公开(公告)号：US20060181708A1

公开(公告)日：2006-08-17

申请号：US11350954

申请日：2006-02-10

Applicant: Eiji Takahashi ,  Hiroyuki Takamatsu ,  Masato Kannaka ,  Naokazu Sakoda ,  Tsutomu Morimoto

Inventor： Eiji Takahashi ,  Hiroyuki Takamatsu ,  Masato Kannaka ,  Naokazu Sakoda ,  Tsutomu Morimoto

IPC: G01N21/59

CPC classification number: G01N21/171 ,  G01N21/031 ,  G01N2021/1712 ,  G01N2021/178 ,  G01N2201/105

Abstract: A liquid sample is irradiated with excitation light and measurement light, and a measurement position at which a traveling path of the measurement light passes through an excitation section of the excitation light in the sample is changed while the sample is being irradiated with the excitation light and the measurement light. Then, the phase change of the measurement light is measured for each measurement by optical interferometry on the basis of the measurement light after the measurement light passes through the sample. The measurement position is changed by, for example, scanning the excitation light, moving the sample, moving a lens that collects the excitation light in the sample so as to change the light-collecting position (focal position) in the sample, etc.

公开(公告)号：US07034270B2

公开(公告)日：2006-04-25

申请号：US10798013

申请日：2004-03-11

Applicant: Hiroshi Sasaki

Inventor： Hiroshi Sasaki

IPC: G02B7/04

CPC classification number: G01N21/6458 ,  G01N2021/1774 ,  G01N2021/3137 ,  G01N2021/3174 ,  G01N2021/6417 ,  G01N2021/6471 ,  G01N2201/06113 ,  G01N2201/067 ,  G01N2201/105 ,  G02B21/0032 ,  G02B21/16

Abstract: In case of irradiating a sample with laser beam, dispersing light emitted from the sample to a spectrum, and fetching and detecting from a wavelength band extraction portion light in at least one band area from the dispersed spectrum, when at least one of a plurality of optical elements arranged between the sample and the dispersive element is switched, a positional relationship between the wavelength band extraction portion and a spectrum image formation position which is displaced in a dispersion direction due to a change in angle of light entering the dispersive element.

Abstract translation: 在用激光束照射样品的情况下，将从样品发射的光分散到光谱中，并且从波长带提取部分中获取并检测来自分散光谱的至少一个带区域中的光，当多个 布置在样品和分散元件之间的光学元件被切换，波长带提取部分与由于进入分散元件的光的角度的变化而在色散方向上移位的光谱图像形成位置之间的位置关系。

公开(公告)号：US20240255429A1

公开(公告)日：2024-08-01

申请号：US18424128

申请日：2024-01-26

Applicant: Trustees of Boston University

Inventor： Ji-Xin Cheng

IPC: G01N21/65

CPC classification number: G01N21/65 ,  G01N2201/06113 ,  G01N2201/105

Abstract: A stimulated Raman photothermal (SRP) microscope for imaging a sample. A first optical source omits an intensity-modulated pump beam. A second optical source omits an intensity-modulated Stokes beam. The Stokes beam is combined with the pump beam to form a combined beam. The combined beam is directed to the sample to induce a thermal effect caused by the stimulated Raman process. A third optical source emits a probe beam, the probe beam is directed to the sample. An optical detector detects modulation of the probe beam after modulation by the sample to measure an SRP signal.

公开(公告)号：US11988603B2

公开(公告)日：2024-05-21

申请号：US16346339

申请日：2017-10-30

Applicant: UNIVERSITY OF VIENNA

Inventor： Alipasha Vaziri

IPC: G01N21/64 ,  G02B21/00 ,  G02B21/36 ,  H01S3/00

CPC classification number: G01N21/6408 ,  G01N21/6458 ,  G01N21/6486 ,  G02B21/0076 ,  G02B21/367 ,  G01N2201/105 ,  H01S3/005

Abstract: A tissue imaging system includes a laser module for outputting a laser pulse, an optical delay module configured to split a laser pulse received from the laser module into a plurality of time-delayed sub-pulses, a telescope for delivering the sub-pulses from the optical delay module to a target volume and a photodetector configured to collect photons generated within the target volume in response to excitation of the target volume by the first and second sub-pulses. The system may further include a spatial multiplexing module configured to receive the temporally multiplexed laser pulse from the optical delay module and splitting the temporally multiplexed laser pulse into a plurality of sub-beams including a first sub-beam and a second sub-beam, wherein the first sub-beam and the second sub-beam are spatially separated with respect to a first image plane formed at a first depth within the target volume and with respect to a second image plane formed at a second depth within the target volume.

