公开(公告)号：US09068952B2

公开(公告)日：2015-06-30

申请号：US12584294

申请日：2009-09-02

Applicant: Aleksey Petrenko ,  Christian Wolters ,  Zhongping Cai ,  Anatoly Romanovsky ,  Bret Whiteside

Inventor： Aleksey Petrenko ,  Christian Wolters ,  Zhongping Cai ,  Anatoly Romanovsky ,  Bret Whiteside

IPC: G01N21/88 ,  G01N21/95 ,  G02B27/09

CPC classification number: G01N21/9501 ,  G01N21/8806 ,  G01N2201/06113 ,  G01N2201/0633 ,  G02B27/0972

Abstract: A method and apparatus for producing high frequency dynamically focused oblique laser illumination for a spinning wafer inspection system. The focus is changed by changing the beam direction incidence angle so as to bring focal spot onto the wafer surface.Disclosed herein is a system and method for automatic beam shaping (i.e., spot size) and steering (i.e., position) for a spinning wafer inspection system, combined into a single module. Also disclosed is a method and system for measuring the beam position/size/shape and angle with sufficient resolution to make corrections using feedback from the monitor.

Abstract translation: 一种用于生产用于旋转晶片检测系统的高频动态聚焦倾斜激光照明的方法和装置。 通过改变光束方向入射角来改变焦点，以便将焦斑引入晶片表面。 本文公开了一种用于旋转晶片检查系统的自动光束成形（即光点尺寸）和转向（即，位置）的系统和方法，其组合成单个模块。 还公开了一种用于以足够的分辨率测量光束位置/尺寸/形状和角度以使用来自监视器的反馈进行校正的方法和系统。

公开(公告)号：US20150077533A1

公开(公告)日：2015-03-19

申请号：US14488966

申请日：2014-09-17

Applicant: The Procter & Gamble Company

Inventor： Mathias HERRLEIN ,  Thomas HIRN ,  Knut MEINERT ,  Hartmut SCHMIDT ,  Amo ZINKE

IPC: G06T5/00 ,  G06T5/50 ,  H04N5/225

CPC classification number: G06T5/005 ,  G01N21/4738 ,  G01N2021/0339 ,  G01N2021/4764 ,  G01N2201/0633 ,  G06T2207/10024 ,  H04N5/2256

Abstract: Apparatus and method for rendering an image of a fibrous material. The method includes providing parametric fibrous material optical properties derived from actual material fiber samples via the apparatus; providing a parametric virtual light environment; providing a virtual fibrous material array; and rendering an image of the virtual fibrous material array according to the interaction of the parametric fibrous material properties and the parametric virtual light environment.

Abstract translation: 用于渲染纤维材料的图像的装置和方法。 该方法包括通过该装置提供从实际材料纤维样品衍生的参数纤维材料光学性质; 提供参数虚拟光环境; 提供虚拟纤维材料阵列; 以及根据参数纤维材料性质和参数虚拟光环境的相互作用呈现虚拟纤维材料阵列的图像。

公开(公告)号：US20140118743A1

公开(公告)日：2014-05-01

申请号：US13859759

申请日：2013-04-10

Applicant: LITE-ON IT CORPORATION

Inventor： Yu-Jin Kao ,  Yi-Kai Cheng ,  Shih-Chang Wang ,  Ta-Hsiang Wang ,  Timothy Liu

IPC: G01N21/59

CPC classification number: G01N21/253 ,  G01N2201/0415 ,  G01N2201/0626 ,  G01N2201/0633

Abstract: An optical measuring apparatus comprising at least one light emitting unit, a stage, at least one lens, and at least one light detector is provided. The light emitting unit emits a light beam. The stage contains accommodating spaces. The accommodating spaces move to the transmission path of the light beam in turn. The lens is located between the light emitting unit and the stage, whose orthogonal projection on the stage appears substantially to be a polygon. When one of the accommodating spaces moves to the transmission path of the light beam, a perpendicular bisector half line of each side of the polygon is not overlapped with another adjacent accommodating space of the accommodating spaces. An optical measuring method is also provided.

