Micro-electromechanical system (MEMS) based current and magnetic field sensor
    32.
    发明授权
    Micro-electromechanical system (MEMS) based current and magnetic field sensor 有权
    基于微机电系统(MEMS)的电流和磁场传感器

    公开(公告)号:US07453256B2

    公开(公告)日:2008-11-18

    申请号:US11356332

    申请日:2006-02-16

    CPC classification number: G01R15/148

    Abstract: A micro-electromechanical system (MEMS) current and magnetic field sensor for sensing a magnetic field produced by a conductor includes a magneto-MEMS component for sensing the magnetic field and an interference-MEMS component for sensing an interference, wherein the magneto-MEMS component and the interference MEMS component are used to provide an indication of the current in the conductor.

    Abstract translation: 用于感测由导体产生的磁场的微机电系统(MEMS)电流和磁场传感器包括用于感测磁场的磁MEMS组件和用于感测干扰的干涉MEMS组件,其中磁MEMS组件 并且使用干涉MEMS分量来提供导体中的电流的指示。

    MICRO-ELECTROMECHANICAL SYSTEM (MEMS) BASED CURRENT AND MAGNETIC FIELD SENSOR USING TUNNELING CURRENT SENSING
    33.
    发明申请
    MICRO-ELECTROMECHANICAL SYSTEM (MEMS) BASED CURRENT AND MAGNETIC FIELD SENSOR USING TUNNELING CURRENT SENSING 有权
    基于微机电系统(MEMS)的电流和使用隧道式电流传感器的磁场传感器

    公开(公告)号:US20070181963A1

    公开(公告)日:2007-08-09

    申请号:US11736678

    申请日:2007-04-18

    Abstract: A micro-electro-mechanical system (MEMS) current sensor for sensing a magnetic field produced by an electrical current flowing in a conductor includes a first fixed element and a moving element. The moving element is spaced away from the first fixed element and is movable relative to the fixed element responsive to a magnetic field produced by an electrical current flowing in a conductor for providing a mechanical indication of a strength of the magnetic field. The sensor also includes a tunneling current generator for generating a tunneling current between the first fixed element and the moving element and a tunneling current monitor for monitoring a change in the tunneling current responsive to the mechanical indication to provide an indication of a value of the electrical current in the conductor.

    Abstract translation: 用于感测由在导体中流动的电流产生的磁场的微机电系统(MEMS)电流传感器包括第一固定元件和移动元件。 移动元件与第一固定元件间隔开,并且可响应于在导体中流动的电流产生的磁场相对于固定元件移动,以提供磁场强度的机械指示。 传感器还包括用于在第一固定元件和移动元件之间产生隧道电流的隧道电流发生器,以及隧道电流监视器,用于响应于机械指示监视隧道电流的变化,以提供电气值的指示 电流在导体中。

    Thermopile-based gas sensor
    34.
    发明申请
    Thermopile-based gas sensor 失效
    基于热电堆的气体传感器

    公开(公告)号:US20060220164A1

    公开(公告)日:2006-10-05

    申请号:US11095243

    申请日:2005-03-31

    CPC classification number: G01N25/4893 Y10T436/11

    Abstract: A method of manufacturing a sensor is provided. The method includes disposing a sacrificial layer on a substrate, disposing a low-thermal-conductivity layer on the sacrificial layer, and disposing a first set of conductive arms and a second set of conductive arms on the low-thermal-conductivity layer to form a plurality of thermal junctions. The plurality of thermal junctions is adapted to form a plurality of hot junctions and a plurality of cold junctions when subjected to a difference in temperature. The method also includes removing the sacrificial layer and a portion of the low-thermal-conductivity layer to form a cavity therein. The cavity is configured to provide insulation for the plurality of hot junctions. A thermopile sensor is also provided, and a calorimetric gas sensor implementing the thermopile sensor is provided.

    Abstract translation: 提供一种制造传感器的方法。 该方法包括在衬底上设置牺牲层,在牺牲层上设置低热导率层,以及将第一组导电臂和第二组导电臂设置在低热导率层上以形成 多个热路口。 多个热接头适于在经受温差时形成多个热接点和多个冷接点。 该方法还包括去除牺牲层和低热导率层的一部分以在其中形成空腔。 空腔构造成为多个热接点提供绝缘。 还提供热电堆传感器,并提供实现热电堆传感器的量热气体传感器。

    System and method for sensing pressure
    35.
    发明授权
    System and method for sensing pressure 有权
    用于感应压力的系统和方法

    公开(公告)号:US07017418B1

    公开(公告)日:2006-03-28

    申请号:US11012417

    申请日:2004-12-15

    CPC classification number: G01L9/0019 G01L9/0008 G01L9/0016 G01L9/0022

    Abstract: A differential pressure sensor for use in an industrial application is described. The differential pressure sensor includes a membrane layer having a covered portion and an exposed portion where a first side of the exposed portion of the membrane layer is in fluid communication to a first aperture and a second side of the exposed portion is in fluid communication to a second aperture. The differential pressure sensor also includes at least one resonating device secured to the covered portion of the membrane layer and configured to oscillate at a desired frequency and a sensing circuitry configured to a detect oscillation in the at least one resonating device indicative of deformation in the membrane layer.