公开(公告)号：US20240060880A1

公开(公告)日：2024-02-22

申请号：US18270880

申请日：2021-11-02

Applicant: Hitachi High-Tech Corporation

Inventor： Masahiro WATANABE ,  Kaifeng ZHANG ,  Shuichi BABA ,  Takenori HIROSE

IPC: G01N21/35 ,  G02B21/06 ,  G02B21/26

CPC classification number: G01N21/35 ,  G02B21/06 ,  G02B21/26 ,  G01N2201/105 ,  G01N2201/0636

Abstract: Provided is a spectroscopic measurement device capable of improving detection sensitivity to a change in a physical property value such as expansion of a sample to which energy is applied by an infrared ray or the like. The spectroscopic measurement device includes: a stage on which a sample is to be placed; an energy source configured to generate an energy beam to be emitted to a predetermined region of the sample; an electromagnetic wave source configured to generate an electromagnetic wave to be emitted to the sample; an objective lens configured to focus the electromagnetic wave in the predetermined region; two confocal detectors configured to detect the electromagnetic wave reflected by the sample; and a calculation unit configured to calculate, based on each of outputs of the confocal detectors, a change in a physical property value of the sample when the energy beam is emitted to the predetermined region.

公开(公告)号：US20180307020A1

公开(公告)日：2018-10-25

申请号：US15924666

申请日：2018-03-19

Applicant: The United States of America, as represented by the Secretary, Depart. of Health and Human Service

Inventor： Hari Shroff ,  Andrew York

IPC: G02B21/00 ,  G02B21/36 ,  G01N21/64

CPC classification number: G02B21/0072 ,  G01N21/6458 ,  G01N2021/6478 ,  G01N2201/0633 ,  G01N2201/105 ,  G02B21/0032 ,  G02B21/004 ,  G02B21/0076 ,  G02B21/008 ,  G02B21/365

Abstract: Various embodiments for a multi-focal selective illumination microscopy (SIM) system for generating multi-focal patterns of a sample are disclosed. The multi-focal SIM system performs a focusing, scaling and summing operation on each generated multi-focal pattern in a sequence of multi-focal patterns that completely scan the sample to produce a high resolution composite image.

公开(公告)号：US10018572B2

公开(公告)日：2018-07-10

申请号：US15265805

申请日：2016-09-14

Applicant: KLA-Tencor Corporation

Inventor： Richard E. Bills ,  Neil Judell ,  Klaus R. Freischlad ,  James P. McNiven

IPC: G01N21/88 ,  G01N21/95 ,  G01N21/21 ,  G01N21/47 ,  G01N21/55 ,  G01N21/956 ,  G06T7/00

CPC classification number: G01N21/9501 ,  G01N21/21 ,  G01N21/47 ,  G01N21/4738 ,  G01N21/474 ,  G01N21/55 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/95 ,  G01N21/956 ,  G01N2021/4707 ,  G01N2021/4711 ,  G01N2021/4792 ,  G01N2021/556 ,  G01N2021/8809 ,  G01N2021/8848 ,  G01N2021/8864 ,  G01N2021/8877 ,  G01N2021/8896 ,  G01N2201/0612 ,  G01N2201/105 ,  G06T7/0004 ,  G06T2207/30148 ,  Y10T29/49826

Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The optical collection and detection system features, in the front quartersphere, a light channel assembly for collecting light reflected from the surface of the workpiece, and a front collector and wing collectors for collecting light scattered from the surface, to greatly improve the measurement capabilities of the system. The light channel assembly has a switchable edge exclusion mask and a reflected light detection system for improved detection of the reflected light.

