公开(公告)号：US20020060785A1

公开(公告)日：2002-05-23

申请号：US09828025

申请日：2001-04-06

Inventor： J. Christopher Dries ,  Marshall Cohen

IPC: G01N021/00 ,  G01J003/28 ,  G01J004/00

CPC classification number: H04B10/07955 ,  G01J3/2803 ,  G01J3/447 ,  G01J4/04 ,  G02B6/29371 ,  G02B6/29385 ,  H04B10/077 ,  H04J14/02

Abstract: An apparatus for use in wave division multiplexing optical telecommunication systems includes a dual photodiode array which converts parallel and perpendicularly polarized light beams at given wavelengths to electrical signals which are digitized and used to rapidly and simultaneously determine all wavelengths and associated components of power and angle of polarization. This information can be displayed for monitoring purposes, or can be used to control signals travelling through optical fiber.

Abstract translation: 用于波分复用光通信系统的装置包括双光电二极管阵列，其将给定波长的平行和垂直偏振光束转换成电信号，电信号被数字化并用于快速并同时确定功率和角度的所有波长和相关分量 极化。 该信息可以显示用于监视目的，也可以用于控制通过光纤传播的信号。

公开(公告)号：US20020021443A1

公开(公告)日：2002-02-21

申请号：US09838700

申请日：2001-04-19

Inventor： Srivatsa Venkatasubbarao ,  Lothar U. Kempen

IPC: G01J004/00

CPC classification number: G01N21/21 ,  G01N21/253 ,  G01N21/552 ,  Y10S436/805

Abstract: Imaging apparatus which images the changes in height of reactive spots on the surface of a slide requires the surface roughness of the slide to be small enough to distinguish the changes in height from the roughness features of the slide.

Abstract translation: 对幻灯片表面上的反应斑点的高度变化进行成像的成像设备需要滑块的表面粗糙度足够小以区分高度与滑块的粗糙度特征的变化。

公开(公告)号：US20010048527A1

公开(公告)日：2001-12-06

申请号：US09864678

申请日：2001-05-24

Applicant: Ando Electric Co., Ltd.

Inventor： Nobuaki Takeuchi

IPC: G01J004/00

CPC classification number: G01N21/21 ,  G01J4/00

Abstract: In the present invention, measuring the one-dimensional or two-dimensional voltage distribution or electrical field distribution in a measured device is made possible, and a reduction in the measuring time can be implemented. The present invention comprises a first optical system (2, 3) wherein light emitted from the light source is shaped into a line-shaped light beam and irradiates a desired measurement line in the measured device via the electrooptic element, a second optical system (7, 8, 9) that maintains as-is the shape of the line-shaped light beam reflected from the desired measurement line in the measured device after transiting the electro-optic element, a light receiving device (10) that receives the line-shaped light beam emitted from the second optical system and converts each of the measured points to an electrical signal depending on the strength of each light beam reflected at each of the measured points on the desired measurement line on the measured device and outputs the result, and a signal processing device (11, 12, 13, 14, 16) that calculates the voltage or electrical field at each of the measured points of the measured device from the output signal of the light receiving device and calculates the electrical field distribution or the voltage distribution at the measured part of measured device.

Abstract translation: 在本发明中，可以测量测量装置中的一维或二维电压分布或电场分布，并且可以实现测量时间的减少。 本发明包括第一光学系统（2,3），其中从光源发射的光被成形为线状光束，并且经由电光元件在测量的装置中照射期望的测量线，第二光学系统（7 ，8,9），其在转移所述电光元件之后维持从所述测量装置中的期望测量线反射的所述线状光束的形状，接收所述线形的光接收装置（10） 从第二光学系统发射的光束，并且根据在测量装置上的期望测量线上的每个测量点反射的每个光束的强度将每个测量点转换成电信号，并输出结果， 信号处理装置（11,12,13,14,16），其从所述光接收装置的输出信号和所述测量装置计算所测量的装置的每个测量点处的电压或电场 计算被测器件测量部分的电场分布或电压分布。

