公开(公告)号：US20180038682A1

公开(公告)日：2018-02-08

申请号：US15785710

申请日：2017-10-17

Applicant: Nikon Corporation

Inventor： Daniel Gene Smith ,  Eric Peter Goodwin

IPC: G01B11/14 ,  G01B11/02 ,  G01N21/25

Abstract: Prediction of a distribution of light in an illumination pupil of an illumination system includes identifying component(s) of the illumination system the adjustment of which affects this distribution and simulating the distribution based on a point spread function defined in part by the identified components. The point spread function has functional relationship with configurable setting of the illumination settings.

公开(公告)号：US20180003484A1

公开(公告)日：2018-01-04

申请号：US15632849

申请日：2017-06-26

Applicant: Nikon Corporation

Inventor： Eric Peter Goodwin

IPC: G01B11/24

CPC classification number: G01B11/2441 ,  G01B9/02032 ,  G01B9/02049 ,  G01B9/02085 ,  G01B9/0209 ,  G01B2290/50

Abstract: System and method for profiling of a surface with lateral scanning interferometer the optical axis of which is perpendicular to the surface. In-plane scanning of the surface is carried out with increments that correspond to integer number of pixels of an employed optical detector. Determination of height profile of a region-of-interest that is incomparably larger than a FOV of the interferometer objective is performed in time reduced by at least an order of magnitude as compared to time required for the same determination by a vertical scanning interferometer.

公开(公告)号：US09638799B2

公开(公告)日：2017-05-02

申请号：US13840658

申请日：2013-03-15

Applicant: Nikon Corporation ,  Nikon Metrology NV

Inventor： Eric Peter Goodwin ,  Daniel G. Smith ,  Alexander Cooper ,  Mina A. Rezk ,  Anthony R. Slotwinski ,  Thomas M. Hedges

IPC: G01S17/10 ,  G02B26/10 ,  G01S17/32 ,  G01S7/481 ,  G01S7/491 ,  G01S17/66

CPC classification number: G01S17/102 ,  G01S7/4812 ,  G01S7/4817 ,  G01S7/4818 ,  G01S7/4917 ,  G01S17/325 ,  G01S17/66 ,  G02B26/101 ,  G02B26/108

Abstract: Laser radar systems include a pentaprism configured to scan a measurement beam with respect to a target surface. A focusing optical assembly includes a corner cube that is used to adjust measurement beam focus. Target distance is estimated based on heterodyne frequencies between a return beam and a local oscillator beam. The local oscillator beam is configured to propagate to and from the focusing optical assembly before mixing with the return beam. In some examples, heterodyne frequencies are calibrated with respect to target distance using a Fabry-Perot interferometer having mirrors fixed to a lithium aluminosilicate glass-ceramic tube.

公开(公告)号：US09194694B2

公开(公告)日：2015-11-24

申请号：US13753841

申请日：2013-01-30

Applicant: Nikon Corporation

Inventor： Eric Peter Goodwin

IPC: G01B11/02 ,  G01B11/14 ,  G01B9/02

CPC classification number: G01B11/14 ,  G01B9/02018

Abstract: An exemplary device has a stationary portion and a movable portion. The stationary portion has a first corner-cube, an optical system including a beamsplitter, and a light detector. The movable portion comprises a second corner-cube mountable on an object that is displaceable in a principal direction relative to the stationary portion. The beamsplitter splits a beam of collimated broadband light into a reference beam and a measurement beam that are directed by the optical system to make multiple roundtrip passes from the optical system to the respective corner cubes and back. The reference beam and measurement beam interfere with each other to produce a coherence envelope sensed by the detector, wherein a detected displacement of the coherence envelope corresponds to a respective position of the object in the principal direction.

