公开(公告)号：US12010919B2

公开(公告)日：2024-06-11

申请号：US17241506

申请日：2021-04-27

Applicant: Microjet Technology Co., Ltd.

Inventor： Hao-Jan Mou ,  Hsien-Chung Tai ,  Lin-Huei Fang ,  Yung-Lung Han ,  Chi-Feng Huang ,  Chun-Yi Kuo ,  Tsung-I Lin ,  Chin-Wen Hsieh

IPC: H01L41/04 ,  B81B3/00 ,  H10N30/20 ,  H10N30/80

CPC classification number: H10N30/802 ,  B81B3/0021 ,  H10N30/2047 ,  B81B2201/036

Abstract: A heterogeneous integration chip of a micro fluid actuator is disclosed and includes a first substrate, a first insulation layer, a first conductive layer, a piezoelectric layer, a second conductive layer, a second substrate, a control element, a perforated trench and a conductor. The first substrate includes a first chamber. The first insulation layer is disposed on the first substrate. The first conductive layer is disposed on the first insulation layer and includes an electrode pad. The piezoelectric layer and the second conductive layer are stacked on the first conductive layer sequentially. The second substrate is assembled to the first substrate through a bonding layer to define a second chamber and includes an orifice, a fluid flowing channel and a third chamber. The control element is disposed in the second substrate. The perforated trench filled with the conductor is penetrated from the electrode pad to the second substrate.

公开(公告)号：US09638338B2

公开(公告)日：2017-05-02

申请号：US14274698

申请日：2014-05-10

Applicant: RHEONIX, INC.

Inventor： Peng Zhou ,  Lincoln C. Young

IPC: F15C3/04 ,  F16K7/12 ,  B01F5/06 ,  B01F11/00 ,  B01F13/00 ,  B01L3/00 ,  B29C65/48 ,  B29C65/00 ,  B81C1/00 ,  F04B43/04 ,  F04B43/06 ,  F16K99/00 ,  F15C1/08 ,  B29K25/00 ,  B29K33/00 ,  B29K69/00 ,  B29K101/12 ,  B29L31/00

CPC classification number: F16K7/12 ,  B01F5/0683 ,  B01F5/0688 ,  B01F11/0071 ,  B01F13/0059 ,  B01F2215/0034 ,  B01L3/502707 ,  B01L3/50273 ,  B01L3/502738 ,  B01L2200/12 ,  B01L2300/0816 ,  B01L2300/0861 ,  B01L2300/0867 ,  B01L2300/0887 ,  B01L2400/0481 ,  B01L2400/0487 ,  B01L2400/06 ,  B01L2400/0638 ,  B01L2400/0655 ,  B01L2400/084 ,  B29C65/4895 ,  B29C66/004 ,  B29C66/54 ,  B29C66/5412 ,  B29C66/71 ,  B29K2025/00 ,  B29K2025/04 ,  B29K2033/08 ,  B29K2069/00 ,  B29K2101/12 ,  B29L2031/7496 ,  B29L2031/7506 ,  B29L2031/756 ,  B81B3/0021 ,  B81B2201/036 ,  B81B2201/054 ,  B81B2203/0127 ,  B81C1/00103 ,  B81C1/00158 ,  F04B43/028 ,  F04B43/043 ,  F04B43/06 ,  F15C1/08 ,  F16K99/0001 ,  F16K99/0015 ,  F16K99/0021 ,  F16K99/0034 ,  F16K99/0055 ,  F16K99/0057 ,  F16K99/0059 ,  F16K2099/0074 ,  F16K2099/0076 ,  F16K2099/0078 ,  F16K2099/008 ,  F16K2099/0084 ,  F16K2099/0094 ,  Y10T29/49405 ,  Y10T137/212 ,  Y10T137/2202 ,  Y10T137/2218 ,  Y10T137/8593 ,  Y10T137/85978 ,  Y10T156/1002 ,  Y10T156/1043 ,  B29K2033/12 ,  B29K2025/06

Abstract: Plastic microfluidic structures having a substantially rigid diaphragm that actuates between a relaxed state wherein the diaphragm sits against the surface of a substrate and an actuated state wherein the diaphragm is moved away from the substrate. As will be seen from the following description, the microfluidic structures formed with this diaphragm provide easy to manufacture and robust systems, as well readily made components such as valves and pumps.

