公开(公告)号：US20150331018A1

公开(公告)日：2015-11-19

申请号：US14424263

申请日：2013-07-30

Applicant: Shibuya Kogyo Co., Ltd.

Inventor： Yukinobu NISHINO ,  Yuichi TAKENAKA ,  Youhei SAKAMOTO ,  Ryo ABE

IPC: G01R19/165 ,  G01R19/00 ,  H01J33/04

CPC classification number: G01R19/165 ,  G01R19/0092 ,  G21K5/04 ,  H01J33/04

Abstract: An electron beam detecting device detects a state of an electron beam radiated by an electron beam radiation device. A plurality of wire electrodes, which are conductors, are disposed corresponding to a plurality of filaments, the wire electrodes being electrically insulated from each other, in the area in which the electron beams are radiated. The electrical current flowing through each of the wire electrodes is measured by an electric current measuring instrument (measuring unit). A CPU (determining unit) determines the radiation level of the electron beams by receiving a signal output by the electric current measuring instrument. The CPU judges that when the measuring instrument measures a decrease of the current value, an abnormal condition exists in the filament corresponding to the conductor with the lower current value.

Abstract translation: 电子束检测装置检测由电子束辐射装置辐射的电子束的状态。 作为导体的多个线电极相对于多个细丝布置，线电极在电子束被辐射的区域中彼此电绝缘。 通过电流测量仪（测量单元）测量流过每根线电极的电流。 CPU（确定单元）通过接收由电流测量仪器输出的信号来确定电子束的辐射水平。 CPU判断当测量仪器测量电流值的减小时，对应于具有较低电流值的导体的灯丝存在异常状况。

公开(公告)号：US08338807B2

公开(公告)日：2012-12-25

申请号：US13079602

申请日：2011-04-04

Applicant: Tzvi Avnery ,  Kenneth P. Felis

Inventor： Tzvi Avnery ,  Kenneth P. Felis

IPC: H01J33/04

CPC classification number: H01J33/04 ,  Y10T29/49895

Abstract: An exit window for an electron beam emitter through which electrons pass in an electron beam includes a structural foil for metal to metal bonding with the electron beam emitter. The structural foil has a central opening formed therethrough. A window layer of high thermal conductivity extends over the central opening of the structural foil and provides a high thermal conductivity region through which the electrons can pass.

Abstract translation: 电子束通过的电子束发射器的出射窗包括用于与电子束发射体进行金属与金属结合的结构箔。 结构箔具有从其形成的中心开口。 具有高导热性的窗口层在结构箔的中心开口上延伸，并提供高导电性区域，电子可通过该区域通过。

公开(公告)号：US20080143235A1

公开(公告)日：2008-06-19

申请号：US11964273

申请日：2007-12-26

Applicant: Tzvi Avnery ,  Kenneth P. Felis

Inventor： Tzvi Avnery ,  Kenneth P. Felis

IPC: H01J33/04

CPC classification number: H01J33/04 ,  Y10T29/49895

Abstract: An exit window for an electron beam emitter through which electrons pass in an electron beam includes a structural foil for metal to metal bonding with the electron beam emitter. The structural foil has a central opening formed therethrough. A window layer of high thermal conductivity extends over the central opening of the structural foil and provides a high thermal conductivity region through which the electrons can pass.

Abstract translation: 电子束通过的电子束发射器的出射窗包括用于与电子束发射体进行金属与金属结合的结构箔。 结构箔具有从其形成的中心开口。 具有高导热性的窗口层在结构箔的中心开口上延伸，并提供高导电性区域，电子可通过该区域通过。

公开(公告)号：US07265367B2

公开(公告)日：2007-09-04

申请号：US10751676

申请日：2004-01-05

Applicant: Tzvi Avnery ,  Kenneth P. Felis

Inventor： Tzvi Avnery ,  Kenneth P. Felis

IPC: H01J33/04

CPC classification number: H01J33/04 ,  Y10T29/49895

Abstract: An exit window for an electron beam emitter through which electrons pass in an electron beam includes a structural foil for metal to metal bonding with the electron beam emitter. The structural foil has a central opening formed therethrough. A window layer of high thermal conductivity extends over the central opening of the structural foil and provides a high thermal conductivity region through which the electrons can pass.

