Use of amorphous carbon film as a hardmask in the fabrication of optical waveguides
    22.
    发明申请
    Use of amorphous carbon film as a hardmask in the fabrication of optical waveguides 失效
    在制造光波导中使用无定形碳膜作为硬掩模

    公开(公告)号:US20050199013A1

    公开(公告)日:2005-09-15

    申请号:US10799147

    申请日:2004-03-12

    Abstract: Methods are provided for forming optical devices, such as waveguides, with minimal defect formation. In one aspect, the invention provides a method for forming a waveguide structure on a substrate surface including forming a cladding layer on the substrate surface, forming a core layer on the cladding layer, depositing an amorphous carbon hardmask on the core layer, forming a patterned photoresist layer on the amorphous carbon hardmask, etching the amorphous carbon hardmask, and etching the core material.

    Abstract translation: 提供了用于形成具有最小缺陷形成的光学器件(例如波导)的方法。 一方面,本发明提供了一种在基板表面上形成波导结构的方法,包括在基板表面上形成包覆层,在包层上形成芯层,在芯层上沉积无定形碳硬掩模,形成图案化 无定形碳硬掩模上的光致抗蚀剂层,蚀刻无定形碳硬掩模,并蚀刻芯材。

    PROCESS OF MAKING RARE EARTH DOPED OPTICAL FIBRE
    23.
    发明申请
    PROCESS OF MAKING RARE EARTH DOPED OPTICAL FIBRE 有权
    制造稀土光纤光纤的工艺

    公开(公告)号:US20040187524A1

    公开(公告)日:2004-09-30

    申请号:US09982946

    申请日:2001-10-22

    Abstract: The present invention discloses a process for making rare earth (RE) doped optical fibre by using RE oxide coated silica nanoparticles as the precursor materia, more particularly the method of the present invention involves preparation of stable dispersions (sol) of RE oxide coated silica nanoparticles at ambient temperature and applying a thin coating on the inner surface of silica glass tube following dip coating technique or any other conventional methods, of the said silica sol containing suitable dopants selected from Ge, Al, P, etc., the coated tubes were further processed into optical preforms by following MCVD technique and fiberised in desired configuration, the novelty lies in eliminating the step of the formation of porous soot layer at high temperature by CVD process inside a fused silica glass tube for formation of the core and also in the elemination of the incorporation of the rare earth ions into the porous soot layer following the solution doping technique or other conventional methods, the direct addition of RE oxides in the sol eliminates the formation of microcrystalites and clusters of rare earth ions and prevents change in composition including variation of RE concentration in the core which results in increase in the reproducibility and reliability of the process to a great extent, further the addition of Ge(OET)4 at ambient temperature in the silica sol reduces the quantity of GeCl4 which is required at high temperature to achieve the desired Numerical Aperture.

    Abstract translation: 本发明公开了一种通过使用RE氧化物涂覆的二氧化硅纳米颗粒作为前体材料制备稀土(RE)掺杂光纤的方法,更具体地说,本发明的方法包括制备RE氧化物涂覆的二氧化硅纳米粒子的稳定分散体(sol) 在环境温度下,在浸渍涂布技术或任何其它常规方法之后,在石英玻璃管的内表面上施加薄涂层,所述硅溶胶含有选自Ge,Al,P等的合适的掺杂剂,所述涂覆的管进一步 通过按照MCVD技术处理成光学预型件并在所需结构中纤维化,新颖性在于消除了在用于形成芯的熔融石英玻璃管内的CVD工艺在高温下形成多孔烟灰层的步骤,以及在电镀 根据溶液掺杂技术或其他配合将稀土离子掺入多孔烟灰层中 通常的方法中,在溶胶中直接添加RE氧化物消除了微晶体和稀土离子簇的形成,并且防止了组分中的变化,包括核心中RE浓度的变化,这导致过程的再现性和可靠性增加到 在很大程度上,进一步在硅溶胶中环境温度下添加Ge(OET)4会降低在高温下所需的GeCl 4的量以达到所需的数值孔径。

