公开(公告)号：US20150311058A1

公开(公告)日：2015-10-29

申请号：US14650657

申请日：2013-08-23

Applicant: RND-IS-AN, LTD

Inventor： Pavel Stanislavovich ANTSIFEROV ,  Konstantin Nikolaevich KOSHELEV ,  Vladimir Mikhailovich KRIVTSUN ,  Aleksandr Andreevich LASH

IPC: H01J61/02 ,  H01J63/08

CPC classification number: H01J61/025 ,  H01J61/54 ,  H01J61/76 ,  H01J63/08 ,  H01J65/04

Abstract: The invention relates to light sources with laser pumping and to methods for generating radiation with a high luminance in the ultraviolet (UV) and visible spectral ranges. The technical result of the invention includes extending the functional possibilities of a light source with laser pumping by virtue of increasing the luminance, increasing the coefficient of absorption of the laser radiation by a plasma, and significantly reducing the numerical aperture of a divergent laser beam which is to be occluded and which is passing through the plasma. The device comprises a chamber containing a gas, a laser producing a laser beam, an optical element, a region of radiating plasma produced in the chamber by the focused laser beam, an occluder, which is mounted on the axis of the divergent laser beam on the second side of the chamber and an optical system for collecting plasma radiation.

Abstract translation: 本发明涉及具有激光泵浦的光源以及用于在紫外线（UV）和可见光谱范围内产生具有高亮度的辐射的方法。 本发明的技术结果包括通过增加亮度，增加等离子体激光辐射的吸收系数来扩大激光泵浦的光源的功能可能性，并显着减少发射激光束的数值孔​​径 被封闭并且正在通过等离子体。 该装置包括容纳气体的腔室，产生激光束的激光器，光学元件，通过聚焦激光束在腔室中产生的辐射等离子体的区域，封闭器，其安装在发散激光束的轴上 室的第二侧和用于收集等离子体辐射的光学系统。

公开(公告)号：US08921813B2

公开(公告)日：2014-12-30

申请号：US13625198

申请日：2012-09-24

Applicant: William Palmer ,  Joseph M. Cattadoris, Jr.

Inventor： William Palmer ,  Joseph M. Cattadoris, Jr.

IPC: A61L2/10 ,  A61L9/20 ,  A61N5/06 ,  F21V7/06 ,  H01J61/02 ,  F21V7/00

CPC classification number: A61L2/10 ,  A61L9/20 ,  A61N5/0624 ,  F21V7/005 ,  H01J61/025

Abstract: An ultraviolet (UV) germicidal or sterilization fixture having a dual parabolic reflecting assembly for collimating and redirecting UV light. The first pair of parabolic reflectors are positioned to collimate and reflect light emanating from the sides of the UV light source and spaced apart proximately to the rear surface of the UV source to allow light to pass through. The second pair of reflectors are positioned behind the first pair and aligned to capture light passing through the gap formed by the first pair of reflectors and then collimate and redirect the light produced by the rear of the light source out of the front of the fixture.

Abstract translation: 紫外线（UV）杀菌或灭菌器具具有用于准直和重新定向UV光的双抛物面反射组件。 第一对抛物面反射器被定位成准直和反射从UV光源的侧面发出的光并且近似于UV源的后表面间隔开以允许光通过。 第二对反射器位于第一对之后并且对准以捕获穿过由第一对反射器形成的间隙的光，然后将由光源的后部产生的光准直并重定向到固定装置前部。

公开(公告)号：US20140239202A1

公开(公告)日：2014-08-28

申请号：US14183134

申请日：2014-02-18

Applicant: Ilya Bezel ,  Anatoly Shchemelinin ,  Alex Salnik ,  Anant Chimmalgi

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Alex Salnik ,  Anant Chimmalgi

IPC: H01J61/02

CPC classification number: H01J61/025 ,  H01J61/33 ,  H01J65/04

Abstract: A laser-sustained plasma illuminator system includes at least one laser light source to provide light. At least one reflector focuses the light from the laser light source at a focal point of the reflector. An enclosure substantially filled with a gas is positioned at or near the focal point of the reflector. The light from the laser light source at least partially sustains a plasma contained in the enclosure. The enclosure has at least one wall with a thickness that is varied to compensate for optical aberrations in the system.

