Method of fabricating composite field emission source
    24.
    发明授权
    Method of fabricating composite field emission source 有权
    复合场致发射源的制作方法

    公开(公告)号:US09005407B2

    公开(公告)日:2015-04-14

    申请号:US13317955

    申请日:2011-10-31

    Abstract: A method of fabricating a composite field emission source is provided. A first stage of film-forming process is performed by using RF magnetron sputtering, so as to form a nano structure film on a substrate, in which the nano structure film is a petal-shaped structure composed of a plurality of nano graphite walls. Afterward, a second stage of film-forming process is performed for increasing carbon accumulation amount on the nano structure film and thereby growing a plurality of nano coral-shaped structures on the petal-shaped structure. Therefore, the composite field emission source with high strength and nano coral-shaped structures can be obtained, whereby improving the effect and life of electric field emission.

    Abstract translation: 提供了一种制造复合场致发射源的方法。 通过使用RF磁控溅射进行成膜处理的第一阶段,以在纳米结构膜为由多个纳米石墨壁构成的花瓣状结构的基板上形成纳米结构膜。 之后,进行第二阶段的成膜过程,以增加纳米结构膜上的碳积累量,从而在花瓣状结构上生长多个纳米珊瑚状结构。 因此,可以获得具有高强度和纳米珊瑚结构的复合场发射源,从而提高电场发射的效果和寿命。

    FIELD EMISSION DEVICES AND METHODS OF MANUFACTURING EMITTERS THEREOF
    25.
    发明申请
    FIELD EMISSION DEVICES AND METHODS OF MANUFACTURING EMITTERS THEREOF 有权
    现场排放装置及其制造方法

    公开(公告)号:US20150060758A1

    公开(公告)日:2015-03-05

    申请号:US14474213

    申请日:2014-09-01

    Abstract: A field emission device may comprise: an emitter comprising a cathode electrode and an electron emission source supported by the cathode electrode; an insulating spacer around the emitter, the insulating spacer forming an opening that is a path of electrons emitted from the electron emission source; and/or a gate electrode around the opening. The electron emission source may comprise a plurality of graphene thin films vertically supported in the cathode electrode toward the opening.

    Abstract translation: 场发射器件可以包括:发射器,包括阴极电极和由阴极电极支撑的电子发射源; 围绕发射极的绝缘间隔物,绝缘间隔物形成作为从电子发射源发射的电子的路径的开口; 和/或围绕开口的栅电极。 电子发射源可以包括在阴极中朝向开口垂直支撑的多个石墨烯薄膜。

    Method of fabricating composite field emission source
    28.
    发明申请
    Method of fabricating composite field emission source 审中-公开
    复合场致发射源的制作方法

    公开(公告)号:US20120090986A1

    公开(公告)日:2012-04-19

    申请号:US13317955

    申请日:2011-10-31

    Abstract: A method of fabricating a composite field emission source is provided. A first stage of film-forming process is performed by using RF magnetron sputtering, so as to form a nano structure film on a substrate, in which the nano structure film is a petal-like structure composed of a plurality of nano graphite walls. Afterward, a second stage of film-forming process is performed for increasing carbon accumulation amount on the nano structure film and thereby growing a plurality of nano coral-like structures on the petal-like structure. Therefore, the composite field emission source with high strength and nano coral-like structures can be obtained, whereby improving the effect and life of electric field emission.

    Abstract translation: 提供了一种制造复合场致发射源的方法。 通过使用RF磁控管溅射进行成膜处理的第一阶段,以在纳米结构膜为由多个纳米石墨壁构成的花瓣状结构的基板上形成纳米结构膜。 之后,进行第二阶段的成膜过程,以增加纳米结构膜上的碳积累量,从而在花瓣状结构上生长多个纳米珊瑚状结构。 因此,可以获得具有高强度和纳米珊瑚状结构的复合场发射源,从而提高电场发射的效果和寿命。

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