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公开(公告)号:US20230008261A1
公开(公告)日:2023-01-12
申请号:US17372612
申请日:2021-07-12
Applicant: Intel Corporation
Inventor: Abhishek A. Sharma , Van H. Le , Brian S. Doyle , Prashant Majhi
IPC: H01L29/78 , H01L27/1159 , H01L29/423 , H01L29/786 , H01L21/28 , H01L29/66
Abstract: Memory cells with non-planar memory materials that include FE or AFE materials are described. An example memory cell includes a transistor provided over a support structure, where a memory material is integrated with a transistor gate. The channel material and the memory material are non-planar in that each includes a horizontal portion substantially parallel to the support structure, and a first and a second sidewall portions, each of which is substantially perpendicular to the support structure, where the horizontal portion of the memory material is between the horizontal portion of the channel material and a gate electrode material of the transistor gate, the first sidewall of the memory material is between the first sidewall of the channel material and the gate electrode material, and the second sidewall of the memory material is between the second sidewall of the channel material and the gate electrode material.
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公开(公告)号:US11430949B2
公开(公告)日:2022-08-30
申请号:US16324464
申请日:2016-09-25
Applicant: Intel Corporation
Inventor: Ravi Pillarisetty , Elijah V. Karpov , Prashant Majhi , Niloy Mukherjee
IPC: H01L45/00 , H01L23/528 , H01L27/24
Abstract: Disclosed herein are metal filament memory cells, and related devices and techniques. In some embodiments, a memory cell may include: a transistor having a source/drain region; and a metal filament memory device including an active metal and an electrolyte; wherein the electrolyte is coupled between the active metal and the source/drain region when the transistor is an n-type metal oxide semiconductor (NMOS) transistor, and the active metal is coupled between the electrolyte and the source/drain region when the transistor is a p-type metal oxide semiconductor (PMOS) transistor.
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公开(公告)号:US20220262860A1
公开(公告)日:2022-08-18
申请号:US17736346
申请日:2022-05-04
Applicant: Intel Corporation
Inventor: Elijah V. Karpov , Brian S. Doyle , Ravi Pillarisetty , Prashant Majhi , Abhishek A. Sharma
Abstract: Disclosed herein are selector devices and related devices and techniques. In some embodiments, a selector device may include a first electrode, a second electrode, and a selector material between the first electrode and the second electrode. The selector material may include germanium, tellurium, and sulfur.
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公开(公告)号:US20220190035A1
公开(公告)日:2022-06-16
申请号:US17118377
申请日:2020-12-10
Applicant: Intel Corporation
Inventor: Prashant Majhi , Derchang Kau , Max Hineman
IPC: H01L27/24 , H01L29/24 , H01L29/786 , H01L21/02 , H01L29/66
Abstract: A memory device structure includes a first plurality of line structures, where each line structure, in the first plurality of line structures, includes a first transistor channel. The memory device structure further includes a second plurality of line structures substantially orthogonal to the first plurality of line structures, where each line structure, in the second plurality of line structures, includes a second transistor channel A memory cell is at each cross-point between the first plurality of line structures and the second plurality of line structures.
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公开(公告)号:US11362140B2
公开(公告)日:2022-06-14
申请号:US16024199
申请日:2018-06-29
Applicant: Intel Corporation
Inventor: Prashant Majhi , Brian Doyle , Ravi Pillarisetty , Abhishek Sharma , Elijah V. Karpov
Abstract: Integrated circuits including 3D memory structures are disclosed. Air-gaps are purposefully introduced between word lines. The word lines may be horizontal or vertical.