Abstract translation: 激光持续等离子体照明器系统包括至少一个激光源以提供光。 至少一个反射器将来自激光光源的光聚焦在反射器的焦点处。 基本上充满气体的外壳位于反射器的焦点处或附近。 来自激光光源的光至少部分维持包含在外壳中的等离子体。 外壳具有至少一个具有变化的厚度的壁以补偿系统中的光学像差。

公开(公告)号：US20140042336A1

公开(公告)日：2014-02-13

申请号：US13790084

申请日：2013-03-08

Applicant: KLA-TENCOR CORPORATION

Inventor： Ilya Bezel ,  Anatoly Shchemelinin ,  Matthew Alan Panzer

IPC: H01J61/02

CPC classification number: H01J61/02 ,  H01J61/12 ,  H01J61/125 ,  H01J61/14 ,  H01J61/16 ,  H01J61/28 ,  H01J61/302 ,  H01J61/52 ,  H01J61/54 ,  H01J65/04 ,  H01J65/042

Abstract: A wafer inspection system includes a laser sustained plasma (LSP) light source that generates light with sufficient radiance to enable bright field inspection. Reliability of the LSP light source is improved by introducing an amount of water into the bulb containing the gas mixture that generates the plasma. Radiation generated by the plasma includes substantial radiance in a wavelength range below approximately 190 nanometers that causes damage to the materials used to construct the bulb. The water vapor acts as an absorber of radiation generated by the plasma in the wavelength range that causes damage. In some examples, a predetermined amount of water is introduced into the bulb to provide sufficient absorption. In some other examples, the temperature of a portion of the bulb containing an amount of condensed water is regulate to produce the desired partial pressure of water in the bulb.

Abstract translation: 晶片检查系统包括激光持续等离子体（LSP）光源，其产生具有足够辐射度的光以实现明场检查。 通过将一定量的水引入到含有产生等离子体的气体混合物的灯泡中来提高LSP光源的可靠性。 由等离子体产生的辐射包括在低于约190纳米的波长范围内的实质辐射，这导致用于构建灯泡的材料的损坏。 水蒸汽作为在等离子体产生的辐射的吸收体，在波长范围内引起损伤。 在一些实例中，将预定量的水引入灯泡以提供足够的吸收。 在一些其它实施例中，调节包含一定量冷凝水的灯泡的一部分的温度以产生灯泡中期望的水分压。

公开(公告)号：US08400059B2

公开(公告)日：2013-03-19

申请号：US13181916

申请日：2011-07-13

Applicant: Alex Voronov ,  Burkard Jung ,  Franz-Josef Schilling

Inventor： Alex Voronov ,  Burkard Jung ,  Franz-Josef Schilling

IPC: H01J17/02 ,  H01J61/02

CPC classification number: H01J61/307 ,  H01J61/72

Abstract: Known mercury-vapor discharge lamps for planar irradiation are provided with a lamp bulb made of quartz glass, which encloses a closed discharge space having a non-linear gas-discharge channel. In order to provide a structurally simple lamp, which also guarantees a highest possible homogeneity of the UV irradiation, even for a small distance to the surface to be treated, the lamp bulb is formed as a quartz-glass chamber defined by straight walls and having bottom, top, and side walls and is divided into sub-chambers by several separating webs made of quartz glass and projecting from the bottom wall to the top wall. These sub-chambers include a front-most sub-chamber and a rear-most sub-chamber and form in series interconnection the non-linear gas-discharge channel. The separating webs extend alternately from one side wall up to close to the opposite side wall, while leaving open a gap connecting adjacent sub-chambers in a fluid-communicating manner. One electrode is allocated to the front-most sub-chamber and the other electrode is allocated to the rear-most sub-chamber.

