公开(公告)号：US20230347310A1

公开(公告)日：2023-11-02

申请号：US18212599

申请日：2023-06-21

Applicant: Applied Materials, Inc.

Inventor： Jonathan Frankel ,  Colin C. Neikirk ,  Pravin K. Narwankar ,  Quoc Truong ,  Govindraj Desai ,  Sekar Krishnasamy

IPC: B01J8/10 ,  C23C16/44 ,  B05D1/00 ,  B01F27/70 ,  B01F27/112

CPC classification number: B01J8/10 ,  C23C16/4417 ,  B05D1/60 ,  B01F27/70 ,  B01F27/112 ,  B01J2208/00867 ,  B01F2101/22

Abstract: A reactor for coating particles includes a stationary vacuum chamber to hold a bed of particles to be coated, a vacuum port in an upper portion of the chamber, a chemical delivery system configured to inject a reactant or precursor gas into a lower portion of the chamber, a paddle assembly, and a motor to rotate a drive shaft of the paddle assembly. The lower portion of the chamber forms a half-cylinder. The paddle assembly includes a rotatable drive shaft extending through the chamber along the axial axis of the half cylinder, and a plurality of paddles extending radially from the drive shaft such that rotation of the drive shaft by the motor orbits the plurality of paddles about the drive shaft.

公开(公告)号：US20220084796A1

公开(公告)日：2022-03-17

申请号：US17017952

申请日：2020-09-11

Applicant: Applied Materials, Inc.

Inventor： Quoc Truong ,  Dmitry A. Dzilno ,  Robert B. Moore

IPC: H01J37/32 ,  H05H1/36 ,  C23C16/455 ,  H01L21/02

Abstract: A plasma source assembly for use with a substrate processing chamber is described. The assembly includes a spring which is disposed between electrodes and a dielectric ring.

公开(公告)号：US12220678B2

公开(公告)日：2025-02-11

申请号：US17073111

申请日：2020-10-16

Applicant: Applied Materials, Inc

Inventor： Govindraj Desai ,  Sekar Krishnasamy ,  Sumedh Acharya ,  Dakshalkumar Patel ,  Jonathan Frankel ,  Quoc Truong ,  Mario Cambron ,  Ravindra Patil

IPC: C23C16/44 ,  B01J8/00 ,  B01J19/00 ,  B05C19/00 ,  B05C19/02 ,  B05D1/00

Abstract: A reactor for coating particles includes a stationary vacuum chamber to hold a bed of particles to be coated, a chemical delivery system, and a paddle assembly. The paddle assembly includes a rotatable drive shaft and a first plurality of paddles and a second plurality of paddles that extend radially from the drive shaft. The spacing, cross-sections, and oblique angles of the paddles are such that orbiting of the paddles causes the first plurality of paddles and the second plurality of paddles to displace substantially equal volumes in opposite directions in the lower portion of the stationary vacuum chamber.

公开(公告)号：US20200340108A1

公开(公告)日：2020-10-29

申请号：US16855887

申请日：2020-04-22

Applicant: Applied Materials, Inc.

Inventor： Jonathan Frankel ,  Quoc Truong ,  Sekar Krishnasamy ,  Govindraj Desai ,  Sandip S. Desai

IPC: C23C16/44 ,  C23C16/455

Abstract: A method of coating particles includes dispensing particles into a vacuum chamber to form a particle bed in at least a lower portion of the chamber that forms a half-cylinder, evacuating the chamber through a vacuum port in an upper portion of the chamber, rotating a paddle assembly such that a plurality of paddles orbit a drive shaft to stir the particles in the particle bed, injecting a reactant or precursor gas through a plurality of channels into the lower portion of the chamber as the paddle assembly rotates to coat the particles, and injecting the reactant or precursor gas or a purge gas through the plurality of channels at a sufficiently high velocity such that the reactant or precursor a purge gas de-agglomerates particles in the particle bed.

公开(公告)号：US20200338521A1

公开(公告)日：2020-10-29

申请号：US16855871

申请日：2020-04-22

Applicant: Applied Materials, Inc.

Inventor： Jonathan Frankel ,  Colin C. Neikirk ,  Pravin K. Narwankar ,  Quoc Truong ,  Govindraj Desai ,  Sekar Krishnasamy

IPC: B01J19/18 ,  B01F7/00 ,  B01F7/04 ,  B01J19/00

Abstract: A reactor for coating particles includes a stationary vacuum chamber having a lower portion that forms a half-cylinder and an upper portion to hold a bed of particles to be coated, a vacuum port in the upper portion of the chamber, a paddle assembly, a motor to rotate a drive shaft of the paddle assembly, a chemical delivery system to deliver a first fluid, and a first gas injection assembly to receive the first fluid from the chemical delivery system and having apertures configured to inject a first reactant or precursor gas into the lower portion of the chamber and such that the first reactant or precursor gas flows substantially tangent to a curved inner surface of the half-cylinder.

公开(公告)号：US20240376596A1

公开(公告)日：2024-11-14

申请号：US18781825

申请日：2024-07-23

Applicant: Applied Materials, Inc.

Inventor： Jonathan Frankel ,  Colin C. Neikirk ,  Pravin K. Narwankar ,  Quoc Truong ,  Govindraj Desai ,  Sekar Krishnasamy ,  Shrikant Swaminathan

IPC: C23C16/44 ,  B01F27/051 ,  B01F27/07 ,  B01F27/072 ,  B01F27/112 ,  B01F27/70 ,  B01J19/00 ,  B01J19/18 ,  C23C16/455

Abstract: A reactor for coating particles includes a stationary vacuum chamber that has a lower portion that forms a half-cylinder and an upper portion and that holds a bed of particles to be coated, a vacuum port in the upper portion of the chamber, a paddle assembly, and a gas injection assembly that includes a vaporizer to convert a first liquid to a first reactant or precursor gas, a manifold to receive the first reactant or precursor gas from the vaporizer, and a plurality of channels leading from the manifold to a plurality of apertures located in the lower portion of the chamber.