Abstract translation: 提供了包括至少一个发光单元，台，至少一个透镜和至少一个光检测器的光学测量装置。 发光单元发射光束。 舞台包含容纳空间。 容纳空间依次移动到光束的传输路径。 透镜位于发光单元和舞台之间，其在舞台上的正交投影基本上看起来是多边形。 当容纳空间中的一个移动到光束的传输路径时，多边形的每一侧的垂直二等分线半线不与容纳空间的另一个相邻的容纳空间重叠。 还提供了一种光学测量方法。

公开(公告)号：US08594143B2

公开(公告)日：2013-11-26

申请号：US12628578

申请日：2009-12-01

Applicant: Bert Willing ,  Rui Protasio ,  Mathieu Gaillard

Inventor： Bert Willing ,  Rui Protasio ,  Mathieu Gaillard

IPC: H01S3/04

CPC classification number: G01N21/3504 ,  G01J3/10 ,  G01J3/42 ,  G01J2003/423 ,  G01N21/39 ,  G01N2021/399 ,  G01N2201/0612 ,  G01N2201/0633 ,  H01S5/02212 ,  H01S5/02296 ,  H01S5/02415 ,  H01S5/02438 ,  H01S5/0267 ,  H01S5/18388

Abstract: The invention relates to a laser diode structure, specifically for use in gas detection, with a hermetically sealed housing with electrical connections having a bottom and a window. A laser diode chip and a temperature control system for the laser diode chip are provided in the housing. A thermo element in the form of a Peltier element forms the temperature control system, and is connected via a lower flat surface to the bottom of the housing and via an upper flat surface to the laser diode chip, with a temperature-controlled beam shaping element as collimator provided between the laser diode chip and the window of the housing that acts on a laser beam emerging from a laser aperture of the laser diode chip before it passes through the window. The beam shaping element is in contact with the laser diode chip and is preferably connected via a boundary surface to the laser aperture with surface-to-surface contact or adhesively, or is made in one piece together with the laser aperture.

Abstract translation: 本发明涉及一种专门用于气体检测的激光二极管结构，其具有带有底部和窗口的电连接的气密密封外壳。 激光二极管芯片和用于激光二极管芯片的温度控制系统设置在壳体中。 形式为Peltier元件的热元件形成温度控制系统，并通过下平面连接到壳体的底部，并通过上平面连接到激光二极管芯片，具有温度控制的光束成形元件 作为在激光二极管芯片和壳体的窗口之间提供的准直器，其作用于在激光二极管芯片通过窗口之前从激光二极管芯片的激光孔径出射的激光束。 光束成形元件与激光二极管芯片接触，并且优选地通过边界面与表面接触或粘合地连接到激光器孔，或者与激光孔一起制成一个部件。

公开(公告)号：US20130010280A1

公开(公告)日：2013-01-10

申请号：US13542100

申请日：2012-07-05

Applicant: Angelo W. Palmieri ,  Donald A. Palmieri

Inventor： Angelo W. Palmieri ,  Donald A. Palmieri

IPC: G01N21/87

CPC classification number: G01N21/87 ,  G01N2201/02 ,  G01N2201/06113 ,  G01N2201/0633

Abstract: A device for producing a reproducible identification pattern of a polished gemstone includes light directing means for directing a focused beam of light onto a gemstone orientated in a particular known manner to produce an output of the internal refraction and reflection characteristics of the gemstone including reflected light beams having particular locations, sizes and intensities. The device also includes automated means for changing a position of the gemstone relative to the focused beam of light; and also a means for recording the output in a manner to record the relative size and location of the reflected light beams.

