Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures
    31.
    发明授权
    Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures 有权
    用于椭偏仪,反射测量和散射测量的干涉测量方法,包括薄膜结构的表征

    公开(公告)号:US07403289B2

    公开(公告)日:2008-07-22

    申请号:US11760163

    申请日:2007-06-08

    Abstract: A method including: imaging test light emerging from a test object over a range of angles to interfere with reference light on a detector, wherein the test and reference light are derived from a common source; for each of the angles, simultaneously varying an optical path length difference from the source to the detector between interfering portions of the test and reference light at a rate that depends on the angle at which the test light emerges from the test object; and determining an angle-dependence of an optical property of the test object based on the interference between the test and reference light as the optical path length difference is varied for each of the angles.

    Abstract translation: 一种方法,包括:对在测试对象上出现的角度范围内的测试光进行成像,以干涉检测器上的参考光,其中测试和参考光源自公共源; 对于每个角度,同时改变与测试光和参考光的干涉部分之间的光源与检测器之间的光程长度差,其速率取决于测试光从测试对象出射的角度; 并且基于作为光路长度差的测试参考光之间的干涉测定被测物体的光学特性的角度依赖性,对于每个角度而变化。

    Heterodyne Photonic Dispersion and Loss Analyzer
    32.
    发明申请
    Heterodyne Photonic Dispersion and Loss Analyzer 审中-公开
    Heterodyne光子色散和损耗分析仪

    公开(公告)号:US20080100847A1

    公开(公告)日:2008-05-01

    申请号:US11553422

    申请日:2006-10-26

    CPC classification number: G01B9/0201 G01B9/02004 G01B9/02081 G01B2290/70

    Abstract: A method and apparatus for determining the optical parameters of a device under test (DUT) is disclosed. A first portion of an optical signal is modulated to generate a first modulated signal. The first modulated signal is applied to the DUT to output a test signal. A second portion of the optical signal is modulated to create a reference signal. The test signal and reference signal are optically combined into a combined signal. An electrical signal generated from the combined signal is processed to determine at least one optical parameter of the DUT. Processing the electrical signal includes demodulating the electrical signal.

    Abstract translation: 公开了一种用于确定待测器件(DUT)的光学参数的方法和装置。 光信号的第一部分被调制以产生第一调制信号。 将第一调制信号施加到DUT以输出测试信号。 光信号的第二部分被调制以产生参考信号。 测试信号和参考信号被光学地组合成组合信号。 从组合信号产生的电信号被处理以确定DUT的至少一个光学参数。 处理电信号包括解调电信号。

    Interferometry Method for Ellipsometry, Reflectometry, and Scatterometry Measurements, Including Characterization of Thin Film Structures
    35.
    发明申请
    Interferometry Method for Ellipsometry, Reflectometry, and Scatterometry Measurements, Including Characterization of Thin Film Structures 有权
    用于椭圆偏振,反射和散射测量的干涉测量方法,包括薄膜结构的表征

    公开(公告)号:US20070247637A1

    公开(公告)日:2007-10-25

    申请号:US11760163

    申请日:2007-06-08

    Applicant: Peter de Groot

    Inventor: Peter de Groot

    Abstract: A method including: imaging test light emerging from a test object over a range of angles to interfere with reference light on a detector, wherein the test and reference light are derived from a common source; for each of the angles, simultaneously varying an optical path length difference from the source to the detector between interfering portions of the test and reference light at a rate that depends on the angle at which the test light emerges from the test object; and determining an angle-dependence of an optical property of the test object based on the interference between the test and reference light as the optical path length difference is varied for each of the angles.

    Abstract translation: 一种方法,包括:对在测试对象上出现的角度范围内的测试光进行成像,以干涉检测器上的参考光,其中测试和参考光源自公共源; 对于每个角度,同时改变与测试光和参考光的干涉部分之间的光源与检测器之间的光程长度差,其速率取决于测试光从测试对象出射的角度; 并且基于作为光路长度差的测试参考光之间的干涉测定被测物体的光学特性的角度依赖性,对于每个角度而变化。

    CLUTTER REJECTION FILTERS FOR OPTICAL DOPPLER TOMOGRAPHY
    36.
    发明申请
    CLUTTER REJECTION FILTERS FOR OPTICAL DOPPLER TOMOGRAPHY 审中-公开
    用于光学多普勒血管造影术的离心器止血滤器

    公开(公告)号:US20070216908A1

    公开(公告)日:2007-09-20

    申请号:US11688142

    申请日:2007-03-19

    Abstract: In Optical Doppler tomography (ODT), or color Doppler optical coherence tomography, the signal component of primary interest arises from moving scatterers, such as flowing blood cells in blood vessels. Clutter rejection filters are provided and used to remove undesired components from the ODT signal, such as clutter induced by stationary scatterers (e.g., the relatively stationary tissue of a blood vessel wall). Empirical results indicate that such clutter rejection filters can be employed to achieve ODT images from which blood vessel diameter can more accurately be estimated than images obtained using conventional ODT techniques. Further, Doppler images obtained using the clutter rejection filter technique disclosed herein exhibit fewer background artifacts induced by the relative motion of stationary scatterers with respect to the scanning probe.

