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公开(公告)号:US10068963B2
公开(公告)日:2018-09-04
申请号:US14936370
申请日:2015-11-09
Applicant: United Microelectronics Corp.
Inventor: Huai-Tzu Chiang , Sheng-Hao Lin , Hao-Ming Lee , Yu-Ru Yang , Shih-Hsien Huang , Chien-Hung Chen , Chun-Yuan Wu , Cheng-Tzung Tsai
IPC: H01L29/78 , H01L29/16 , H01L29/161 , H01L29/06 , H01L29/10 , H01L29/66 , H01L21/225 , H01L21/768
Abstract: Provided is a FinFET including a substrate, at least one fin and at least one gate. A portion of the at least one fin is embedded in the substrate. The at least one fin includes, from bottom to top, a seed layer, a stress relaxation layer and a channel layer. The at least one gate is across the at least one fin. A method of forming a FinFET is further provided.
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公开(公告)号:US09590041B1
公开(公告)日:2017-03-07
申请号:US14960430
申请日:2015-12-06
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Yu-Ru Yang , Huai-Tzu Chiang , Sheng-Hao Lin , Shih-Hsien Huang , Chien-Hung Chen , Chun-Yuan Wu , Cheng-Tzung Tsai
IPC: H01L21/02 , H01L29/10 , H01L29/78 , H01L29/165 , H01L29/778 , H01L27/092
CPC classification number: H01L29/1054 , H01L21/02381 , H01L21/02538 , H01L27/092 , H01L29/105 , H01L29/66795 , H01L29/778 , H01L29/785
Abstract: A semiconductor structure includes a semiconductor substrate, a dielectric structure formed on the semiconductor substrate and including at least a recess formed therein, a fin formed in the recess, and a dislocation region formed in the fin. The semiconductor substrate includes a first semiconductor material. The fin includes the first semiconductor material and a second semiconductor material. A lattice constant of the second semiconductor material is different from a lattice constant of the first semiconductor material. A topmost portion of the dislocation region is higher than an opening of the recess.
Abstract translation: 半导体结构包括半导体衬底,形成在半导体衬底上并且至少包括形成在其中的凹部的电介质结构,形成在凹部中的鳍和形成在鳍中的位错区。 半导体衬底包括第一半导体材料。 翅片包括第一半导体材料和第二半导体材料。 第二半导体材料的晶格常数与第一半导体材料的晶格常数不同。 位错区域的最高部分高于凹部的开口。
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公开(公告)号:US20160086932A1
公开(公告)日:2016-03-24
申请号:US14526536
申请日:2014-10-29
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Chien-Hung Chen , Chun-Hsien Wu
IPC: H01L27/02 , H01L27/092
CPC classification number: H01L27/11807 , H01L27/0207 , H01L27/092 , H01L2027/11885
Abstract: An integrated circuit layout structure having dual-height standard cells includes at least a first standard cell including a first cell height and at least a second standard cell including a second cell height. The second cell height is one half of the first cell height. The first standard cell includes at least one or more first doped region formed in a middle of the first standard cell and a plurality of second doped regions formed at a top side and a bottom side of the first standard cell. The first doped region includes a first conductivity type and the second doped regions include a second conductivity type complementary to the first conductivity type.
Abstract translation: 具有双高度标准单元的集成电路布局结构包括至少包括第一单元高度的第一标准单元和至少包括第二单元高度的第二标准单元。 第二个单元格高度是第一个单元格高度的一半。 第一标准单元包括在第一标准单元的中间形成的至少一个或多个第一掺杂区和形成在第一标准单元的顶侧和底侧的多个第二掺杂区。 第一掺杂区域包括第一导电类型,第二掺杂区域包括与第一导电类型互补的第二导电类型。
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公开(公告)号:US09136276B1
公开(公告)日:2015-09-15
申请号:US14255977
申请日:2014-04-18
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Ya-Huei Huang , Sung-Bin Lin , Wen-Chung Chang , Feng-Ji Tsai , Yen-Ting Ho , Chien-Hung Chen
IPC: H01L27/115 , H01L29/792 , H01L29/66
CPC classification number: H01L27/11568 , H01L21/26513 , H01L27/11573 , H01L29/42348 , H01L29/6659 , H01L29/66833 , H01L29/7833 , H01L29/792
Abstract: A method for forming a memory cell structure includes following steps. A substrate including at least a memory cell region defined thereon is provided, and a first gate stack is formed in the memory cell region. A first LDD implantation is performed to form a first LDD at one side of the first gate stack in the memory cell region, and the first LDD includes a first conductivity type. A second LDD implantation is performed to form a second LDD at one side of the first gate stack opposite to the first LDD in the memory cell region, and the second LDD includes the first conductivity type. The first LDD and the second LDD are different from each other.
