公开(公告)号：US08864969B2

公开(公告)日：2014-10-21

申请号：US12822971

申请日：2010-06-24

Applicant: Yang Liu ,  Robert W. Dutton ,  Roger T. Howe

Inventor： Yang Liu ,  Robert W. Dutton ,  Roger T. Howe

IPC: G01N33/487

CPC classification number: G01N33/48721 ,  C12Q1/68 ,  G01N27/04 ,  G01N27/4145 ,  G01N27/44791 ,  G01N33/68

Abstract: According to one aspect, the disclosure is directed to an example embodiment in which a circuit-based arrangement includes a circuit-based substrate securing a channel, with an effective width that is not limited by the Debye screening length, along a surface of the substrate. A pair of reservoirs are included in or on the substrate and configured for containing and presenting a sample having bio-molecules for delivery in the channel. A pair of electrodes electrically couple a charge in the sample to enhance ionic current flow therein (e.g., to overcome the electrolyte screening), and a sense electrode is located along the channel for sensing a characteristic of the biological sample by using the electrostatic interaction between the enhanced ionic current flow of the sample and the sense electrode. Actual detection occurs by using a charge-signal processing circuit to process the sensed charge signal and, therefrom, provide an output indicative of a signature for the bio-molecules delivered in the channel.

Abstract translation: 根据一个方面，本发明涉及一个示例性实施例，其中基于电路的布置包括沿着基板的表面固定通道的电路基板，具有不受德拜屏蔽长度限制的有效宽度 。 一对储存器包含在基底中或基底上，并且被配置为容纳和呈现具有用于在通道中递送的生物分子的样品。 一对电极将样品中的电荷电耦合以增强其中的离子电流（例如，以克服电解质屏蔽），并且感测电极沿着通道定位，以通过使用 样品和感测电极的增强的离子电流流动。 通过使用电荷信号处理电路来处理所感测的电荷信号，从而提供指示在通道中递送的生物分子的签名的输出，发生实际检测。

公开(公告)号：US5879963A

公开(公告)日：1999-03-09

申请号：US820248

申请日：1997-03-18

Applicant: Roger T. Howe ,  Richard S. Payne ,  Stephen F. Bart

Inventor： Roger T. Howe ,  Richard S. Payne ,  Stephen F. Bart

IPC: B81B7/00 ,  G01P15/08 ,  H05K3/34

CPC classification number: B81B7/0006 ,  G01P15/0802 ,  Y10S428/901 ,  Y10T428/24917 ,  Y10T428/24926

Abstract: A method and apparatus for providing a sub-ground plane for a micromachined device. The sub-ground plane is formed in or on the substrate. Above the sub-ground plane is a dielectric and then a discontinuous conductive layer used for interconnects for parts of the micromachined device. A movable microstructure is suspended above the interconnect layer. A conductive layer can be suspended above the movable microstructure. In one embodiment, the sub-ground plane is diffused into the substrate or a well in the substrate, and is of an opposite type from the type of silicon into which it is diffused. Alternatively, the sub-ground plane is formed from a conductive layer, deposited over the substrate before the layer used for interconnects.

Abstract translation: 一种用于提供微加工装置的子接地平面的方法和装置。 子接地平面形成在基底中或基底上。 在子接地平面之上是电介质，然后是用于微加工装置的部件的互连的不连续导电层。 可移动微结构悬浮在互连层上方。 导电层可以悬浮在可移动微结构的上方。 在一个实施例中，子接地平面扩散到衬底或衬底中的阱中，并且与其被扩散的硅的类型相反。 或者，子接地平面由导电层形成，在用于互连的层之前沉积在衬底上。

公开(公告)号：US5640039A

公开(公告)日：1997-06-17

申请号：US347702

申请日：1994-12-01

Applicant: Kevin Hin-Leung Chau ,  Roger T. Howe ,  Richard S. Payne ,  Yang Zhao ,  Theresa A. Core ,  Steven J. Sherman

Inventor： Kevin Hin-Leung Chau ,  Roger T. Howe ,  Richard S. Payne ,  Yang Zhao ,  Theresa A. Core ,  Steven J. Sherman

IPC: G01P15/08 ,  G01P15/125 ,  H01L29/82

CPC classification number: G01P15/125 ,  G01P15/0802 ,  G01P2015/0814

Abstract: A method and apparatus for providing a conductive plane beneath a suspended microstructure. A conductive region is diffused into a substrate. A dielectric layer is added, covering the substrate, and then removed from a portion of the conductive region. A spacer layer is deposited over the dielectric and exposed conductive region. A polysilicon layer is deposited over the spacer layer, and formed into the shape of the suspended microstructure. After removal of the spacer layer, the suspended microstructure is left free to move above an exposed conductive plane. The conductive plane is driven to the same potential as the microstructure.

