公开(公告)号：US5454021A

公开(公告)日：1995-09-26

申请号：US149351

申请日：1993-11-09

Applicant: Kunio Nakajima ,  Shuzo Sudo

Inventor： Kunio Nakajima ,  Shuzo Sudo

IPC: C22C5/04 ,  C23C14/06 ,  G21K1/06

CPC classification number: G21K1/06 ,  G21K2201/06

Abstract: An x-ray mirror material of high reflectance with a surface roughness which is very small and a high film density, the material being a Pt alloy film provided as a mirror surface for reflecting x-ray radiation. The composition of the mirror material is expressed by the general formula: Pt.sub.1-x M.sub.x. This material is deposited on a substrate surface which has been polished to a level form, where M is at least one substance selected from Mo, Ru, Rh, Pd, Ta, W, and Au, and x satisfies the formula: 0.005.ltoreq..times..ltoreq.0.10.

Abstract translation: 具有非常小的表面粗糙度和高膜密度的高反射率的x射线镜材料，该材料是作为用于反射x射线辐射的镜面的Pt合金膜。 镜面材料的组成由通式Pt1-xMx表示。 该材料沉积在已经被抛光到水平形式的基底表面上，其中M是选自Mo，Ru，Rh，Pd，Ta，W和Au中的至少一种物质，并且x满足下式： = x

公开(公告)号：US09234856B2

公开(公告)日：2016-01-12

申请号：US13809335

申请日：2011-08-01

Applicant: Taihei Mukaide

Inventor： Taihei Mukaide

IPC: G01N23/04 ,  G01N23/20 ,  G01N23/083 ,  G21K1/06

CPC classification number: G01N23/20 ,  G01N23/04 ,  G01N23/083 ,  G21K1/06 ,  G21K2201/06 ,  G21K2201/067 ,  G21K2207/005

Abstract: An apparatus for deriving X-ray absorbing and phase information comprises; a splitting element for splitting spatially an X-ray, a detector for detecting intensities of the X-rays transmitted through an object, the intensity of the X-rays changing according to X-ray phase and also position changes, and an calculating unit for calculating an X-ray transmittance image, and an X-ray differential phase contrast or phase sift contrast image as the phase information. The X-ray is split into two or more X-rays having different widths, and emitted onto the detector unit. And, the calculating unit calculates the X-ray absorbing and phase information based on a difference, between the two or more X-rays, in correlation between the changing of the phase of the X-ray and the changing the intensity of the X-ray in the detector unit.

Abstract translation: 用于导出X射线吸收和相位信息的装置包括： 用于在空间上分割X射线的分离元件，用于检测透过物体的X射线的强度的检测器，X射线相位变化的X射线的强度以及位置变化，以及用于 计算X射线透射率图像，以及X射线差分相位对比度或相移筛选图像作为相位信息。 X射线被分成具有不同宽度的两个或更多个X射线，并被发射到检测器单元上。 并且，计算单元根据X射线的相位的变化与X射线的强度的变化的关系，基于两个以上的X射线之间的差异来计算X射线吸收和相位信息， 射线在检测器单元。

公开(公告)号：US09153351B2

公开(公告)日：2015-10-06

申请号：US13643407

申请日：2011-04-26

Applicant: Olivier Tache ,  Olivier Spalla

Inventor： Olivier Tache ,  Olivier Spalla

IPC: G21K1/02 ,  G21K1/06

CPC classification number: G21K1/02 ,  G21K1/025 ,  G21K1/06 ,  G21K2201/06 ,  G21K2201/062 ,  G21K2201/067

Abstract: A collimation device for an X-ray beam, an optical device for analyzing a specimen by the scattering of an X-ray beam, and a collimator for an X-ray beam. The collimation device includes an enclosure configured to be under a vacuum or a controlled atmosphere, the enclosure including an inlet and an outlet for the X-ray beam and at least one plate made of a material having a diffracting periodic structure, the plate including two main faces and at least one flared aperture between the faces.

