Light Measuring Device and Light Measuring Method
    21.
    发明申请
    Light Measuring Device and Light Measuring Method 有权
    光测量装置和光测量方法

    公开(公告)号:US20160299080A1

    公开(公告)日:2016-10-13

    申请号:US15036241

    申请日:2014-09-22

    Abstract: To measure a surface state, reflective CARS is suitable in terms of the signal intensity. However, with the reflective CARS, it has been difficult to identify the surface position because the shape information is not acquired. Thus, a reflective CARS microscope is combined with a high-resolution phase sensor. The surface position is identified with the phase sensor, and reflected CARS generated from the surface is detected, so that composition analysis is performed.

    Abstract translation: 为了测量表面状态,反射CARS在信号强度方面是合适的。 然而,对于反射CARS,由于未获取形状信息,因此难以识别表面位置。 因此,反射CARS显微镜与高分辨率相位传感器组合。 用相位传感器识别表面位置,并检测从表面产生的反射CARS,从而进行组成分析。

    Illumination apparatus and pattern inspection apparatus
    23.
    发明授权
    Illumination apparatus and pattern inspection apparatus 有权
    照明装置和图案检查装置

    公开(公告)号:US09410899B2

    公开(公告)日:2016-08-09

    申请号:US14607737

    申请日:2015-01-28

    Abstract: An illumination apparatus according to embodiments includes: a light source generating laser light; a rotational phase plate having a plurality of randomly arranged stepped regions, the rotational phase plate transmitting the laser light to give a phase change to the laser light; and an integrator including a plurality of lenses arranged in an array, the laser light transmitted through the rotational phase plate being incident on the integrator, an allowable angle of incidence for the laser light of the lenses being set at a maximum value of or larger than an angle of diffraction of a first order of the laser light at the rotational phase plate.

    Abstract translation: 根据实施例的照明装置包括:产生激光的光源; 旋转相位板,具有多个随机布置的台阶区域,旋转相位板传输激光以对激光进行相位变化; 以及包括以阵列布置的多个透镜的积分器,透过旋转相位板的激光入射到积分器上,将透镜的激光的允许入射角设定为最大值或大于 在旋转相位板处的激光的一阶的衍射角。

    SENSOR DEVICE FOR MONITORING THE STATE OF A LUBRICANT AND METHOD FOR PRODUCING SAID SENSOR DEVICE
    24.
    发明申请
    SENSOR DEVICE FOR MONITORING THE STATE OF A LUBRICANT AND METHOD FOR PRODUCING SAID SENSOR DEVICE 有权
    用于监测润滑剂状态的传感器装置和用于生产传感器装置的方法

    公开(公告)号:US20160223459A1

    公开(公告)日:2016-08-04

    申请号:US15022071

    申请日:2014-07-25

    Abstract: Rolling bearings include a plurality of rolling bodies which during operation roll on raceways. In order to reduce friction during rolling, it is customary to supply the rolling bearings with a lubricant. However, the quality of the lubricant can deteriorate during operation due to long-term stress, aging, or thermal influences, or get lost in gaps etc. The objective addressed by the invention is that of providing a sensor device, which can be operated in a functionally reliable manner. This objective is achieved by a sensor device for monitoring the state of a lubricant in a lubricant chamber, including a transmitter platform, wherein on the transmitter platform, a plurality of diode devices are arranged, having a measurement window device, wherein the measurement window device is arranged between a measuring chamber and the lubricant chamber, having a receiving device, wherein at least one of the diode devices comprises a die and a plastic dome. The plastic dome and the die are connected by way of a contact surface, wherein the contact surface is arranged on an upper side of the die.