Abstract translation: 用于产生抛光宝石的可再现识别图案的装置包括用于将聚焦光束引导到以特定已知方式定向的宝石的光引导装置，以产生包括反射光束的宝石的内部折射和反射特性的输出 具有特定的位置，大小和强度。 该装置还包括用于改变宝石相对于聚焦光束的位置的自动装置; 以及用于以记录反射光束的相对大小和位置的方式记录输出的装置。

公开(公告)号：US20090268202A1

公开(公告)日：2009-10-29

申请号：US12499049

申请日：2009-07-07

Applicant: Gregg A. Wagner

Inventor： Gregg A. Wagner

IPC: G01N21/49 ,  B01J19/12

CPC classification number: G01N15/0205 ,  G01N21/05 ,  G01N21/51 ,  G01N2021/0346 ,  G01N2201/0612 ,  G01N2201/0633 ,  G01N2201/0642

Abstract: A liquid particle counter for optically detecting an unconstrained particle suspended in a flowing liquid includes a sample chamber having a liquid inlet and a liquid outlet; a laser diode module producing a symmetrically collimated laser beam; a beam shaping optical system directing the laser beam at the sample chamber; and an optical detector located to detect light scattered by the particle in the sample chamber, the detector producing an electric signal characteristic of a parameter of the particle. The laser beam has an energy of a watt or more and passed through an aperture in a black glass aperture element in the sample chamber. The black glass aperture element removes diffracted and stray light from the beam without damage to the sample chamber.

Abstract translation: 用于光学检测悬浮在流动液体中的无约束粒子的液体颗粒计数器包括具有液体入口和液体出口的样品室; 产生对称准直激光束的激光二极管模块; 将激光束引导到样品室的光束整形光学系统; 以及光检测器，用于检测由样品室中的颗粒散射的光，该检测器产生特征为该粒子参数的电信号。 激光束具有瓦特或更高的能量，并且通过样品室中的黑色玻璃孔径元件中的孔。 黑色玻璃孔径元件从梁中去除衍射和杂散光，而不损坏样品室。

公开(公告)号：US07576857B2

公开(公告)日：2009-08-18

申请号：US10923339

申请日：2004-08-20

Applicant: Gregg A. Wagner

Inventor： Gregg A. Wagner

IPC: G01N21/00

CPC classification number: G01N15/0205 ,  G01N21/05 ,  G01N21/51 ,  G01N2021/0346 ,  G01N2201/0612 ,  G01N2201/0633 ,  G01N2201/0642

Abstract: A liquid particle counter for optically detecting an unconstrained particle suspended in a flowing liquid includes a sample chamber having a liquid inlet and a liquid outlet; a laser diode module producing a symmetrically collimated laser beam; a beam shaping optical system directing the laser beam at the sample chamber; and an optical detector located to detect light scattered by the particle in the sample chamber, the detector producing an electric signal characteristic of a parameter of the particle. The laser beam has an energy of a watt or more and passed through an aperture in a black glass aperture element in the sample chamber. The black glass aperture element removes diffracted and stray light from the beam without damage to the sample chamber.

Abstract translation: 用于光学检测悬浮在流动液体中的无约束粒子的液体颗粒计数器包括具有液体入口和液体出口的样品室; 产生对称准直激光束的激光二极管模块; 将激光束引导到样品室的光束整形光学系统; 以及光检测器，用于检测由样品室中的颗粒散射的光，该检测器产生特征为该粒子参数的电信号。 激光束具有瓦特或更高的能量，并且通过样品室中的黑色玻璃孔径元件中的孔。 黑色玻璃孔径元件从梁中去除衍射和杂散光，而不损坏样品室。

公开(公告)号：US5973842A

公开(公告)日：1999-10-26

申请号：US27571

申请日：1998-02-23

Applicant: Peter E. Spangenberg

Inventor： Peter E. Spangenberg

IPC: G01N15/14 ,  G02B27/10

CPC classification number: G01N15/1436 ,  G01N2201/0633

Abstract: An optical illuminator assembly for an analytical instrument, such as a clinical hematology or a flow cytometer instrument, and method of aligning the components of the illuminator assembly and orienting the illuminator assembly. The illuminator assembly includes a plurality of optical components, such as a laser source, e.g., a laser diode, optionally a spatial filter, a beam shaping aperture, and a focussing lens. The optical components are mounted in or to a housing and are internally oriented with respect to the housing to produce a focussed laser beam output. The housing is in turn mounted on an alignment mechanism which can move the focussed beam in four degrees of freedom, thereby to direct the focussed beam to a particular location. Thus, a factory alignment and a low cost prealigned optical illuminator assembly is obtained, which can be easily oriented for use in an instrument.

