Fuse structure having a tortuous metal fuse line
    41.
    发明授权
    Fuse structure having a tortuous metal fuse line 失效
    具有曲折金属熔断线的保险丝结构

    公开(公告)号:US07667289B2

    公开(公告)日:2010-02-23

    申请号:US11091508

    申请日:2005-03-29

    CPC classification number: H01L23/5258 H01L2924/0002 H01L2924/00

    Abstract: A laser fuse structure for a semiconductor device, the laser fuse structure having an array of laser fuses wherein one or more of the fuses in the array have a tortuous fuse line extending between first and second connectors that connect the fuse to an underlying circuit area.

    Abstract translation: 一种用于半导体器件的激光熔丝结构,所述激光熔丝结构具有激光熔丝阵列,其中阵列中的一个或多个熔丝具有在将熔丝连接到下面的电路区域的第一和第二连接器之间延伸的曲折熔丝。

    Seal ring structures with reduced moisture-induced reliability degradation
    42.
    发明申请
    Seal ring structures with reduced moisture-induced reliability degradation 有权
    密封环结构具有减少的水分诱导的可靠性降低

    公开(公告)号:US20080251923A1

    公开(公告)日:2008-10-16

    申请号:US11786076

    申请日:2007-04-10

    CPC classification number: H01L23/585 H01L2924/0002 H01L2924/00

    Abstract: A semiconductor chip includes a seal ring adjacent to edges of the semiconductor chip; an opening extending from a top surface to a bottom surface of the seal ring, wherein the opening has a first end on an outer side of the seal ring and a second end on an inner side of the seal ring; and a moisture barrier having a sidewall parallel to a nearest side of the seal ring, wherein the moisture barrier is adjacent the seal ring and has a portion facing the opening.

    Abstract translation: 半导体芯片包括与半导体芯片的边缘相邻的密封环; 从所述密封环的顶表面延伸到底表面的开口,其中所述开口具有在所述密封环的外侧上的第一端和所述密封环的内侧上的第二端; 以及具有平行于所述密封环的最近侧的侧壁的防潮屏障,其中所述防潮层邻近所述密封环并且具有面向所述开口的部分。

    Method for damascene formation using plug materials having varied etching rates

    公开(公告)号:US20060099787A1

    公开(公告)日:2006-05-11

    申请号:US10983681

    申请日:2004-11-09

    CPC classification number: H01L21/76808

    Abstract: Methods for forming openings in damascene structures, such as dual damascene structures are provided, using plug materials having varied etching rates. In one embodiment, a semiconductor substrate is provided with a low-k material layer formed thereabove, the low-k material layer having an upper surface and at least one via opening formed therethrough. A first plug material layer is formed over the low-k material layer and filled in the via opening, the first plug material layer having a first etching rate. The first plug material layer is etched back to form a first plug partially filling the via opening. A second plug material layer is formed over the low-k material layer and the first plug. The second plug material layer is etched back to form a second plug partially below the upper surface of the low-k material layer, the second plug material layer having a second etching rate higher than the first etching rate.

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