    Abstract translation: 滚动轴承包括在滚道运行期间滚动的多个滚动体。 为了减少轧制过程中的摩擦,通常为滚动轴承提供润滑剂。 然而,润滑剂的质量由于长时间的应力,老化或热影响而在操作期间劣化,或者在间隙等中损失。本发明所提出的目的是提供一种传感器装置,其可以在 功能可靠的方式。 该目的通过一种传感器装置实现,该传感器装置用于监测润滑剂室中的润滑剂的状态,包括发射台,其中在发射台上配置有多个二极管装置,具有测量窗口装置,其中测量窗口装置 布置在测量室和具有接收装置的润滑剂室之间,其中至少一个二极管装置包括模具和塑料圆顶。 塑料圆顶和模具通过接触表面连接,其中接触表面设置在模具的上侧。

    STRUCTURED ILLUMINATION DEVICE AND STRUCTURED ILLUMINATION MICROSCOPE DEVICE
    25.
    发明申请
    STRUCTURED ILLUMINATION DEVICE AND STRUCTURED ILLUMINATION MICROSCOPE DEVICE 有权
    结构照明装置和结构化照明显微镜装置

    公开(公告)号:US20160131885A1

    公开(公告)日:2016-05-12

    申请号:US14996717

    申请日:2016-01-15

    Abstract: A structured illumination device includes: a diffraction unit that diffracts light beams of a plurality of wavelengths that are emitted simultaneously or sequentially by a light source into a plurality of diffracted beams; and an optical system that forms interference fringes on a surface of a sample using the plurality of diffracted beams diffracted by the diffraction unit, the optical system including a first optical system and a second optical system that focuses the plurality of diffracted beams at positions on or near a pupil plane of the first optical system, and a magnification characteristic dY(λ) of the second optical system satisfying the condition of (fo·nw−afλ/P)≦dY(λ)≦(fo·NA−afλ/P), where a=1 (for M=1, 2) or a=2 (for M=3).

    Abstract translation: 结构化照明装置包括:衍射单元,将由光源同时或顺序地发射的多个波长的光束衍射成多个衍射光束; 以及光学系统,其使用由衍射单元衍射的多个衍射光束在样品的表面上形成干涉条纹,所述光学系统包括第一光学系统和第二光学系统,所述第一光学系统和第二光学系统将所述多个衍射光束聚焦在或 在第一光学系统的光瞳面附近,满足条件(fo·nw-afλ/ P)≦̸ dY(λ)≦̸(fo·NA-afλ)的第二光学系统的放大特性dY(λ) / P),其中a = 1(对于M = 1,2)或a = 2(对于M = 3)。

    MICROPARTICLE MEASURING APPARATUS
    27.
    发明申请
    MICROPARTICLE MEASURING APPARATUS 有权
    微波测量装置

    公开(公告)号:US20150276575A1

    公开(公告)日:2015-10-01

    申请号:US14434404

    申请日:2013-08-30

    Abstract: A microparticle measuring apparatus for highly accurately detecting the position of a microparticle flowing through a flow channel includes a light irradiation unit for irradiating a microparticle flowing through a flow channel with light, and a scattered light detection unit for detecting scattered light from the microparticle, including an objective lens for collecting light from the microparticle, a light splitting element for dividing the scattered light from the light collected by the objective lens, into first and second scattered light, a first scattered light detector for receiving an S-polarized light component, and an astigmatic element disposed between the light splitting element and the first scattered light detector, and making the first scattered light astigmatic. A relationship between a length L from a rear principal point of the objective lens to a front principal point of the astigmatic element, and a focal length f of the astigmatic element satisfies the following formula I. 1.5f≦L≦2.5f  (I)

    Abstract translation: 用于高精度地检测流过流路的微粒的位置的微粒测量装置包括:用于照射流过流路的微粒的光照射单元,以及用于检测来自微粒的散射光的散射光检测单元,包括 用于收集来自微粒的光的物镜,将从物镜收集的光中散射的光分成第一和第二散射光的分光元件,用于接收S偏振光分量的第一散射光检测器,以及 设置在所述分光元件和所述第一散射光检测器之间的散光元件,以及使所述第一散射光散光。 从物镜的后方主点到散光元件的前方主点的长度L与散光元件的焦距f的关系满足下列公式:1.5f≦̸ L≦̸ 2.5f(I)

    ILLUMINATION APPARATUS AND PATTERN INSPECTION APPARATUS
    28.
    发明申请
    ILLUMINATION APPARATUS AND PATTERN INSPECTION APPARATUS 有权
    照明装置和图案检查装置

    公开(公告)号:US20150219568A1

    公开(公告)日:2015-08-06

    申请号:US14607737

    申请日:2015-01-28

    Abstract: An illumination apparatus according to embodiments includes: a light source generating laser light; a rotational phase plate having a plurality of randomly arranged stepped regions, the rotational phase plate transmitting the laser light to give a phase change to the laser light; and an integrator including a plurality of lenses arranged in an array, the laser light transmitted through the rotational phase plate being incident on the integrator, an allowable angle of incidence for the laser light of the lenses being set at a maximum value of or larger than an angle of diffraction of a first order of the laser light at the rotational phase plate.