公开(公告)号：US09616171B2

公开(公告)日：2017-04-11

申请号：US15015627

申请日：2016-02-04

Applicant: Cam Med LLC

Inventor： Yanzhe Qin ,  Zhifei Ge

IPC: A61M31/00 ,  A61M5/168 ,  A61M5/145 ,  F04B43/04 ,  A61M5/142 ,  B81C1/00 ,  A61M39/24 ,  F04B53/10 ,  F16K99/00

CPC classification number: A61M5/14248 ,  A61M5/14586 ,  A61M5/16881 ,  A61M39/24 ,  A61M2005/14252 ,  A61M2205/3334 ,  A61M2205/35 ,  A61M2205/581 ,  A61M2205/582 ,  A61M2207/00 ,  B32B37/12 ,  B32B2535/00 ,  B81B2201/036 ,  B81C1/00158 ,  B81C2201/034 ,  F04B43/043 ,  F04B53/10 ,  F16K2099/008 ,  F16K2099/0094

Abstract: A flexible patch pump for controllable accurate subcutaneous delivery of one or more medicaments to a patient includes a laminated layered structure. The pump may have a rigid reservoir layer including a number of rigid reservoirs disposed in a flexible material; a flexible microfluidic layer including a compliant membrane for sealing the rigid reservoirs, a network of microfluidic channels connecting the rigid reservoirs, and a number of inlet and/or outlet valves corresponding to the rigid reservoirs; and a flexible-rigid electronic circuit layer including a number of individually-addressable actuators. In operation, the rigid reservoirs may contain medicament that is dispensed in precise volumes at appropriate times due, for example, to a pressure change in an addressed reservoir caused by displacement of the compliant membrane or other actuation element.

公开(公告)号：US20160228819A1

公开(公告)日：2016-08-11

申请号：US15025443

申请日：2014-09-26

Applicant: OHIO STATE INNOVATION FOUNDATION

Inventor： Derek James Hansford ,  Jeremiah Schley ,  Daniel Gallego-Perez

IPC: B01D61/42 ,  B01L3/00 ,  G01N27/447

CPC classification number: B01D61/427 ,  B01L3/50273 ,  B01L2200/06 ,  B01L2300/06 ,  B01L2300/0681 ,  B01L2400/0418 ,  B81B2201/036 ,  B82Y30/00 ,  C12N2521/00 ,  F04B19/006 ,  G01N27/44743 ,  G01N27/44791

Abstract: Disclosed are devices for the controlled handling and delivery of solutions, as well as methods of making and using thereof. The devices can comprise a nanoporous membrane having a top surface and a bottom surface; a fluid source positioned in fluid contact with the bottom surface of the nanoporous membrane; and an electrode patterned on one or more of the surfaces of the nanoporous. membrane (e.g., on the top surface of the nanoporous membrane, on the bottom surface of the nanoporous membrane, or on both the top surface and the bottom surface of the nanoporous membrane). The electrode or electrodes are patterned so as to define a fluid delivery region in fluid contact with the top surface of the nanoporous membrane.

Abstract translation: 公开了用于受控处理和递送解决方案的装置，以及制造和使用它们的方法。 该装置可以包括具有顶表面和底表面的纳米多孔膜; 定位成与纳米多孔膜的底表面流体接触的流体源; 以及在纳米多孔的一个或多个表面上图案化的电极。 膜（例如，在纳米多孔膜的顶表面，纳米多孔膜的底表面上，或在纳米多孔膜的顶表面和底表面上）。 电极或电极被图案化以便限定与纳米多孔膜的顶表面流体接触的流体输送区域。