Abstract translation: 一种用于在悬浮微结构下方提供导电平面的方法和装置。 导电区域扩散到衬底中。 添加介电层，覆盖基板，然后从导电区域的一部分去除。 间隔层沉积在电介质和暴露的导电区域上。 多晶硅层沉积在间隔层上，并形成悬浮微结构的形状。 在去除间隔层之后，使悬浮的微结构自由地在暴露的导电平面上移动。 导电平面被驱动到与微结构相同的电位。

公开(公告)号：US5537083A

公开(公告)日：1996-07-16

申请号：US298233

申请日：1994-08-30

Applicant: Liwei Lin ,  Clark T. Nguyen ,  Roger T. Howe ,  Albert P. Pigano

Inventor： Liwei Lin ,  Clark T. Nguyen ,  Roger T. Howe ,  Albert P. Pigano

IPC: H03H9/46 ,  H03H9/00

CPC classification number: H03H9/02275 ,  H03H9/02377 ,  H03H9/46 ,  H03H9/462

Abstract: A micromechanical filter having planar components, and manufacturable using very large scale integrated circuit microfabrication techniques. The input and output transducers are interdigitated comb electrodes. The mechanical coupling between the input and output transducers includes planar flexures, displacement of the electrodes producing bending of the elements of the flexures. By sealing micromechanical filters in a vacuum and providing on-board circuitry, high signal-to-noise ratios and quality factors are achievable. Construction of a real-time spectrum analyzer using many micromechanical resonators, provides a device with high accuracy and a short sample time.

公开(公告)号：US5455547A

公开(公告)日：1995-10-03

申请号：US332981

申请日：1994-10-31

Applicant: Liwei Lin ,  Clark T.-C. Nguyen ,  Roger T. Howe ,  Albert P. Pisano

Inventor： Liwei Lin ,  Clark T.-C. Nguyen ,  Roger T. Howe ,  Albert P. Pisano

IPC: H03H9/46 ,  H03H9/00

CPC classification number: H03H9/02275 ,  H03H9/02377 ,  H03H9/46 ,  H03H9/462

Abstract: A micromechanical filter having planar components, and manufacturable using very large scale integrated circuit microfabrication techniques. The input and output transducers are interdigitated comb electrodes. The mechanical coupling between the input and output transducers includes planar flexures, displacement of the electrodes producing bending of the elements of the flexures. By sealing micromechanical filters in a vacuum and providing on-board circuitry, high signal-to-noise ratios and quality factors are achievable. Construction of a real-time spectrum analyzer using many micromechanical resonators, provides a device with high accuracy and a short sample time.

Abstract translation: 具有平面部件的微机械滤波器，并且可使用非常大规模的集成电路微加工技术制造。 输入和输出换能器是叉指梳状电极。 输入和输出换能器之间的机械耦合包括平面弯曲，电极的位移产生弯曲元件的弯曲。 通过在真空中密封微机械滤波器并提供板上电路，可以实现高信噪比和质量因素。 构建使用许多微机械谐振器的实时频谱分析仪，为设备提供高精度和短的采样时间。

公开(公告)号：US5025346A

公开(公告)日：1991-06-18

申请号：US312642

申请日：1989-02-17

Applicant: William C. Tang ,  Roger T. Howe

Inventor： William C. Tang ,  Roger T. Howe

IPC: B81B3/00 ,  B81C99/00 ,  G01C19/5719 ,  G01P15/08 ,  G01P15/097 ,  G01P15/10 ,  G03F7/00 ,  H02N1/00 ,  H03H9/02 ,  H03H9/24

CPC classification number: B81B3/0021 ,  G01C19/5719 ,  G01P15/0802 ,  G01P15/097 ,  G03F7/00 ,  H02N1/008 ,  H03H9/02275 ,  H03H9/2431 ,  B81B2201/033 ,  G01P2015/0814 ,  H03H2009/02496 ,  Y10S73/01

Abstract: A microbridge device for use as a sensor or an actuator is driven parallel to a substrate as a resonant microstructure. The microstructure comprises a stationary thin-film electrode secured to the substrate and located in a plane above it. A movable plate overlaying the substrate is suspended above it. The movable plate and electrode are patterned to provide for each at least one comb with fingers interdigitated with those of the other.

Abstract translation: 用作传感器或致动器的微桥装置作为谐振微结构平行于衬底驱动。 微结构包括固定在基板上并位于其上方的平面上的固定薄膜电极。 覆盖基板的可动板悬挂在其上。 可移动板和电极被图案化以为每个至少一个梳子提供与另一个梳子相互指指的手指。

公开(公告)号：US20100207254A1

公开(公告)日：2010-08-19

申请号：US12706112

申请日：2010-02-16

Applicant: Jinendra Raja Jain ,  Roger T. Howe

Inventor： Jinendra Raja Jain ,  Roger T. Howe

IPC: H01L29/06 ,  H01L21/30

CPC classification number: H01L31/105 ,  H01L33/34

Abstract: Various applications are directed to a material stack having a strained active material therein. In connection with an embodiment, an active material (e.g. a semiconductor material) is at least initially and partially released from and suspended over a substrate, strained, and held in place. The release and suspension facilitates the application of strain to the semiconductor material.