公开(公告)号：US20050225224A1

公开(公告)日：2005-10-13

申请号：US10822890

申请日：2004-04-13

Applicant: Edgar Dally ,  Donald Gagne ,  Robert Espinosa ,  Joel Christeson

Inventor： Edgar Dally ,  Donald Gagne ,  Robert Espinosa ,  Joel Christeson

IPC: H01J33/00 ,  H01J33/04

CPC classification number: H01J33/04 ,  H01J33/00

Abstract: There is described, for example, a generally cylindrical generator of energetic electrons that releases electrons from a vacuum enclosure into a surrounding space including into the atmosphere where the electrons may be used for a variety of applications including clean up of a flowing gas stream. Described is an efficient electron generator that emits more beam power than past structures in this class of devices and does so in connection with the treatment of gases or surfaces requiring treatment.

Abstract translation: 例如，描述了一种通常为圆柱形的能量电子发生器，其将电子从真空外壳释放到包括进入气氛的周围空间中，其中电子可用于各种应用，包括清理流动的气流。 描述的是一种有效的电子发生器，其发射比这类装置中的过去结构更多的光束功率，并且与处理需要处理的气体或表面有关。

公开(公告)号：US06919570B2

公开(公告)日：2005-07-19

申请号：US10326923

申请日：2002-12-19

Applicant: Tzvi Avnery

Inventor： Tzvi Avnery

IPC: H01J37/244 ,  H01J33/04

CPC classification number: H01J37/244

Abstract: A sensing device for sensing an electron beam includes a vacuum chamber having an electron permeable window for allowing electrons from the electron beam to enter vacuum chamber. An electrode extends within the vacuum chamber for receiving at least a portion of the electrons entering the vacuum chamber. The intensity of the electron beam is capable of being determined from the amount of electrons received by the electrode.

Abstract translation: 用于感测电子束的感测装置包括具有用于允许来自电子束的电子进入真空室的电子透过窗口的真空室。 电极在真空室内延伸，用于接收至少一部分进入真空室的电子。 电子束的强度能够由电极接收的电子的量确定。

公开(公告)号：US20050045832A1

公开(公告)日：2005-03-03

申请号：US10961631

申请日：2004-10-08

Applicant: Michael Kelly ,  Charles Bryson

Inventor： Michael Kelly ,  Charles Bryson

IPC: G01Q30/16 ,  H01J3/26 ,  H01J33/04 ,  H01J37/252

CPC classification number: H01J33/04 ,  H01J37/05 ,  H01J37/244 ,  H01J49/488 ,  H01J2237/2448 ,  H01J2237/24485

Abstract: An electron energy analyzer including a curved electrostatic low-pass reflector and a high-pass electrostatic transmissive filter. The reflector comprises a curved grid, preferably ellipsoidal, and an absorber electrode placed in back of the curved grid with respect to the electron source and biased negatively to the curved grid to act as a reflective low-pass filter and a collimating optics for the reflected beam. The transmissive filter includes first and second flat grids extending across the collimated reflected beam. The second grid on the side of the first grid opposite the curved grid is biased negatively to the first grid and the absorber electrode. A field free region is created by applying the same bias to the curved grid, the first grid, and chamber sidewall sleeve. An electron detector detects all electrons passed by the second grid in an energy band in the overlap of the high-pass and low-pass bands.

Abstract translation: 一种电子能量分析仪，包括弯曲静电低通反射器和高通静电透射滤光片。 反射器包括弯曲格栅，优选椭圆形，和相对于电子源放置在弧形格栅背面的吸收电极，并且负反射地偏置到弯曲网格以用作反射低通滤波器和用于反射的准直光学器件 光束。 透射滤光器包括延伸穿过准直反射光束的第一和第二平坦栅格。 与第一格架相对的弧形栅格侧的第二格栅被负向偏置到第一格栅和吸收体电极。 通过将相同的偏压施加到弯曲格栅，第一格栅和室侧壁套筒来产生无场区域。 电子检测器通过高通和低通带重叠的能带检测由第二格栅通过的所有电子。

公开(公告)号：US6140755A

公开(公告)日：2000-10-31

申请号：US872697

申请日：1997-06-11

Applicant: Armand P. Neukermans ,  Timothy G. Slater

Inventor： Armand P. Neukermans ,  Timothy G. Slater

IPC: G21G5/00 ,  D21H19/02 ,  G21G1/10 ,  G21K5/00 ,  G21K5/04 ,  H01J1/02 ,  H01J5/18 ,  H01J9/24 ,  H01J33/04 ,  H05H6/00 ,  H01J29/70