    Abstract translation: 描述了用于工业应用的差压传感器。 差压传感器包括具有被覆部分和暴露部分的膜层,其中膜层的暴露部分的第一侧与第一孔流体连通,并且暴露部分的第二侧与流体连通 第二个光圈。 差压传感器还包括至少一个固定到膜层的被覆盖部分并被配置为以期望的频率振荡的谐振装置,以及感测电路,其被配置为检测至少一个谐振装置中的振荡,指示膜中的变形 层。

    SENSOR ASSEMBLIES AND METHODS OF ASSEMBLING SAME
    36.
    发明申请
    SENSOR ASSEMBLIES AND METHODS OF ASSEMBLING SAME 失效
    传感器组件及其组装方法

    公开(公告)号:US20120291570A1

    公开(公告)日:2012-11-22

    申请号:US13112187

    申请日:2011-05-20

    CPC classification number: G01D11/30 G01D11/245

    Abstract: A method for assembling a sensor assembly includes providing a sensing device configured to measure at least one variable. The method also includes at least partially enclosing a magnetic material within an enclosure. At least a portion of the enclosure is manufactured from a material having a permeability that facilitates forming a magnetic field therein. The method also includes coupling the sensing device to a first portion of the enclosure. The enclosure includes at least one second portion that is movable with respect to the first portion of the enclosure such that a magnetic coupling force is induced external to the enclosure to facilitate coupling the sensor assembly to a magnetic surface.

    Abstract translation: 一种用于组装传感器组件的方法包括提供被配置为测量至少一个变量的感测装置。 该方法还包括在外壳内至少部分地包围磁性材料。 外壳的至少一部分由具有促进其中形成磁场的渗透性的材料制成。 该方法还包括将感测装置耦合到外壳的第一部分。 所述外壳包括至少一个第二部分,所述至少一个第二部分可相对于所述外壳的所述第一部分移动,使得在所述外壳外部引入磁耦合力以便于将所述传感器组件耦合到磁性表面。

    Motion Artifact Rejection Microelectrode
    38.
    发明申请
    Motion Artifact Rejection Microelectrode 有权
    运动神器抑制微电极

    公开(公告)号:US20110230745A1

    公开(公告)日:2011-09-22

    申请号:US12725865

    申请日:2010-03-17

    Abstract: An electrode system for the measurement of biopotential signals includes a substrate. A microelectrode is coupled to the substrate. An accelerometer is coupled to the substrate. A biopotential amplifier is electrically coupled to the microelectrode and acceleration measurement circuit is electrically coupled to the accelerometer. A method of measuring a biopotential from a patient includes sensing a biopotential with a microelectrode. The biopotential is amplified with an amplifier in electrical communication with the microelectrode. A movement of the electrode is sensed with an accelerometer integrated with the electrode substrate. The sensed biopotential and the sensed movement are provided to an electronic controller. Portions of the sensed biopotential that correspond to sensed movement are identified as artifact contaminated portions.

    Abstract translation: 用于测量生物电位信号的电极系统包括基底。 微电极耦合到衬底。 加速度传感器耦合到基板。 生物电位放大器电耦合到微电极,并且加速度测量电路电耦合到加速度计。 从患者测量生物潜力的方法包括用微电极感测生物电位。 生物电位用与微电极电连通的放大器放大。 用与电极基板一体化的加速度计感测电极的移动。 感测到的生物电势和感测的运动被提供给电子控制器。 对应于感测到的移动的感测生物电位的部分被识别为伪影污染部分。

    Micro-electromechanical system (MEMS) based current and magnetic field sensor
    39.
    发明授权
    Micro-electromechanical system (MEMS) based current and magnetic field sensor 有权
    基于微机电系统(MEMS)的电流和磁场传感器

    公开(公告)号:US07705583B2

    公开(公告)日:2010-04-27

    申请号:US12251896

    申请日:2008-10-15

    CPC classification number: G01R15/148

    Abstract: A micro-electromechanical system (MEMS) current and magnetic field sensor for sensing a magnetic field produced by a conductor includes a magneto-MEMS component for sensing the magnetic field and an interference-MEMS component for sensing an interference, wherein the magneto-MEMS component and the interference MEMS component are used to provide an indication of the current in the conductor.

    Abstract translation: 用于感测由导体产生的磁场的微机电系统(MEMS)电流和磁场传感器包括用于感测磁场的磁MEMS组件和用于感测干扰的干涉MEMS组件,其中磁MEMS组件 并且使用干涉MEMS分量来提供导体中的电流的指示。

    MICRO-ELECTROMECHANICAL SYSTEM (MEMS) BASED CURRENT AND MAGNETIC FIELD SENSOR
    40.
    发明申请
    MICRO-ELECTROMECHANICAL SYSTEM (MEMS) BASED CURRENT AND MAGNETIC FIELD SENSOR 有权
    微电子系统(MEMS)基于电流和磁场传感器

    公开(公告)号:US20090033314A1

    公开(公告)日:2009-02-05

    申请号:US12251896

    申请日:2008-10-15

    CPC classification number: G01R15/148

    Abstract: A micro-electromechanical system (MEMS) current and magnetic field sensor for sensing a magnetic field produced by a conductor includes a magneto-MEMS component for sensing the magnetic field and an interference-MEMS component for sensing an interference, wherein the magneto-MEMS component and the interference MEMS component are used to provide an indication of the current in the conductor.

    Abstract translation: 用于感测由导体产生的磁场的微机电系统(MEMS)电流和磁场传感器包括用于感测磁场的磁MEMS组件和用于感测干扰的干涉MEMS组件,其中磁MEMS组件 并且使用干涉MEMS分量来提供导体中的电流的指示。

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