公开(公告)号：US20180211812A1

公开(公告)日：2018-07-26

申请号：US15744769

申请日：2016-07-13

Applicant: NATIONAL UNIVERSITY CORPORATION NARA INSTITUTE OF SCIENCE AND TECHNOLOGY

Inventor： Fumihiko MATSUI ,  Hiroyuki MATSUDA

IPC: H01J37/05 ,  H01J37/075 ,  H01J37/09 ,  H01J37/12 ,  H01J37/244 ,  H01J37/252 ,  H01J37/305 ,  H01J43/24

CPC classification number: H01J37/05 ,  G01N23/227 ,  H01J37/075 ,  H01J37/09 ,  H01J37/12 ,  H01J37/244 ,  H01J37/252 ,  H01J37/305 ,  H01J43/24 ,  H01J49/06 ,  H01J49/488

Abstract: Provided is a compact device which captures, over a large solid angle range, electrically charged particles emitted from a point source and parallelizes the trajectories of said charged particles. The present invention is configured from: an electrostatic lens comprising a plurality of axisymmetric electrodes (10-14) and an axisymmetric aspherical mesh (2) which has a surface that is concave away from the point source; and a flat collimator plate (3) positioned coaxially with the electrostatic lens. The acceptance angle for the electrically charged particles generated from a point source (7) is ±30° or greater. The shape of the aspherical mesh (2), and the potentials and the positions of a ground electrode (10) and application electrodes (11-15) are adjusted so that the trajectories of the electrically charged particles are substantially parallelized by the electrostatic lens. The electrostatic lens and the flat collimator plate are positioned on a common axis.

公开(公告)号：US20050045832A1

公开(公告)日：2005-03-03

申请号：US10961631

申请日：2004-10-08

Applicant: Michael Kelly ,  Charles Bryson

Inventor： Michael Kelly ,  Charles Bryson

IPC: G01Q30/16 ,  H01J3/26 ,  H01J33/04 ,  H01J37/252

CPC classification number: H01J33/04 ,  H01J37/05 ,  H01J37/244 ,  H01J49/488 ,  H01J2237/2448 ,  H01J2237/24485

Abstract: An electron energy analyzer including a curved electrostatic low-pass reflector and a high-pass electrostatic transmissive filter. The reflector comprises a curved grid, preferably ellipsoidal, and an absorber electrode placed in back of the curved grid with respect to the electron source and biased negatively to the curved grid to act as a reflective low-pass filter and a collimating optics for the reflected beam. The transmissive filter includes first and second flat grids extending across the collimated reflected beam. The second grid on the side of the first grid opposite the curved grid is biased negatively to the first grid and the absorber electrode. A field free region is created by applying the same bias to the curved grid, the first grid, and chamber sidewall sleeve. An electron detector detects all electrons passed by the second grid in an energy band in the overlap of the high-pass and low-pass bands.

Abstract translation: 一种电子能量分析仪，包括弯曲静电低通反射器和高通静电透射滤光片。 反射器包括弯曲格栅，优选椭圆形，和相对于电子源放置在弧形格栅背面的吸收电极，并且负反射地偏置到弯曲网格以用作反射低通滤波器和用于反射的准直光学器件 光束。 透射滤光器包括延伸穿过准直反射光束的第一和第二平坦栅格。 与第一格架相对的弧形栅格侧的第二格栅被负向偏置到第一格栅和吸收体电极。 通过将相同的偏压施加到弯曲格栅，第一格栅和室侧壁套筒来产生无场区域。 电子检测器通过高通和低通带重叠的能带检测由第二格栅通过的所有电子。

公开(公告)号：US4849629A

公开(公告)日：1989-07-18

申请号：US120155

申请日：1987-11-13

Applicant: Hiroshi Daimon ,  Shozo Ino

Inventor： Hiroshi Daimon ,  Shozo Ino

IPC: G01Q60/20 ,  G01Q70/10 ,  H01J49/44 ,  H01J49/48

CPC classification number: H01J49/488

Abstract: A charged particle analyzer comprises a spherical grid, a spherical electrode, a screen plate, and a detector. The spherical electrode is outside of the spherical grid and is concentric with the spherical grid. The screen plate has an entry window and an exit opening, which are symmetrical with the center of the sphere of the spherical grid. A sample is disposed at the entry window of the screen plate. The detector is positioned behind the exit opening to detect charged particles emitted from the sample. The charged particles having the same energy can travel through the exit opening of the screen plate, and their amount or their angular distribution is measured.