公开(公告)号：US20040257565A1

公开(公告)日：2004-12-23

申请号：US10494374

申请日：2004-05-13

Inventor： Mitsuhiro Ishihara

IPC: G01J004/00

CPC classification number: G01B11/25 ,  G01B11/24 ,  G01J4/04

Abstract: A polarization bearing detection type two-dimensional light reception timing detecting device for implementing a fast surface shape measurement that can accommodate an animal body measurement, and a surface shape measuring device using it. The polarization bearing of a detection light is turned in synchronization with slit light scanning, and the polarization bearing is two-dimensionally recorded by two sets of analyzers and storage type image detectors in a crossed Nicols arrangement, and thereby it is possible to determine, with only one-time imaging, timing at which a slit light is beamed into respected pixels in the storage type image detectors.

Abstract translation: 一种用于实现能够适应动物身体测量的快速表面形状测量的偏振轴承检测型二维光接收定时检测装置，以及使用它的表面形状测量装置。 检测光的偏振轴承与狭缝光扫描同步地旋转，偏振轴承由两组分析仪和存储型图像检测器以十字尼科尔布置二维记录，从而可以用 只有一次成像，狭缝光在存储型图像检测器中被照射到相关像素中的定时。

公开(公告)号：US20040233437A1

公开(公告)日：2004-11-25

申请号：US10791780

申请日：2004-03-04

Applicant: DAINIPPON SCREEN MFG. CO., LTD.

Inventor： Masahiro Horie

IPC: G01J004/00

CPC classification number: G01N21/211 ,  G01N2021/213

Abstract: In a spectroscopic ellipsometer (1), a lighting part (3) comprises a light source part for measurement (measurement light source) (31) and a polarizer (32), and the polarizer (32) obtains polarized light from light outputted from the measurement light source (31) and guides the polarized light to a substrate (9). A light receiving part (4) comprises an analyzer (41) on which reflected light which is the polarized light reflected on the substrate 9 is incident and a spectroscope (42), and the reflected light through the analyzer (41) enters the spectroscope (42), where a polarization state at each wavelength is acquired. The spectroscopic ellipsometer (1) has a construction in which mirrors are disposed only between the measurement light source (31) and the polarizer (32) and between the analyzer (41) and the spectroscope (42). In the spectroscopic ellipsometer (1), with this construction, the polarization state of the polarized light or its reflected light is not changed by mirrors and it is therefore possible to achieve measurements with high accuracy.

Abstract translation: 在分光椭偏仪（1）中，发光部（3）包括测量用光源部（测定光源）（31）和偏振片（32），偏光板（32） 测量光源（31）并将偏振光引导到衬底（9）。 光接收部分（4）包括分析器（41），反射在基板9上的偏振光入射的反射光和分光镜（42），并且通过分析器（41）的反射光进入分光器 42），其中获取每个波长的偏振状态。 光谱椭偏仪（1）具有仅在测量光源（31）和偏振器（32）之间以及分析器（41）和分光计（42）之间设置反射镜的结构。 在分光椭圆偏振仪（1）中，通过这种结构，偏振光或其反射光的偏振状态不会被反射镜改变，因此可以以高精度实现测量。

公开(公告)号：US20040227943A1

公开(公告)日：2004-11-18

申请号：US10728559

申请日：2003-12-05

Inventor： Joanne Y. Law ,  Kerry D. Bagwell ,  Eric S. Johnstone ,  Elizabeth A. Nevis

IPC: G01J004/00

CPC classification number: G01B9/02003 ,  G01B2290/70

Abstract: A polarization control system includes a beam source that generates a first beam component containing light with a first polarization and a first frequency and a second beam component containing light with a second polarization and a second frequency. A polarization state modulator adjusts the polarizations of the components for transmission on a single optical fiber. A detector system measures polarizations of the components when output from the optical fiber and determines how to adjust the polarization state modulator in order to give the first and the second components the desired output polarization states. The beam source can be implemented using a Zeeman-split laser, a laser containing a birefringent element, a pair of phase-locked lasers, and/or a variety of configurations of electro-optic or acousto-optic crystals operated to create or enhance the frequency difference between the beam components.

