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公开(公告)号:US11978620B2
公开(公告)日:2024-05-07
申请号:US17880455
申请日:2022-08-03
Applicant: KLA Corporation
Inventor: Ilya Bezel , Leonid Borisovich Zvedenuk , Andrey Evgenievich Stepanov , Amir Torkaman
CPC classification number: H01J65/042 , H01J61/025 , H01J61/28 , H01J61/52
Abstract: A plasma lamp for use in a laser-sustained plasma (LSP) light source is disclosed. The plasma lamp includes a gas containment structure for containing a gas, a gas seal positioned at a base of the gas containment structure, a gas inlet, and a gas outlet. The plasma lamp includes a gas swirler including a set of nozzles configured to generate a vortex gas flow and a swirler shaft including an inlet channel for delivering the gas from the gas inlet to the nozzles and an outlet channel for delivering the gas from the gas containment structure to the gas outlet. The plasma lamp includes a distributor including one or more plenums to distribute the gas from the gas inlet into the swirler. The plasma lamp may also include a deflector fluidically coupled to the swirler shaft and extending above the set of nozzles and configured to direct gas flow around the swirler.
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公开(公告)号:US20230335389A1
公开(公告)日:2023-10-19
申请号:US18132162
申请日:2023-04-07
Applicant: KLA Corporation
Inventor: John Szilagyi , Ilya Bezel
CPC classification number: H01J65/042 , H01J61/025 , H01J61/28 , H01J61/52 , H01J61/16
Abstract: A laser-sustained broadband light source includes a gas containment structure and multiple jet nozzles. The jet nozzles are configured to direct multiple liquid jets of plasma-forming material in directions to collide with one another within the gas containment structure. The laser-sustained broadband light source further includes a laser pump source configured to generate an optical pump to sustain a plasma in a region of the gas containment structure at a collision point of the plurality of liquid jets and a light collector element configured to collect broadband light emitted from the plasma.
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公开(公告)号:US10080275B2
公开(公告)日:2018-09-18
申请号:US14688687
申请日:2015-04-16
Applicant: IMMUNOLIGHT, LLC , DUKE UNIVERSITY
Inventor: Frederic A. Bourke, Jr. , Zakaryae Fathi , Ian Nicholas Stanton , Michael J. Therien , Paul Rath Stauffer , Paolo Maccarini , Katherine Sarah Hansen , Diane Renee Fels , Cory Robert Wyatt
CPC classification number: H05B41/2806 , A61L2/10 , A61N1/40 , A61N1/44 , A61N2/00 , A61N5/10 , C02F1/32 , H01J65/042 , Y02B20/22 , Y02W10/37
Abstract: Methods and systems for producing a change in a medium. A first method and system (1) place in a vicinity of the medium at least one upconverter including a gas for plasma ignition, with the upconverter being configured, upon exposure to initiation energy, to generate light for emission into the medium, and (2) apply the initiation energy from an energy source including the first wavelength λ1 to the medium, wherein the emitted light directly or indirectly produces the change in the medium. A second method and system (1) place in a vicinity of the medium an agent receptive to microwave radiation or radiofrequency radiation, and (2) apply as an initiation energy the microwave radiation or radiofrequency radiation by which the agent directly or indirectly generates emitted light in the infrared, visible, or ultraviolet range to produce at least one of physical and biological changes in the medium.
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4.
公开(公告)号:US09978580B2
公开(公告)日:2018-05-22
申请号:US15356232
申请日:2016-11-18
Applicant: Heraeus Noblelight America LLC
Inventor: William E. Johnson , Robert Ervin
CPC classification number: H01J61/56 , G06K7/10366 , G06K19/0776 , H01J61/025 , H01J65/042 , H04W4/80 , H05B37/02
Abstract: A lamp is provided. The lamp includes a transparent envelope for emitting light, and an RFID tag coupled to a portion of the transparent envelope.
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公开(公告)号:US09939132B2
公开(公告)日:2018-04-10
申请号:US14802928
申请日:2015-07-17
Applicant: iUNU, LLC
IPC: F21V15/01 , H01J61/56 , H01J65/04 , F21V15/00 , A01G9/26 , H01J61/02 , F21V3/04 , F21V7/04 , F21V7/22 , F21W131/40 , F21Y115/10
CPC classification number: F21V15/01 , A01G9/26 , F21V3/04 , F21V7/048 , F21V7/22 , F21V15/00 , F21W2131/40 , F21Y2115/10 , H01J61/025 , H01J61/56 , H01J65/042 , Y02A40/274
Abstract: Shielding radio frequency interference (RFI) using reflector optics is disclosed. A simplified non-sealed reflector is used in conjunction with a mounting system, resulting in desired amounts of visible and non-visible light using radio frequency driven luminaries and emitters without sacrificing output or coverage area. Configurations are disclosed such that achieved RF grounding is compliant with FCC regulations. Accordingly, the disclosed RFI shielding improves optical design options, increased output, and decreased manufacturing costs over traditional sealed enclosures.
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公开(公告)号:US09805925B1
公开(公告)日:2017-10-31
申请号:US15270252
申请日:2016-09-20
Applicant: SPL Industries USA, Inc.
