公开(公告)号：US20130147313A1

公开(公告)日：2013-06-13

申请号：US13816556

申请日：2011-08-12

Applicant: Matthias Sachse

Inventor： Matthias Sachse

IPC: B81C1/00 ,  H02N1/00

CPC classification number: B81C1/00619 ,  B81B2201/0221 ,  B81B2201/033 ,  B81B2203/051 ,  G01C19/5733 ,  G01P15/125 ,  H01G5/16 ,  H02N1/008

Abstract: The invention presents a method for producing microstructured apparatuses for microelectromechanical systems (MEMS). In order to increase the maximum aspect ratio conditioned by physical or chemical microstructuring methods, it is proposed to design flat elements of the apparatus, which are structured such that they are movable relative to one another, to be laterally changeable from a first reference position relative to one another (structuring position) to a second reference position (operating position) in a permanent or irreversible manner. As a result, higher trench capacitances can be formed between structured wall sections. The reference position can be changed by means of integrated drives or by supplying energy from the outside and said change is effected in a direction which is substantially different from the measuring direction. In addition to mechanical work and energy from electrical or magnetic fields, heat can be used to shift location in drives as a result of the action of force on an element or induced changes in length. This method makes it possible to produce highly sensitive sensors for very small excitation signals or to produce economical actuators with an extremely high level of efficiency in the form of low-attenuation, area-optimized, highly capacitive converters, as well as variable vertical capacitors with a high capacitance.

Abstract translation: 本发明提供一种用于生产用于微机电系统（MEMS）的微结构化装置的方法。 为了增加由物理或化学微结构化方法调节的最大纵横比，建议设计设备的扁平元件，其被构造成使得它们能够相对于彼此移动，从而可以相对于第一参考位置相对地横向变化 以永久或不可逆的方式彼此（结构位置）到第二参考位置（操作位置）。 结果，可以在结构化的壁部分之间形成更高的沟槽电容。 参考位置可以通过集成驱动器或通过从外部供应能量来改变，并且所述改变在与测量方向基本上不同的方向上进行。 除了来自电场或磁场的机械功能和能量之外，由于力对元件的作用或引起长度变化，热量可用于将位置移动到驱动器中。 该方法使得可以为非常小的激励信号产生高灵敏度的传感器，或者以低衰减，面积优化，高容性转换器以及可变垂直电容器的形式产生具有非常高的效率水平的经济致动器 高电容。

公开(公告)号：US20120182594A1

公开(公告)日：2012-07-19

申请号：US13377030

申请日：2009-06-11

Applicant: Qingxin Zhang ,  Yu Du ,  Chee Wei Tan

Inventor： Qingxin Zhang ,  Yu Du ,  Chee Wei Tan

IPC: G02B26/00 ,  H01L29/84

CPC classification number: B81B3/0054 ,  B81B2201/033 ,  B81B2201/047 ,  G02B6/4204 ,  G02B6/4226 ,  G02B6/4236 ,  G02B26/0833 ,  G02B26/0866

Abstract: A microelectromechanical system (MEMS) device, method of operating the MEMS device, and a method of forming the MEMS device are provided. The MEMS device includes a positioning mechanism and a locking mechanism. The positioning mechanism includes a first arm structure having a first surface and a second surface; a second arm structure having a first surface and a second surface; wherein the first surface of the first arm structure faces the first surface of the second arm structure. The positioning mechanism also includes a first actuator disposed adjacent to the second surface of the first arm structure facing away from the second arm structure; and a second actuator disposed adjacent to the second surface of the second arm structure facing away from the first arm structure. The locking mechanism includes a first pair of locking elements arranged such that each locking element is disposed at two opposite side surfaces of the first arm structure between the first and second surfaces of the first arm structure; and a second pair of locking elements arranged such that each locking element is disposed at two opposite side surfaces of the second arm structure between the first and second surfaces of the second arm structure. The first and second pairs of locking elements are configured to engage with and disengage from the first and second arm structures respectively.