Abstract translation: 各种应用涉及其中具有应变活性材料的材料堆叠。 结合一个实施例，活性材料（例如半导体材料）至少首先和部分地从衬底上释放并悬浮在衬底上，应变并保持就位。 释放和悬浮有助于将应变应用于半导体材料。

公开(公告)号：US07522019B2

公开(公告)日：2009-04-21

申请号：US11146303

申请日：2005-06-03

Applicant: Sunil A. Bhave ,  Roger T. Howe

Inventor： Sunil A. Bhave ,  Roger T. Howe

IPC: H03H9/00 ,  H03H9/125

CPC classification number: H03H9/2405 ,  H03H9/02259 ,  H03H2009/02496 ,  H03H2009/02511

Abstract: An electrostatic transducer for micromechanical resonators, in which the electrode gaps are filled with a dielectric material having a much higher permittivity than air. This internal electrostatic transducer has several advantages over both air-gap electrostatic and piezoelectric transduction; including lower motional impedance, compatibility with advanced scaled CMOS device technology, and extended dynamic range. In one aspect, in order to minimize energy losses, the dielectric material has an acoustic velocity which is matched to that of the resonator material. Internal electrostatic transduction can be adapted to excite and detect either vertical modes (perpendicular to the substrate) or lateral modes (in the plane of the substrate). Its increased transduction efficiency is of particular importance for reducing the motional resistance of the latter.

Abstract translation: 一种用于微机械谐振器的静电传感器，其中电极间隙填充有比空气高得多的介电常数的电介质材料。 这种内部静电传感器具有优于气隙静电和压电传导的几个优点; 包括较低的运动阻抗，与先进的CMOS设备技术的兼容性以及扩展的动态范围。 在一个方面，为了最小化能量损失，电介质材料具有与谐振器材料的声速匹配的声速。 内部静电转换可以适应于激发和检测垂直模式（垂直于衬底）或横向模式（在衬底的平面中）。 其增加的转导效率对于降低后者的运动阻力尤其重要。

公开(公告)号：US07151277B2

公开(公告)日：2006-12-19

申请号：US10613508

申请日：2003-07-03

Applicant: Di Gao ,  Roger T. Howe ,  Roya Maboudian

Inventor： Di Gao ,  Roger T. Howe ,  Roya Maboudian

IPC: H01L29/04 ,  H01L29/76 ,  H01L29/26 ,  H01L31/12 ,  H01L33/00

CPC classification number: H01L21/0475 ,  B81C1/00595 ,  B81C2201/0109 ,  B81C2201/0132

Abstract: A method of etching silicon carbide using a nonmetallic mask layer. The method includes providing a silicon carbide substrate; forming a non-metallic mask layer by applying a layer of material on the substrate; patterning the mask layer to expose underlying areas of the substrate; and etching the underlying areas of the substrate with a plasma at a first rate, while etching the mask layer at a rate lower than the first rate.

Abstract translation: 使用非金属掩模层蚀刻碳化硅的方法。 该方法包括提供碳化硅衬底; 通过在衬底上施加一层材料形成非金属掩模层; 图案化掩模层以暴露衬底的下面的区域; 并以等于第一速率蚀刻衬底的下面的区域，同时以低于第一速率的速率蚀刻掩模层。

公开(公告)号：US06481285B1

公开(公告)日：2002-11-19

申请号：US09556023

申请日：2000-04-20

Applicant: Andrei M. Shkel ,  Roger T. Howe

Inventor： Andrei M. Shkel ,  Roger T. Howe

IPC: G01P904

CPC classification number: G01C19/5719

Abstract: A micro-machined angle measurement gyroscope. In one implementation, the gyroscope includes a substrate; a proof mass coupled to the substrate by an isotropic suspension such that the proof mass can move in any direction in the plane of the substrate; a plurality of drive electrodes configured to cause the proof mass to oscillate in the plane of the substrate; and a plurality of sense electrodes configured to sense the motion of the proof mass in the plane of the substrate. In another implementation, the gyroscope includes a substrate; a proof mass suspended above the substrate by an isotropic suspension such that the proof mass can move in any direction in an oscillation plane normal to the substrate; a plurality of drive electrodes configured to cause the proof mass to oscillate in the oscillation plane; and a plurality of sense electrodes configured to sense the motion of the proof mass in the oscillation plane.

Abstract translation: 微加工角度测量陀螺仪。 在一个实施方式中，陀螺仪包括基板; 通过各向同性悬浮液与基板相连的检测质量块，使得检测质量块能够在基板的平面中的任何方向上移动; 多个驱动电极，其构造成使得所述检测质量在所述基板的平面中振荡; 以及多个感测电极，其被配置为感测所述基板的平面中的所述检验质量块的运动。 在另一实施方式中，陀螺仪包括基板; 通过各向同性悬浮液悬挂在衬底上方的校准物质，使得校准物质可以在垂直于衬底的振荡平面中的任何方向上移动; 多个驱动电极，其构造成使得所述检测质量在所述振荡平面中振荡; 以及多个感测电极，被配置为感测所述振动平面中的所述质量块的运动。