公开(公告)号：US20150118625A1

公开(公告)日：2015-04-30

申请号：US14588865

申请日：2015-01-02

Applicant: Seagate Technology LLC

Inventor： XiaoMin Yang ,  Zhaoning Yu ,  Kim Yang Lee ,  Michael Feldbaum ,  Yautzong Hsu ,  Wei Hu ,  Shuaigang Xiao ,  Henry Yang ,  HongYing Wang ,  Rene Johannes Marinus van de Veerdonk ,  David Kuo

IPC: G11B5/855 ,  C23F4/00 ,  G03F7/20 ,  B05D1/00

CPC classification number: G11B5/855 ,  B05D1/005 ,  B32B3/30 ,  B32B27/283 ,  B32B27/302 ,  B32B27/308 ,  B32B27/36 ,  B32B2457/14 ,  B81C1/00031 ,  B81C2201/0149 ,  B82Y10/00 ,  B82Y40/00 ,  C23F4/00 ,  G03F7/0002 ,  G03F7/0035 ,  G03F7/165 ,  G03F7/2022 ,  G03F7/203 ,  G03F7/2059 ,  G03F7/40 ,  H01L21/02112 ,  H01L21/0274 ,  H01L21/3065 ,  Y10T428/24612

Abstract: Provided herein is a method, including a) transferring an initial pattern of an initial template to a substrate; b) performing block copolymer self-assembly over the substrate with a density multiplication factor k; c) creating a subsequent pattern in a subsequent template with the density multiplication factor k; and d) repeating steps a)-c) with the subsequent template as the initial template until a design specification for the subsequent pattern with respect to pattern density and pattern resolution is met.

Abstract translation: 本文提供了一种方法，包括：a）将初始模板的初始图案转移到衬底; b）以密度倍增因子k在衬底上进行嵌段共聚物自组装; c）使用密度倍增因子k在后续模板中创建后续模式; 和d）重复步骤a）-c），随后的模板作为初始模板，直到满足关于模式密度和模式分辨率的后续模式的设计规范。

公开(公告)号：US20140113064A1

公开(公告)日：2014-04-24

申请号：US14141834

申请日：2013-12-27

Applicant: SEAGATE TECHNOLOGY LLC

Inventor： Hamid Ghazvini ,  David Kuo ,  Minh Huong Le ,  Kim Yang Lee ,  HongYing Wang ,  Nobuo Kurataka ,  Yautzong Hsu ,  Henry Hung Yang

IPC: G06K5/00

CPC classification number: G06K5/00 ,  G11B5/746 ,  G11B5/82 ,  G11B5/84 ,  G11B5/855 ,  G11B20/182 ,  G11B27/36 ,  G11B2220/2516

Abstract: A system and method of calibrating optical measuring equipment includes optically measuring discrete objects of a first known predictable pattern from a calibration apparatus, wherein the first known predictable pattern is a bit pattern. A recording surface optical reader is calibrated based on the optically measuring. Using the first known predictable pattern, contamination is filtered from the results of the optically measuring.

Abstract translation: 校准光学测量设备的系统和方法包括从校准装置光学测量第一已知可预测图案的离散物体，其中第一已知可预测图案是位图案。 基于光学测量校准记录表面光学读取器。 使用第一已知的可预测模式，从光学测量的结果中滤去污染物。

公开(公告)号：US20130208378A1

公开(公告)日：2013-08-15

申请号：US13835873

申请日：2013-03-15

Applicant: Seagate Technology, LLC

Inventor： Bing K. YEN ,  Jim Hennessey ,  Eric Freeman ,  Kim Yang Lee ,  David S. Kuo ,  Mark Ostrowski

IPC: G11B5/84

CPC classification number: G11B5/84 ,  B82Y10/00 ,  G11B5/743 ,  G11B5/82 ,  G11B5/855

Abstract: The invention relates to bit patterned recording media having a stop layer for chemical mechanical polishing. One embodiment of the present invention is a method of manufacturing a magnetic recording medium comprising the step of planarizing by chemical mechanical polishing until the stop layer is reached. The present invention also provides a magnetic recording medium having a stop layer.

Abstract translation: 本发明涉及具有用于化学机械抛光的停止层的位图形记录介质。 本发明的一个实施例是一种制造磁记录介质的方法，包括通过化学机械抛光进行平面化的步骤，直到达到停止层。 本发明还提供一种具有停止层的磁记录介质。