Abstract translation: 提供了微机电系统（MEMS）装置，操作MEMS装置的方法以及形成MEMS器件的方法。 MEMS装置包括定位机构和锁定机构。 定位机构包括具有第一表面和第二表面的第一臂结构; 具有第一表面和第二表面的第二臂结构; 其中第一臂结构的第一表面面向第二臂结构的第一表面。 所述定位机构还包括第一致动器，所述第一致动器邻近所述第一臂结构的所述第二表面邻近所述第二臂结构设置; 以及第二致动器，其邻近所述第二臂结构的所述第二表面邻近所述第一臂结构设置。 锁定机构包括第一对锁定元件，其布置成使得每个锁定元件设置在第一臂结构的第一和第二表面之间的第二臂结构的两个相对的侧表面处; 以及第二对锁定元件，其布置成使得每个锁定元件设置在第二臂结构的第二和第二表面之间的第二臂结构的两个相对的侧表面处。 第一和第二对锁定元件构造成分别与第一和第二臂结构接合和分离。

公开(公告)号：US20110025350A1

公开(公告)日：2011-02-03

申请号：US11378596

申请日：2006-03-17

Applicant: Jason Vaughn Clark

Inventor： Jason Vaughn Clark

IPC: G01R27/26

CPC classification number: G01N27/22 ,  B81B2201/033 ,  B81C99/003

Abstract: This invention is a novel methodology for precision metrology, sensing, and actuation at the micro- and nano-scale. It is well-suited for tiny technology because it leverages off the electromechanical benefits of the scale. The invention makes use of electrical measurands of micro- or nano-scale devices to measure and characterize themselves, other devices, and whatever the devices subsequently interact with. By electronically measuring the change in capacitance, change in voltage, and/or resonant frequency of just a few simple test structures, a multitude of geometric, dynamic, and material properties may be extracted with a much higher precision than conventional methods.

Abstract translation: 本发明是用于精密计量，感测和在微尺度和纳米尺度下的致动的新颖方法。 它非常适合微小的技术，因为它利用了秤的机电效益。 本发明利用微尺度或纳米级装置的电测量来测量和表征其本身，其他装置以及随后的装置与之相互作用的任何装置。 通过电子测量仅仅几个简单测试结构的电容变化，电压变化和/或谐振频率，可以以比传统方法更高的精度提取多种几何，动态和材料特性。

公开(公告)号：US07808766B2

公开(公告)日：2010-10-05

申请号：US11917810

申请日：2006-07-06

Applicant: Ghislain Despesse ,  Jean-Jacques Chaillout ,  Thomas Jager

Inventor： Ghislain Despesse ,  Jean-Jacques Chaillout ,  Thomas Jager

IPC: H01G5/01 ,  H01G5/00 ,  H01G4/005

CPC classification number: H01G5/16 ,  B81B3/0086 ,  B81B2201/033 ,  G01C19/56 ,  G01P15/125 ,  G01P2015/0814

Abstract: A capacitive device comprising at least one first and one second comb, respectively provided with interdigital fingers, adapted to be mobile relative to each other depending on the closing-spacing apart of the axes of the fingers, at least one finger of the first comb including a face opposite a face of a finger of the second comb wherein the axis of the finger of the first comb and the axis of the finger of the second comb are inclined relative to a plane orthogonal to the first direction of displacement of the combs, the plane being defined by the second and third directions perpendicular to the direction, and perpendicular to each other.

Abstract translation: 一种电容式装置，包括分别设置有叉指的至少一个第一梳和第二梳，适于相对于彼此移动，取决于手指的轴线的闭合间隔，第一梳的至少一个手指包括 与第二梳子的手指的面相反的面，其中第一梳子的手指的轴线和第二梳子的手指的轴线相对于与梳子的第一移位方向正交的平面倾斜， 平面由垂直于方向的第二和第三方向限定，并且彼此垂直。

公开(公告)号：US20100213791A1

公开(公告)日：2010-08-26

申请号：US12599688

申请日：2008-06-30

Applicant: Atsushi Kandori ,  Chienliu Chang ,  Makoto Takagi

Inventor： Atsushi Kandori ,  Chienliu Chang ,  Makoto Takagi

IPC: H02N1/00 ,  H03B1/00

CPC classification number: B81B3/0086 ,  B81B2201/0242 ,  B81B2201/033 ,  B81B2203/058 ,  G01C19/5719

Abstract: An oscillator device that includes a movable body oscillatably supported about a rotation axis, wherein the movable body is separated into plural electrically separated conductive regions in the thickness direction, and at least one of the plural electrically separated conductive regions in the thickness direction further has plural electrically separated conductive regions.

