/021 , B29C2043/023 , B29L2011/00 , B29L2011/0066 , G01J3/0259 , G01J3/0262 , G01J3/0286 , G01J3/0291 , G01J3/2803 , G01J3/36 , G01J2003/1857 , G02B5/18 , G02B5/32 , G02B7/00
Abstract: A spectrometer includes a support having a bottom wall part in which a depression is provided and a side wall part, a light detection element supported by the side wall part while opposing the depression, a resin layer disposed at least on an inner surface of the depression, and a dispersive part provided in the resin layer on the inner surface of the depression. The resin layer is in contact with an inner surface of the side wall part. A thickness of the resin layer in a first direction in which the depression and the light detection element oppose each other is larger in a part in contact with the inner surface of the side wall part than in a part disposed on the inner surface of the depression.
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Patent Agency Ranking
公开(公告)号：US20180195966A1
公开(公告)日：2018-07-12
申请号：US15576435
申请日：2016-04-28
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Masashi ITO , Katsumi SHIBAYAMA , Kazuto OFUJI , Hiroki OYAMA , Yoshihiro MARUYAMA
CPC classification number: G01N21/658 , G01J3/4412 , G01N2021/651 , G01N2201/068
Abstract: An SERS unit includes a support 10 that includes a cavity 11 provided with an opening 12, an optical functional portion 20 that is disposed in the cavity 11 to face the opening 12 and causes surface enhanced Raman scattering, and a package 5 that accommodates the support 10 and is evacuated. The package 5 is in contact with at least an edge 12a of the opening 12, and is bent toward the optical functional portion 20 in a state in which the package 5 is spaced apart from the optical functional portion 20 in the opening 12.
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公开(公告)号：US20180175100A1
公开(公告)日：2018-06-21
申请号：US15562001
申请日：2016-03-31
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Noburo HOSOKAWA , Nao INOUE , Katsumi SHIBAYAMA
IPC: H01L27/146 , H01L23/00
CPC classification number: H01L27/14687 , H01L21/3205 , H01L21/768 , H01L21/76898 , H01L23/481 , H01L23/522 , H01L23/532 , H01L24/02 , H01L24/05 , H01L24/13 , H01L27/14632 , H01L27/14636 , H01L27/14643 , H01L31/02005 , H01L31/0203 , H01L31/02161 , H01L31/022408 , H01L31/103 , H01L31/107 , H01L2224/02313 , H01L2224/0233 , H01L2224/0235 , H01L2224/0236 , H01L2224/02371 , H01L2224/02372 , H01L2224/02381 , H01L2224/0345 , H01L2224/05558 , H01L2224/05567 , H01L2224/0557 , H01L2224/10126 , H01L2224/11 , H01L2224/12105 , H01L2224/13007 , H01L2224/13009 , H01L2224/13021 , H01L2224/13022 , H01L2224/13024 , H01L2224/13025 , H01L2924/10253 , H01L2924/12043 , H01L2924/351 , H01L2924/00014
Abstract: A method includes a first process in which a first wiring is provided on a surface of a semiconductor substrate; a second process in which a light transmitting substrate is attached to the surface; a third process in which the semiconductor substrate is thinned so that the thickness of the semiconductor substrate is smaller than the thickness of the light transmitting substrate; a fourth process in which a through hole is formed in the semiconductor substrate; a fifth process in which a dip coating method is performed using a resin material and thus a resin insulating layer is provided; a sixth process in which a contact hole is formed in the resin insulating layer; and a seventh process in which a second wiring is provided on a surface of the resin insulating layer, and the first wiring and the second wiring are electrically connected via a contact hole.
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公开(公告)号：US20180136134A1
公开(公告)日：2018-05-17
申请号：US15553337
申请日：2016-02-10
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Katsumi SHIBAYAMA , Masashi ITO , Kazuto OFUJI , Hiroki OYAMA , Yoshihiro MARUYAMA , Nao INOUE
IPC: G01N21/65
CPC classification number: G01N21/658 , B82Y40/00 , G01N2021/651
Abstract: An SERS element includes a substrate, a fine structure portion formed on a surface of the substrate and having a plurality of pillars, and a conductor layer formed on the fine structure portion and constituting an optical functional portion that causes surface-enhanced Raman scattering. A groove is provided in an outer surface of each pillar. A plurality of gaps are formed in the conductor layer by forming the conductor layer on the outer surface of each pillar in a state in which at least a portion of an inner surface of the groove is exposed.
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公开(公告)号：US20180011232A1
公开(公告)日：2018-01-11
申请号：US15633863
申请日：2017-06-27
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Toshimitsu KAWAI , Katsumi SHIBAYAMA , Takashi KASAHARA , Masaki HIROSE , Hiroki OYAMA , Yumi TERAMACHI
CPC classification number: G02B5/285 , G01J1/0488 , G01J5/023 , G01J5/0235 , G01J5/024 , G01J5/041 , G01J5/045 , G01J5/06 , G01J5/0862 , G02B5/288 , G02B26/001
Abstract: A Fabry-Perot interference filter includes: a substrate having a first surface and a second surface facing each other; a first layer structure disposed on the first surface; and a second layer structure disposed on the second surface, wherein the first layer structure is provided with a first mirror portion and a second mirror portion facing each other with an air gap therebetween, and a distance between the first mirror portion and the second mirror portion is varied, and the second layer structure is formed with a separation region separating at least a part of the second layer structure into one side and another side in a direction along the second surface.
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公开(公告)号：US20170089838A1
公开(公告)日：2017-03-30
申请号：US15375720
申请日：2016-12-12
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Katsumi SHIBAYAMA , Masashi ITO , Takafumi YOKINO , Masaki HIROSE , Anna YOSHIDA , Kazuto OFUJI , Yoshihiro MARUYAMA
IPC: G01N21/65
CPC classification number: G01N21/658 , B82Y40/00 , G01J3/02 , G01J3/12 , G01J3/44 , G01N2201/02 , G01N2201/0227 , G01N2201/06113
Abstract: A SERS unit comprises a substrate; an optical function part formed on the substrate, for generating surface-enhanced Raman scattering; and a package containing the optical function part in an inert space and configured to irreversibly expose the space.
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