公开(公告)号：US4772786A

公开(公告)日：1988-09-20

申请号：US940319

申请日：1986-12-10

Applicant: Roger M. Langdon

Inventor： Roger M. Langdon

IPC: G01L1/24 ,  G01D5/26 ,  G01H9/00 ,  G01K5/52 ,  G01L1/10 ,  G01L1/18 ,  G01L9/00 ,  G01L11/02 ,  G01P15/093 ,  G01D5/34

CPC classification number: G01L1/103 ,  G01D5/268 ,  G01H9/006 ,  G01K5/52 ,  G01L1/186 ,  G01L11/02 ,  G01L9/0014 ,  G01L9/0017 ,  G01L9/002 ,  G01L9/0079 ,  G01P15/093

Abstract: A sensor comprises a beam, e.g. of silicon, which resonates at a frequency dependent on the force imposed on the beam. Light on a line induces resonance of the beam by means of the photothermal effect. The light reflected from the beam is amplitude modulated at the resonance frequency, and returns along the line. It is reflected by a semi-reflecting plane mirror onto a lens which focusses it onto a photodetector. The photodetector produces an output voltage modulated at the oscillation frequency, and is thus representative of the force imposed on beam 1.

Abstract translation: 一个传感器包括一个光束， 的硅，其以取决于施加在光束上的力的频率谐振。 线上的光线通过光热效应引起光束的共振。 从光束反射的光在谐振频率处进行幅度调制，并沿着线返回。 它被半反射平面镜反射到将其聚焦到光电检测器上的透镜上。 光电检测器产生以振荡频率调制的输出电压，因此代表施加在光束1上的力。

公开(公告)号：US20170314973A1

公开(公告)日：2017-11-02

申请号：US15499292

申请日：2017-04-27

Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES

Inventor： Luca LEONCINO ,  Sebastien HENTZ ,  Guillaume JOURDAN ,  Marc SANSA PERNA

IPC: G01D5/353

CPC classification number: G01D5/353 ,  G01D5/26 ,  G01D5/34 ,  G01L1/103 ,  G01L9/0023 ,  G01M11/3172 ,  G01N29/036 ,  G01N29/2418 ,  G01N2291/015 ,  G01N2291/0256 ,  G01N2291/0427 ,  G01P15/093 ,  G01P15/097

Abstract: Resonator measurement system having at least MEMS and/or NEMS, comprising: an optomechanical device comprising at least one resonating element at at least one resonance frequency of fr and at least one optical element whose optical index is sensitive to the displacement of the resonating element, excitation circuitry of exciting the resonating element at least at one operating frequency of fm, injection device for injecting a light beam whose intensity is modulated at frequency f1=fm+Δf in the optomechanical device, a photodetection device configured measure the intensity of a light beam coming out of the optomechanical device, the intensity of the measurement beam having at least one component at frequency Δf.

公开(公告)号：US20160191011A1

公开(公告)日：2016-06-30

申请号：US14650658

申请日：2013-12-13

Applicant: GENERAL ELECTRONIC COMPANY

Inventor： Russell CRADDOCK ,  Roger JONES ,  Li ZHAO ,  Muhammad IRSHAD

IPC: H03H9/02 ,  H03H3/02 ,  H03H3/007 ,  G01L1/10 ,  G01P15/02

CPC classification number: H03H9/02244 ,  G01K7/32 ,  G01L1/103 ,  G01L9/002 ,  G01L9/0077 ,  G01L19/0092 ,  G01L19/04 ,  G01P15/02 ,  H03H3/0072 ,  H03H3/02

Abstract: A resonator device 10 is disclosed. The resonator device may be used in a transducer or a sensor such as a pressure, force or acceleration sensor. The resonator device comprises a resonator 20 provided on a diaphragm 30. A cap 40 is provided which may be fusion bonded to the diaphragm 30 to enclose the resonator 20 and form a hermetically sealed package 10. The resonator device is excited by applying electromagnetic stimulation, such as infra-red or optical stimulation, which may be from a laser via a fibre 50. The resonator device may be interrogated by applying an electromagnetic signal into the optical cavity formed between the resonator 20 and the inside surface of the cap 40 to derive a frequency change of the resonator. As the resonator device incorporates a hermetically sealed package and is stimulated by electromagnetic radiation, it is robust and able to operate in harsh environments.

