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    Micromachine switch, filter circuit, duplexer circuit, and communication device
    22.
    发明授权
    Micromachine switch, filter circuit, duplexer circuit, and communication device 有权
    微机械开关，滤波电路，双工器电路和通讯装置

    公开(公告)号：US08022794B2

    公开(公告)日：2011-09-20

    申请号：US12297334

    申请日：2007-04-25

    Applicant: Hiroshi Nakatsuka ,  Takehiko Yamakawa ,  Keiji Onishi

    Inventor： Hiroshi Nakatsuka ,  Takehiko Yamakawa ,  Keiji Onishi

    IPC: H01P1/10 ,  H01H57/00

    CPC classification number: B81B5/00 ,  B81B2201/018 ,  B81B2201/034 ,  H01H1/0036 ,  H01P1/127

    Abstract: A micromachine switch switches an electrical connection between signal electrodes in accordance with control signals. The micromachine switch includes a substrate, a rotating body provided on the substrate, and a movable electrode provided on the rotating body. The micromachine switch also includes a first signal electrode, one end of which is electrically connected to one end of the movable electrode, and a second signal electrode provided near the rotating body to be positioned such that a rotation of the rotating body causes the second signal electrode to be electrically connected to another end of the movable electrode. Further, a drive section causes, based on a first control signal, the rotating body to rotate until the movable electrode and the second signal electrode are electrically connected, and causes, based on a second control signal, the rotating body to rotate until the movable electrode and the second signal electrode are disconnected.

    Abstract translation: 微机械开关根据控制信号切换信号电极之间的电气连接。 微机械开关包括基板，设置在基板上的旋转体和设置在旋转体上的可动电极。 微机械开关还包括第一信号电极，其一端电连接到可动电极的一端，以及第二信号电极，设置在旋转体附近，以定位成使得旋转体的旋转引起第二信号 电极电连接到可动电极的另一端。 此外，驱动部基于第一控制信号使旋转体旋转直到可动电极和第二信号电极电连接，并且基于第二控制信号使旋转体旋转直到可动 电极和第二信号电极断开。

    Radially Staged Microscale Turbomolecular Pump
    23.
    发明申请
    Radially Staged Microscale Turbomolecular Pump 审中-公开
    径向分级微尺度涡轮分子泵

    公开(公告)号：US20090081022A1

    公开(公告)日：2009-03-26

    申请号：US11859682

    申请日：2007-09-21

    Applicant: Wei Yang

    Inventor： Wei Yang

    IPC: F04D19/04 ,  F04D17/08

    CPC classification number: F04D17/168 ,  B81B3/0021 ,  B81B2201/034 ,  B81B2201/036 ,  B81B2203/056 ,  F04D17/127

    Abstract: A radial turbomolecular vacuum pump that includes a rotor made from a silicon rotor surface comprising monolithically fabricated micro blades, and a stator made from a silicon stator surface comprising corresponding monolithically fabricated grooves. The micro blades and grooves are arranged in multiple rings, and the rotor and stator disks are placed in proximity, creating interdigitated stator and rotor blade rings. The interdigitated stator and rotor blade rings form a multi-stage compression in the radial direction.

    Abstract translation: 一种径向涡轮分子真空泵，包括由包括单片制造的微型叶片的硅转子表面制成的转子，以及由硅定子表面制成的定子，其包括相应的单片制造的凹槽。 微型叶片和槽布置在多个环中，并且转子和定子盘被放置在邻近处，产生相互指向的定子和转子叶片环。 交叉定子和转子叶片环在径向方向形成多级压缩。

    MICRO ELECTRO MECHANICAL DEVICE AND MANUFACTURING METHOD THEREOF
    24.
    发明申请
    MICRO ELECTRO MECHANICAL DEVICE AND MANUFACTURING METHOD THEREOF 有权
    微电子机械装置及其制造方法

    公开(公告)号：US20080017925A1

    公开(公告)日：2008-01-24

    申请号：US11777409

    申请日：2007-07-13

    Applicant: Mayumi YAMAGUCHI ,  Konami IZUMI

    Inventor： Mayumi YAMAGUCHI ,  Konami IZUMI

    IPC: H01L29/06 ,  H01L21/00

    CPC classification number: H01L29/84 ,  B81B2201/034 ,  B81C1/00246 ,  B81C2203/0742

    Abstract: To manufacture a micro structure and an electric circuit included in a micro electro mechanical device over the same insulating surface in the same step. In the micro electro mechanical device, an electric circuit including a transistor and a micro structure are integrated over a substrate having an insulating surface. The micro structure includes a structural layer having the same stacked-layer structure as a layered product of a gate insulating layer of the transistor and a semiconductor layer provided over the gate insulating layer. That is, the structural layer includes a layer formed of the same insulating film as the gate insulating layer and a layer formed of the same semiconductor film as the semiconductor layer of the transistor. Further, the micro structure is manufactured by using each of conductive layers used for a gate electrode, a source electrode, and a drain electrode of the transistor as a sacrificial layer.

