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    Cleaning method and cleaner
    32.
    发明申请
    Cleaning method and cleaner 失效
    清洁方法和清洁剂

    公开(公告)号：US20020005214A1

    公开(公告)日：2002-01-17

    申请号：US09892742

    申请日：2001-06-28

    Inventor： Hiroshi Tomita ,  Motoyuki Sato ,  Soichi Nadahara ,  Mitsuhiko Shirakashi ,  Kenya Ito

    IPC: B08B003/02

    CPC classification number: H01L21/67046 ,  B01F3/04099 ,  B01F3/0446 ,  B01F5/0476 ,  B01F2003/0439 ,  B01F2003/04886 ,  B01F2201/01 ,  B08B1/00 ,  B08B1/04 ,  B08B3/02 ,  Y10S134/902

    Abstract: To realize a substrate cleaning method which enables effective cleaning of a wafer having a recess thereon without causing any increase in cleaning cost. Ozone gas and ammonia water are supplied right above a wafer 7 having a recess thereon, a gas-dissolving liquid is produced by dissolving the ozone gas in the ammonia water, and the gas-dissolving liquid is used to carry out contact and non-contact types physical cleaning on the wafer.

    Abstract translation: 为了实现能够有效地清洁具有凹部的晶片的基板清洗方法，而不会导致清洁成本的任何增加。 在其上具有凹部的晶片7的正上方供给臭氧气体和氨水，通过将臭氧气体溶解在氨水中而制造气体溶解液，并且使用气体溶解液进行接触和非接触 在晶片上进行物理清洗。

    Dissolving gas in a liquid
    33.
    发明授权
    Dissolving gas in a liquid 失效
    溶于液体中的气体

    公开(公告)号：US4639340A

    公开(公告)日：1987-01-27

    申请号：US693937

    申请日：1985-01-23

    Applicant: Michael E. Garrett

    Inventor： Michael E. Garrett

    IPC: B01F1/00 ,  B01F3/04 ,  B01F3/08 ,  B01F5/02 ,  B01F5/04 ,  B01F5/10 ,  C02F3/12 ,  C02F3/26

    CPC classification number: C02F3/1294 ,  B01F3/0876 ,  B01F5/0206 ,  B01F5/0416 ,  B01F5/106 ,  C02F3/26 ,  B01F2003/04879 ,  B01F2201/01 ,  B01F3/04099 ,  Y02W10/15 ,  Y10S261/75 ,  Y10S261/78

    Abstract: In order to dissolve a gas such as oxygen in a liquid, typically aqueous, a stream of liquid is taken from tank 2 by a pump 10 and pressurized thereby. Oxygen is introduced into the stream via a conduit 18 upstream of a venturi 20. The resulting mixture of oxygen bubbles and liquid is accelerated from a sub-sonic to a super-sonic velocity as it flows through the venturi 20. The resultant shockwave is effective to reduce the size of the bubbles. The stream of liquid carrying oxygen bubbles dispersed therein is then transported at sub-sonic velocity along the conduit 12 to a sparge pipe 14 through which it is introduced into the main volume 4 of liquid into the tank 2. As the liquid passes through the orifices of the sparge pipe 14 so it is again accelerated to a super-sonic velocity and another shockwave is created thereby causing the bubbles to reduce in size such that they readily dissolve in or are consumed by the main volume of liquid.

    Abstract translation: 为了将诸如氧的气体溶解在通常为水的液体中，通过泵10从罐2取出液体流并将其加压。 氧气通过文丘里管20上游的导管18引入流中。所产生的氧气泡和液体的混合物在流经文丘里管20时从亚声速加速到超声波速度。所得到的冲击波是有效的 以减小气泡的大小。 然后分散在其中的携带氧气泡的液流沿着导管12以亚声速传送到喷射管14，通过该喷射管14将其引入液体的主体积4进入罐2.当液体通过孔 的喷射管14，所以它再次被加速到超声波速度，并且产生另一个冲击波，从而导致气泡的尺寸减小，使得它们容易溶解或被主体积的液体消耗。

    Carbonic water production apparatus and carbonic water production method
    35.
    发明授权
    Carbonic water production apparatus and carbonic water production method 失效
    碳酸水生产设备和碳酸水生产方法

