公开(公告)号：US20130042681A1

公开(公告)日：2013-02-21

申请号：US13586226

申请日：2012-08-15

Applicant: Johannes Classen ,  Jochen Reinmuth ,  Sebastian Guenther ,  Pia Bustian-Todorov

Inventor： Johannes Classen ,  Jochen Reinmuth ,  Sebastian Guenther ,  Pia Bustian-Todorov

IPC: H05K13/00 ,  G01P3/44

CPC classification number: G01C19/5783 ,  B81B2201/025 ,  B81C1/00182 ,  G01P15/0802 ,  G01P2015/0882

Abstract: A method for manufacturing a micromechanical structure, and a micromechanical structure. The micromechanical structure encompasses a first micromechanical functional layer, made of a first material, that comprises a buried conduit having a first end and a second end; a micromechanical sensor structure having a cap in a second micromechanical functional layer that is disposed above the first micromechanical functional layer; an edge region in the second micromechanical functional layer, such that the edge region surrounds the sensor structure and defines an inner side containing the sensor structure and an outer side facing away from the sensor structure; such that the first end is located on the outer side and the second end on the inner side.

Abstract translation: 微机械结构的制造方法和微机械结构。 微机械结构包括由第一材料制成的第一微机械功能层，其包括具有第一端和第二端的埋管; 微机械传感器结构，其具有位于第一微机械功能层上方的第二微机械功能层中的盖; 所述第二微机械功能层中的边缘区域使得所述边缘区域围绕所述传感器结构并限定包含所述传感器结构的内侧和远离所述传感器结构的外侧; 使得第一端位于内侧的外侧和第二端。

公开(公告)号：US08191420B2

公开(公告)日：2012-06-05

申请号：US12806415

申请日：2010-08-12

Applicant: Leslie Bruce Wilner ,  Tom Kwa

Inventor： Leslie Bruce Wilner ,  Tom Kwa

IPC: G01P15/08 ,  G01P15/10 ,  G01P15/12

CPC classification number: G01P15/123 ,  B81B3/0078 ,  B81B2201/0235 ,  G01P1/023 ,  G01P15/08 ,  G01P15/0802 ,  G01P2015/0882

Abstract: A new high G-range damped acceleration sensor is proposed with a proof mass optimized for maximized, bi-directional and symmetrical damping to accommodate acceleration ranges above and beyond several thousand G's. In order to achieve the maximum, bi-directional and symmetrical damping, the high G-range acceleration sensor is designed to have minimum amount of mass in the proof mass while maximizing its surface areas. Such high G-range damped acceleration sensor can be applied to any application in which damping (or suppression of ringing) is desired at quite high frequencies.

Abstract translation: 提出了一种新的高G范围阻尼加速度传感器，其具有针对最大化，双向和对称阻尼优化的检测质量，以适应​​超过数千G的加速度范围。 为了实现最大的双向和对称阻尼，高G范围加速度传感器被设计为在最大化其表面积的同时在检验质量中具有最小量的质量。 这种高G范围阻尼加速度传感器可以应用于在相当高的频率下需要阻尼（或抑制振铃）的任何应用。

公开(公告)号：US20120073371A1

公开(公告)日：2012-03-29

申请号：US13241665

申请日：2011-09-23

Applicant: Horst Theuss

Inventor： Horst Theuss

IPC: G01P15/105 ,  G01P15/125 ,  G01P15/12 ,  G01P15/00

CPC classification number: G01P15/123 ,  G01P15/11 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/082 ,  G01P2015/0865 ,  G01P2015/0882 ,  H01L2224/48091 ,  H01L2224/48092 ,  H01L2224/48227 ,  H01L2924/1461 ,  H01L2924/00014 ,  H01L2924/00

Abstract: In various embodiments, a microelectromechanical system may include a mass element; a substrate; a signal generator; and a fixing structure configured to fix the mass element to the substrate; wherein the mass element is fixed in such a way that, upon an acceleration of the microelectromechanical system, the mass element can be moved relative to the substrate in at least two spatial directions, and wherein a signal is generated by the movement of the mass element by means of the signal generator.

Abstract translation: 在各种实施例中，微机电系统可以包括质量元件; 底物; 信号发生器; 以及固定结构，其构造成将所述质量元件固定到所述基板; 其中所述质量元件被固定为使得在所述微机电系统的加速时，所述质量元件能够在至少两个空间方向上相对于所述衬底移动，并且其中通过所述质量元件的运动产生信号 通过信号发生器。

公开(公告)号：US12000859B2

公开(公告)日：2024-06-04

申请号：US17929872

申请日：2022-09-06

Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES

Inventor： Marc Sansa Perna ,  Théo Miani ,  Thierry Verdot

IPC: G01P15/097 ,  G01P15/08 ,  H03H9/02

CPC classification number: G01P15/097 ,  H03H9/02362 ,  G01P2015/0814 ,  G01P2015/0851 ,  G01P2015/0882

Abstract: A resonant sensor including a support, a proof body suspended from the support and having a resonant frequency ωa, an element that measures a force including at least one resonator of resonant frequency ωrn, the force being applied by the proof body, and a mechanical decoupling structure interposed between the proof body and the resonator. The decoupling structure includes a decoupling mass, a first connecting element between the decoupling mass and the proof body, a second connecting element between the decoupling mass and the resonator, the decoupling structure having a main vibration mode whose resonant frequency ωd is such that ωa

公开(公告)号：US20180252739A1

公开(公告)日：2018-09-06

申请号：US15904500

申请日：2018-02-26

Applicant: Atlantic Inertial Systems Limited

Inventor： Alan MALVERN

IPC: G01P1/00

CPC classification number: G01P1/003 ,  B81B7/0016 ,  B81B7/0058 ,  G01P2015/0882

Abstract: A MEMS sensor package includes a MEMS sensor fixed to a vibration damping mount. The mount includes a silicon substrate defining an outer frame; a moveable support to which the MEMS sensor is fixed; and a vibration damping structure connected between the outer frame and the moveable support to damp movement of the support. The MEMS sensor and vibration damping mount are enclosed by a casing that is backfilled with gas.