    Abstract translation: 根据实施例的照明装置包括:产生激光的光源; 旋转相位板,具有多个随机布置的台阶区域,旋转相位板传输激光以对激光进行相位变化; 以及包括以阵列布置的多个透镜的积分器,透过旋转相位板的激光入射到积分器上,将透镜的激光的允许入射角设定为最大值或大于 在旋转相位板处的激光的一阶的衍射角。

    NON-CONTACT METHOD AND SYSTEM FOR INSPECTING A MANUFACTURED PART AT AN INSPECTION STATION HAVING A MEASUREMENT AXIS
    29.
    发明申请
    NON-CONTACT METHOD AND SYSTEM FOR INSPECTING A MANUFACTURED PART AT AN INSPECTION STATION HAVING A MEASUREMENT AXIS 有权
    在具有测量轴的检查站检查制造部件的非接触方法和系统

    公开(公告)号:US20150204798A1

    公开(公告)日:2015-07-23

    申请号:US14629527

    申请日:2015-02-24

    Abstract: A method and system for inspecting a manufactured part at an inspection station are provided. A supported part is rotated about a measurement axis so that the part moves at predetermined angular increments during at least one rotational scan. A backside beam of collimated radiation is directed at and is occluded by the supported part at each of a first plurality of consecutive increments of movement to create a stream of unobstructed portions of the backside beam in rapid succession passing by and not blocked by the supported part. A frontside beam of radiation is directed at and is reflected by the supported part at each of a second plurality of consecutive increments of movement to create a stream of reflected portions of the frontside beam in rapid succession. The streams of reflected and unobstructed portions are detected at the inspection station to obtain electrical signals which are processed.

    Abstract translation: 提供了一种在检查站检查制造部件的方法和系统。 支撑部件围绕测量轴线旋转,使得部件在至少一次旋转扫描期间以预定的角度增量移动。 准直辐射的后侧光束被引导并被第一多个连续运动增量中的每一个被被支撑部分遮挡,以产生快速连续地通过并未被被支撑部分阻挡的背侧光束的无障碍部分的流 。 在第二多个连续运动增量中的每一个上,前方束的辐射被引导并被所支撑的部分反射,从而快速连续地产生前侧梁的反射部分的流。 在检查站检测反射和无障碍部分的流,以获得被处理的电信号。

    CATADIOPTRIC ILLUMINATION SYSTEM FOR METROLOGY
    30.
    发明申请
    CATADIOPTRIC ILLUMINATION SYSTEM FOR METROLOGY 审中-公开
    系统辐射照明系统

    公开(公告)号:US20150116719A1

    公开(公告)日:2015-04-30

    申请号:US14592755

    申请日:2015-01-08

    Abstract: A catadioptric optical system operates in a wide spectral range. In an embodiment, the catadioptric optical system includes a first reflective surface positioned and configured to reflect radiation; a second reflective surface positioned and configured to reflect radiation reflected from the first reflective surface as a collimated beam, the second reflective surface having an aperture to allow transmission of radiation through the second reflective surface; and a channel structure extending from the aperture toward the first reflective surface and having an outlet, between the first reflective surface and the second reflective surface, to supply radiation to the first reflective surface.

    Abstract translation: 反射折射光学系统在宽光谱范围内工作。 在一个实施例中,反折射光学系统包括定位和配置成反射辐射的第一反射表面; 第二反射表面,被定位和配置为反射从第一反射表面反射的辐射作为准直光束,第二反射表面具有孔,以允许辐射透过第二反射表面; 以及从所述孔向所述第一反射表面延伸并且在所述第一反射表面和所述第二反射表面之间具有出口的通道结构,以向所述第一反射表面提供辐射。

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