CPC classification number: H05H6/00 ,  G21G1/10 ,  H01J33/04 ,  H01J5/18

Abstract: An actinic radiation source (20) includes an anode (36) upon which an electron beam from a cathode ray gun (24) impinges. The anode (36) includes a window area (52) formed by a silicon membrane. The electron beam upon striking the anode (36) permeates the window area (52) to penetrate into medium surrounding actinic radiation source (20). A method for making an anode (36) uses a substrate having both a thin first layer (44) and a thicker second layer (46) of single crystal silicon material between which is interposed a layer of etch stop material (48). The second layer (46) is anisotropically etched to the etch stop material (48) to define the electron beam window area (52) on the first layer (44). That portion of the etch stop layer (48) exposed by etching through the second layer (46) is then removed. The anode (36) thus fabricated has a thin, monolithic, low-stress and defect-free silicon membrane electron beam window area (52) provided by the first layer of the substrate.

Abstract translation: 光化辐射源（20）包括阳极（36），来自阴极射线枪（24）的电子束撞击该阳极。 阳极（36）包括由硅膜形成的窗口区域（52）。 撞击阳极（36）时的电子束渗透窗口区域（52）以穿透到围绕光化辐射源（20）的介质中。 用于制造阳极（36）的方法使用具有薄的第一层（44）和较厚的单晶硅材料第二层（46）的衬底，在衬底之间插入有一层蚀刻停止材料（48）。 第二层（46）被各向异性蚀刻到蚀刻停止材料（48）上以限定第一层（44）上的电子束窗口区域（52）。 然后去除通过蚀刻通过第二层（46）暴露的蚀刻停止层（48）的那部分。 由此制造的阳极（36）具有由基板的第一层提供的薄的，整体的，低应力和​​无缺陷的硅膜电子束窗口区域（52）。

公开(公告)号：US5962995A

公开(公告)日：1999-10-05

申请号：US778037

申请日：1997-01-02

Applicant: Tzvi Avnery

Inventor： Tzvi Avnery

IPC: G21K5/04 ,  H01J3/02 ,  H01J33/00 ,  H05H5/00 ,  H05H5/03 ,  H01J33/04 ,  H01J37/063

CPC classification number: H01J33/02 ,  H01J3/027 ,  H01J33/00

Abstract: An electron accelerator includes a vacuum chamber having an electron beam exit window. An electron generator is positioned within the vacuum chamber for generating electrons. A housing surrounds the electron generator and has a first series of openings formed in the housing between the electron generator and the exit window for allowing electrons to accelerate from the electron generator out the exit window in an electron beam when a voltage potential is applied between the housing and the exit window. The housing also has a second series and third series of openings formed in the housing on opposite sides of the electron generator for causing electrons to be uniformly distributed across the electron beam by flattening electrical field lines between the electron generator and the exit window.

Abstract translation: 电子加速器包括具有电子束出射窗的真空室。 电子发生器位于真空室内以产生电子。 壳体围绕电子发生器并且具有形成在电子发生器和出射窗口之间的壳体中的第一系列开口，用于当电压在电子发射器和电子发射器之间施加电压时，允许电子以电子束从电子发生器从出射窗口加速出射出窗口 住房和出口窗。 壳体还具有在电子发生器的相对侧上的壳体中形成的第二系列和第三系列的开口，用于通过使电子发生器和出射窗之间的电场线平坦化，使电子均匀分布在电子束上。

公开(公告)号：US5210426A

公开(公告)日：1993-05-11

申请号：US774970

申请日：1991-10-15

Applicant: Yoshiyasu Itoh ,  Yutaka Ishiwata ,  Masataka Tamura

Inventor： Yoshiyasu Itoh ,  Yutaka Ishiwata ,  Masataka Tamura

IPC: G21K5/00 ,  H01J5/18 ,  H01J33/04 ,  H01J37/301

CPC classification number: H01J33/04 ,  H01J5/18

Abstract: This invention provides an electron beam irradiation device employing a material containing a Ti-A1 intermetallic composite as the material of an electron beam permeable window for allowing passage to the outside of a chamber of an electron beam generated in the chamber. Also, this invention provides a method of manufacturing an electron beam permeable window containing a Ti-A1 intermetallic composite by manufacturing a window-frame mounted titanium foil by fixing titanium foil between an outer window frame and an inner window frame of an electron beam permeable window, coating this with aluminium and titanium by converting aluminium and titanium to a metallic vapor state and subjecting this to thermal diffusion treatment.