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    GAS FIELD IONIZATION ION SOURCE AND ION BEAM DEVICE
    21.
    发明申请
    GAS FIELD IONIZATION ION SOURCE AND ION BEAM DEVICE 有权
    气体离子源和离子束装置

    公开(公告)号：US20120199758A1

    公开(公告)日：2012-08-09

    申请号：US13501561

    申请日：2010-10-12

    Applicant: Yoshimi Kawanami ,  Tohru Ishitani

    Inventor： Yoshimi Kawanami ,  Tohru Ishitani

    IPC: H01J3/14 ,  H01T23/00

    CPC classification number: H01J37/08 ,  H01J27/26 ,  H01J37/3056 ,  H01J2237/002 ,  H01J2237/006 ,  H01J2237/0807

    Abstract: Provided is a gas field ionization ion source capable of emitting heavy ions with high brightness which are suitable for processing a sample. The gas field ionization ion source according to the present invention includes a temperature controller individually controlling the temperature of the tip end of an emitter electrode (1) and the temperature of a gas injection port part (3) of a gas supply unit.

    Abstract translation: 提供能够发出适合于处理样品的高亮度的重离子的气体电离离子源。 根据本发明的气体电离离子源包括温度控制器，其分别控制发射极电极（1）的末端的温度和气体供给单元的气体注入口部分（3）的温度。

    GAS FIELD IONIZATION ION SOURCE APPARATUS AND SCANNING CHARGED PARTICLE MICROSCOPE EQUIPPED WITH SAME
    22.
    发明申请
    GAS FIELD IONIZATION ION SOURCE APPARATUS AND SCANNING CHARGED PARTICLE MICROSCOPE EQUIPPED WITH SAME 审中-公开
    气体放电离子源装置和扫描带有粒子的微粒显微镜

    公开(公告)号：US20120132802A1

    公开(公告)日：2012-05-31

    申请号：US13381638

    申请日：2010-06-08

    Applicant: Noriaki Arai ,  Tohru Ishitani

    Inventor： Noriaki Arai ,  Tohru Ishitani

    IPC: H01J27/02 ,  H01J37/26

    CPC classification number: H01J27/26 ,  H01J37/023 ,  H01J37/08 ,  H01J37/28 ,  H01J2237/006 ,  H01J2237/061 ,  H01J2237/0807

    Abstract: A gas field ionization ion source apparatus is provided which is small-sized, has high-performance, and is capable of performing a tilt adjustment in a state in which an emitter tip position is maintained approximately constant. An emitter (1) is surrounded by a chamber wall (4) of an emitter chamber and ions are emitted from the tip of the emitter (1). A gas that is an ion material is introduced into the emitter chamber, through an extraction electrode (3) to which a high voltage is applied and a tube (15). The emitter (1) is cooled by a freezing means (10) through a metallic net (11) and an emitter base (12). The emitter base (12) is fixed to a movable portion (13a) of a tilting means (13). The movable portion (13a) is connected to a non-movable portion (13b) through a sliding surface (14). The sliding surface (14) forms a part of a cylindrical surface whose central axis is an axis that passes through the tip of the emitter (1) and is orthogonal to an optical axis. If the surface forms such a shape, and the amount of sliding of the sliding surface (14) is controlled, control on the tilt of the emitter (1) can be performed without moving the tip of the emitter (1).

    Abstract translation: 提供了一种小型化，高性能的气体电离离子源装置，并且能够在发射极尖端位置保持大致恒定的状态下进行倾斜调整。 发射器（1）被发射器室的室壁（4）包围，离子从发射器（1）的尖端发射。 作为离子材料的气体通过施加高电压的引出电极（3）和管（15）引入发射室。 发射器（1）由冷冻装置（10）通过金属网（11）和发射极基座（12）冷却。 发射极基座（12）固定在倾斜装置（13）的可动部分（13a）上。 可移动部分（13a）通过滑动表面（14）连接到不可移动部分（13b）。 滑动表面（14）形成圆柱形表面的一部分，其中心轴是穿过发射器（1）的尖端并与光轴正交的轴线。 如果表面形成这样的形状，并且控制滑动表面（14）的滑动量，则可以在不移动发射器（1）的尖端的情况下执行对发射器（1）的倾斜的控制。

    ION MICROSCOPE
    23.
    发明申请
    ION MICROSCOPE 有权
    离子显微镜

    公开(公告)号：US20120097863A1

    公开(公告)日：2012-04-26

    申请号：US13381623

    申请日：2010-06-04

    Applicant: Norihide Saho ,  Hiroyuki Tanaka ,  Noriaki Arai ,  Hiroyasu Shichi ,  Yoichi Ose

    Inventor： Norihide Saho ,  Hiroyuki Tanaka ,  Noriaki Arai ,  Hiroyasu Shichi ,  Yoichi Ose