    公开(公告)号：US07533873B2

    公开(公告)日：2009-05-19

    申请号：US11808529

    申请日：2007-06-11

    Applicant: Yoshinori Nagasaka ,  Hiroki Sakakibara ,  Yuichi Morioka ,  Katsuya Sanai ,  Michio Kanno ,  Satoshi Takeda

    Inventor： Yoshinori Nagasaka ,  Hiroki Sakakibara ,  Yuichi Morioka ,  Katsuya Sanai ,  Michio Kanno ,  Satoshi Takeda

    IPC: B01F3/04

    CPC classification number: B01F3/04269 ,  A61H33/02 ,  A61H33/60 ,  A61H35/006 ,  A61H2033/145 ,  B01F3/04808 ,  B01F3/04815 ,  B01F5/0465 ,  B01F5/106 ,  B01F13/0035 ,  B01F2003/04404 ,  B01F2003/04893 ,  B01F2201/01 ,  B01F2215/0034 ,  Y10S261/07

    Abstract: A carbonic water production apparatus equipped with a carbonic acid gas dissolving apparatus and a circulation pump, wherein water in a bath is circulated by the circulation pump, and carbonic acid gas is fed into the carbonic acid gas dissolving apparatus to dissolve the carbonic acid gas in the water, and wherein the circulation pump is a positive-displacement metering pump having a self-priming ability; a carbonic water production method using this apparatus; a carbonic water production method including an early step for producing a carbonic water and a concentration maintaining step for the carbonic water; a carbonic water production apparatus equipped with a device for controlling the feeding pressure of carbonic water gas so as to give an intended concentration of carbonic acid gas; a carbonic water production apparatus which automatically discharges out a drain; and a carbonic water production apparatus combined with a portable foot bath.

    Abstract translation: 一种装有碳酸气体溶解装置和循环泵的碳水生产装置，其中通过循环泵循环浴中的水，并且将碳酸气体进料到碳酸气体溶解装置中以将碳酸气体溶解在 水，并且其中所述循环泵是具有自吸能力的正排量计量泵; 使用该装置的碳水生产方法; 一种碳水生产方法，包括生产碳水的早期步骤和碳水的浓缩维持步骤; 配备有用于控制碳水煤气的供给压力以产生预定浓度的碳酸气体的装置的碳水生产装置; 自动排出排水的碳水生产设备; 以及与便携式足浴组合的碳水生产设备。

    Apparatus for supplying water containing dissolved gas
    36.
    发明授权
    Apparatus for supplying water containing dissolved gas 有权
    用于供给含有溶解气体的水的装置

    公开(公告)号：US07329312B2

    公开(公告)日：2008-02-12

    申请号：US11653664

    申请日：2007-01-16

    Applicant: Hiroshi Morita ,  Junichi Ida ,  Kazumi Tsukamoto

    Inventor： Hiroshi Morita ,  Junichi Ida ,  Kazumi Tsukamoto

    IPC: B01D19/00 ,  B01F1/00 ,  C02F1/20

    CPC classification number: B01F15/0412 ,  B01F3/0446 ,  B01F3/04985 ,  B01F15/00123 ,  B01F15/00136 ,  B01F15/00344 ,  B01F15/0479 ,  B01F2201/01 ,  B01F2215/0036 ,  B01F2215/0096 ,  C02F2103/346

    Abstract: An apparatus for supplying water containing dissolved gas comprising a flowmeter for measuring a flowrate of pure or ultra-pure water and a mechanism for controlling a flowrate, a means for adjusting an amount of water which adjusts an amount of the pure or ultra-pure water supplied to the apparatus for dissolving a gas, a tank which receives the water containing dissolved gas in an excessive amount which is not used at a point of use, a piping system through which the water containing dissolved gas glows from the tank towards the point of use and the water containing dissolved gas in an excessive amount returns to the tank, a piping system for supplying the water containing dissolved gas to the tank, and a controlling means for adjusting an amount of water based on a water level in the tank.