公开(公告)号：US12077856B2

公开(公告)日：2024-09-03

申请号：US18314707

申请日：2023-05-09

Applicant: Applied Materials, Inc.

Inventor： Jonathan Frankel ,  Colin C. Neikirk ,  Pravin K. Narwankar ,  Quoc Truong ,  Govindraj Desai ,  Sekar Krishnasamy ,  Shrikant Swaminathan

IPC: C23C16/44 ,  B01F27/051 ,  B01F27/07 ,  B01F27/072 ,  B01F27/112 ,  B01F27/70 ,  B01J19/00 ,  B01J19/18 ,  C23C16/455

CPC classification number: C23C16/4417 ,  B01F27/051 ,  B01F27/0726 ,  B01F27/074 ,  B01F27/112 ,  B01F27/70 ,  B01J19/0066 ,  B01J19/18 ,  C23C16/45555

Abstract: A reactor for coating particles includes a stationary vacuum chamber that has a lower portion that forms a half-cylinder and an upper portion and that holds a bed of particles to be coated, a vacuum port in the upper portion of the chamber, a paddle assembly, and a gas injection assembly that includes a vaporizer to convert a first liquid to a first reactant or precursor gas, a manifold to receive the first reactant or precursor gas from the vaporizer, and a plurality of channels leading from the manifold to a plurality of apertures located in the lower portion of the chamber.

公开(公告)号：US20230279543A1

公开(公告)日：2023-09-07

申请号：US18314707

申请日：2023-05-09

Applicant: Applied Materials, Inc.

Inventor： Jonathan Frankel ,  Colin C. Neikirk ,  Pravin K. Narwankar ,  Quoc Truong ,  Govindraj Desai ,  Sekar Krishnasamy ,  Shrikant Swaminathan

IPC: C23C16/44 ,  C23C16/455 ,  B01J19/00 ,  B01J19/18 ,  B01F27/051 ,  B01F27/70 ,  B01F27/07 ,  B01F27/112 ,  B01F27/072

CPC classification number: C23C16/4417 ,  B01F27/051 ,  B01F27/0726 ,  B01F27/074 ,  B01F27/112 ,  B01F27/70 ,  B01J19/0066 ,  B01J19/18 ,  C23C16/45555

Abstract: A reactor for coating particles includes a stationary vacuum chamber that has a lower portion that forms a half-cylinder and an upper portion and that holds a bed of particles to be coated, a vacuum port in the upper portion of the chamber, a paddle assembly, and a gas injection assembly that includes a vaporizer to convert a first liquid to a first reactant or precursor gas, a manifold to receive the first reactant or precursor gas from the vaporizer, and a plurality of channels leading from the manifold to a plurality of apertures located in the lower portion of the chamber.

公开(公告)号：US11674223B2

公开(公告)日：2023-06-13

申请号：US16855871

申请日：2020-04-22

Applicant: Applied Materials, Inc.

Inventor： Jonathan Frankel ,  Colin C. Neikirk ,  Pravin K. Narwankar ,  Quoc Truong ,  Govindraj Desai ,  Sekar Krishnasamy ,  Shrikant Swaminathan

IPC: C23C16/44 ,  C23C16/455 ,  B01J19/00 ,  B01J19/18 ,  B01F27/051 ,  B01F27/70 ,  B01F27/07 ,  B01F27/112 ,  B01F27/072

CPC classification number: C23C16/4417 ,  B01F27/051 ,  B01F27/074 ,  B01F27/0726 ,  B01F27/112 ,  B01F27/70 ,  B01J19/0066 ,  B01J19/18 ,  C23C16/45555

Abstract: A reactor for coating particles includes a stationary vacuum chamber having a lower portion that forms a half-cylinder and an upper portion to hold a bed of particles to be coated, a vacuum port in the upper portion of the chamber, a paddle assembly, a motor to rotate a drive shaft of the paddle assembly, a chemical delivery system to deliver a first fluid, and a first gas injection assembly to receive the first fluid from the chemical delivery system and having apertures configured to inject a first reactant or precursor gas into the lower portion of the chamber and such that the first reactant or precursor gas flows substantially tangent to a curved inner surface of the half-cylinder.

公开(公告)号：US20220205091A1

公开(公告)日：2022-06-30

申请号：US17697845

申请日：2022-03-17

Applicant: Applied Materials, Inc.

Inventor： Jonathan Frankel ,  Quoc Truong ,  Sekar Krishnasamy ,  Govindraj Desai ,  Sandip S. Desai

IPC: C23C16/44 ,  C23C16/455 ,  B01J19/00 ,  B01J19/18 ,  B01F27/051 ,  B01F27/70 ,  B01F27/07 ,  B01F27/112 ,  B01F27/072

Abstract: A method of coating particles includes dispensing particles into a vacuum chamber to form a particle bed in at least a lower portion of the chamber that forms a half-cylinder, evacuating the chamber through a vacuum port in an upper portion of the chamber, rotating a paddle assembly such that a plurality of paddles orbit a drive shaft to stir the particles in the particle bed, injecting a reactant or precursor gas through a plurality of channels into the lower portion of the chamber as the paddle assembly rotates to coat the particles, and injecting the reactant or precursor gas or a purge gas through the plurality of channels at a sufficiently high velocity such that the reactant or precursor a purge gas de-agglomerates particles in the particle bed.