Abstract translation: 一种振荡器装置，包括围绕旋转轴可摆动地支撑的可移动体，其中所述可移动体在所述厚度方向上被分离为多个分离的导电区域，并且所述多个电分离的导电区域中的至少一个在所述厚度方向上还具有多个 电分离的导电区域。

公开(公告)号：US20100085622A1

公开(公告)日：2010-04-08

申请号：US12517241

申请日：2007-12-11

Applicant: Ulrich Hofmann ,  Marten Oldsen

Inventor： Ulrich Hofmann ,  Marten Oldsen

IPC: G02B26/08 ,  B32B37/00 ,  B23K31/00

CPC classification number: G02B26/0841 ,  B81B2201/033 ,  B81B2201/042 ,  B81C1/00166

Abstract: The present invention relates to a method for producing a micro-mirror actuator and the corresponding actuator. In the method, the actuator is generated from a layered construction made of at least three main layers (101, 103, 107), which are at least sectionally electrically insulated from one another via intermediate layers (102, 104, 106). The layers are structured to form the micro-mirror element and the electrodes, the structuring being performed in such a way that a closed frame (310) is formed from at least the uppermost layer (107) around the inner area of the actuator, which allows a hermetic encapsulation of the inner area by application of a cover plate onto the frame. Furthermore, a conductor level (105), which is electrically insulated from these layers via the intermediate layers, is generated between at least two of the layers and structured to form conductor paths, via which one or more electrodes may be electrically contacted from outside the frame (310) after the formation of contact openings in one or more of the intermediate layers (102, 104, 106).A hermetically sealed encapsulation of the inner area of actuator may already be achieved easily at the wafer level using the method.

Abstract translation: 本发明涉及一种用于制造微反射镜致动器和相应致动器的方法。 在该方法中，致动器由至少三个主层（101,103,107）制成的分层结构产生，所述至少三个主层通过中间层（102,104,106）至少部分地电绝缘。 这些层被构造成形成微镜元件和电极，结构以这样的方式执行，使得围绕致动器的内部区域的至少最上层（107）形成闭合框架（310），其中 允许通过在框架上施加盖板来对内部区域进行气密封装。 此外，在至少两个层之间产生经由中间层与这些层电绝缘的导体电平（105），并且构造成形成导体路径，一个或多个电极可以通过该导体路径从外部电接触 在一个或多个中间层（102,104,106）中形成接触开口之后的框架（310）。 使用该方法，可以在晶片级上容易地实现致动器的内部区域的气密密封。

公开(公告)号：US20090107949A1

公开(公告)日：2009-04-30

申请号：US12292540

申请日：2008-11-20

Applicant: Norinao Kouma ,  Osamu Tsuboi ,  Hiromitsu Soneda ,  Satoshi Ueda

Inventor： Norinao Kouma ,  Osamu Tsuboi ,  Hiromitsu Soneda ,  Satoshi Ueda

IPC: B44C1/22

CPC classification number: G02B26/0841 ,  B81B3/0062 ,  B81B2201/033 ,  B81B2201/047 ,  B81B2203/0109 ,  B81B2203/058

Abstract: A micro-oscillating element includes a frame, a movable functional portion, and a torsional joint for joining the frame and the functional portion. The micro-oscillating element also includes first and second comb-tooth electrodes for generation of the driving force for the oscillating motion of the movable functional portion about the torsional joint. The first comb-tooth electrode includes a plurality of first electrode teeth each having a first conductor, an insulator and a second conductor laminated in the direction of the oscillating motion, where the first conductor and the second conductor are electrically connected with each other. The second comb-tooth electrode includes a plurality of second electrode teeth caused not to face the second conductor but to face the first conductor of the first electrode teeth during non-operation. The second electrode teeth are longer than the first conductor in the direction of the oscillating motion.

Abstract translation: 微振动元件包括框架，可移动功能部分和用于连接框架和功能部分的扭转接头。 微振动元件还包括用于产生用于可动功能部分围绕扭转接头的摆动运动的驱动力的第一和第二梳齿电极。 第一梳齿电极包括多个第一电极齿，每个第一电极齿具有沿振荡运动方向层叠的第一导体，绝缘体和第二导体，其中第一导体和第二导体彼此电连接。 第二梳齿电极包括在不操作期间不面向第二导体而是面对第一电极齿的第一导体的多个第二电极齿。 第二电极齿在摆动运动方向上比第一导体长。

公开(公告)号：US07479402B2

公开(公告)日：2009-01-20

申请号：US11277024

申请日：2006-03-20

Applicant: Lianzhong Yu

Inventor： Lianzhong Yu

IPC: H01L21/00

CPC classification number: B81C1/00484 ,  B81B2201/0235 ,  B81B2201/033 ,  B81B2203/0136 ,  B81C2201/019

Abstract: A method of manufacturing a vertical comb structure for a micro electromechanical (MEMS) device. Tooth structures are formed on a first wafer. A second wafer is then bonded to the tooth structures of the first wafer. The tooth structures are then released to form a comb structure. Forming the tooth structures on the first wafer includes using oxidation, photolithography, etching, epitaxy, and chemical and mechanical polishing to create the tooth structures on the first wafer.