Abstract translation: 示例性装置具有固定部分和可移动部分。 固定部分具有第一角立方体，包括分束器的光学系统和光检测器。 可移动部分包括可安装在物体上的可相对于静止部分在主方向上移动的第二角形立方体。 分光器将准直的宽带光束分解成参考光束和由光学系统引导的测量光束，以进行从光学系统到相应的角立方体和背部的多个往返传递。 参考光束和测量光束彼此干涉以产生由检测器感测的相干包络，其中相干包络的检测位移对应于物体在主方向上的相应位置。

公开(公告)号：US20150276385A1

公开(公告)日：2015-10-01

申请号：US14736118

申请日：2015-06-10

Applicant: NIKON CORPORATION

Inventor： Eric Peter Goodwin ,  Zhiqiang Liu

IPC: G01B11/14 ,  G01D5/34

CPC classification number: G01B11/14 ,  G01D5/34 ,  G03F7/70775

Abstract: Methodology of measuring a position of a wafer with an encoder directing measurement beam(s) of light towards a wafer area that is being contemporaneously patterned in an exposure apparatus. The Abbe error of such measurement is minimized or even negated by combining the data from first and second measurement signals, one of which is defined as complementary, Abbe-error correcting measurement signal for which the induced Abbe error is either opposite to or at least different from the Abbe error corresponding to another, main measurement signal. The combination of the main and Abbe-error correcting signals is performed with a heterodyne interferometer employing a two-dimensional diffraction grating diffracting each of the measurement beams twice.

Abstract translation: 用编码器测量晶片的位置的方法，所述编码器将测量光束朝向在曝光装置中同时构图的晶片区域。 通过组合来自第一和第二测量信号的数据，这种测量的阿贝误差被最小化或甚至否定，其中一个被定义为互补的阿贝误差校正测量信号，其诱发的阿贝误差与之相反或至少不同 从阿贝错误对应另一个，主要测量信号。 通过使用将每个测量光束衍射两次的二维衍射光栅的外差干涉仪来执行主和误差校正信号的组合。

公开(公告)号：US20140293278A1

公开(公告)日：2014-10-02

申请号：US14302187

申请日：2014-06-11

Applicant: Nikon Corporation

Inventor： Daniel Gene Smith ,  Eric Peter Goodwin

IPC: G01B11/14 ,  G01N21/25 ,  G01B11/02

CPC classification number: G01B11/14 ,  G01B11/02 ,  G01B11/0608 ,  G01J3/0237 ,  G01J3/0297 ,  G01N21/25 ,  G02B7/28 ,  G02B7/36

Abstract: A new and useful method is provided for Goos-Hanchen compensation in an optical autofocus (AF) system that uses light reflected from a substrate to determine changes in the z position of a substrate. According to the method of the invention reflected light from the substrate is provided at a plurality of wavelengths and polarizations, detected and used to make corrections that compensate for the errors due to the Goos-Hanchen effect.

Abstract translation: 在使用从基板反射的光来确定基板的z位置的变化的光学自动对焦（AF）系统中，为Goos-Hanchen补偿提供了一种新的有用的方法。 根据本发明的方法，来自基板的反射光以多个波长和极化被提供，被检测并用于进行修正，以补偿由于Goos-Hanchen效应引起的误差。

公开(公告)号：US20140049762A1

公开(公告)日：2014-02-20

申请号：US13796316

申请日：2013-03-12

Applicant: NIKON CORPORATION

Inventor： Eric Peter Goodwin

IPC: G01B11/14 ,  G03F7/20

CPC classification number: G01B11/14 ,  G03F7/70775

Abstract: A measurement system for measuring the position of a work piece (28) includes a stage grating (234) and an encoder head (236). A first measurement beam (38A) is directed at the stage grating (234) at a first angle, the first measurement beam (38A) being at a first wavelength. A second measurement beam (38B) is directed at the stage grating (234) at a second angle that is different than the first angle, the second measurement beam (38B) being at a second wavelength that is different than the first wavelength. At least a portion of the first measurement beam (38A) and at least a portion of the second measurement beam (38B) are interfered with one another to create a measurement signal along a signal axis.