Inventor: Timothy J. Brockett , Gregg A. Hollingsworth , Mehran Matloubian
CPC classification number: H01J65/042 , H01J61/125 , H01J61/302 , H05B41/2806
Abstract: In electrodeless HID lamps the radio frequency (RF) source is separated from a lamp housing in which vessel containing plasma arc is mounted. This lamp housing is usually designed to maximize the amount of RF energy incident on the plasma arc. The plasma arc, however, cannot convert the entire amount of incident RF energy into light and a portion instead is released as propagating radiation or remains localized RF electromagnetic fields in the vicinity of lamp. In this invention, we introduce field suppression probes: Small, configurable structures that are made of conductive materials that mount directly to the lamp housing or alternately the lamp fixture that is able to suppress unused RF energy that is emanated from the lamp housing or plasma. These probes, when configured with the lamp, can substantially suppress the unused RF energy and prevent EMI emissions and reduce RF feedback that can adversely affect the lamp.
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公开(公告)号:US20170250066A1
公开(公告)日:2017-08-31
申请号:US15478306
申请日:2017-04-04
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Akinori ASAI , Kenshi FUKUMITSU
IPC: H01J65/04 , H01J61/073 , G03F7/20
CPC classification number: H01J65/04 , G03F7/70025 , H01J61/025 , H01J61/0737 , H01J61/26 , H01J65/042
Abstract: In a light source device, a control unit causes an energy density of a laser light in a lighting start region RS when a laser support light is maintained to be lower than an energy density of the laser light in the lighting start region RS when the laser support light is put on. For this reason, when the laser support light is maintained, a laser light L is radiated to the lighting start region RS at an energy density of a degree where sputtering does not occur. Therefore, in the light source device, because sputtering in a light emission sealing body can be suppressed, a sufficiently long life can be realized.
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8.
公开(公告)号:US20170154765A1
公开(公告)日:2017-06-01
申请号:US15356232
申请日:2016-11-18
Applicant: Heraeus Noblelight America LLC
Inventor: William E. Johnson, III , Robert Ervin
IPC: H01J61/56 , G06K7/10 , G06K19/077 , H01J65/04 , H01J61/02
CPC classification number: H01J61/56 , G06K7/10366 , G06K19/0776 , H01J61/025 , H01J65/042 , H04W4/80 , H05B37/02
Abstract: A lamp is provided. The lamp includes a transparent envelope for emitting light, and an RFID tag coupled to a portion of the transparent envelope.
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公开(公告)号:US09576786B2
公开(公告)日:2017-02-21
申请号:US14843939
申请日:2015-09-02
Applicant: iUNU, LLC
CPC classification number: H01J65/042 , A01G7/045 , H01J61/52 , H05B37/0227 , H05B37/0245 , H05B41/24 , H05B41/2806 , Y02P60/146
Abstract: The user of plasma light technology and remote lighting control techniques may enable a single master controller to control a large number of lighting fixtures. Multiple lighting fixtures may be equipped with control applications. Each control application may control the radio frequency driver of a lighting fixture that drives the plasma bulbs of the lighting fixture to produce light output for growing plants. The master controlled may execute on one or more computing devices. The master controller may send input instructions to the control applications of the lighting fixtures via a network. The instructions may be implemented by the control applications to command the radio frequency drivers to regulate a spectral distribution and/or intensity of the light output of the lighting fixtures.
Abstract translation: 等离子体光技术和远程照明控制技术的用户可以使单个主控制器能够控制大量的照明装置。 多个照明灯具可能配备有控制应用。 每个控制应用可以控制驱动照明器具的等离子体灯泡的照明器具的射频驱动器以产生用于生长植物的光输出。 被控制的主机可以在一个或多个计算设备上执行。 主控制器可以通过网络向照明灯具的控制应用发送输入指令。 指令可以由控制应用来实现,以指示射频驱动器调节照明器具的光输出的光谱分布和/或强度。
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公开(公告)号:US09526158B1
公开(公告)日:2016-12-20
申请号:US14814622
申请日:2015-07-31
Applicant: KLA-Tencor Corporation
Inventor: Ilya Bezel , Anatoly Shchemelinin , Yanming Zhao , Gildardo R. Delgado
IPC: H02J1/02 , H05H1/24 , H01J61/09 , H01J1/02 , H01J23/033
CPC classification number: H05H1/24 , H01J1/025 , H01J23/033 , H01J61/09 , H01J61/28 , H01J61/52 , H01J61/54 , H01J61/545 , H01J65/042
Abstract: A laser sustained plasma light source having a cell with a gas volume contained within the cell. At least one laser is directed into the gas volume, for sustaining a plasma within the gas volume, which plasma produces a light. Means are provided for continuously providing the gas volume to the plasma in a laminar flow. A reflector collects the light and provides the light to a desired location.
Abstract translation: 一种激光持续等离子体光源,其具有包含在电池内的气体体积的电池。 至少一个激光器被引导到气体体积中,用于维持等离子体产生光的气体体积内的等离子体。 提供了用于在层流中连续地向等离子体提供气体体积的装置。 反射器收集光并将光提供到期望的位置。
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