Abstract translation: 已知的用于平面照射的汞蒸汽放电灯设置有由石英玻璃制成的灯泡，其包围具有非线性气体放电通道的封闭放电空间。 为了提供一种结构简单的灯，即使在待处理表面的距离较小的情况下，也能保证最高的UV照射均匀性，灯泡形成为由直壁限定的石英玻璃室，并且具有 底部，顶部和侧壁，并且通过几个由石英玻璃制成的分离网分成子室，并从底壁突出到顶壁。 这些子室包括最前面的子室和最后面的子室，并且将非线性气体放电通道串联连接。 分离腹板从一个侧壁交替地延伸到靠近相对的侧壁，同时留下以流体连通的方式连接相邻的分室的间隙。 一个电极被分配到最前面的子室，另一个电极被分配给最后面的子室。

公开(公告)号：US20120112637A1

公开(公告)日：2012-05-10

申请号：US12940475

申请日：2010-11-05

Applicant: Cornelis Jozef Petrus Maria Rooijackers

Inventor： Cornelis Jozef Petrus Maria Rooijackers

IPC: H01J61/02

CPC classification number: H05B41/282 ,  H01J61/28 ,  H01J61/54 ,  H01J61/72 ,  H05B41/295

Abstract: A lamp is operated with main and auxiliary amalgams. In accordance with one or more embodiments, a lamp includes an auxiliary amalgam-based material that releases mercury at an elevated temperature that is above an operating temperature of the lamp, and that absorbs mercury at temperatures below the elevated temperature. During a start-up period, the auxiliary amalgam-based material is heated to cause the material to release mercury for generating light in the lamp. After the start-up period, the auxiliary amalgam-based material is allowed to cool below the elevated temperature and absorb mercury, while the lamp continues to operate for generating light using a main amalgam.

Abstract translation: 灯具采用主要和辅助汞合金进行操作。 根据一个或多个实施例，灯包括辅助汞齐材料，其在高于灯的工作温度的升高的温度下释放汞，并且在低于升高的温度的温度下吸收汞。 在启动期间，辅助汞齐材料被加热以使材料释放汞以产生灯中的光。 启动之后，辅助汞合金材料可以在升高的温度下冷却并吸收水银，而灯继续运行，使用主要的汞齐产生光。

公开(公告)号：US20110198992A1

公开(公告)日：2011-08-18

申请号：US13124970

申请日：2009-10-13

Applicant: Geert Wouters ,  Luc Stefaan Emmanuel Lammerant

Inventor： Geert Wouters ,  Luc Stefaan Emmanuel Lammerant

IPC: H01J61/02

CPC classification number: H01J5/56 ,  H01J5/58 ,  H01J9/34 ,  H01J61/52

Abstract: A socketed high pressure gas discharge lamp having a lamp vessel comprising a space sealed by at least one seal. The discharge lamp further comprising a socket in which the lamp vessel is mounted with its seal and fixed with cement. A lamp axis extending through the socket and through the space of the lamp vessel. The socket is provided with at least one opening extending axially through the socket from its base side to its front side. The opening has an annular wall which is either formed only by the socket or by a combination of both the socket and the seal of the lamp vessel. Preferably, the opening is located on either side of the seal.

Abstract translation: 一种插座高压气体放电灯，其具有包含由至少一个密封件密封的空间的灯泡。 放电灯还包括插座，其中灯容器安装有其密封件并用水泥固定。 灯轴延伸穿过插座并通过灯泡的空间。 插座设置有至少一个开口，其从基座侧到其前侧轴向延伸穿过插座。 开口具有环形壁，其仅由插座形成，或者由插座和灯泡的密封件的组合形成。 优选地，开口位于密封件的两侧。

公开(公告)号：US20110006660A1

公开(公告)日：2011-01-13

申请号：US12500228

申请日：2009-07-09

Applicant: LUCA BIZZOZZERO

Inventor： LUCA BIZZOZZERO

IPC: H01J61/02 ,  F21V21/00

CPC classification number: H01J5/54 ,  H01R13/6275 ,  H01R33/09

Abstract: A UV lamp comprises: a bulb (2) containing a mixture of an inert gas and metallic halides; at least one first electrode (4) and one second (4) electrode associated with the bulb (2); a connector (6), coupled to the bulb (2) and having two thin metal plates (12a) protruding from a portion of said connector (6). Each flat thin plate (12a) is electrically connected to an electrode (4) and is spaced apart from the other thin plate (12a) by at least 20 mm.