公开(公告)号：US20180183404A1

公开(公告)日：2018-06-28

申请号：US15850453

申请日：2017-12-21

Applicant: Commissariat A L'Energie Atomique Et Aux Energies Alternatives ,  Safran Electronics & Defense

Inventor： Guillaume Jourdan ,  Guillaume Lehee

IPC: H03H9/02 ,  H03H9/24 ,  H03H3/007

CPC classification number: H03H9/02448 ,  B81B3/0045 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81B2201/0271 ,  G01P15/003 ,  G01P15/0802 ,  G01P2015/0882 ,  H03H3/0072 ,  H03H9/02338 ,  H03H9/2452 ,  H03H2009/02307

Abstract: Microelectronic structure comprising a mobile mass mechanically linked to a first and to a second mechanical element by first and second mechanical linking device respectively, a polarisation source for the second mechanical linking device. The second mechanical linking means comprises two linking elements and a thermal reservoir placed between the linking elements, where at least one of the linking elements is made of piezoresistive material, where at least one of the first and second linking elements exhibit thermoelasticity properties. The thermal reservoir exhibits a thermal capacity which is different from those of the linking elements. The second linking device and the mobile mass are arranged relative to each other such that displacement of the mobile mass applies a mechanical stress to the second linking means.

公开(公告)号：US20180003503A1

公开(公告)日：2018-01-04

申请号：US15638007

申请日：2017-06-29

Applicant: Infineon Technologies AG

Inventor： Marco Haubold

IPC: G01C19/5726 ,  G01P15/125 ,  G01P1/00 ,  B81B7/02 ,  H05K5/03 ,  B81B3/00 ,  G01P15/08

CPC classification number: G01C19/5726 ,  B81B3/0018 ,  B81B7/0016 ,  B81B7/02 ,  B81B2201/0235 ,  B81B2201/0264 ,  G01C19/5783 ,  G01D11/10 ,  G01L19/146 ,  G01P1/003 ,  G01P15/125 ,  G01P2015/0882 ,  H05K5/03

Abstract: A device comprises a substrate, a spring structure, and a first sensor. The first sensor is resiliently coupled with the substrate via the spring structure. The spring structure is configured to provide damping of the first sensor with respect to the substrate. The device also comprises a second sensor configured to sense a deflection of the spring structure.

公开(公告)号：US09834432B2

公开(公告)日：2017-12-05

申请号：US14260539

申请日：2014-04-24

Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENE ALT

Inventor： Yannick Deimerly ,  Guillaume Jourdan ,  Patrice Rey

IPC: B81B7/00 ,  G01P15/08 ,  G01C19/5726

CPC classification number: B81B7/0016 ,  B81B7/008 ,  B81B2201/025 ,  G01C19/5726 ,  G01P2015/0882 ,  Y10T29/49082

Abstract: Inertial sensor comprising a fixed part and at least one mass suspended from the fixed part and means of damping the displacement of the part suspended from the fixed part, said damping means being electromechanical damping means comprising at least one DC power supply source, one electrical resistor and one variable capacitor in series, said variable capacitor being formed partly by the suspended part and partly by the fixed part such that displacement of the suspended part causes a variation of the capacitance of the variable capacitor.

公开(公告)号：US09804188B2

公开(公告)日：2017-10-31

申请号：US14763020

申请日：2013-11-13

Applicant: Hitachi Automotive Systems, Ltd.

Inventor： Heewon Jeong ,  Kiyoko Yamanaka ,  Masahide Hayashi

IPC: G01P15/097 ,  G01P15/08 ,  G01P15/125 ,  G01C19/5747

CPC classification number: G01P15/097 ,  G01C19/5747 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0882

Abstract: An inertial sensor not susceptible to temperature change and vibration disturbance in an implementation environment of the inertial sensor is provided. In the present invention, for example, as illustrated in FIG. 9, an extending portion EXU is provided so as to connect to a fixing portion FU3, this extending portion EXU and a third region P3 which configures part of a mass body MS are connected via a support beam BM3 and a support beam BM4, and the support beam BM3 and the support beam BM4 are disposed oppositely with respect to a virtual line IL1. With this, natural frequency of an unwanted mode due to rotation and torsion of the mass body MS can be shifted to a high frequency band.

公开(公告)号：US20170261528A1

公开(公告)日：2017-09-14

申请号：US15454249

申请日：2017-03-09

Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES

Inventor： Bruno FAIN ,  Aboubacar Chaehoi ,  Philippe Robert

IPC: G01P1/00 ,  G01P15/12

CPC classification number: G01P1/003 ,  G01P15/123 ,  G01P2015/0817 ,  G01P2015/0882

Abstract: Linear accelerometer comprising a fixed part, a rotationally moving part in the plane of the accelerometer around an axis of rotation orthogonal to the plane of the accelerometer, the moving part comprising a centre of gravity distinct from the point of intersection of the axis of rotation and the plane of the accelerometer, means forming pivot link between the moving part and the fixed part, means for detecting the displacement of the moving part with respect to the fixed part, means for viscous damping the displacement of the moving part in said plane, said viscous damping means comprising interdigitated combs, at least one first comb on the moving part and at least one second comb on the fixed part (2), the first comb and the second comb being interdigitated.