Abstract translation: 带电粒子分析仪包括球形网格，球形电极，筛板和检测器。 球形电极在球栅之外，与球栅同心。 筛板具有入口窗口和出口开口，其与球形网格的球体的中心对称。 样品设置在筛板的进入窗口处。 检测器位于出口开口后面，以检测从样品发射的带电粒子。 具有相同能量的带电粒子可以穿过筛板的出口，并且测量其量或其角度分布。

公开(公告)号：US4748324A

公开(公告)日：1988-05-31

申请号：US857965

申请日：1986-05-01

Applicant: Erich Plies ,  Wilhelm Argyo

Inventor： Erich Plies ,  Wilhelm Argyo

IPC: G01N23/225 ,  H01J37/05 ,  H01J37/244 ,  H01J37/28 ,  H01J49/48 ,  H01J40/00

CPC classification number: H01J49/488 ,  H01J37/05

Abstract: A deflection element for an electrostatic opposing field spectrometer includes a grid electrode at a positive potential and a deflection electrode at a negative potential disposed symmetrically thereto, as well as housing portions disposed between the grid electrode and the deflection electrode, so that together they form a generated surface of a hollow cylinder disposed concentric to an optical axis of the spectrometer.

Abstract translation: 用于静电相对场光谱仪的偏转元件包括正电位的栅极和对称设置的负电位的偏转电极以及设置在栅电极和偏转电极之间的壳体部分，从而一起形成 生成的与设置在光谱仪的光轴同心的中空圆筒的表面。

公开(公告)号：US4728790A

公开(公告)日：1988-03-01

申请号：US41654

申请日：1987-04-21

Applicant: Erich Plies

Inventor： Erich Plies

IPC: H01J37/28 ,  G01Q30/02 ,  G01R31/28 ,  G01R31/305 ,  H01J37/10 ,  H01J37/244 ,  H01J37/26 ,  H01J49/06 ,  H01J49/44 ,  H01J49/48 ,  H01J37/252

CPC classification number: G01R31/305 ,  H01J37/10 ,  H01J37/268 ,  H01J49/06 ,  H01J49/488

Abstract: The spectrometer objective of the invention is composed of a short focal length objective lens (OL) and a spectrometer-detector arrangement which is completely integrated in the magnetic lens. The working distance (L) has a decisive influence on the chromatic and spherical image defect of the objective lens (OL) which can be reduced with the arrangement of the invention and, thus, the diameter of the electron probe on the specimen (PR) can be substantially demagnified. An angle-independent accumulation of the secondary electrons (SE) are triggered such that the measuring location occurs according to the invention by imaging of the virtual source point (QS) of the secondary electrons (SE) into the center of a spherical opposing field which occurs in the spatial region between two spherical-symmetrical grid electrodes (K1 and K2).

Abstract translation: 本发明的光谱仪物镜由完全集成在磁性透镜中的短焦距物镜（OL）和光谱仪检测器装置组成。 工作距离（L）对物镜（OL）的彩色和球面图像缺陷具有决定性的影响，可以通过本发明的布置而减小，因此，样品（PR）上的电子探针的直径， 可以大幅度缩小。 触发二次电子（SE）的角度无关的累积，使得根据本发明，通过将二次电子（SE）的虚拟源点（QS）成像成球面相对场的中心来测量位置， 发生在两个球对称栅格电极（K1和K2）之间的空间区域中。

公开(公告)号：US3805068A

公开(公告)日：1974-04-16

申请号：US27757172

申请日：1972-08-03

Applicant: LEE J

Inventor： LEE J

IPC: G01Q60/00 ,  H01J49/48 ,  H01J37/26

CPC classification number: H01J49/488

Abstract: Method and apparatus for energy analysis of a stream of moving electrons by effecting electrostatic segregation and counting of an electron portion having a preselected kinetic energy.

Abstract translation: 通过进行静电偏析和具有预选动能的电子部分的计数来对运动电子流进行能量分析的方法和装置。

公开(公告)号：US20180082829A1

公开(公告)日：2018-03-22

申请号：US15503342

申请日：2016-01-21

Applicant: JAPAN SYNCHROTRON RADIATION RESEARCH INSTITUTE

Inventor： Takayuki MURO ,  Tomohiro MATSUSHITA

IPC: H01J49/48 ,  H01J49/02

CPC classification number: H01J49/488 ,  H01J37/05 ,  H01J37/244 ,  H01J49/022 ,  H01J2237/053 ,  H01J2237/057 ,  H01J2237/24485

Abstract: A retarding potential type energy analyzer including a front grid electrode, reference grid electrode and rear grid electrode sequentially arranged, with a predetermined amount of potential difference given between the reference grid electrode and the front grid electrode to form an upward potential gradient as well as a potential difference given between the reference grid electrode and the rear grid electrode to form a downward potential gradient, the grid electrodes are arranged so that the distance between the reference grid electrode and the rear grid electrode is shorter than the distance between the reference grid electrode and the front grid electrode, or the potential difference between the reference grid electrode and the rear grid electrode is made to be greater than the potential difference between the reference grid electrode and the front grid electrode.

