Dynamic illumination in optical inspection systems
    31.
    发明授权
    Dynamic illumination in optical inspection systems 有权
    光学检测系统中的动态照明

    公开(公告)号:US07973921B2

    公开(公告)日:2011-07-05

    申请号:US12145708

    申请日:2008-06-25

    Abstract: An optical inspection system or tool can be configured to inspect objects using dynamic illumination where one or more characteristics of the illumination is/are adjusted to meet the inspection needs of different areas. For example, the illumination intensity may be increased or decreased as the tool inspects areas of memory and periphery features in a wafer die. In some embodiments, the adjustment can be based on data obtained during a pre-inspection setup sequence in which images taken based on illumination with varying characteristics are evaluated for suitability in the remainder of the inspection process.

    Abstract translation: 光学检查系统或工具可以被配置为使用动态照明来检查物体,其中调整照明的一个或多个特征以满足不同区域的检查需要。 例如,当工具检查晶片管芯中的存储器区域和外围特征时,可以增加或减小照明强度。 在一些实施例中,调整可以基于在预检查设置顺序期间获得的数据,其中基于具有变化特性的照明拍摄的图像被评估为在检查过程的其余部分中的适用性。

    Spectroscopic chemical analysis methods and apparatus
    32.
    发明授权
    Spectroscopic chemical analysis methods and apparatus 有权
    光谱化学分析方法和仪器

    公开(公告)号:US07800753B1

    公开(公告)日:2010-09-21

    申请号:US12399743

    申请日:2009-03-06

    Abstract: Spectroscopic chemical analysis methods and apparatus are disclosed which employ deep ultraviolet (e.g. in the 200 nm to 300 nm spectral range) electron beam pumped wide bandgap semiconductor lasers, incoherent wide bandgap semiconductor light emitting devices, and hollow cathode metal ion lasers to perform non-contact, non-invasive detection of unknown chemical analytes. These deep ultraviolet sources enable dramatic size, weight and power consumption reductions of chemical analysis instruments. Chemical analysis instruments employed in some embodiments include capillary and gel plane electrophoresis, capillary electrochromatography, high performance liquid chromatography, flow cytometry, flow cells for liquids and aerosols, and surface detection instruments. In some embodiments, Raman spectroscopic detection methods and apparatus use ultra-narrow-band angle tuning filters, acousto-optic tuning filters, and temperature tuned filters to enable ultra-miniature analyzers for chemical identification. In some embodiments Raman analysis is conducted simultaneously with native fluorescence spectroscopy to provide high levels of sensitivity and specificity in the same instrument.

    Abstract translation: 公开了使用深紫外线(例如在200nm至300nm光谱范围内)的电子束泵浦宽带隙半导体激光器,非相干宽带隙半导体发光器件和空心阴极金属离子激光器的光谱化学分析方法和装置, 接触,未知化学分析物的非侵入性检测。 这些深紫外线源可以显着降低化学分析仪器的体积,重量和功耗。 在一些实施方案中使用的化学分析仪器包括毛细管和凝胶平面电泳,毛细管电色谱,高效液相色谱,流式细胞术,液体和气溶胶流动池以及表面检测仪器。 在一些实施例中,拉曼光谱检测方法和装置使用超窄带角度调谐滤波器,声光调谐滤波器和温度调节滤波器,以使超微型分析仪能够进行化学鉴定。 在一些实施方案中,拉曼分析与天然荧光光谱同时进行,以在同一仪器中提供高水平的灵敏度和特异性。

    Method and device for characterizing analyte using electro-optically modulated surface plasmon resonance based on phase detection
    33.
    发明授权
    Method and device for characterizing analyte using electro-optically modulated surface plasmon resonance based on phase detection 失效
    基于相位检测使用电光调制表面等离子体共振来表征分析物的方法和装置

    公开(公告)号:US07728979B2

    公开(公告)日:2010-06-01

    申请号:US11749142

    申请日:2007-05-15

    CPC classification number: G01N21/553 G01N2201/067

    Abstract: A method and a device for detecting object properties using electro-optically modulated surface plasmon resonance (SPR) based on phase detection is disclosed. In the case of a surface plasmon resonance sensing device according to the present invention, the voltage is applied on the sensing device made of an electro-optic material to modulate the surface plasmon resonance condition by varying the wavevector of the incident lightwave. The relation between the phase of output optical wave and the applied voltage is measured, and the solution concentration or the material property is obtained by using the slope of a regression straight line of this relations. The invention can be used in the experimental arrangements of the attenuated-total-reflection (ATR) structure and the optical waveguide structure, and has advantages of high sensitivity, high stability, small bulk, low equipment cost, etc.