Abstract translation: 一种用于形成存储单元结构的方法包括以下步骤。 提供至少包括限定在其上的存储单元区域的衬底,并且在存储单元区域中形成第一栅极堆叠。 执行第一LDD注入以在存储单元区域中的第一栅极堆叠的一侧形成第一LDD,并且第一LDD包括第一导电类型。 执行第二LDD注入以在存储单元区域中与第一LDD相对的第一栅极堆叠的一侧处形成第二LDD,并且第二LDD包括第一导电类型。 第一LDD和第二LDD彼此不同。
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公开(公告)号:US20250040228A1
公开(公告)日:2025-01-30
申请号:US18916723
申请日:2024-10-16
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Chun-Hsien Huang , Yu-Tse Kuo , Shu-Ru Wang , Chien-Hung Chen , Li-Ping Huang , Chun-Yen Tseng
IPC: H01L29/423 , G11C5/06 , G11C11/412 , H01L29/78 , H10B10/00
Abstract: The present invention provides a method for forming a layout pattern of static random access memory, comprising forming a PU1 (first pull-up transistor), a PU2 (second pull-up transistor), a PD1A (first pull-down transistor), a PD1B (second pull-down transistor), a PD2A (third pull-down transistor), a PD2B (fourth pull-down transistor), a PG1A (first access transistor), a PG1B (second access transistor), a PG2A (third access transistor) and a PG2B (fourth access transistor) located on the substrate. The PD1A and the PD1B are connected in parallel with each other, the PD2A and the PD2B are connected in parallel with each other, wherein the gate structures include a first J-shaped gate structure, and the first J-shaped gate structure is an integrally formed structure.
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公开(公告)号:US20240006405A1
公开(公告)日:2024-01-04
申请号:US17875430
申请日:2022-07-28
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Chun-Hsien Lin , Chien-Hung Chen , Ruei-Yau Chen
IPC: H01L27/02 , H01L27/118 , H01L21/8234
CPC classification number: H01L27/0207 , H01L27/11807 , H01L21/823481 , H01L2027/11831
Abstract: The invention provides a semiconductor structure, which comprises a first standard cell and a second standard cell located on a substrate, wherein an isolation region is included between the first standard cell and the second standard cell, a plurality of fin structures and a plurality of gates form a plurality of transistors, which are respectively located in the first standard cell and the second standard cell, and a plurality of single diffusion breaks (SDBs) located in the first standard cell and the second standard cell. A plurality of first dummy grooves in the first standard cell and the second standard cell, and a plurality of second dummy grooves in the isolation region, wherein some of the second dummy grooves overlap the first dummy grooves.
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公开(公告)号:US10776402B2
公开(公告)日:2020-09-15
申请号:US15820662
申请日:2017-11-22
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Li-Chin Wang , Ya-Ching Cheng , Chien-Hung Chen , Chun-Liang Hou , Da-Ching Liao
IPC: G06F17/00 , G06F16/28 , G05B19/418
Abstract: A manufacture parameters grouping and analyzing method, and a manufacture parameters grouping and analyzing system are provided. The manufacture parameters grouping and analyzing method includes the following steps: A plurality of process factors are classified into a plurality of groups. In each of the groups, an intervening relationship between any two of the process factors is larger than a predetermined correlation value. In each of the groups, at least one representative factor is selected from each of the groups according to a plurality of outputting relationships of the process factors related to an output factor or a plurality of sample amounts of the process factors. Finally, the representative factor is used for various applications.
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公开(公告)号:US10482153B2
公开(公告)日:2019-11-19
申请号:US15905263
申请日:2018-02-26
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Da-Ching Liao , Li-Chin Wang , Ya-Ching Cheng , Chien-Hung Chen , Chun-Liang Hou
Abstract: An analyzing method and an analyzing system for manufacturing data are provided. The analyzing method includes the following steps. A plurality of models each of which has a correlation value representing a relationship between at least one of a plurality of factors and a target parameter are provided. The models are screened according to the correlation values. A rank information and a frequency information of the factors are listed up according to the models. The factors are screened according to the rank information and the frequency information. The models are ranked and at least one of the models is selected.
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公开(公告)号:US10290653B2
公开(公告)日:2019-05-14
申请号:US15466871
申请日:2017-03-23
Applicant: UNITED MICROELECTRONICS CORP.
Inventor: Chien-Hung Chen , Chun-Hsien Wu
IPC: H01L27/118 , H01L27/02 , H01L27/092
Abstract: An integrated circuit layout structure having dual-height standard cells includes at least a first standard cell including a first cell height and at least a second standard cell including a second cell height. The second cell height is one half of the first cell height. The first standard cell includes one first doped region formed in a middle of the first standard cell and a plurality of second doped regions formed at a top side and a bottom side of the first standard cell. The first doped region includes a first conductivity type and the second doped regions include a second conductivity type complementary to the first conductivity type. And an area of the first doped region is smaller than an area of the total second doped regions.
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公开(公告)号:US20180323256A1
公开(公告)日:2018-11-08
申请号:US16040319
申请日:2018-07-19
Applicant: United Microelectronics Corp.
Inventor: Huai-Tzu Chiang , Sheng-Hao Lin , Hao-Ming Lee , Yu-Ru Yang , Shih-Hsien Huang , Chien-Hung Chen , Chun-Yuan Wu , Cheng-Tzung Tsai
IPC: H01L29/06 , H01L29/10 , H01L21/768 , H01L29/66 , H01L29/78 , H01L21/225
CPC classification number: H01L29/0615 , H01L21/2253 , H01L21/76802 , H01L21/76871 , H01L29/1033 , H01L29/1054 , H01L29/66795 , H01L29/785
Abstract: Provided is a FinFET including a substrate, at least one fin and at least one gate. A portion of the at least one fin is embedded in the substrate. The at least one fin includes, from bottom to top, a seed layer, a stress relaxation layer and a channel layer. The at least one gate is across the at least one fin. A method of forming a FinFET is further provided.
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