Abstract translation: 用于X射线束的准直装置，用于通过X射线束的散射来分析样本的光学装置和用于X射线束的准直器。 准直装置包括被配置为处于真空或受控气氛的外壳，外壳包括用于X射线束的入口和出口以及由具有衍射周期性结构的材料制成的至少一个板，该板包括两个 主面和至少一个面之间的喇叭孔。

公开(公告)号：US09046466B2

公开(公告)日：2015-06-02

申请号：US13641966

申请日：2011-05-20

Applicant: Chidane Ouchi

Inventor： Chidane Ouchi

IPC: G03H5/00 ,  G01N23/20 ,  G01B9/021 ,  G03H1/10 ,  G01N23/04 ,  G01J9/02 ,  A61B6/00 ,  G02B5/18 ,  G01J9/00 ,  G21K1/06 ,  G01B11/25

CPC classification number: G01N23/04 ,  A61B6/4291 ,  A61B6/484 ,  G01B11/2527 ,  G01J9/00 ,  G01J9/0215 ,  G01N2223/1016 ,  G01N2223/32 ,  G02B5/18 ,  G02B5/1814 ,  G02B5/1838 ,  G02B5/1842 ,  G02B5/1871 ,  G02B5/189 ,  G21K1/06 ,  G21K2201/06 ,  G21K2207/005

Abstract: Provided is an X-ray imaging apparatus having simple configuration and obtaining differential phase contrast images in two directions crossing each other without rotating the diffraction grating and the masking grating. The apparatus including: a diffraction grating diffracting X-rays; a masking grating masking portions rays and transmitting portions are two-dimensionally arranged to partially mask bright zones of the interference pattern; a moving device changing the relative position between the interference pattern and the masking grating; a detector detecting the intensity distribution of the X-rays transmitted through the masking grating; and a calculator calculating a differential phase contrast image or a phase contrast image of a subject, the calculator being configured to calculate the differential phase contrast image or the phase contrast image in each of two mutually crossing directions on the basis of results of detection performed a plurality of times by the detector.

Abstract translation: 本发明提供一种具有简单结构的X射线成像设备，并且在不旋转衍射光栅和掩蔽光栅的情况下彼此交叉的两个方向获得差分相位差图像。 该装置包括衍射光栅衍射X射线; 屏蔽光栅遮蔽部分光线和透射部分被二维布置以部分地掩蔽干涉图案的亮区; 移动装置改变干涉图案和掩蔽光栅之间的相对位置; 检测器，其检测透过所述掩蔽光栅的X射线的强度分布; 以及计算器，其计算对象的差分相位差图像或相位对比图像，所述计算器被配置为基于检测结果a计算两个相互交叉方向中的每一个中的差分相位对比图像或相位对比图像 多次由检测器。

公开(公告)号：US20150028223A1

公开(公告)日：2015-01-29

申请号：US14385802

申请日：2013-03-20

Applicant: MAPPER LITHOGRAPHY IP B.V.

Inventor： Pieter Kruit ,  Marc Smits

IPC: H01J37/317 ,  F15D1/02

CPC classification number: H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  F15D1/025 ,  G03F7/70925 ,  G21K2201/06 ,  H01J9/38 ,  H01J37/3007 ,  H01J37/3177 ,  H01J37/32862 ,  H01J2237/006 ,  H01J2237/022 ,  H01J2237/327 ,  Y10T137/2082 ,  Y10T137/87571

Abstract: The invention relates to an arrangement for transporting radicals. The arrangement includes a plasma generator and a guiding body. The plasma generator includes a chamber (2) in which a plasma may be formed. The chamber has an inlet (5) for receiving an input gas, and one or more outlets (6) for removal of at least one of the plasma and radicals created therein. The guiding body is hollow and is arranged for guiding radicals formed in the plasma towards an area or volume at which contaminant deposition is to be removed. The chamber inlet is coupled to a pressure device (40) for providing a pulsed pressure into the chamber so as to create a flow in the guiding body.