Abstract translation: 公开了一种谐振器装置10。 谐振器装置可以用在换能器或诸如压力，力或加速度传感器的传感器中。 谐振器装置包括设置在隔膜30上的谐振器20.设置盖40，其可以熔接到隔膜30以包围谐振器20并形成气密密封的封装10.通过施加电磁刺激来激发谐振器装置， 例如红外或光学刺激，其可以来自经由光纤50的激光。可以通过将电磁信号施加到形成在谐振器20和盖40的内表面之间的光学腔中来询问谐振器装置，以导出 谐振器的频率变化。 由于谐振器装置包含密封的封装并且被电磁辐射刺激，所以它是坚固的并且能够在恶劣的环境中操作。

公开(公告)号：US08516904B2

公开(公告)日：2013-08-27

申请号：US13128458

申请日：2009-10-28

Applicant: Werner Schiffers ,  John R. Webster

Inventor： Werner Schiffers ,  John R. Webster

IPC: G01L5/10 ,  G01L1/10 ,  G01H17/00

CPC classification number: G01L3/08 ,  G01L1/103 ,  G01L3/045

Abstract: A strain sensor apparatus for a rotatable shaft including a radiation emitter/receiver, a vibration element attached to the shaft and a reflector that is positioned to reflect radiation onto the vibration element.

Abstract translation: 一种用于可旋转轴的应变传感器装置，包括辐射发射器/接收器，附接到轴的振动元件和被定位成将辐射反射到振动元件上的反射器。

公开(公告)号：US08276451B2

公开(公告)日：2012-10-02

申请号：US12867322

申请日：2008-12-03

Applicant: Carl Tyren

Inventor： Carl Tyren

IPC: G01N29/12

CPC classification number: G01L9/0014 ,  G01H9/00 ,  G01L1/103 ,  G01L3/045

Abstract: A device for measuring a vibration frequency of a mechanically vibrating string or rod, comprising a microwave transmitter for directing microwaves towards the vibrating string and a microwave receiver for receiving the microwaves amplitude modulated by the frequency of mechanical vibration. A member is arranged close to a vibration maximum of the vibrating string. The member is arranged on one side of the vibrating object and the microwave receiver is arranged on the other side thereof. The device is used for measuring temperature, pressure, torque, force or identity.

Abstract translation: 一种用于测量机械振动弦或杆的振动频率的装置，包括用于将微波引向振动弦的微波发射器和用于接收由机械振动频率调制的微波振幅的微波接收器。 一个构件靠近振动弦的振动最大值而布置。 该构件设置在振动对象的一侧，微波接收器设置在其另一侧。 该装置用于测量温度，压力，扭矩，力或身份。

公开(公告)号：US20100319457A1

公开(公告)日：2010-12-23

申请号：US12867322

申请日：2008-12-03

Applicant: Carl Tyren

Inventor： Carl Tyren

IPC: G01H13/00

CPC classification number: G01L9/0014 ,  G01H9/00 ,  G01L1/103 ,  G01L3/045

Abstract: A device for measuring a vibration frequency of a mechanically vibrating string or rod, comprising a microwave transmitter for directing microwaves towards the vibrating string and a microwave receiver for receiving the microwaves amplitude modulated by the frequency of mechanical vibration. A member is arranged close to a vibration maximum of the vibrating string. The member is arranged on one side of the vibrating object and the microwave receiver is arranged on the other side thereof. The device is used for measuring temperature, pressure, torque, force or identity.

Abstract translation: 一种用于测量机械振动弦或杆的振动频率的装置，包括用于将微波引向振动弦的微波发射器和用于接收由机械振动频率调制的微波振幅的微波接收器。 一个构件靠近振动弦的振动最大值而布置。 该构件设置在振动对象的一侧，微波接收器设置在其另一侧。 该装置用于测量温度，压力，扭矩，力或身份。

公开(公告)号：US07176048B1

公开(公告)日：2007-02-13

申请号：US10905036

申请日：2004-12-12

Applicant: David W. Burns

Inventor： David W. Burns

IPC: H01L21/00

CPC classification number: G01L9/002 ,  G01L1/103 ,  G01P15/093 ,  G01P15/097

Abstract: A process to form a laterally offset photodiode for an optically coupled resonator includes implanting a semiconductor substrate to form the laterally offset photodiode adjacent to the resonator. The resonator masks the implanting underneath the resonator when the semiconductor substrate is implanted. Also disclosed is an optically coupled resonator, a process for fabricating an optically coupled resonator, and a device including an optically coupled resonator having a laterally offset photodiode.