    IPC: H01J37/26 ,  H01J37/20

    CPC classification number: H01J37/08 ,  H01J37/28 ,  H01J2237/002 ,  H01J2237/0216 ,  H01J2237/061 ,  H01J2237/0807

    Abstract: Provided are a large-current and highly stable gas field ionization ion source, and a high-resolution ion microscope with a large focal depth.The present invention relates to an ion microscope provided with a gas field ionization ion source, in which disposed are a refrigerator for cooling the gas field ionization ion source independent of the main body of the ion microscope, and a refrigerant circulation circuit cooling mechanism for circulating a refrigerant between the gas field ionization ion source and the refrigerator. Consequently it is possible to reduce the mechanical vibration of the refrigerator, which propagates to the gas field ionization ion source, and to achieve both the improvement of the brightness of the ion source and the improvement of ion beam focusing performance.

    Abstract translation: 提供大电流和高度稳定的气田电离离子源，以及具有大焦深的高分辨率离子显微镜。 本发明涉及一种具有气田电离离子源的离子显微镜，其中设置有用于冷却与离子显微镜主体无关的气田电离离子源的制冷机，以及用于循环的制冷剂循环回路冷却机构 气体离子源和冰箱之间的制冷剂。 因此，可以减小传播到气田电离离子源的冰箱的机械振动，并且实现离子源的亮度的提高和离子束聚焦性能的提高。

    ION BEAM DEVICE
    27.
    发明申请
    ION BEAM DEVICE 有权
    离子束装置

    公开(公告)号：US20110266465A1

    公开(公告)日：2011-11-03

    申请号：US13144620

    申请日：2010-01-08

    Applicant: Hiroyasu Shichi ,  Shinichi Matsubara ,  Norihide Saho ,  Noriaki Arai ,  Tohru Ishitani

    Inventor： Hiroyasu Shichi ,  Shinichi Matsubara ,  Norihide Saho ,  Noriaki Arai ,  Tohru Ishitani

    IPC: G01N23/00

    CPC classification number: H01J37/08 ,  H01J27/26 ,  H01J37/15 ,  H01J2237/0216 ,  H01J2237/0807 ,  H01J2237/28

    Abstract: Provided is an ion beam device provided with a gas electric field ionization ion source which can prevent an emitter tip from vibrating in a non-contact manner. The gas electric field ionization ion source is comprised of an emitter tip (21) for generating ions; an emitter base mount (64) for supporting the emitter tip; an ionizing chamber which has an extraction electrode (24) opposed to the emitter tip and which is configured so as to surround the emitter tip (21); and a gas supply tube (25) for supplying gas to the vicinity of the emitter tip. The emitter base mount and a vacuum container magnetically interact with each other.

    Abstract translation: 提供了一种具有气体电离电离离子源的离子束装置，其能够防止发射极尖端以非接触的方式振动。 气体电场离子源由用于产生离子的发射极尖端（21）组成; 发射极底座（64），用于支撑发射器尖端; 电离室具有与发射极尖端相对的引出电极（24），其构造为围绕发射极尖端（21）; 以及用于将气体供给到发射极尖端附近的气体供给管（25）。 发射极基座和真空容器彼此磁性相互作用。

    SCANNING CHARGED PARTICLE BEAMS
    28.
    发明申请
    SCANNING CHARGED PARTICLE BEAMS 有权
    扫描充电粒子

    公开(公告)号：US20100294930A1

    公开(公告)日：2010-11-25

    申请号：US12744152

    申请日：2008-12-12

    Applicant: Dirk Preikszas ,  Michael Steigerwald ,  Joerg Ackermann

    Inventor： Dirk Preikszas ,  Michael Steigerwald ,  Joerg Ackermann

    IPC: G21K5/00 ,  G01N23/00

    CPC classification number: H01J37/026 ,  H01J37/28 ,  H01J37/3026 ,  H01J2237/004 ,  H01J2237/022 ,  H01J2237/0807 ,  H01J2237/30488

    Abstract: Methods are disclosed that include exposing, in direct succession, portions of a surface of a sample to a charged particle beam, the portions of the surface of the sample forming a row in a first direction, the charged particle beam having an average spot size fat the surface of the sample, each portion being spaced from its neighboring portions by a distance of at least din the first direction, and a ratio d/f being 2 or more.