Abstract translation: 偏振控制系统包括产生包含具有第一偏振光和第一频率的光的第一光束分量和包含具有第二偏振和第二频率的光的第二光束分量的光束源。 偏振状态调制器调节用于在单个光纤上传输的组件的极化。 当从光纤输出时，检测器系统测量元件的极化，并且确定如何调整偏振状态调制器以给出第一和第二分量所需的输出偏振状态。 光束源可以使用塞曼分割激光器，包含双折射元件的激光器，一对锁相激光器和/或电光或声光晶体的各种配置来实现，其操作以产生或增强 光束分量之间的频率差。

公开(公告)号：US20040218179A1

公开(公告)日：2004-11-04

申请号：US10857223

申请日：2004-05-28

Inventor： Adam E. Norton ,  Abdurrahman Sezginer ,  Fred E. Stanke

IPC: G01J004/00

CPC classification number: G01B11/02 ,  G01J3/02 ,  G01J3/0294 ,  G01N21/211 ,  G01N21/25 ,  G01N21/474 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/213

Abstract: An optical measurement system for evaluating a sample has a motor-driven rotating mechanism coupled to an azimuthally rotatable measurement head, allowing the optics to rotate with respect to the sample. A polarimetric scatterometer, having optics directing a polarized illumination beam at non-normal incidence onto a periodic structure on a sample, can measure optical properties of the periodic structure. An E-O modulator in the illumination path can modulate the polarization. The head optics collect light reflected from the periodic structure and feed that light to a spectrometer for measurement. A beamsplitter in the collection path can ensure both S and P polarization from the sample are separately measured. The measurement head can be mounted for rotation of the plane of incidence to different azimuthal directions relative to the periodic structures. The instrument can be integrated within a wafer process tool in which wafers may be provided at arbitrary orientation.

Abstract translation: 用于评估样品的光学测量系统具有耦合到方位角可旋转测量头的电动机旋转机构，允许光学器件相对于样品旋转。 具有将非正常入射的偏振照明光束引导到样品上的周期性结构上的光学偏振散射仪可以测量周期性结构的光学性质。 照明路径中的E-O调制器可以调制偏振。 头部光学器件收集从周期性结构反射的光并将光馈送到光谱仪进行测量。 收集路径中的分束器可以确保来自样品的S和P极化分别测量。 测量头可以安装成相对于周期性结构使入射平面旋转到不同的方位角方向。 仪器可以集成在晶片工艺工具中，其中可以以任意取向提供晶片。

公开(公告)号：US20040196460A1

公开(公告)日：2004-10-07

申请号：US10472253

申请日：2004-04-12

Inventor： Hans-Jurgen Dobschal ,  Gunter Machke ,  Jorg Bischoff

IPC: G01J004/00 ,  G01J003/28

CPC classification number: G01J4/00 ,  G01J3/28 ,  G01N21/211 ,  G01N21/47

Abstract: In a measurement arrangement comprising an optical device, into which a diverging beam coming from a specimen is coupled for measurement, and further comprising a detector, which is arranged following said optical device and comprises a multiplicity of detector pixels arranged in one plane and evaluable independently of each other, wherein the optical device spectrally disperses the diverging beam in a first direction transversely of the propagation direction of the beam and directs it to the detector, the optical device also parallels the beam, before it impinges on the detector, in a second direction transversely of the propagation direction (C) such that rays of the beam impinging on the detector, which are adjacent to each other in the second direction, extend parallel to each other.