    Abstract translation: 一种用于供给含有溶解气体的水的装置，包括用于测量纯净水或超纯水的流量的流量计和用于控制流量的机构，用于调节调节纯水或超纯水量的水量的装置 供给到用于溶解气体的装置，容纳含有溶解气体的水的罐，其中过量的水在未使用的点上被使用;管道系统，其中含有溶解气体的水从罐发出朝向 并且含有过量的溶解气体的水返回到罐中，用于将含有溶解气体的水供给到罐的管道系统，以及用于基于罐中的水位调节水量的控制装置。

    Process for producing chlorine dioxide
    39.
    发明申请
    Process for producing chlorine dioxide 审中-公开
    二氧化氯生产工艺

    公开(公告)号：US20050084429A1

    公开(公告)日：2005-04-21

    申请号：US10912548

    申请日：2004-08-06

    Applicant: Gary Charles ,  Michael Burke

    Inventor： Gary Charles ,  Michael Burke

    IPC: B01F3/04 ,  B01F5/00 ,  B01F5/04 ,  B01F5/18 ,  B01J19/26 ,  C01B11/02 ,  B01F1/00

    CPC classification number: C01B11/026 ,  B01F3/04099 ,  B01F5/0057 ,  B01F5/0415 ,  B01F5/043 ,  B01F5/18 ,  B01F2201/01 ,  B01J19/26 ,  B01J2219/00162 ,  B01J2219/00164

    Abstract: The invention concerns a process and an apparatus for continuously producing chlorine dioxide, the process comprising the steps of: feeding chlorate ions, acid and hydrogen peroxide as aqueous solutions to a reactor; reducing chlorate ions in the reector to chlorine dioxide, thereby forming a product stream in the reactor containing chlorine dioxide; feeding motive water to an eductor comprising a nozzle; bringing the motive water to flow through the nozzle and causing it to flow further through the eductor in an at least partially spiral or helical manner, transferring the product stream from the reactor to the eductor and mixing it with the motive water and thereby forming a diluted aqueous solution containing chlorine dioxide, and; withdrawing the diluted aqueous solution containing chlorine dioxide from the eductor.

    Abstract translation: 本发明涉及连续生产二氧化氯的方法和设备，该方法包括以下步骤：将氯酸根离子，酸和过氧化氢作为水溶液加入到反应器中; 将二极管中的氯酸根离子还原为二氧化氯，从而在含有二氧化氯的反应器中形成产物流; 将动水输送到包括喷嘴的喷射器; 使动水流过喷嘴并使其以至少部分螺旋或螺旋方式进一步流过喷射器，将产物流从反应器转移到喷射器并将其与动水混合，从而形成稀释的 含有二氧化氯的水溶液，和 从喷射器中取出含有二氧化氯的稀释水溶液。

    Device for introducing a gaseous substance in a fluid and use thereof
    40.
    发明授权
    Device for introducing a gaseous substance in a fluid and use thereof 失效
    用于将气态物质引入流体中并用于其中的装置

    公开(公告)号：US06767006B1

    公开(公告)日：2004-07-27

    申请号：US10009303

    申请日：2002-06-06

    Applicant: Marco Tripepi

    Inventor： Marco Tripepi

    IPC: B01F304

    CPC classification number: B01F5/0413 ,  B01F3/04099 ,  B01F2201/01 ,  B01F2215/0086

    Abstract: Solubilizing device of a gas into a fluid includes the following components in combination: at least a first pipe section (1) convergent at the end thereof; a second pipe section (2), with a cross section smaller than that of the first pipe section (1), coaxial and integral thereto; a third pipe section (3) divergent for the entire length thereof, coaxial to the second pipe section (2), of a cross section intermediate between the ones of the first and of the second pipe section, the second and the third pipe section being separated by a mixing chamber, provided with a gas introducer (5) and (6), substantially slanted of a ≦90° angle with respect to the axis of the pipe section (2), for the inlet and the adjustment of the gaseous substance to be admixed to the fluid, respectively. The invention also relates to the use of the aforesaid device in various technological fields. The figure shows an embodiment of the device according to the invention.

    Abstract translation: 将气体的增溶装置组装到流体中，组合有以下部件：至少在其端部会聚的第一管部（1）;具有比第一管部的截面小的截面的第二管部（2） （1），同轴并且与其成一体;第三管段（3），其在与第二管段（2）同轴的整个长度上发散，其中第一和第二管段 ，第二和第三管段被混合室隔开，该混合室设置有相对于管段（2）的轴线基本上倾斜的<= 90°角的气体引入器（5）和（6） 用于分别将入口和气态物质的调节与流体混合。 本发明还涉及上述装置在各种技术领域中的应用。 该图示出了根据本发明的装置的实施例。

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