公开(公告)号：US08847159B2

公开(公告)日：2014-09-30

申请号：US13433071

申请日：2012-03-28

Applicant: Lee Chen ,  Barton Lane ,  Merritt Funk ,  Jianping Zhao ,  Radha Sundararajan

Inventor： Lee Chen ,  Barton Lane ,  Merritt Funk ,  Jianping Zhao ,  Radha Sundararajan

IPC: G01T1/185 ,  H01J49/48 ,  H01J37/32 ,  H05H1/00

CPC classification number: H01J37/32935 ,  H01J49/488 ,  H05H1/0081 ,  Y10T29/49002

Abstract: An ion energy analyzer for determining an ion energy distribution of a plasma and comprising an entrance grid, a selection grid, and an ion collector. The entrance grid includes a first plurality of openings dimensioned to be less than a Debye length for the plasma. The ion collector is coupled to the entrance grid via a first voltage source. The selection grid is positioned between the entrance grid and the ion collector and is coupled to the entrance grid via a second voltage source. An ion current meter is coupled to the ion collector to measure an ion flux onto the ion collector and transmit a signal related thereto.

Abstract translation: 一种用于确定等离子体的离子能量分布并包括入口格栅，选择栅格和离子收集器的离子能量分析器。 入口格栅包括尺寸小于等离子体的德拜长度的第一多个开口。 离子收集器通过第一电压源耦合到入口电网。 选择网格位于入口格栅和离子收集器之间，并通过第二电压源耦合到入口格栅。 离子电流计耦合到离子收集器以测量离子收集器上的离子通量并传输与其相关的信号。

公开(公告)号：US20120248311A1

公开(公告)日：2012-10-04

申请号：US13433088

申请日：2012-03-28

Applicant: Merritt Funk ,  Lee Chen ,  Barton Lane ,  Jianping Zhao ,  Radha Sundararajan

Inventor： Merritt Funk ,  Lee Chen ,  Barton Lane ,  Jianping Zhao ,  Radha Sundararajan

IPC: G01T1/16 ,  B23K31/02 ,  H01S4/00

CPC classification number: H01J37/32935 ,  H01J49/488 ,  H05H1/0081 ,  Y10T29/49002

Abstract: A process by which an ion energy analyzer is manufactured includes processing a first substrate to form an entrance grid having a first channel and a first plurality of openings extending therethrough. A second substrate is processed to form a selection grid having a second channel therein and a second plurality of openings extending therethrough. A third substrate is processed to form an ion collector having a third channel therein. The entrance grid is operably coupled to, and electrically isolated from, the selection grid, which is, in turn, operably coupled to, and electrically isolated from, the ion collector.

Abstract translation: 制造离子能量分析器的过程包括处理第一基底以形成具有第一通道和延伸穿过其中的第一多个开口的入口格栅。 处理第二衬底以形成其中具有第二通道的选择栅格和延伸穿过其中的第二多个开口。 处理第三衬底以形成其中具有第三通道的离子收集器。 入口栅格可操作地耦合到选择栅格并与之电隔离，所述选择栅格又可操作地耦合到离子收集器并与电离隔离。

公开(公告)号：US20080067323A1

公开(公告)日：2008-03-20

申请号：US11597955

申请日：2005-06-01

Applicant: Erez Halahmi ,  Ron Naaman ,  Leeor Kronik

Inventor： Erez Halahmi ,  Ron Naaman ,  Leeor Kronik

IPC: H01J43/30

CPC classification number: G01J1/42 ,  H01J40/16 ,  H01J49/488

Abstract: A device and method are presented for use in measuring photon energy. The device comprises at least one pixel unit (10) including a Photocathode (12) that emits electrons in response to absorbed photons; an Anode (14); and a control unit (19) operable for controlling an electric current from the Photocathode (12) to the Anode (14) so as to selectively prevent electrons' arrival to the Anode (14) to thereby scan a spectrum of photon energies incident on the Photocathode (12).

Abstract translation: 提出了一种用于测量光子能量的装置和方法。 该装置包括至少一个像素单元（10），其包括响应于吸收的光子发射电子的光电阴极（12）; 阳极（14）; 以及控制单元（19），其可操作用于控制从光电阴极（12）到阳极（14）的电流，以便选择性地防止电子到达阳极（14），从而扫描入射到阳极 光电阴极（12）。