    Abstract translation: 在光学多普勒断层扫描(ODT)或彩色多普勒光学相干断层扫描中,主要关注的信号分量来自运动散射体,如血管中的血细胞流动。 提供杂波拒绝滤波器并用于从ODT信号中去除不期望的分量,例如由固定散射体(例如,血管壁的相对静止的组织)引起的杂波。 实证结果表明,这种杂波抑制滤波器可用于实现ODT图像,从而可以比使用常规ODT技术获得的图像更准确地估计血管直径。 此外,使用本文公开的杂波抑制滤波器技术获得的多普勒图像表现出较少的相对于扫描探针的固定散射体的相对运动引起的背景伪像。

    Phase shifting imaging module and method of imaging
    38.
    发明申请
    Phase shifting imaging module and method of imaging 失效
    相移成像模块及成像方法

    公开(公告)号:US20070133009A1

    公开(公告)日:2007-06-14

    申请号:US11300553

    申请日:2005-12-14

    Abstract: A phase shifting imaging module in a handheld imager is provided. The phase shifting imaging module includes a first beam splitter configured to split an image radiation beam into first and second image radiation beams. It also includes a first prism configured to align the first and second image radiation beams, and a second beam splitter configured to split the first and second image radiation beams into four image radiation beams. A second prism aligns the four image radiation beams. A phase mask introduces phase retardation between the four image radiation beams, resulting in four phase shifted image radiation beams. A pixilated sensor generates image data based upon each of the four phase shifted image radiation beams.

    Abstract translation: 提供了一种手持式成像器中的相移成像模块。 相移成像模块包括被配置为将图像辐射束分割成第一和第二图像辐射束的第一分束器。 它还包括被配置为对齐第一和第二图像辐射束的第一棱镜,以及被配置为将第一和第二图像辐射束分成四个图像辐射束的第二分束器。 第二棱镜对准四个图像辐射束。 相位掩模引入四个图像辐射束之间的相位延迟,导致四个相移的图像辐射束。 像素化传感器基于四个相移图像辐射束中的每一个产生图像数据。

    POLARIZATION SENSITIVE OPTICAL COHERENCE DEVICE FOR OBTAINING BIREFRINGENCE INFORMATION
    39.
    发明申请
    POLARIZATION SENSITIVE OPTICAL COHERENCE DEVICE FOR OBTAINING BIREFRINGENCE INFORMATION 审中-公开
    极化敏感光学相干装置获得双向信息

    公开(公告)号:US20070109554A1

    公开(公告)日:2007-05-17

    申请号:US11559238

    申请日:2006-11-13

    Abstract: Polarization-sensitive optical coherence devices for obtaining birefringence information are presented. The polarization state of the optical radiation outgoing from the optical radiation source is controlled such that the polarization state of the optical radiation incident on a sample has a 45 degrees angle with respect to the anisotropy axis of the sample. A combination optical radiation is produced in a secondary interferometer by combining a sample portion with a reference portion of optical radiation reflected from a tip of an optical fiber of the optical fiber probe. Subject to a preset optical path length difference of the arms of the secondary interferometer, a cross-polarized, and/or a parallel-polarized component of the combined optical radiation, are selected. Time domain and frequency domain registration are provided. The performance of the device is substantially independent from the orientation of the optical fiber probe with respect to the sample.

    Abstract translation: 提出了用于获得双折射信息的偏振敏感光学相干装置。 控制从光辐射源出射的光辐射的偏振状态,使得入射到样品上的光辐射的偏振状态相对于样品的各向异性轴具有45度的角度。 通过将样品部分与从光纤探针的光纤的尖端反射的光辐射的参考部分组合,在二次干涉仪中产生组合光辐射。 受到二次干涉仪的臂的预设光程长度差异,组合光辐射的交叉极化和/或平行偏振分量的选择。 提供时域和频域注册。 器件的性能基本上与光纤探针相对于样品的取向无关。

    Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures
    40.
    发明申请
    Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures 有权
    用于椭偏仪,反射测量和散射测量的干涉测量方法,包括薄膜结构的表征

    公开(公告)号:US20070081167A1

    公开(公告)日:2007-04-12

    申请号:US11542617

    申请日:2006-10-03

    Applicant: Peter De Groot

    Inventor: Peter De Groot

    Abstract: A method including: imaging test light emerging from a test object over a range of angles to interfere with reference light on a detector, wherein the test and reference light are derived from a common source; for each of the angles, simultaneously varying an optical path length difference from the source to the detector between interfering portions of the test and reference light at a rate that depends on the angle at which the test light emerges from the test object; and determining an angle-dependence of an optical property of the test object based on the interference between the test and reference light as the optical path length difference is varied for each of the angles.

    Abstract translation: 一种方法,包括:对在测试对象上出现的角度范围内的测试光进行成像,以干涉检测器上的参考光,其中测试和参考光源自公共源; 对于每个角度,同时改变与测试光和参考光的干涉部分之间的光源与检测器之间的光程长度差,其速率取决于测试光从测试对象出射的角度; 并且基于作为光路长度差的测试参考光之间的干涉测定被测物体的光学特性的角度依赖性,对于每个角度而变化。

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