公开(公告)号：US20130064354A1

公开(公告)日：2013-03-14

申请号：US13643407

申请日：2011-04-26

Applicant: Olivier Tache ,  Olivier Spalla

Inventor： Olivier Tache ,  Olivier Spalla

IPC: G21K1/02

CPC classification number: G21K1/02 ,  G21K1/025 ,  G21K1/06 ,  G21K2201/06 ,  G21K2201/062 ,  G21K2201/067

Abstract: A collimation device for an X-ray beam, an optical device for analyzing a specimen by the scattering of an X-ray beam, and a collimator for an X-ray beam. The collimation device includes an enclosure configured to be under a vacuum or a controlled atmosphere, the enclosure including an inlet and an outlet for the X-ray beam and at least one plate made of a material having a diffracting periodic structure, the plate including two main faces and at least one flared aperture between the faces.

Abstract translation: 用于X射线束的准直装置，用于通过X射线束的散射来分析样本的光学装置和用于X射线束的准直器。 准直装置包括被配置为处于真空或受控气氛的外壳，外壳包括用于X射线束的入口和出口以及由具有衍射周期性结构的材料制成的至少一个板，该板包括两个 主面和至少一个面之间的喇叭孔。

公开(公告)号：US08317929B2

公开(公告)日：2012-11-27

申请号：US11367693

申请日：2006-03-06

Applicant: Tatyana Victorovna Rakhimova ,  Vadim Yevgenyevich Banine ,  Vladimir Vitalevich Ivanov ,  Konstantin Nikolaevitch Koshelev ,  Johannes Hubertus Johannes Moors ,  Aleksander Sergeevich Kovalev ,  Dmitriy Victorovich Lopaev

Inventor： Tatyana Victorovna Rakhimova ,  Vadim Yevgenyevich Banine ,  Vladimir Vitalevich Ivanov ,  Konstantin Nikolaevitch Koshelev ,  Johannes Hubertus Johannes Moors ,  Aleksander Sergeevich Kovalev ,  Dmitriy Victorovich Lopaev

IPC: B08B3/12 ,  B08B6/00 ,  B08B7/00 ,  B08B7/02 ,  C25F1/00 ,  C25F3/30 ,  C25F5/00

CPC classification number: G03F7/70925 ,  G03F7/70933 ,  G21K2201/06

Abstract: A method for cleaning elements of a lithographic apparatus, for example optical elements such as a collector mirror, includes providing a gas containing nitrogen; generating nitrogen radicals from at least part of the gas, thereby forming a radical containing gas; and providing at least part of the radical containing gas to the one or more elements of the apparatus. A lithographic apparatus includes a source and an optical element, and an electrical discharge generator arranged to generate a radio frequency discharge.

Abstract translation: 用于清洁光刻设备的元件的方法，例如诸如集光镜的光学元件，包括提供含氮的气体; 从至少部分气体产生氮自由基，从而形成含有自由基的气体; 以及将至少部分含自由基的气体提供给所述装置的一个或多个元件。 光刻设备包括源和光学元件，以及布置成产生射频放电的放电发生器。

公开(公告)号：US20120236985A1

公开(公告)日：2012-09-20

申请号：US13514061

申请日：2010-12-03

Applicant: Sebastian Schusser ,  Gereon Vogtmeier

Inventor： Sebastian Schusser ,  Gereon Vogtmeier

IPC: G21K1/06 ,  A61B6/00 ,  A61B6/03 ,  G01N23/04

CPC classification number: G21K1/06 ,  A61B6/484 ,  G21K2201/06 ,  G21K2207/005

Abstract: The present invention relates to X-rayimage acquisition technology in general. Employing phase-contrast imaging for X-rayimage acquisition may significantly enhance the visibility of structures in images acquired. However, phase-contrast information may only be obtainable in a small detector region with subsequent image acquisitions requiring individual phase stepping states to allow reconstruction of an X-ray image. Accordingly, a grating arrangement for phase-contrast imaging is provided which may allow on the fly phase stepping during a field of view scan. According to the present invention a grating arrangement (1) for phase-contrast imaging is provided, comprising a first grating element (8) and a second grating element (10). Each of the first grating element (8) and the second grating element (10) comprises a trench structure. The trench structure comprises at least one trench region (9) and at least one barrier region (3). The at least one trench region (9) and the at least one barrier region (3) are at least locally arranged in parallel. The first grating element (8) and the second grating element (10) are arranged such that the trench structure of the first grating element (8) and the trench structure of the second grating element (10) are non-parallel comprising an angle α.