    Abstract translation: 公开的方法包括直接连续地将样品的表面的一部分暴露于带电粒子束，样品表面的部分在第一方向上形成一行，带电粒子束具有平均斑点大小脂肪 样品的表面，每个部分与其相邻部分间隔至少在第一方向上的距离，并且比率d / f为2或更大。

    FOCUSED ION BEAM APPARATUS
    29.
    发明申请
    FOCUSED ION BEAM APPARATUS 有权
    聚焦离子束设备

    公开(公告)号：US20100219339A1

    公开(公告)日：2010-09-02

    申请号：US12712863

    申请日：2010-02-25

    Applicant: Takashi Ogawa ,  Kenichi Nishinaka ,  Yoshihiro Koyama

    Inventor： Takashi Ogawa ,  Kenichi Nishinaka ,  Yoshihiro Koyama

    IPC: G01N23/225 ,  H01J3/14

    CPC classification number: H01J37/08 ,  H01J37/28 ,  H01J2237/0807 ,  H01J2237/31749

    Abstract: The crystal structure of the emitter can be accurately grasped from a FIM image without being influenced by disturbances, such as contamination, and even if the rearrangement of atoms has been performed, whether or not the crystal structure of the emitter has returned to the original state can also be accurately determined. There is a provided a focused ion beam apparatus including an emitter 10, a gas source 11 which supplies gas G2, a cooling unit 12 which cools the emitter, a heating unit 13 which heats the tip of the emitter, an extraction power source unit 15 which applies an extraction voltage to ionize the gas into gas ions at the tip of the emitter, and then extract the gas ions, a beam optical system 16 which makes the extracted gas ions into a focused ion beam (FIB), and then radiates the focused ion beam onto a sample S, an image acquiring mechanism 17 which acquires a FIM image of the tip of the emitter, and a control unit 7 having a display unit and a storage unit 7b. A guide which displays an ideal crystal structure of the tip of the emitter is stored in advance in the storage unit. The control unit is enabled to display the guide in the state of overlapping the acquired FIM image on the display unit.

    Abstract translation: 可以从FIM图像中精确地掌握发射体的晶体结构，而不受诸如污染等干扰的影响，即使原子的重排已经被执行，发射体的晶体结构是否已经恢复到初始状态 也可以准确确定。 提供了一种聚焦离子束装置，其包括发射极10，供应气体G2的气体源11，冷却发射极的冷却单元12，加热发射极顶端的加热单元13，提取电源单元15 其施加提取电压以将气体离子化为发射体顶端的气体离子，然后提取气体离子，使得提取的气体离子成为聚焦离子束（FIB）的束光学系统16，然后辐射 聚焦离子束到样本S上，获取发射器的尖端的FIM图像的图像获取机构17以及具有显示单元和存储单元7b的控制单元7。 将显示发射器顶端的理想晶体结构的引导件预先存储在存储单元中。 控制单元能够在显示单元上与获取的FIM图像重叠的状态下显示引导件。

    Particle-optical apparatus equipped with a gas ion source
    30.
    发明授权
    Particle-optical apparatus equipped with a gas ion source 有权
    配备气体离子源的粒子光学仪器

    公开(公告)号：US07772564B2

    公开(公告)日：2010-08-10

    申请号：US11709303

    申请日：2007-02-21

    Applicant: Pieter Kruit ,  Vipin Nagnath Tondare

    Inventor： Pieter Kruit ,  Vipin Nagnath Tondare

    IPC: H01J27/02

    CPC classification number: H01J27/205 ,  H01J37/08 ,  H01J2237/0807 ,  H01J2237/082

    Abstract: The invention relates to an electron impact gas ion with high brightness and low energy spread. This high brightness is achieved by injecting electrons in a small ionization volume (from less than 1 μm to several tens of micrometers in size) from one side and extracting ions from the other. The electrons injected are produced by a high brightness electron source, such as a field emitter or a Schottky emitter.In one embodiment of the invention the required high electron density in the ionization volume is realized by placing a field emitter close to the ionization volume (e.g. 30 μm), without optics between source and ionization volume.In another embodiment of the invention the source is imaged onto a MEMS structure. Two small diaphragms of e.g. 50 nm are spaced e.g. 1 μm apart. The electrons enter through one of these diaphragms, while the ions leave the ionization volume through the other one. The two diaphragms are manufactured by e.g. drilling with an ion beam, resulting in two small and well aligned diaphragms.

    Abstract translation: 本发明涉及具有高亮度和低能量扩散的电子冲击气体离子。 通过从一侧注入小电离体积（小于1μm至数十微米）的电子并从另一侧提取离子来实现该高亮度。 注入的电子通过高亮度电子源产生，例如场发射体或肖特基发射极。 在本发明的一个实施方案中，电离体积中所需的高电子密度通过将场致发射体靠近离子化体积（例如30μm）放置，而不需要源和电离体积之间的光学元件。 在本发明的另一个实施例中，源被成像到MEMS结构上。 两个小的隔膜。 50nm间隔开。 相距1μm。 电子通过这些隔膜中的一个进入，而离子离开离子化体积通过另一个。 两个隔膜由例如， 用离子束进行钻孔，产生两个小且良好对准的膜片。

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