Abstract translation: 用于测量工件（28）的位置的测量系统包括平台光栅（234）和编码器头（236）。 第一测量光束（38A）以第一角度指向舞台光栅（234），第一测量光束（38A）处于第一波长。 第二测量光束（38B）以与第一角度不同的第二角度指向舞台光栅（234），第二测量光束（38B）处于与第一波长不同的第二波长。 第一测量光束（38A）的至少一部分和第二测量光束（38B）的至少一部分彼此干涉以产生沿信号轴的测量信号。

公开(公告)号：US20220252392A1

公开(公告)日：2022-08-11

申请号：US17623570

申请日：2020-07-02

Applicant: Nikon Corporation

Inventor： Eric Peter Goodwin ,  Heather Lynn Durko ,  Daniel Gene Smith ,  Johnathan Agustin Marquez ,  Michael Birk Binnard ,  Patrick Shih Chang ,  Matthew Parker-McCormick Bjork ,  Paul Derek Coon ,  Brett William Herr ,  Motofusa Ishikawa

IPC: G01B11/25 ,  B33Y50/00 ,  B22F10/80 ,  B22F12/90 ,  B33Y30/00

Abstract: 3D metrology techniques are disclosed for determining a changing topography of a substrate processed in an additive manufacturing system. Techniques include fringe scanning, simultaneous fringe projections, interferometry, and x-ray imaging. The techniques can be applied to 3D printing systems to enable rapid topographical measurements of a 3D printer powder bed, or other rapidly moving, nearly continuous surface to be tested. The techniques act in parallel to the system being measured to provide information about system operation and the topography of the product being processed. A tool is provided for achieving higher precision, increasing throughput, and reducing the cost of operation through early detection and diagnosis of operating problems and printing defects. These techniques work well with any powder bed 3D printing system, providing real-time metrology of the powder bed, the most recently printed layer, or both without reducing throughput.

公开(公告)号：US20220212263A1

公开(公告)日：2022-07-07

申请号：US17623847

申请日：2020-07-01

Applicant: Nikon Corporation

Inventor： Alton Hugh Phillips ,  Patrick Shih Chang ,  Michael Birk Binnard ,  Matthew Rosa ,  Serhad Ketsamanian ,  Lexian Guo ,  Brett William Herr ,  Eric Peter Goodwin ,  Johnathan Agustin Marquez ,  Matthew Parker-McCormick Bjork ,  Paul Derek Coon ,  Motofusa Ishikawa

IPC: B22F12/37 ,  B33Y30/00 ,  B33Y50/02 ,  B22F10/85 ,  B22F12/90 ,  B22F12/00 ,  B23K26/342 ,  B23K26/08

Abstract: To improve the operation of 3D printing systems, techniques are disclosed for a rotary 3D printer comprising: a main rotating support table rotating about a first axis and one or more secondary support tables rotating around a non-coaxial secondary axis; a powder supply assembly for distributing powder onto the tables; and an energy system for directing an energy beam at the powder to form a part. The main support table and secondary support tables can rotate in the same or opposite directions.
Disclosed techniques include: grooved support table surfaces for improving stability of applied powder; reciprocating bellows for controlling a differential load on actuators that move the support tables; high temperature bearings or bushings for supporting rotary motion at high temperatures; and a mechanism for counterbalancing a weight of the part being built.

公开(公告)号：US11248901B2

公开(公告)日：2022-02-15

申请号：US17262656

申请日：2019-07-22

Applicant: Nikon Corporation

Inventor： Eric Peter Goodwin ,  Wan Qin

IPC: G01B9/02 ,  G01B9/04 ,  G01N21/45 ,  G02B21/34 ,  G03H1/00 ,  G03H1/04

Abstract: Object interference in biological samples generated by lateral shearing interference microscopes is addressed by a shearing microscope slide comprising a periodic structure having alternating reference and sample regions. In some embodiments, the reference regions are configured to provide references that remove sample overlap in a sheared microscopic measurement. A system for generating sheared microscopic measurements is also provided that comprises an inlet configured to receive a sample material, an outlet configured to release a portion of the sample material, and a periodic structure having a plurality of interleaved reference and sample channels. In some cases, the sample channels are configured to accommodate a flow of sample material from the inlet to the outlet and the reference channels are configured to provide references that remove sample overlap in a sheared microscopic measurement.