公开(公告)号：US09233837B2

公开(公告)日：2016-01-12

申请号：US14509171

申请日：2014-10-08

Applicant: General Electric Company

Inventor： Mehmet Arik ,  Stanton Earl Weaver

IPC: F04B17/03 ,  B81B7/00 ,  F04B45/047 ,  H01L23/467 ,  B81C1/00 ,  H01L41/09

CPC classification number: B81B7/0093 ,  B81B2201/036 ,  B81B2201/058 ,  B81B2203/0127 ,  B81C1/00158 ,  F04B45/047 ,  H01L23/467 ,  H01L41/0973 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A micro-electromechanical (MEM) synthetic jet actuator includes a semiconductor substrate having a cavity extending therethrough, such that a first opening is formed in a first surface of the semiconductor substrate and such that a second opening is formed in a second surface of the semiconductor substrate. A first flexible membrane is formed on at least a portion of the front surface of the semiconductor substrate and extends over the first opening. The first flexible membrane also includes an orifice formed therein aligned with the first opening. The MEM synthetic jet actuator also includes a second flexible membrane that is formed on at least a portion of the second surface of the semiconductor substrate and that extends over the second opening, and a pair of actuator elements coupled to the flexible membranes and aligned with the cavity to selectively cause displacement of the first and second flexible membranes.

公开(公告)号：US09184131B2

公开(公告)日：2015-11-10

申请号：US14127580

申请日：2012-06-29

Applicant: Heikki Kuisma

Inventor： Heikki Kuisma

IPC: H01L23/00 ,  H01L23/528 ,  H01L25/16 ,  H01L25/18 ,  B81C1/00 ,  G01P1/02 ,  H01L23/538 ,  G01L19/14 ,  G01P15/08 ,  G01C19/5783 ,  H01L25/00 ,  H01L21/56 ,  H01L27/146 ,  G01L19/00

CPC classification number: B81B7/0074 ,  B81B2201/0235 ,  B81B2201/025 ,  B81B2201/0257 ,  B81B2201/0264 ,  B81B2201/036 ,  B81B2207/012 ,  B81B2207/095 ,  B81C1/00333 ,  G01C19/5783 ,  G01L19/0084 ,  G01L19/148 ,  G01P1/023 ,  G01P1/026 ,  G01P15/0802 ,  H01L21/568 ,  H01L23/528 ,  H01L23/5389 ,  H01L24/16 ,  H01L24/17 ,  H01L24/19 ,  H01L24/32 ,  H01L24/73 ,  H01L24/83 ,  H01L24/92 ,  H01L24/96 ,  H01L24/97 ,  H01L25/16 ,  H01L25/18 ,  H01L25/50 ,  H01L27/14618 ,  H01L2223/6677 ,  H01L2224/12105 ,  H01L2224/16145 ,  H01L2224/16227 ,  H01L2224/1703 ,  H01L2224/32145 ,  H01L2224/32225 ,  H01L2224/73204 ,  H01L2224/8312 ,  H01L2224/8319 ,  H01L2224/92125 ,  H01L2224/97 ,  H01L2924/12042 ,  H01L2924/14 ,  H01L2924/1433 ,  H01L2924/1461 ,  H01L2924/15311 ,  H01L2924/181 ,  H01L2924/18162 ,  H01L2224/81 ,  H01L2224/83 ,  H01L2924/00012 ,  H01L2924/00

Abstract: A method of making a system-in-package device, and a system-in-package device is disclosed. In the method, at least one first species die with predetermined dimensions, at least one second species die with predetermined dimensions, and at least one further component of the system-in-device is included in the system-in package device. At least one of the first and second species dies is selected for redimensioning, and material is added to at least one side of the selected die such that the added material and the selected die form a redimensioned die structure. A connecting layer is formed on the redimensioned die structure. The redimensioned die structure is dimensioned to allow mounting of the non-selected die and the at least one further component into contact with the redimensioned die structure via the connecting layer.