Abstract translation: 一种制造用于微机电（MEMS）装置的垂直梳结构的方法。 齿结构形成在第一晶片上。 然后将第二晶片接合到第一晶片的齿结构。 然后释放牙结构以形成梳结构。 在第一晶片上形成齿结构包括使用氧化，光刻，蚀刻，外延和化学和机械抛光以在第一晶片上产生齿结构。

公开(公告)号：US07413920B2

公开(公告)日：2008-08-19

申请号：US11528619

申请日：2006-09-28

Applicant: Young-chul Ko ,  Hyun-ku Jeong

Inventor： Young-chul Ko ,  Hyun-ku Jeong

IPC: H01L21/00

CPC classification number: B81C1/00547 ,  B81B2201/033

Abstract: A double-sided etching method using an embedded alignment mark includes: preparing a substrate having first and second alignment marks embedded in an intermediate portion thereof; etching an upper portion of the substrate so as to expose the first alignment mark from a first surface of the substrate; etching the upper portion of the substrate using the exposed first alignment mark; etching a lower portion of the substrate so as to expose the second alignment mark from a second surface of the substrate; and etching the lower portion of the substrate using the exposed second alignment mark.

Abstract translation: 使用嵌入对准标记的双面蚀刻方法包括：准备具有嵌入其中间部分中的第一和第二对准标记的基板; 蚀刻所述基板的上部以便从所述基板的第一表面露出所述第一对准标记; 使用暴露的第一对准标记蚀刻衬底的上部; 蚀刻所述基板的下部以便从所述基板的第二表面露出所述第二对准标记; 并使用暴露的第二对准标记蚀刻衬底的下部。

公开(公告)号：US07304556B2

公开(公告)日：2007-12-04

申请号：US10527731

申请日：2004-06-25

Applicant: Masaya Tamura ,  Shinji Kobayashi

Inventor： Masaya Tamura ,  Shinji Kobayashi

IPC: H01H51/22

CPC classification number: G02B6/358 ,  B81B3/0051 ,  B81B2201/033 ,  B81B2201/045 ,  G02B6/3514 ,  G02B6/3518 ,  G02B6/3544 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3584 ,  G02B26/0833 ,  H02N1/008

Abstract: A buckling actuator has a connecting section of a supporting beam that is provided with a rotatable supporter for allowing a movable member to be stably maintained at one of two switch positions. A substrate, stationary members, rotatable supporters, and supporting beams support a movable member in a shiftable manner in a y-axis direction, such that the movable member can be shifted between first and second switch positions. Moreover, the rotatable supporters are each provided with arm portions which extend in a radial fashion and support the corresponding supporting beam in a rotatable manner. When the movable member is being shifted, each supporting beam can be rotated without having to bend a corresponding end by a significant amount. Thus, a large barrier ΔE of potential energy of the movable member is set between the first and second switch positions. The movable member can therefore be stably maintained at each of the switch positions even when electric power is not supplied to electrodes. Furthermore, each arm portion prevents the movable member from being displaced in an x-axis direction.

Abstract translation: 弯曲致动器具有支撑梁的连接部分，该连接部分设置有用于允许可动构件稳定地保持在两个开关位置之一的可旋转支撑件。 基板，固定构件，旋转支撑件和支撑梁在y轴方向上以可移动的方式支撑可移动构件，使得可移动构件能够在第一和第二开关位置之间移动。 此外，旋转的支撑件各自设置有以径向方式延伸并以可旋转方式支撑相应的支撑梁的臂部分。 当可移动部件移动时，可以使每个支撑梁旋转，而不必使相应的端部弯曲大量。 因此，在第一和第二开关位置之间设置可动构件的势能的大阻挡DeltaE。 因此，即使不向电极供电，也可以将可动构件稳定地维持在开关位置的各个位置。 此外，每个臂部防止可动构件在x轴方向上移位。