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41.
公开(公告)号:US20200279907A1
公开(公告)日:2020-09-03
申请号:US16874845
申请日:2020-05-15
Applicant: Micron Technology, Inc.
IPC: H01L49/02 , H01L27/11507
Abstract: A memory cell comprises a capacitor having a first conductive capacitor electrode having laterally-spaced walls that individually have a top surface. A second conductive capacitor electrode is laterally between the walls of the first capacitor electrode, and comprises a portion above the first capacitor electrode. Ferroelectric material is laterally between the walls of the first capacitor electrode and laterally between the second capacitor electrode and the first capacitor electrode. The capacitor comprises an intrinsic current leakage path from one of the first and second capacitor electrodes to the other through the ferroelectric material. A parallel current leakage path is between an elevationally-inner surface of the portion of the second capacitor electrode that is above the first capacitor electrode and at least one of the individual top surfaces of the laterally-spaced walls of the first capacitor electrode. The parallel current leakage path is circuit-parallel the intrinsic current leakage path and of lower total resistance than the intrinsic current leakage path. Other aspects, including methods, are disclosed.
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公开(公告)号:US10396145B2
公开(公告)日:2019-08-27
申请号:US15404576
申请日:2017-01-12
Applicant: Micron Technology, Inc.
IPC: H01L27/11507 , H01L49/02
Abstract: A memory cell comprises a capacitor having a first conductive capacitor electrode having laterally-spaced walls that individually have a top surface. A second conductive capacitor electrode is laterally between the walls of the first capacitor electrode, and comprises a portion above the first capacitor electrode. Ferroelectric material is laterally between the walls of the first capacitor electrode and laterally between the second capacitor electrode and the first capacitor electrode. The capacitor comprises an intrinsic current leakage path from one of the first and second capacitor electrodes to the other through the ferroelectric material. A parallel current leakage path is between an elevationally-inner surface of the portion of the second capacitor electrode that is above the first capacitor electrode and at least one of the individual top surfaces of the laterally-spaced walls of the first capacitor electrode. The parallel current leakage path is circuit-parallel the intrinsic current leakage path and of lower total resistance than the intrinsic current leakage path. Other aspects, including methods, are disclosed.
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公开(公告)号:US20180350824A1
公开(公告)日:2018-12-06
申请号:US16059672
申请日:2018-08-09
Applicant: Micron Technology, Inc.
Inventor: Qian Tao , Matthew N. Rocklein , Beth R. Cook , D.V. Nirmal Ramaswamy
IPC: H01L27/11507 , H01L45/00 , H01L49/02
CPC classification number: H01L27/11507 , H01L28/60 , H01L45/04 , H01L45/1253 , H01L45/14 , H01L45/147 , H01L45/1608 , H01L45/1641
Abstract: A method of forming a ferroelectric memory cell. The method comprises forming an electrode material exhibiting a desired dominant crystallographic orientation. A hafnium-based material is formed over the electrode material and the hafnium-based material is crystallized to induce formation of a ferroelectric material having a desired crystallographic orientation. Additional methods are also described, as are semiconductor device structures including the ferroelectric material.
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公开(公告)号:US10090462B2
公开(公告)日:2018-10-02
申请号:US14960953
申请日:2015-12-07
Applicant: Micron Technology, Inc.
Inventor: Durai Vishak Nirmal Ramaswamy , Lei Bi , Beth R. Cook , Dale W. Collins
Abstract: Electronic apparatus, systems, and methods can include a resistive memory cell having a structured as an operably variable resistance region between two electrodes and a metallic barrier disposed in a region between the dielectric and one of the two electrodes. The metallic barrier can have a structure and a material composition to provide oxygen diffusivity above a first threshold during program or erase operations of the resistive memory cell and oxygen diffusivity below a second threshold during a retention state of the resistive memory cell. Additional apparatus, systems, and methods are disclosed.
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公开(公告)号:US10062703B2
公开(公告)日:2018-08-28
申请号:US15459136
申请日:2017-03-15
Applicant: Micron Technology, Inc.