Abstract translation: 本发明一般涉及X射线图像采集技术。 采用X射线图像采集的相位对比成像可以显着增强获得的图像中结构的可视性。 然而，相位对比度信息只能在小的检测器区域中获得，随后的图像采集需要各个相位步进状态以允许重建X射线图像。 因此，提供了用于相位对比成像的光栅装置，其可以在视野扫描期间在飞行阶段上进行步进。 根据本发明，提供了一种用于相位对比成像的光栅装置（1），包括第一光栅元件（8）和第二光栅元件（10）。 第一光栅元件（8）和第二光栅元件（10）中的每一个包括沟槽结构。 沟槽结构包括至少一个沟槽区（9）和至少一个势垒区（3）。 至少一个沟槽区域（9）和至少一个阻挡区域（3）至少局部地平行布置。 第一光栅元件（8）和第二光栅元件（10）被布置成使得第一光栅元件（8）的沟槽结构和第二光栅元件（10）的沟槽结构不平行，包括角度α 。

公开(公告)号：US20120162627A1

公开(公告)日：2012-06-28

申请号：US13370829

申请日：2012-02-10

Applicant: Damian Fiolka ,  Ralf Stuetzle

Inventor： Damian Fiolka ,  Ralf Stuetzle

IPC: G03B27/72 ,  G02B5/30 ,  G02B5/09

CPC classification number: G03F7/70233 ,  G02B27/0905 ,  G02B27/0977 ,  G03F7/70075 ,  G03F7/70116 ,  G03F7/70175 ,  G03F7/702 ,  G03F7/70566 ,  G21K1/06 ,  G21K1/16 ,  G21K2201/06 ,  G21K2201/064 ,  G21K2201/067

Abstract: An illumination optical unit includes a collector mirror which produces a polarization distribution that is applied to the first faceted optical element during the operation of the illumination optical unit. There are at least two first facet elements to which radiation having a differing polarization is applied. The first faceted optical element has at least one first state in which the normal vectors of the reflective surfaces of the first facet elements are selected so that a first predetermined polarization distribution results at the location of the object field during the operation of the illumination optical unit.

Abstract translation: 照明光学单元包括集光镜，其在照明光学单元的操作期间产生施加到第一刻面光学元件的偏振分布。 存在施加具有不同极化的辐射的至少两个第一小面元件。 第一刻面光学元件具有至少一个第一状态，其中第一面元件的反射表面的法向矢量被选择为使得在照明光学单元的操作期间在物场的位置处产生第一预定偏振分布 。

公开(公告)号：US20120050704A1

公开(公告)日：2012-03-01

申请号：US12807165

申请日：2010-08-30

Applicant: Richard A. Levesque ,  Natale M. Ceglio ,  Giovanni Nocerino ,  Fabio Zocchi

Inventor： Richard A. Levesque ,  Natale M. Ceglio ,  Giovanni Nocerino ,  Fabio Zocchi

IPC: G03B27/42 ,  H05G2/00

CPC classification number: G21K1/067 ,  G03F7/70033 ,  G03F7/70166 ,  G21K2201/06 ,  G21K2201/064 ,  G21K2201/065 ,  G21K2201/067 ,  H05G2/003 ,  H05G2/006 ,  H05G2/008

Abstract: A source-collector module (SOCOMO) for generating a laser-produced plasma (LPP) that emits EUV radiation, and a grazing-incidence collector (GIC) mirror arranged relative to the LPP and having an input end and an output end. The LPP is formed using an LPP target system having a light source portion and a target portion, wherein a pulsed laser beam from the light source portion irradiates Xenon liquid in the target portion. The GIC mirror is arranged relative to the LPP to receive the EUV radiation at its input end and focus the received EUV radiation at an intermediate focus adjacent the output end. A radiation collection enhancement device having at least one funnel element may be used to increase the amount of EUV radiation provided to the intermediate focus and/or directed to a downstream illuminator. An EUV lithography system that utilizes the SOCOMO is also disclosed.