    Abstract translation: 公开了一种使用基于相位检测的电光调制表面等离子体共振(SPR)检测物体特性的方法和装置。 在根据本发明的表面等离子体共振感测装置的情况下,电压被施加在由电光材料制成的感测装置上,以通过改变入射光波的波矢来调制表面等离子体共振条件。 测量输出光波相位与施加电压之间的关系,通过使用该关系的回归直线的斜率来获得溶液浓度或材料特性。 本发明可用于衰减全反射(ATR)结构和光波导结构的实验布置,具有灵敏度高,稳定性高,体积小,设备成本低等优点。

    Method for building an algorithm for converting spectral information
    35.
    发明申请
    Method for building an algorithm for converting spectral information 有权
    用于构建用于转换光谱信息的算法的方法

    公开(公告)号:US20080045820A1

    公开(公告)日:2008-02-21

    申请号:US11973790

    申请日:2007-10-10

    Abstract: A system for determining the concentration of an analyte in at least one body fluid in body tissue comprises an infrared light source, a body tissue interface, a detector, and a central processing unit. The body tissue interface is adapted to contact body tissue and to deliver light from the infrared light source to the contacted body tissue. The detector is adapted to receive spectral information corresponding to infrared light transmitted through the portion of body tissue being analyzed and to convert the received spectral information into an electrical signal indicative of the received spectral information. The central processing unit is adapted to compare the electrical signal to an algorithm built upon correlation with the analyte in body fluid, the algorithm adapted to convert the received spectral information into the concentration of the analyte in at least one body fluid.

    Abstract translation: 用于确定身体组织中的至少一种体液中的分析物的浓度的系统包括红外光源,身体组织界面,检测器和中央处理单元。 身体组织界面适于接触身体组织并将红外光源的光传送到被接触的身体组织。 检测器适于接收对应于通过被分析的身体组织部分透射的红外光的光谱信息,并将接收到的光谱信息转换为指示所接收的光谱信息的电信号。 中央处理单元适于将电信号与建立在体液中与分析物相关的算法进行比较,该算法适于将接收到的光谱信息转换成至少一个体液中分析物的浓度。

    System and method for self-referenced SPR measurements
    36.
    发明申请
    System and method for self-referenced SPR measurements 有权
    用于自参考SPR测量的系统和方法

    公开(公告)号:US20070046943A1

    公开(公告)日:2007-03-01

    申请号:US11210633

    申请日:2005-08-24

    CPC classification number: G01N21/553 G01N2201/067

    Abstract: A system and method of using a refractive index sensor to determine a characteristic of a sample. The operation of the system and method allow for determining a change in a bulk index of the sample, and an amount of sample adsorption, using a reflected beam from an interface of the sensor. An embodiment of a system and method further provide for identifying changes in incident angles determine from reflective measurement data of the sensor, in combination with different proportionality constants of the refractive index sensor to determine a characteristic of the sample.

    Abstract translation: 一种使用折射率传感器来确定样品特征的系统和方法。 系统和方法的操作允许使用来自传感器的界面的反射光束来确定样品的体积指数的变化和样品吸附的量。 系统和方法的实施例进一步提供用于识别入射角度的变化,其根据传感器的反射测量数据,结合折射率传感器的不同比例常数来确定样本的特性。

    Exploring fluorophore microenvironments
    38.
    发明授权
    Exploring fluorophore microenvironments 有权
    探索荧光团微环境

    公开(公告)号:US07141378B2

    公开(公告)日:2006-11-28

    申请号:US11173814

    申请日:2005-07-01

    Abstract: Methods, apparatus, and system, implementing and using techniques for detecting a presence of one or more target analytes in particular regions of interest of one or more samples. One or more samples including objects and one or more target analytes are provided. Some of the target analytes are labeled with a fluorophore and are bound to some of the objects in the samples. The samples are illuminated with fluorescence inducing light and fluorescent light is collected from one or more regions of the one or more samples. At least one anisotropy measurement of the samples is performed to identify regions of interest where one or more target analytes are bound to the objects. The collected fluorescent light from the regions of interest is analyzed to determine a presence of target analytes that are bound to the objects in the one or more samples.

    Abstract translation: 方法,装置和系统,实施和使用用于检测一个或多个样品的特定感兴趣区域中一种或多种目标分析物的存在的技术。 提供了一个或多个样品,包括物体和一种或多种目标分析物。 一些目标分析物用荧光团标记,并且与样品中的某些对象结合。 用荧光诱导光照射样品,并从一个或多个样品的一个或多个区域采集荧光。 进行样品的至少一个各向异性测量以识别一个或多个目标分析物与物体结合的感兴趣区域。 分析来自感兴趣区域的收集的荧光以确定与一个或多个样品中的物体结合的目标分析物的存在。

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