Inventor: Qian Tao , Matthew N. Rocklein , Beth R. Cook , D. V. Nirmal Ramaswamy
IPC: H01L47/00 , H01L27/11507 , H01L49/02
CPC classification number: H01L27/11507 , H01L28/60 , H01L45/04 , H01L45/1253 , H01L45/14 , H01L45/147 , H01L45/1608 , H01L45/1641
Abstract: A method of forming a ferroelectric memory cell. The method comprises forming an electrode material exhibiting a desired dominant crystallographic orientation. A hafnium-based material is formed over the electrode material and the hafnium-based material is crystallized to induce formation of a ferroelectric material having a desired crystallographic orientation. Additional methods are also described, as are semiconductor device structures including the ferroelectric material.
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公开(公告)号:US20170186757A1
公开(公告)日:2017-06-29
申请号:US15459136
申请日:2017-03-15
Applicant: Micron Technology, Inc.
Inventor: Qian Tao , Matthew N. Rocklein , Beth R. Cook , D.V. Nirmal Ramaswamy
IPC: H01L27/11507 , H01L49/02
CPC classification number: H01L27/11507 , H01L28/60 , H01L45/04 , H01L45/1253 , H01L45/14 , H01L45/147 , H01L45/1608 , H01L45/1641
Abstract: A method of forming a ferroelectric memory cell. The method comprises forming an electrode material exhibiting a desired dominant crystallographic orientation. A hafnium-based material is formed over the electrode material and the hafnium-based material is crystallized to induce formation of a ferroelectric material having a desired crystallographic orientation. Additional methods are also described, as are semiconductor device structures including the ferroelectric material.
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公开(公告)号:US09431606B1
公开(公告)日:2016-08-30
申请号:US14825087
申请日:2015-08-12
Applicant: Micron Technology, Inc.
Inventor: Durai Vishak Nirmal Ramaswamy , Dale W. Collins , Christopher W. Petz , Beth R. Cook
IPC: H01L45/00
CPC classification number: H01L45/1266 , H01L45/085 , H01L45/1233 , H01L45/1246 , H01L45/14
Abstract: Some embodiments include a memory cell having a pair of electrodes, and a plurality of switching levels between the electrodes. Each switching level has an ion buffer region and a dielectric region. At least one switching level differs from another switching level in one or both of thickness and composition of the ion buffer region and/or the dielectric region.
Abstract translation: 一些实施例包括具有一对电极的存储单元和电极之间的多个开关电平。 每个开关电平具有离子缓冲区和电介质区。 至少一个开关电平与离子缓冲区域和/或电介质区域的厚度和组成中的一个或两个中的另一个开关电平不同。
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公开(公告)号:US09324943B2
公开(公告)日:2016-04-26
申请号:US14451179
申请日:2014-08-04
Applicant: Micron Technology, Inc.
Inventor: Lei Bi , Beth R. Cook , Marko Milojevic , Durai Vishak Nirmal Ramaswamy
CPC classification number: H01L45/08 , G11C13/0002 , G11C13/0007 , G11C13/0035 , G11C13/004 , G11C13/0069 , G11C2013/0073 , G11C2013/0083 , G11C2213/35 , H01L27/2463 , H01L45/145
Abstract: Apparatus, devices, systems, and methods are described that include filamentary memory cells. Mechanisms to substantially remove the filaments in the devices are described, so that the logical state of a memory cell that includes the removable filament can be detected. Additional apparatus, systems, and methods are described.
Abstract translation: 描述了包括丝状记忆单元的装置,装置,系统和方法。 描述了基本上去除器件中的细丝的机理,使得可以检测到包括可除去细丝的存储器单元的逻辑状态。 描述了附加装置,系统和方法。
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公开(公告)号:US20140339491A1
公开(公告)日:2014-11-20
申请号:US14451179
申请日:2014-08-04
Applicant: Micron Technology, Inc.
Inventor: Lei Bi , Beth R. Cook , Marko Milojevic , Durai Vishak Nirmal Ramaswamy
CPC classification number: H01L45/08 , G11C13/0002 , G11C13/0007 , G11C13/0035 , G11C13/004 , G11C13/0069 , G11C2013/0073 , G11C2013/0083 , G11C2213/35 , H01L27/2463 , H01L45/145
Abstract: Apparatus, devices, systems, and methods are described that include filamentary memory cells. Mechanisms to substantially remove the filaments in the devices are described, so that the logical state of a memory cell that includes the that includes the removable filament can be detected. Additional apparatus, systems, and methods are described.
Abstract translation: 描述了包括丝状记忆单元的装置,装置,系统和方法。 描述了基本上去除装置中的长丝的机构,使得可以检测到包括可去除细丝的存储单元的逻辑状态。 描述了附加装置,系统和方法。
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