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公开(公告)号:US11094785B2
公开(公告)日:2021-08-17
申请号:US16876528
申请日:2020-05-18
Applicant: INTEL CORPORATION
Inventor: Prashant Majhi , Glenn A. Glass , Anand S. Murthy , Tahir Ghani , Aravind S. Killampalli , Mark R. Brazier , Jaya P. Gupta
IPC: H01L29/10 , H01L29/775 , H01L21/30 , H01L29/78 , H01L29/423 , H01L29/786 , H01L27/092 , H01L29/06 , H01L21/8238
Abstract: Techniques are disclosed for deuterium-based passivation of non-planar transistor interfaces. In some cases, the techniques can include annealing an integrated circuit structure including the transistor in a range of temperatures, pressures, and times in an atmosphere that includes deuterium. In some instances, the anneal process may be performed at pressures of up to 50 atmospheres to increase the amount of deuterium that penetrates the integrated circuit structure and reaches the interfaces to be passivated. Interfaces to be passivated may include, for example, an interface between the transistor conductive channel and bordering transistor gate dielectric and/or an interface between sub-channel semiconductor and bordering shallow trench isolation oxides. Such interfaces are common locations of trap sites that may include impurities, incomplete bonds dangling bonds, and broken bonds, for example, and thus such interfaces can benefit from deuterium-based passivation to improve the performance and reliability of the transistor.
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公开(公告)号:US10910436B2
公开(公告)日:2021-02-02
申请号:US16315340
申请日:2016-09-24
Applicant: Intel Corporation
Inventor: Elijah V. Karpov , Prashant Majhi , Ravi Pillarisetty , Niloy Mukherjee
Abstract: Disclosed herein are asymmetric selectors for memory cells, and related devices and techniques. In some embodiments, a memory cell may include: a storage element; and a selector device coupled to the storage element, wherein the selector device has a positive threshold voltage and a negative threshold voltage, and a magnitude of the positive threshold voltage is different from a magnitude of the negative threshold voltage.
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公开(公告)号:US20200235221A1
公开(公告)日:2020-07-23
申请号:US16650824
申请日:2017-12-29
Applicant: Intel Corporation
Inventor: Abhishek A. Sharma , Brian S. Doyle , Prashant Majhi , Ravi Pillarisetty , Elijah V. Karpov
IPC: H01L29/51 , H01L27/11 , H01L27/092 , H01L23/535 , H01L21/8238
Abstract: In various embodiments disclosed herein are systems, methods, and apparatuses for using a ferroelectric material as a gate dielectric in an integrated circuit, for example, as part of a transistor. In an embodiment, the transistor can include a p-type metal oxide semiconductor (PMOS) transistor. In an embodiment, the transistor can have a p-doped substrate. In an embodiment, the channel of the transistor can be a p-doped channel. In an embodiment, the transistor having the ferroelectric material as the gate dielectric can be used in connection with an inverter. In an embodiment, the inverter can be used in connection with an static random access memory (SRAM) memory device.
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公开(公告)号:US20200234750A1
公开(公告)日:2020-07-23
申请号:US16633060
申请日:2017-09-29
Applicant: INTEL CORPORATION
Inventor: Abhishek A. Sharma , Brian S. Doyle , Ravi Pillarisetty , Prashant Majhi , Elijah V. Karpov
IPC: G11C11/22 , H01L27/11585
Abstract: A 1S-1T ferroelectric memory cell is provided that include a transistor and a two-terminal selector device. The transistor exhibits a low conductive state and a high conductive state (channel resistance), depending on drive voltage. The two-terminal selector device exhibits one of an ON-state and an OFF-state depending upon whether the transistor is in its low conductive state or its high conductive state. The transistor may be, for instance, a ferroelectric gate vertical transistor. Modulation of a polarization state of ferroelectric material of the vertical transistor may be utilized to switch the state of the selector device. The memory cell may thus selectively be operated in one of an ON-state and an OFF-state depending upon whether the selector device is in its ON-state or OFF-state.
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公开(公告)号:US20200006433A1
公开(公告)日:2020-01-02
申请号:US16024199
申请日:2018-06-29
Applicant: Intel Corporation
Inventor: Prashant Majhi , Brian Doyle , Ravi Pillarisetty , Abhishek Sharma , Elijah V. Karpov
Abstract: Integrated circuits including 3D memory structures are disclosed. Air-gaps are purposefully introduced between word lines. The word lines may be horizontal or vertical.
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