Abstract translation: 用于分析仪器的光学照明器组件，例如临床血液学或流式细胞仪器，以及对准照明器组件的组件和定向照明器组件的方法。 照明器组件包括多个光学部件，例如激光源，例如激光二极管，可选地是空间滤光器，光束整形孔和聚焦透镜。 光学部件安装在壳体中或安装到壳体中并且相对于壳体在内部定向以产生聚焦的激光束输出。 壳体又安装在对准机构上，该对准机构可以以四个自由度移动聚焦的光束，从而将聚焦的光束引导到特定的位置。 因此，获得了工厂对准和低成本的预对准光学照明器组件，其可以容易地定向用于仪器。

公开(公告)号：US5745308A

公开(公告)日：1998-04-28

申请号：US692930

申请日：1996-07-30

Applicant: Peter E. Spangenberg

Inventor： Peter E. Spangenberg

IPC: G01N15/14 ,  G02B7/02

CPC classification number: G01N15/1436 ,  G01N2201/0633

Abstract: An optical illuminator assembly for an analytical instrument, such as a clinical hematology or a flow cytometer instrument, and method of aligning the components of the illuminator assembly and orienting the illuminator assembly. The illuminator assembly includes a plurality of optical components, such as a laser source, e.g., a laser diode, optionally a spatial filter, a beam shaping aperture, and a focussing lens. The optical components are mounted in or to a housing and are internally oriented with respect to the housing to produce a focussed laser beam output. The housing is in turn mounted on an alignment mechanism which can move the focussed beam in four degrees of freedom, thereby to direct the focussed beam to a particular location. Thus, a factory alignment and a low cost prealigned optical illuminator assembly is obtained, which can be easily oriented for use in an instrument.

Abstract translation: 用于分析仪器的光学照明器组件，例如临床血液学或流式细胞仪器，以及对准照明器组件的组件和定向照明器组件的方法。 照明器组件包括多个光学部件，例如激光源，例如激光二极管，可选地是空间滤光器，光束整形孔和聚焦透镜。 光学部件安装在壳体中或安装到壳体中并且相对于壳体在内部定向以产生聚焦的激光束输出。 壳体又安装在对准机构上，该对准机构可以以四个自由度移动聚焦的光束，从而将聚焦的光束引导到特定的位置。 因此，获得了工厂对准和低成本的预对准光学照明器组件，其可以容易地定向用于仪器。

公开(公告)号：US12112469B2

公开(公告)日：2024-10-08

申请号：US17597433

申请日：2019-07-09

Applicant: LG ELECTRONICS INC.

Inventor： Seunghwan Seok ,  Hyohyung Lee ,  Inbum Yang ,  Bongwoon Choi

IPC: G06T7/00 ,  G01N21/95 ,  H01L27/15 ,  H01L33/00 ,  H01L33/44

CPC classification number: G06T7/001 ,  G01N21/95 ,  H01L27/156 ,  H01L33/005 ,  H01L33/44 ,  G01N2201/062 ,  G01N2201/0633 ,  G06T2207/10024 ,  G06T2207/10152 ,  G06T2207/20221 ,  G06T2207/30148 ,  G06T2207/30168

Abstract: The present invention relates to an automatic display pixel inspection system and method and, particularly, to an automatic inspection system and method for inspecting defects occurring in the process of assembling semiconductor light emitting devices in a fluid.