Abstract translation: 形成用于光耦合谐振器的横向偏移光电二极管的工艺包括：注入半导体衬底以形成与谐振器相邻的侧向偏移光电二极管。 当植入半导体衬底时，谐振器掩盖在谐振器下方的注入。 还公开了光耦合谐振器，用于制造光耦合谐振器的工艺，以及包括具有侧向偏移光电二极管的光耦合谐振器的器件。

公开(公告)号：US6031944A

公开(公告)日：2000-02-29

申请号：US999165

申请日：1997-12-30

Applicant: Daniel W. Youngner

Inventor： Daniel W. Youngner

IPC: B81B3/00 ,  G01L1/10 ,  G01L1/18 ,  G01L9/00 ,  G01P15/097 ,  G01P15/10 ,  G02B6/00

CPC classification number: G01P15/097 ,  G01L1/103 ,  G01L1/186 ,  G01L9/0011 ,  G01L9/002

Abstract: A very high temperature microbeam sensor of a resonant integrated microstructure having an electrostatic beam driver and an optical fiber pick-up for sensed light from the beam. The high temperature sensor has no components that are vulnerable to temperatures up to 600 degrees C. Associated components for detection, processing and driving are remote from the sensor environment. By using different materials in the beam assembly, such as tungsten for the beam, and sapphire for the substrate and the shell, the sensor can withstand temperatures up to 1000 degrees C. Also, optical fiber may be used for long distance connections between processing electronics and the driver in the sensing device, by locating a photo detector just outside the very or ultra high temperature sensing environment, and then using optical fiber for sending long distance signals from the processor to the driver photo detector, for eliminating electrical signal-to-noise problems.

Abstract translation: 具有静电束驱动器和用于来自光束的感测光的光纤拾取器的谐振集成微结构的非常高温的微束传感器。 高温传感器没有易受温度高达600摄氏度影响的组件。用于检测，处理和驱动的相关组件远离传感器环境。 通过在梁组件中使用不同的材料，例如用于梁的钨，以及用于衬底和壳的蓝宝石，传感器可以承受高达1000摄氏度的温度。此外，光纤可用于处理电子器件之间的长距离连接 以及感测装置中的驱动器，通过将光电检测器定位在非常或超高温感测环境之外，然后使用光纤将长距离信号从处理器发送到驱动器光电检测器，以消除电信号 - 噪音问题。

公开(公告)号：US5338929A

公开(公告)日：1994-08-16

申请号：US24995

申请日：1993-03-02

Applicant: Bindert S. Douma ,  Peter Eigenraam

Inventor： Bindert S. Douma ,  Peter Eigenraam

IPC: G01L1/10 ,  G01L9/00

CPC classification number: G01L9/002 ,  G01L1/103

Abstract: In a method for monitoring strain variations of a strain responsive element of a micromachined sensor device while subjected to outside parameter conditions, at least two oscillation resonance modes of said element are activated and interrogated optically. Thereby correspondingly at least two resonance frequencies are obtained. From parameter/frequency characteristics of said device correspondingly at least two parameter values are derived.

Abstract translation: 在用于监测微机械传感器装置的应变响应元件的受到外部参数条件的应变变化的方法中，所述元件的至少两个振荡谐振模式被激活并被光学询问。 从而相应地获得至少两个谐振频率。 从所述装置的参数/频率特性相应地导出至少两个参数值。

公开(公告)号：US12055453B2

公开(公告)日：2024-08-06

申请号：US17930024

申请日：2022-09-06

Applicant: KABUSHIKI KAISHA TOSHIBA ,  Toshiba Energy Systems & Solutions Corporation

Inventor： Jun Mitani ,  Takero Mukai ,  Takanobu Kojima ,  Masahiko Nakazono

IPC: G01L23/08 ,  G01L1/02 ,  G01L1/10 ,  G01L1/16 ,  G01L1/25

CPC classification number: G01L23/08 ,  G01L1/02 ,  G01L1/103 ,  G01L1/106 ,  G01L1/162 ,  G01L1/165 ,  G01L1/167 ,  G01L1/255

Abstract: A stress estimation method for a machine structure according to an embodiment is provided with a calculation step of calculating a relationship between the stress generated at the evaluation target position and a physical quantity including a sound pressure or vibration generated at a detection position different from the evaluation target position during vibration of the machine structure. The stress estimation method for a machine structure is provided with a detection step of detecting the physical quantity generated at the detection position during operation of the machine structure. The stress estimation method for a machine structure is provided with an estimation step of estimating the stress generated at the evaluation target position during operation of the machine structure on the basis of the relationship calculated in the calculation step and the physical quantity detected in the detection step.