A SPARK STAND AND METHOD OF MAINTENANCE

    公开(公告)号:US20220333990A1

    公开(公告)日:2022-10-20

    申请号:US17641923

    申请日:2020-09-11

    Inventor: Fabio Demarco

    Abstract: A method of determining a peak intensity in an optical spectrum is described. The method includes producing a two-dimensional array of spectrum values by imaging the optical spectrum onto a detector array. An offset using an actual location and an expected location of a peak of an interpolated subarray is used to adjust an expected location of another peak that is within another two-dimensional subarray. Interpolated spectrum values are then used to produce a peak intensity value of the second peak.

    Light measurement device and light measurement method

    公开(公告)号:US11346720B2

    公开(公告)日:2022-05-31

    申请号:US16963039

    申请日:2018-10-10

    Abstract: In a spectrometry device, a control unit controls a light source so that input of excitation light to an internal space is maintained in a first period, and that the input of the excitation light to the internal space is stopped in a second period, and the analysis unit calculates the photoluminescence quantum yield of a long afterglow emission material on the basis of the number of absorbed photons of the long afterglow emission material obtained on the basis of excitation light spectral data in the first period and the number of light emission photons of the long afterglow emission material obtained on the basis of light emission spectral data in any of the first period, the second period, and a total period of the first period and the second period.

    DIAGNOSTIC TESTING METHOD FOR A SPECTROMETER

    公开(公告)号:US20220163391A1

    公开(公告)日:2022-05-26

    申请号:US17532127

    申请日:2021-11-22

    Abstract: A diagnostic testing method for a detector of a spectrometer. The spectrometer comprises a source of line spectra configured to emit at least one branched pair of spectral lines from an excited species. The method comprises performing a plurality of detector diagnostic measurements and diagnosing a detector operating condition. Each detector diagnostic measurement comprises measuring an intensity of a first spectral line emitted by an excited species of the source of line spectra using the detector, and measuring an intensity of a second spectral line emitted by the excited species of the source of line spectra using the detector. The first and second spectral lines emitted by the excited species of the source of line spectra form a branched pair of spectral lines, and the spectrometer is controlled to vary the intensity of the first and second spectral lines incident on the detector for the plurality of detector diagnostic measurements.

    Plasma processing apparatus
    25.
    发明授权

    公开(公告)号:US11289313B2

    公开(公告)日:2022-03-29

    申请号:US16123208

    申请日:2018-09-06

    Abstract: Provided is a plasma processing apparatus including a processing unit in which a sample is plasma processed and which includes a monitor (optical emission spectroscopy) that monitors light emission of plasma, wherein the processing unit includes a prediction model storage unit that stores a prediction model predicting a plasma processing result, and a control device in which the plasma processing result is predicted by using a prediction model selected based on light emission data and device data as an indicator of state change of the processing unit.

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