Abstract:
A photoresist stripper bath includes a filter in a re-circulation line for filtering residual photoresist materials from said bath. The quality of the stripper and the concentration of the photoresist materials are sensed by passing infrared light transversely through the re-circulating line, detecting the intensity of the light passed through the line and comparing the detected level with a threshold value related to the concentration of the photoresist materials in said stripper.
Abstract:
A sensor and a method for determining the basis weight of a coating material containing latex on a substrate is described. The determined basis weight is insensitive to changes in the amount of substrate material underlying the coating. Signals from the sensor may be used in the control of a coating mechanism to provide a coating having a uniform basis weight.
Abstract:
A sensor and a method for determining the coating weight of a coating material containing silicone on a substrate is described. The determined coating weight is insensitive to changes in the amount of substrate material underlying the coating. Signals from the sensor may be used in the control of a coating mechanism to provide a coating having a uniform weight.
Abstract:
An apparatus for coating sheet metal strip substrate with lubricant type laminate includes top and bottom roller coaters for pinching the metal therebetween to apply laminate. The roller coaters are movable between engaged and disengaged positions. Pneumatic cylinders for actuating the top and bottom roller coaters are operatively connected such that the top and bottom roller coaters can “float” or move vertically while at the same time pinching the metal strip therebetween. The roller coaters comprise roller coater carriages that carry applicator rolls between support rolls without the need to journal ends of the applicator roll. A spring biased applicator head applies laminate directly to one or more sections of the applicator roll.
Abstract:
For depositing fluid dots in an array, e.g., for microscopic analysis, a deposit device, e.g. a pin, cooperating with a fluid source defines a precisely sized drop of fluid of small diameter on a drop carrying surface. Transport mechanism positions the device precisely over the receiving surface and drive mechanism moves the deposit device toward and away from the surface. By repeated action, minute drops of fluid can be deposited precisely in a dense array, preferably under computer control. The drop-carrying surface shown has a diameter less than 375, preferably less than 300, preferably between about 15 and 250 micron, and is bound by a sharp rim that defines the perimeter of the fluid drop. The deposit device is compliant in the direction of deposition motion, e.g. by overcoming resistance of a resilient member. When depositing, the deposit device is laterally constrained to a reference position, e.g. by flexure mounting or the deposit device is mounted to displace from its mounting upon engagement with the receiving surface, and is subject to a lateral force or turning moment that engages the device with a lateral reference surface. A mobile-fluid storage device resupplies the deposit device along the array, e.g. in the immediate vicinity of the deposit locations. Mobile annular storage rings are lowered and raised to obtain a supply of fluid, or a mobile multiwell plate is used. Cleaning mechanism, sampling plans, and array products on microscope slides and fragile or soft membranes are disclosed as are many types of fluid and uses, e.g., in biotechnology, analysis and process control.
Abstract:
A paint applying roller is positioned over the sidewall of a tire rotating about a vertical axis and the roller is vertically movable into contact with the sidewall to apply and spread protective paint over white sidewall surfaces.
Abstract:
A wet chemical process tank, or a wet etch tank, that has improved fluid circulation and improved uniformity in the fluid concentration in the tank is disclosed. In a preferred embodiment, a tank body is provided which has a liquid dispenser positioned therein with a plurality of liquid outlets in a vertical surface of the dispenser each having a different diameter opening for compensating the different fluid pressure in the dispenser. A more uniform liquid concentration is thus achieved in the tank cavity to perform a more uniform chemical process on the plurality of wafers. The tank body is further provided with a second endwall which has a second distance from the plurality of wafers that is at least twice the first distance between a first endwall and the plurality of wafers. When the second endwall is at least 0.5 cm shorter than the first endwall, the larger second distance together with the shorter height of the second endwall induces a large volume of liquid to overflow the second endwall and to carry away any film residues or flakes, such as that of a photoresist material, from the tank cavity and thus preventing any possible redeposition of the film residues on the wafer surface and any contamination problems.
Abstract:
An apparatus and method for applying at least one coating solution of a predetermined viscosity to a photosensitive material. The apparatus includes at least an application roller which is adapted to apply the coating solution onto the photosensitive material. A solution supply guide is positioned relative to the application roller to supply coating solution onto the application roller. The apparatus and method further includes a washing arrangement for washing the coating apparatus in an efficient manner. The washing arrangement includes a movable scrubber bar arrangement which retracts away from the application roller when the coating apparatus is in a coating mode of operation, and is movable to contact the application roller by way of brushes in a cleaning mode of operation. The apparatus and method further includes a recirculation system which alternatively supplies coating solution to the supply guide and cleaning solution to at least the washing arrangement.
Abstract:
An inside wall of an elongated syringe body is coated by supplying at least an outer surface of an applicator ring with a coating of silicon oil while displacing a rod carrying the coated ring from a rear end to a front end of the body with the ring in continuous annular engagement with the inside wall thereof so as to transfer the oil from the ring to the inside wall. Thereafter a scraper ring also carried on the rod is displaced from the front end to the rear end of the body with the scraper ring in continuous annular engagement with the inside wall so as to scrape excess silicone oil from the inside wall.
Abstract:
The apparatus has a first container part within which material for distributing over a surface as a guide coat is held in a substantially loose, finely divided particulate form; a perforated element through which the particulate material can be sprinkled or shaken; and a second container part for receiving an applicator, e.g., in the form of a sponge, on which the particulate material is to be sprinkled or shaken. The apparatus may be provided with the applicator or as a replacement part or “re-fill” for existing apparatus. Particulate material may also be provided for re-charging such apparatus.