公开(公告)号：US20200338517A1

公开(公告)日：2020-10-29

申请号：US16855860

申请日：2020-04-22

Applicant: Applied Materials, Inc.

Inventor： Jonathan Frankel ,  Colin C. Neikirk ,  Pravin K. Narwankar ,  Quoc Truong ,  Govindraj Desai ,  Sekar Krishnasamy

IPC: B01J8/10 ,  B01F7/04 ,  B01F7/00 ,  B05D1/00 ,  C23C16/44

Abstract: A reactor for coating particles includes a stationary vacuum chamber to hold a bed of particles to be coated, a vacuum port in an upper portion of the chamber, a chemical delivery system configured to inject a reactant or precursor gas into a lower portion of the chamber, a paddle assembly, and a motor to rotate a drive shaft of the paddle assembly. The lower portion of the chamber forms a half-cylinder. The paddle assembly includes a rotatable drive shaft extending through the chamber along the axial axis of the half cylinder, and a plurality of paddles extending radially from the drive shaft such that rotation of the drive shaft by the motor orbits the plurality of paddles about the drive shaft.