    Abstract translation: 在相同的步骤中，在相同的绝缘表面上制造包括在微机电装置中的微结构和电路。 在微机电装置中，包括晶体管和微结构的电路集成在具有绝缘表面的基板上。 微结构包括具有与晶体管的栅极绝缘层的层叠体和设置在栅极绝缘层上的半导体层相同的层叠结构的结构层。 也就是说，结构层包括由与绝缘层相同的绝缘膜形成的层和由与晶体管的半导体层相同的半导体膜形成的层。 此外，通过使用用作晶体管的栅电极，源电极和漏电极的导电层作为牺牲层来制造微结构。

    Molecular motor power-supplying device
    25.
    发明申请
    Molecular motor power-supplying device 审中-公开
    分子电机供电装置

    公开(公告)号：US20060156445A1

    公开(公告)日：2006-07-13

    申请号：US11319078

    申请日：2005-12-28

    Applicant: Ming-Jong Wang ,  Hsin-Yun Tsai

    Inventor： Ming-Jong Wang ,  Hsin-Yun Tsai

    IPC: H02N3/00 ,  H02K5/00

    CPC classification number: B81C1/00198 ,  B81B2201/034 ,  B82Y15/00 ,  H02N11/006

    Abstract: A tiny power-assembly device driven by rotatory molecular motors are disclosed. The molecular motor power-supplying device includes multiple connecting members, multiple upper rotating arms, multiple lower rotating arms and multiple rotatory molecular motors. The F1-ATPase is optioned as the sample molecular motor of this device and is located between the upper rotating arm and the lower rotating arm. Each molecular motor is connected with a lower rotating arm through the α, β subunits and connected with a lower rotating arm by the γ subunit. The molecular motor power-supplying device can be driven to shorter (connecting members closely) or longer (connecting members separated far away) by the accumulated driving forces from the rotatory molecular motors.

    Abstract translation: 公开了由旋转分子马达驱动的微小的动力组件装置。 分子电动机供电装置包括多个连接构件，多个上旋转臂，多个下旋转臂和多旋转分子马达。 选择F 1 -ATP酶作为该装置的样品分子马达，并且位于上旋转臂和下旋转臂之间。 每个分子马达通过α，β亚单位与下旋转臂连接，并通过γ亚单位与下旋转臂连接。 分子马达供电装置可以通过来自旋转分子马达的积累的驱动力被驱动到较短的（紧密连接构件）或更长（连接构件远离）。

    Surface-micromachined rotatable member having a low-contact-area hub
    26.
    发明申请
    Surface-micromachined rotatable member having a low-contact-area hub 失效
    具有低接触面积的轮毂的表面微加工的可旋转构件

    公开(公告)号：US20020096018A1

    公开(公告)日：2002-07-25

    申请号：US10098214

    申请日：2002-03-18

    Inventor： M. Steven Rodgers ,  Jeffry J. Sniegowski ,  Thomas W. Krygowski

    IPC: B67B007/14 ,  C23F001/00

    CPC classification number: B81B5/00 ,  B81B2201/034 ,  Y10T74/19651

    Abstract: A surface-micromachined rotatable member formed on a substrate and a method for manufacturing thereof are disclosed. The surface-micromachined rotatable member, which can be a gear or a rotary stage, has a central hub, and an annulus connected to the central hub by an overarching bridge. The hub includes a stationary axle support attached to the substrate and surrounding an axle. The axle is retained within the axle support with an air-gap spacing therebetween of generally 0.3 nullm or less. The rotatable member can be formed by alternately depositing and patterning layers of a semiconductor (e.g. polysilicon or a silicon-germanium alloy) and a sacrificial material and then removing the sacrificial material, at least in part. The present invention has applications for forming micromechanical or microelectromechanical devices requiring lower actuation forces, and providing improved reliability.

    Abstract translation: 公开了一种形成在基板上的表面微机械加工的旋转件及其制造方法。 可以是齿轮或旋转台的表面微加工的可旋转构件具有中心毂和通过总体桥连接到中心毂的环。 轮毂包括附接到基底并围绕轴的固定轴支撑。 轴保持在轴支撑件内，其间隙间隙通常为0.3μm或更小。 可以通过交替地沉积和图案化半导体（例如多晶硅或硅 - 锗合金）和牺牲材料的层并然后至少部分去除牺牲材料来形成可旋转构件。 本发明有用于形成需要较低致动力的微机械或微机电装置的应用，并提供改进的可靠性。

    Microactuator and method of manufacturing the same
    27.
    发明授权
    Microactuator and method of manufacturing the same 失效
    微致动器及其制造方法

    公开(公告)号：US06191518B1

    公开(公告)日：2001-02-20

    申请号：US09075265

    申请日：1998-05-11

    Applicant: Kenichiro Suzuki

    Inventor： Kenichiro Suzuki

    IPC: H02N100

    CPC classification number: B81B3/0008 ,  B81B2201/034 ,  H02N1/008 ,  Y10T29/49002 ,  Y10T29/49007 ,  Y10T29/49009 ,  Y10T29/49021

    Abstract: A microactuator includes a stationary element, a movable element, and a first microstructure. The stationary element is fixed on a substrate and has a plurality of stationary element electrodes arranged at a predetermined pitch. The movable element has a plurality of movable element electrodes opposing to the stationary element electrodes. The movable element is moved by applying a voltage across the stationary element and the movable element. The first microstructure is formed on at least one of the opposing surfaces of the movable element and the stationary element to prevent the movable element from attaching to the stationary element.

    Abstract translation: 微致动器包括固定元件，可移动元件和第一微结构。 固定元件固定在基板上，并且具有以预定间距排列的多个固定元件电极。 可移动元件具有与固定元件电极相对的多个可移动元件电极。 通过施加跨过固定元件和可移动元件的电压来移动可移动元件。 第一微结构形成在可移动元件和固定元件的至少一个相对表面上，以防止可移动元件附接到固定元件。

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