Discharge lamp
    32.
    发明授权
    Discharge lamp 失效
    放电灯

    公开(公告)号:US5808402A

    公开(公告)日:1998-09-15

    申请号:US878142

    申请日:1997-06-18

    CPC classification number: H05B41/2883 H01J5/60 H01J61/34

    Abstract: A discharge lamp, having a base part, a discharge vessel connected with the base part, at least two electrodes arranged in said discharge vessel, the discharge vessel prior to connection with the base part being movable relative to the base part for adjustment, a receiving element fixable on the discharge vessel, an intermediate member formed so that discharge vessel is connectable with intermediate member through receiving element, discharge vessel being movable through receiving element relative to intermediate member for an adjustment, and after a performed adjustment is fixable on intermediate member, intermediate member being movable for an adjustment of discharge vessel relative to the base part and fixable after a performed adjustment on the base part.

    Abstract translation: 一种放电灯,具有基部,与基部连接的放电容器,布置在所述放电容器中的至少两个电极,放电容器在与基部连接之前相对于基座可移动以进行调节, 元件,其可固定在放电容器上,中间构件形成为使得放电容器可通过接收元件与中间构件连接,放电容器可相对于中间构件可移动通过接收元件进行调节,并且在执行调整可固定在中间构件上之后, 中间构件可移动以用于放电容器相对于基座的调节,并且可以在对基部进行调整之后固定。

    Electrodeless fluorescent lamp with bifilar coil and faraday shield
    35.
    发明授权
    Electrodeless fluorescent lamp with bifilar coil and faraday shield 失效
    无电极荧光灯带双线圈和法拉第屏蔽

    公开(公告)号:US5726523A

    公开(公告)日:1998-03-10

    申请号:US643629

    申请日:1996-05-06

    CPC classification number: H01J65/048

    Abstract: An electrodeless fluorescent lamp and fixture is disclosed which operates at radio frequencies and contains a bifilar coil to reduce RF voltage between the plasma and the coil and a metallic cylinder (10) to remove heat from a said bifilar coil. The bifilar coil consists of two windings. The primary (induction) winding (6) is used to generate RF electrical azimuthal field in the bulb volume needed to maintain the inductively-coupled RF plasma. The second (bifilar) winding (18) has essentially the same number of turns and is wound on the inductive winding (6), but in the direction opposite to that of the primary (inductive) winding. The RF current flowing in the inductive winding (6) induces an RF voltage of the opposite polarity in the bifilar winding (18), so two adjacent turns of both windings have equal (or nearly equal) but of opposite sign RF potentials with respect to the plasma. This results in the mutual "cancellation" of capacitive RF electric fields induced by both windings in the plasma and in a sheath formed between the plasma and the cavity walls. The reduction of the electric field in turn results in the lowering of a direct current voltage across the sheath thereby lowering the energy of ions which are accelerated in this sheath coating. The lowering of ion energy reduces the damage caused by ions and leads to improved maintenance and a longer life lamp.

    Abstract translation: 公开了一种无电极荧光灯和固定装置,其在无线电频率下操作,并且包含双线圈以降低等离子体和线圈之间的RF电压,以及金属圆筒(10)以从所述双线圈卷取热量。 双线圈由两个绕组组成。 主(感应)绕组(6)用于产生维持感应耦合RF等离子体所需的灯泡容积中的RF电方位场。 第二(双向)绕组(18)具有基本相同的匝数,并且缠绕在感应绕组(6)上,但是沿与主(感应)绕组相反的方向缠绕。 在电感绕组(6)中流动的RF电流在双线绕组(18)中引起相反极性的RF电压,因此两个绕组的两个相邻匝相对于相对于相同的(或几乎相等)但具有相反的符号RF电位 等离子体。 这导致由等离子体中的两个绕组和在等离子体和空腔壁之间形成的护套引起的电容RF电场的相互“抵消”。 电场的减少又导致穿过护套的直流电压的降低,从而降低在该护套涂层中加速的离子的能量。 离子能量的降低会降低由离子引起的损伤,从而改善维护和延长寿命。

    Large area, surface discharge pumped, vacuum ultraviolet light source
    37.
    发明授权
    Large area, surface discharge pumped, vacuum ultraviolet light source 失效
    大面积,表面放电抽,真空紫外光源

    公开(公告)号:US5585641A

    公开(公告)日:1996-12-17

    申请号:US448242

    申请日:1995-05-23

    CPC classification number: H01J61/00

    Abstract: Large area, surface discharge pumped, vacuum ultraviolet (VUV) light source. A contamination-free VUV light source having a 225 cm.sup.2 emission area in the 240-340 nm region of the electromagnetic spectrum with an average output power in this band of about 2 J/cm.sup.2 at a wall-plug efficiency of approximately 5% is described. Only ceramics and metal parts are employed in this surface discharge source. Because of the contamination-free, high photon energy and flux, and short pulse characteristics of the source, it is suitable for semiconductor and flat panel display material processing.

    Abstract translation: 大面积,表面放电抽,真空紫外线(VUV)光源。 描述了一种无污染的VUV光源,其在电磁光谱的240-340nm区域具有225cm 2的发射面积,并且在约5%的墙壁插头效率下,该带的平均输出功率为约2J / cm 2 。 在该表面放电源中仅使用陶瓷和金属部件。 由于无污染,高光子能量和通量,以及源的短脉冲特性,适用于半导体和平板显示材料的加工。

    High-power radiator
    40.
    发明授权
    High-power radiator 失效
    大功率散热器

    公开(公告)号:US4837484A

    公开(公告)日:1989-06-06

    申请号:US76926

    申请日:1987-07-22

    CPC classification number: H01J61/00 H01J65/00

    Abstract: The high-power radiator comprises a discharge space (12) bounded by a metal electrode (8), cooled on one side, and a dielectric (9). The discharge space (12) is filled with a noble gas or gas mixture. Both the dielectric (9) and the other electrode situated on the surface of the dielectric (9) facing away from the discharge space (12) are transparent for the radiation generated by quiet electric discharges. In this manner, a large-area UV radiator with high efficiency is created which can be operated at high electrical power densities of up to 50 kW/m.sup.2 of active electrode surface.

    Abstract translation: 高功率散热器包括由一侧冷却的金属电极(8)和电介质(9)限定的放电空间(12)。 放电空间(12)填充惰性气体或气体混合物。 电介质(9)和位于电介质(9)的远离放电空间(12)的表面上的另一电极对于由静电放电产生的辐射是透明的。 以这种方式,产生了高效率的大面积UV辐射器,其可以在高达50kW / m 2的有效电极表面的高功率密度下操作。

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