公开(公告)号：US20180081166A1

公开(公告)日：2018-03-22

申请号：US15270311

申请日：2016-09-20

Applicant: APPLIED MATERIALS ISRAEL LTD.

Inventor： Ron Naftail ,  Boris Golberg ,  Rami Elichai

IPC: G02B26/10 ,  G02B27/09 ,  G01N21/95 ,  G01N21/88

CPC classification number: G02B26/10 ,  G01N21/8806 ,  G01N21/9501 ,  G01N2201/105 ,  G02B21/002 ,  G02B27/0966

Abstract: A scanning system that includes an illumination module that is configured to scan, at a first direction, an elongated radiation spot over an object; and a collection module that is configured to (a) collect a collected radiation beam from the object, and (b) optically manipulate the collected radiation beam to provide a counter-scan beam is directed towards a set of detection units and has a focal point that is positioned at a same location regardless of the propagation of the elongated radiation spot along the first direction.

公开(公告)号：US09826918B2

公开(公告)日：2017-11-28

申请号：US14898931

申请日：2015-08-28

Applicant: Juergen Marx

Inventor： Heinrich Alexander Eberl ,  Juergen Marx

IPC: A61B5/103 ,  G01S17/89 ,  G01N21/3563 ,  A61B5/1172 ,  A61B5/1455 ,  A61B5/00 ,  G01B11/24 ,  G01S17/02 ,  G01S17/42 ,  G01S7/48 ,  H04N5/33 ,  H04N5/225 ,  H04N3/09 ,  G01N21/47 ,  G01N21/84 ,  G01S7/481

CPC classification number: A61B5/1032 ,  A61B5/0077 ,  A61B5/1172 ,  A61B5/1455 ,  A61B5/441 ,  A61B5/6826 ,  A61B2562/0238 ,  A61B2576/00 ,  G01B11/24 ,  G01N21/3563 ,  G01N21/4738 ,  G01N21/8422 ,  G01N2201/06113 ,  G01N2201/105 ,  G01N2201/12 ,  G01S7/4802 ,  G01S7/4817 ,  G01S17/023 ,  G01S17/42 ,  G01S17/89 ,  H04N3/09 ,  H04N5/2256 ,  H04N5/33

Abstract: A method for detecting the surface structure and composition of a sample by means of a scanning unit, in particular for detecting traces, which are induced by contact of the skin of the human body on the surface of an object or absorbed by means of a trace carrier. The sample and the scanning unit are moved in relation to one another. The sample surface is irradiated line-by-line using a light beam or laser beam emitted from the scanning unit. The light beam or laser beam reflected from the sample surface is detected, and a digital image of the topography of the sample surface and the intensity of the reflected light beam or laser beam is generated from deviations of the reflected light beam or laser beam from the emitted light beam or laser beam to illustrate the composition of the sample surface.

公开(公告)号：US20170336330A1

公开(公告)日：2017-11-23

申请号：US15159266

申请日：2016-05-19

Applicant: Zeta Instruments, Inc.

Inventor： Steven W. Meeks ,  Rusmin Kudinar ,  Ronny Soetarman ,  Hung P. Nguyen

IPC: G01N21/958 ,  G01N21/55 ,  G01N21/94

CPC classification number: G01N21/958 ,  G01L1/00 ,  G01N21/21 ,  G01N21/55 ,  G01N21/8806 ,  G01N21/94 ,  G01N2021/8854 ,  G01N2201/06113 ,  G01N2201/0683 ,  G01N2201/105 ,  G01N2201/1247

Abstract: A method for detecting defects includes directing a scanning beam to a location on a surface of a transparent sample, measuring top and bottom surface specular reflection intensity, and storing coordinate values of the first location and the top and bottom surface specular reflection intensity in a memory. The method may further include comparing the top surface specular reflection intensity measured at each location with a first threshold value, comparing the bottom surface specular reflection intensity measured at each location with a second threshold value, and determining if a defect is present at each location and on which surface the defect is present. The method may further include comparing the top surface specular reflection intensity measured at each location with a first intensity range, comparing the bottom surface specular reflection intensity measured at each location with a second intensity range, and determining on which surface the defect is present.