    Systems and methods for reducing splice loss in optical fibers
    27.
    发明申请
    Systems and methods for reducing splice loss in optical fibers 有权
    降低光纤接头损耗的系统和方法

    公开(公告)号:US20040086243A1

    公开(公告)日:2004-05-06

    申请号:US10287307

    申请日:2002-11-04

    Abstract: Optical fibers are described that exhibit reduced splice loss. Further described are techniques for fabricating optical fibers exhibiting reduced splice loss. One described fiber includes a plurality of regions, one region having a higher viscosity and the other region having a lower viscosity, such that when the fiber is drawn under tension, a strain is frozen into the higher viscosity region. A lower viscosity buffer layer is sandwiched between the higher viscosity region and the lower viscosity region. The buffer layer isolates the lower viscosity region from changes in refractive index in the higher viscosity region arising from a change in the strain frozen into the higher viscosity region.

    Abstract translation: 描述了表现出减少的接合损耗的光纤。 进一步描述的是制造具有减小的接合损耗的光纤的技术。 一种所述的纤维包括多个区域,一个区域具有较高的粘度,另一个区域具有较低的粘度,使得当纤维在张力下拉伸时,应变被冻结到较高粘度的区域中。 较低粘度的缓冲层夹在较高粘度区域和较低粘度区域之间。 缓冲层将较低粘度区域与由较冷粘度变为较高粘度区域的应变的变化引起的较高粘度区域的折射率变化相分离。

    Method of making extreme ultraviolet lithography glass substrates
    28.
    发明申请
    Method of making extreme ultraviolet lithography glass substrates 审中-公开
    制造极紫外光刻玻璃基板的方法

    公开(公告)号:US20040025542A1

    公开(公告)日:2004-02-12

    申请号:US10456318

    申请日:2003-06-05

    Abstract: A method for making extreme ultraviolet lithography tool glass substrates includes generating a plasma, delivering reactants comprising a silica precursor and a titania precursor into the plasma to produce titania and silica particles, and depositing the titania and silica particles on a deposition surface to form a homogeneous titania-doped silica. The invention provides for homogeneous glass substrates that are free of striae variations and provides for beneficial extreme ultraviolet lithography reflective optics.

    Abstract translation: 用于制造极紫外光刻工具玻璃基板的方法包括产生等离子体,将包含二氧化硅前体和二氧化钛前体的反应物输送到等离子体中以产生二氧化钛和二氧化硅颗粒,并将二氧化钛和二氧化硅颗粒沉积在沉积表面上以形成均匀的 二氧化钛掺杂二氧化硅。 本发明提供了不含条纹变化的均匀玻璃基底,并提供有益的极紫外光刻反射光学器件。

    Suppression of stimulated Brillouin scattering in optical fiber
    29.
    发明授权
    Suppression of stimulated Brillouin scattering in optical fiber 失效
    光纤中受激布里渊散射的抑制

    公开(公告)号:US06542683B1

    公开(公告)日:2003-04-01

    申请号:US09462739

    申请日:2000-01-13

    Abstract: Suppression of stimulated Brillouin scattering (SBS) by broadening the energy spectrum of participating SBS photons and/or phonons is achieved in an optical fiber having a core with both radially nonuniform viscosity and CTE profiles provided by alternating layers of glass modifying dopants such as phosphorous and fluorine. The nonuniform thermal expansion and viscosity profiles impart a residual, permanent, nonuniform stress in the fiber. The SBS suppressing effect provided by the nonuniform stress can be controlled and enhanced by applying a uniform or nonuniform tensile force to the fiber as it is being drawn. A preform for the fiber is also disclosed.

    Abstract translation: 通过扩展参与的SBS光子和/或声子的能谱来抑制受激布里渊散射(SBS),在具有径向不均匀粘度和CTE曲线的核心的光纤中实现,该曲线由玻璃修饰掺杂剂如磷和 氟。 不均匀的热膨胀和粘度特性在纤维中赋予残余的,永久的,不均匀的应力。 通过在拉伸时对纤维施加均匀或不均匀的拉伸力,可以控制和增强由不均匀应力提供的SBS抑制效果。 还公开了一种用于纤维的预制件。

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