Abstract translation: 公开了一种制造系统级封装器件的方法，以及一种系统级封装器件。 在该方法中，具有预定尺寸的至少一个第一种类模具，具有预定尺寸的至少一种第二种类模具，并且系统级装置中的至少一个其它部件包括在系统级封装装置中。 选择第一和第二种类模具中的至少一种用于重新定向，并且将材料添加到所选择的模具的至少一侧，使得添加的材料和所选择的模具形成重新定型的模具结构。 在重新定型的模具结构上形成连接层。 尺寸设计为重新定型的模具结构，以允许非选择的模具和至少一个另外的部件通过连接层与重新定向的模具结构接触。

公开(公告)号：US20150021410A1

公开(公告)日：2015-01-22

申请号：US14509183

申请日：2014-10-08

Applicant: General Electric Company

Inventor： Mehmet Arik ,  Stanton Earl Weaver

IPC: B81B7/00

CPC classification number: B81B7/0093 ,  B81B2201/036 ,  B81B2201/058 ,  B81B2203/0127 ,  B81C1/00158 ,  F04B45/047 ,  H01L23/467 ,  H01L41/0973 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A micro-electromechanical (MEM) synthetic jet actuator includes a semiconductor substrate having a cavity extending therethrough, such that a first opening is formed in a first surface of the semiconductor substrate and such that a second opening is formed in a second surface of the semiconductor substrate. A first flexible membrane is formed on at least a portion of the front surface of the semiconductor substrate and extends over the first opening. The first flexible membrane also includes an orifice formed therein aligned with the first opening. The MEM synthetic jet actuator also includes a second flexible membrane that is formed on at least a portion of the second surface of the semiconductor substrate and that extends over the second opening, and a pair of actuator elements coupled to the flexible membranes and aligned with the cavity to selectively cause displacement of the first and second flexible membranes.

公开(公告)号：US20150021409A1

公开(公告)日：2015-01-22

申请号：US14509171

申请日：2014-10-08

Applicant: General Electric Company

Inventor： Mehmet Arik ,  Stanton Earl Weaver

IPC: B81B7/00

CPC classification number: B81B7/0093 ,  B81B2201/036 ,  B81B2201/058 ,  B81B2203/0127 ,  B81C1/00158 ,  F04B45/047 ,  H01L23/467 ,  H01L41/0973 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A micro-electromechanical (MEM) synthetic jet actuator includes a semiconductor substrate having a cavity extending therethrough, such that a first opening is formed in a first surface of the semiconductor substrate and such that a second opening is formed in a second surface of the semiconductor substrate. A first flexible membrane is formed on at least a portion of the front surface of the semiconductor substrate and extends over the first opening. The first flexible membrane also includes an orifice formed therein aligned with the first opening. The MEM synthetic jet actuator also includes a second flexible membrane that is formed on at least a portion of the second surface of the semiconductor substrate and that extends over the second opening, and a pair of actuator elements coupled to the flexible membranes and aligned with the cavity to selectively cause displacement of the first and second flexible membranes.

Abstract translation: 微机电（MEM）合成射流致动器包括具有延伸穿过其中的空腔的半导体衬底，使得第一开口形成在半导体衬底的第一表面中，并且第二开口形成在半导体的第二表面中 基质。 第一柔性膜形成在半导体衬底的前表面的至少一部分上并在第一开口上延伸。 第一柔性膜还包括与第一开口对准的孔口。 MEM合成射流致动器还包括第二柔性膜，其形成在半导体衬底的第二表面的至少一部分上并且在第二开口上延伸，以及一对致动器元件，其耦合到柔性膜并与 以选择性地引起第一和第二柔性膜的位移。

公开(公告)号：US08804300B2

公开(公告)日：2014-08-12

申请号：US13436583

申请日：2012-03-30

Applicant: Guillaume Bouche

Inventor： Guillaume Bouche

IPC: H01G5/01

CPC classification number: F04B43/043 ,  B81B7/0093 ,  B81B2201/036 ,  B81B2203/0127 ,  B81B2203/0315 ,  H01L23/473 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A pump having: a cavity formed inside an insulating substrate, the upper part of the substrate being situated near the cavity having an edge; a conductive layer covering the inside of the cavity up to the edge and optionally covering the edge itself; a flexible membrane made of a conductive material placed above the cavity and resting against the edge; a dielectric layer covering the conductive layer or the membrane whereby insulating the portions of the conductive layer and of the membrane that are near one another; at least one aeration line formed in the insulating substrate that opens into the cavity via an opening in the conductive layer, and; terminals for applying a voltage between the conductive layer and the membrane.