Abstract translation: 在包括光学装置的测量装置中，来自试样的发散光束耦合到光学装置中用于测量，并且还包括检测器，其被布置在所述光学装置之后并且包括布置在一个平面中并且可独立评估的多个检测器像素 其中所述光学装置在横向于所述光束的传播方向的第一方向上光谱地扩散所述发散光束并将其引导到所述检测器，所述光学装置在其撞击所述检测器之前还将所述光束平行于所述检测器 方向横向于传播方向（C），使得在第二方向上彼此相邻的入射到检测器上的光束彼此平行延伸。

公开(公告)号：US20040189993A1

公开(公告)日：2004-09-30

申请号：US10403489

申请日：2003-03-31

Inventor： Martin Ebert

IPC: G01J004/00

CPC classification number: G01N21/211 ,  G01J4/00 ,  G01N21/9501

Abstract: An ellipsometer includes a light source for generating a probe beam of polychromatic light for interacting with a sample. The probe beam is passed through a first polarizer that imparts a known polarization state to the probe beam. The polarized probe beam is then directed to reflect from the sample. A second illumination source is switched on and off at a predetermined frequency to create an intensity modulated pump beam (the beam may also be chopped). The pump beam is directed normally against the subject producing a small illumination spot within the area illuminated by the probe beam. The pump induces localized changes in the dielectric properties of the subject. The pump-beam induced oscillations are picked up by the portion of the probe beam that is reflected from within the illumination spot of the pump beam. By analyzing only the portion of the reflected probe beam that includes the pump beam induced oscillation, the size of the measurement spot is effectively limited to the illumination spot size of the normally directed pump beam.

Abstract translation: 椭偏仪包括用于产生用于与样品相互作用的多色光的探测光束的光源。 探测光束通过第一偏振器，其将已知的偏振状态赋予探测光束。 然后将极化探针光束引导从样品反射。 第二照明源以预定的频率被打开和关闭以产生强度调制的泵浦光束（该光束也可以被切碎）。 泵浦光束正常地对准对象，从而在由探测光束照射的区域内产生小的照明点。 泵引起受试者的介电性质的局部变化。 泵浦光束感应振荡由从泵浦光束的照明光点内反射的探测光束的部分拾取。 通过仅分析包括泵浦光束振荡的反射的探测光束的部分，测量光斑的尺寸被有效地限制在正向定向的泵浦光束的照明光斑尺寸上。

公开(公告)号：US20040150828A1

公开(公告)日：2004-08-05

申请号：US10700086

申请日：2003-11-03

Inventor： James Lee Hendrix ,  David Y. Wang ,  David M. Aikens ,  Lawrence Rotter ,  Joel Ng

IPC: G01J004/00 ,  G01N021/55

CPC classification number: G01J3/02 ,  G01J3/0218 ,  G01J3/10 ,  G01N21/55 ,  G01N21/9501 ,  G01N2201/06146 ,  G01N2201/0826

Abstract: A flat spectrum illumination source for use in optical metrology systems includes a first light source generating a visible light beam and a second light source generating an ultraviolet light beam. The illumination source also includes an auxiliary light source generating a light beam at wavelengths between the visible light beam and the ultraviolet light beam. The three light beams are combined to provide a broadband probe beam that has substantially even illumination levels across a broad range of wavelengths. Alternately, the illumination source may be fabricated as an array of light emitting diodes selected to cover a range of separate wavelengths. The outputs of the LED array are combined to produce the broadband probe beam.

Abstract translation: 用于光学测量系统的平面光谱照明源包括产生可见光束的第一光源和产生紫外光束的第二光源。 照明源还包括在可见光束和紫外光束之间的波长处产生光束的辅助光源。 三个光束被组合以提供在宽范围的波长上具有基本均匀的照明水平的宽带探测光束。 或者，照明源可以被制造为被选择以覆盖一定范围的分开的波长的发光二极管的阵列。 组合LED阵列的输出以产生宽带探测光束。