Devices for ionizing residual gases in vacuum systems
    37.
    发明授权
    Devices for ionizing residual gases in vacuum systems 失效
    真空系统中残留气体的离子化装置

    公开(公告)号:US3796917A

    公开(公告)日:1974-03-12

    申请号:US3796917D

    申请日:1972-08-21

    Inventor: HILLER D

    CPC classification number: H01J41/16 H01J41/06

    Abstract: The disclosed ionizers are of the orbitron type utilizing a high voltage anode in the form of a wire or rod extending axially within an outer generally cylindrical electrode which may be in the form of a cylindrical conductive screen connected to the negative terminal of the power supply. One or more of the ionizers are mounted within a vacuum space containing residual gas molecules to be ionized. The resulting ions may be propelled by electrostatic field forces to the cylindrical screen and also to the walls of the vacuum chamber where the ions may be absorbed or gettered by freshly deposited titanium or some other gettering material. By this mechanism of ion getter pumping, gas molecules are effectively removed from the vacuum space so as to improve the vacuum. In accordance with the present invention, electrons are injected into the space between the axial anode and the outer cylindrical electrode by an electron-emitting electrode which is typically in the form of a generally circular loop or ring encircling the axial anode and spaced inwardly from the cylindrical outer electrode in the radial electric field beween the inner and outer electrodes. The electron-emitting electrode is preferably energized with a direct current which causes heating of the electron-emitting electrode so that electrons are emitted thermionically therefrom. The current also produces an axial magnetic field in the space between the electron-emitting electrode and the anode. The combination of the radial electric field and the axial magnetic field causes a high percentage of the emitted electrons to go into orbits around the anode so that the electrons have extremely long mean-free paths before finally being attracted to the anode. In this way, the orbiting electrons produce a high degree of ionization of the residual gas molecules in the vacuum space. The axial magnetic field may be enhanced by an electromagnet or a permanent magnet disposed near the circular electron-emitting electrode and preferably aligned axially therewith. The electromagnet may take the form of a loop having one or more turns disposed near the electron-emitting electrode or a coil having a multiplicity of turns and preferably having a core of magnetic material. The permanent magnet may be generally cylindrical in shape and disposed axially. The ionizer may also be used to provide an ion gage in which the ion current to the cylindrical electrode is measured.

    Hydrocarbon responsive getter ion pump
    38.
    发明授权
    Hydrocarbon responsive getter ion pump 失效
    油气回收泵

    公开(公告)号:US3672789A

    公开(公告)日:1972-06-27

    申请号:US3672789D

    申请日:1970-09-21

    Applicant: GEN ELECTRIC

    CPC classification number: H01J41/16

    Abstract: A GETTER PUMP WHICH IS SENSITIVE TO HYDROCARBON GASES AS WELL AS ACTIVE INORGANIC GASES IS DISCLOSED. THE PUMP IS PARTICULARLY USEFUL IN IMAGE CONVERTER TUBES HAVING ORGANIC MATERIALS THEREIN. THE GETTER PUMP INCLUDES ELECTRODE MEANS FOR DISSOCIATING THE HYDROCARBON GASES INTO THEIR ATOMIC CONSTITUENTS AND HEATING MEANS TO IMPROVE THE GETTERING CHARACTERISTICS OF PARTICULAR POROUS GETTER MATERIALS SUCH AS TITANIUM, ZIRCONIUM, ALLOYS OF TITANIUM AND ZIRCONIUM, OR ALLOYS OF ZIRCONIUM AND ALUMINUM.

    Method of operating an ion-getter vacuum pump with gun and grid structure arranged for optimum ionization and sublimation
    39.
    发明授权
    Method of operating an ion-getter vacuum pump with gun and grid structure arranged for optimum ionization and sublimation 失效
    运行具有喷枪和网格结构的离子真空泵的方法适用于最佳离子化和离子化

    公开(公告)号:US3588593A

    公开(公告)日:1971-06-28

    申请号:US3588593D

    申请日:1969-03-27

    CPC classification number: H01J41/16

    Abstract: ELECTRONS INJECTED BETWEEN A CYLINDRICAL HOUSING AND A COAXIAL CYLINDRICAL GRID AT A PREDETERMINED ANGULAR MOMENTUM SPIRAL OVER LONG PATHS AROUND THE GRID FOR OPTIMUM IONIZATION OF GAS MOLECULES. A FIRST ELECTROSTATIC FIELD IS ESTABLISHED BETWEEN THE HOUSING AND GRID FOR ACCELERATING IONS TO THE HOUSING AND FOR ESTABLISHING AN OPTIMUM KINETIC ENERGY TO THE ORBITING ELECTRONS. A SECOND ELECTROSTATIC FIELD

    IS INDEPENDENTLY ESTABLISHED BETWEEN THE GRID AND A CONCENTRIC TITANIUM ROD ANODE AT AN OPTIMUM INTENSITY FOR ACCELERATING SPENT ELECTRONS THROUGH THE GRID TO BOMBARD AND SUBLIMATE THE TITANIUM FOR BURYING IONS AND COMBINING WITH ACTIVE GASES.

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