Abstract translation: 一种泵，具有：形成在绝缘基板内部的空腔，所述基板的上部位于具有边缘的所述空腔附近; 导电层，覆盖空腔的内部直到边缘并且可选地覆盖边缘本身; 由导电材料制成的柔性膜，放置在空腔上方并抵靠边缘; 覆盖导电层或膜的电介质层，由此绝缘导电层和膜彼此靠近的部分; 形成在所述绝缘基板中的至少一个通气线，所述曝气线经由所述导电层中的开口而进入所述空腔， 用于在导电层和膜之间施加电压的端子。

公开(公告)号：US08646482B2

公开(公告)日：2014-02-11

申请号：US12855058

申请日：2010-08-12

Applicant: Peng Zhou ,  Lincoln C. Young

Inventor： Peng Zhou ,  Lincoln C. Young

IPC: F15C3/00

CPC classification number: F16K7/12 ,  B01F5/0683 ,  B01F5/0688 ,  B01F11/0071 ,  B01F13/0059 ,  B01F2215/0034 ,  B01L3/502707 ,  B01L3/50273 ,  B01L3/502738 ,  B01L2200/12 ,  B01L2300/0816 ,  B01L2300/0861 ,  B01L2300/0867 ,  B01L2300/0887 ,  B01L2400/0481 ,  B01L2400/0487 ,  B01L2400/06 ,  B01L2400/0638 ,  B01L2400/0655 ,  B01L2400/084 ,  B29C65/4895 ,  B29C66/004 ,  B29C66/54 ,  B29C66/5412 ,  B29C66/71 ,  B29K2025/00 ,  B29K2025/04 ,  B29K2033/08 ,  B29K2069/00 ,  B29K2101/12 ,  B29L2031/7496 ,  B29L2031/7506 ,  B29L2031/756 ,  B81B3/0021 ,  B81B2201/036 ,  B81B2201/054 ,  B81B2203/0127 ,  B81C1/00103 ,  B81C1/00158 ,  F04B43/028 ,  F04B43/043 ,  F04B43/06 ,  F15C1/08 ,  F16K99/0001 ,  F16K99/0015 ,  F16K99/0021 ,  F16K99/0034 ,  F16K99/0055 ,  F16K99/0057 ,  F16K99/0059 ,  F16K2099/0074 ,  F16K2099/0076 ,  F16K2099/0078 ,  F16K2099/008 ,  F16K2099/0084 ,  F16K2099/0094 ,  Y10T29/49405 ,  Y10T137/212 ,  Y10T137/2202 ,  Y10T137/2218 ,  Y10T137/8593 ,  Y10T137/85978 ,  Y10T156/1002 ,  Y10T156/1043 ,  B29K2033/12 ,  B29K2025/06

Abstract: Plastic microfluidic structures having a substantially rigid diaphragm that actuates between a relaxed state wherein the diaphragm sits against the surface of a substrate and an actuated state wherein the diaphragm is moved away from the substrate. As will be seen from the following description, the microfluidic structures formed with this diaphragm provide easy to manufacture and robust systems, as well readily made components such as valves and pumps.

Abstract translation: 塑料微流体结构具有基本上刚性的膜片，其在松弛状态之间起作用，其中隔膜抵靠衬底的表面，以及致动状态，其中隔膜移动离开衬底。 从以下描述可以看出，用这种隔膜形成的微流体结构提供易于制造和坚固的系统，以及易于制造的部件，例如阀和泵。