Abstract translation: UV灯包括：包含惰性气体和金属卤化物的混合物的灯泡（2）; 与所述灯泡（2）相关联的至少一个第一电极（4）和一个第二（4）电极; 连接器（6），其连接到所述灯泡（2）并且具有从所述连接器（6）的一部分突出的两个薄金属板（12a）。 每个扁平薄板（12a）电连接到电极（4）并与另一个薄板（12a）隔开至少20mm。

公开(公告)号：US20100052496A1

公开(公告)日：2010-03-04

申请号：US12550426

申请日：2009-08-31

Applicant: Hideyuki Matsumoto ,  Takashi Noguchi

Inventor： Hideyuki Matsumoto ,  Takashi Noguchi

IPC: H01J61/02

CPC classification number: H01J61/0732

Abstract: A discharge lamp configured to suppress temperature increases in the electrode on the opening part side of a reflective mirror is described. The discharge lamp includes an F electrode and an R electrode having shapes before forming the melt electrodes that satisfy at least one of the following conditions (a) to (c): (a) The diameter of the core wire of the F electrode is d1f, and the diameter of the core wire of the R electrode is d1r, then d1f>1.2×d1r; (b) The wire diameter of the coil of said F electrode is d2f, and the wire diameter of the coil of the R electrode is d2r, then d2f>1.2×d2r; (c) the number of windings of the coil of the F electrode is nf, and the number of windings of the coil of the R electrode is nr, then nf>1.2×nr.

Abstract translation: 描述了构造成抑制反射镜的开口部侧的电极的温度升高的放电灯。 放电灯包括F电极和R电极，其形成熔融电极之前的形状满足以下条件（a）至（c）中的至少一个：（a）F电极的芯线的直径为d1f ，R电极的芯线直径为d1r，d1f> 1.2×d1r; （b）所述F电极的线圈的线径为d2f，R电极的线圈的线径为d2r，d2f> 1.2×d2r; （c）F电极的线圈的绕组数为nf，R电极的线圈的绕组数为nr，nf> 1.2×nr。

公开(公告)号：US20090146562A1

公开(公告)日：2009-06-11

申请号：US12064730

申请日：2005-09-28

Applicant: Hiroshi Ogasawara ,  Hiroshi Miyasaki ,  Hidenori Kakehashi ,  Keisuke Harada ,  Yoshinobu Shibata

Inventor： Hiroshi Ogasawara ,  Hiroshi Miyasaki ,  Hidenori Kakehashi ,  Keisuke Harada ,  Yoshinobu Shibata

IPC: H01J61/02

CPC classification number: H01J65/048 ,  F21S8/08 ,  F21W2131/103

Abstract: An electrodeless discharge lamp apparatus is provided which is increased in heat dissipation, making it possible to adapt to an increase in output of the apparatus. The electrodeless discharge lamp apparatus comprises a bulb containing a discharge gas and a coupler accommodated in a cavity formed in the bulb for generating a high frequency electromagnetic field. The coupler has: an induction coil; a core inserted into the coil; a heat conductor for conducting heat generated from the coil and the core; and a bobbin made of resin which accommodates the core and the heat conductor therein, and which has the coil wound therearound. The bobbin is designed to be separated in a radial direction of the coil, so that it is possible to separately mold the respective parts of the bobbin. Thus, it is not necessary to form, in the bobbin, a draft angle which has been necessary in the prior art when molding a tubular-shaped bobbin, and it is possible to make the thickness of the bobbin thin and uniform, so that the proportion of the bobbin in the volume of the cavity can be reduced to increase the proportion of the heat conductor.

Abstract translation: 提供了一种无电极放电灯装置，其散热增加，使得可以适应装置的输出增加。 无电极放电灯装置包括容纳放电气体的灯泡和容纳在形成于灯泡中的空腔中的耦合器，用于产生高频电磁场。 耦合器具有：感应线圈; 芯线插入线圈; 用于传导从线圈和芯产生的热的导热体; 以及由树脂构成的线轴，其中容纳有芯和热导体，并​​且具有卷绕在其上的线圈。 线轴被设计成在线圈的径向方向上分离，从而可以分别模制线轴的各个部分。 因此，在筒管中不需要在成型管状筒管时在现有技术中形成拔模斜度，并且可以使筒管的厚度变薄且均匀，从而使 可以减小筒管在空腔体积中的比例，以增加导热体的比例。