Abstract:
A compact high aspect ratio MEMS optical switch, and a process for fabricating same, are disclosed. An outer body portion is mounted so as to have a first rotational degree of freedom about a first axis. An inner body portion is coupled mechanically to the outer body portion so as to have a second rotational degree of freedom relative to the outer body portion about a second axis, the second axis being substantially perpendicular to the first axis and in the plane of the outer body portion. The inner body portion is further coupled to the outer body portion in a manner such that the inner body portion rotates with the outer body portion about the first axis if the outer body is rotated about the first axis, such that the second axis remains substantially in the plane of the outer body portion as the outer body portion rotates about the first axis. An outer electrostatic actuator is configured to rotate the outer body portion about the first axis when an electrostatic force is applied to the outer electrostatic actuator. An inner electrostatic actuator is configured to rotate the inner body portion relative to the outer portion about the second axis when an electrostatic force is applied to the inner electrostatic actuator. The outer body portion, inner body portion, outer electrostatic actuator, and inner electrostatic actuator are formed in just two structural layers. In one embodiment, the inner body portion comprises a metal substrate on which a metal payload, such as an optical mirror, is formed.
Abstract:
A damped micromechanical device useful for adjusting optical components, positioning transducers, and sensing motion. The micromechanical device includes a top cap that helps create an area of restricted fluid flow to increase mechanical damping of the device and minimize the response of the structure to mechanical perturbations. The micromechanical device is constructed to cause piston-like Poiseuille flow through controlled gaps within the actuator. By controlling the gap dimensions, the amount of damping can be adjusted.
Abstract:
A micro-electro-mechanical-system (MEMS) mirror device includes a mirror component that is capable of moving upon electrostatic actuation. The MEMS mirror device also includes and one or more electrostatic actuators providing electrostatic actuation. The electrostatic actuators having plates disposed approximately perpendicular to the mirror component. The plates are disposed to define a gap between the plates that decreases along a direction perpendicular to a surface of the mirror component.
Abstract:
The nonlinear mechanical modulator of the present invention comprises first and second masses, a first spring connecting the first and second masses, and a second spring connecting the second mass and a fixed end. A motion input is applied to any one of the first and second masses and a resultant motion output is generated from the other one of the masses. Further, at least one of the springs has a nonlinear behavior characteristic that its stiffness varies according to a magnitude of the motion input. At this time, a nonlinear characteristic of the spring is categorized into a nonlinearly increasing characteristic that its stiffness is increased as its deflection becomes greater, and a nonlinearly decreasing characteristic that its stiffness is decreased as its deflection becomes greater. One or both of the two nonlinear characteristics can be applied to and employed in the mechanical modulator of the present invention.
Abstract:
A micromachined structure having electrically isolated components is formed by thermomigrating a dopant through a substrate to form a doped region within the substrate. The doped region separates two portions of the substrate. The dopant is selected such that the doped region electrically isolates the two portions of the substrate from each other via junction isolation.
Abstract:
In a micromotion mechanical structure, such as a vibration-type sensor or a step motor, comprising at least one fixed electrode and at least one movable electrode which is moved by electrostatic power applied to the fixed electrode, at least one of the electrodes is formed essentially by a single crystal semiconductor material. The single crystal semiconductor material has various merits of uniform mechanical properties, small internal stress, etc. for use in such electrodes. Such structure has been realized by attaching patterned electrode made of the material to another substrate and then removing or thinning the original substrate carrying the patterned electrodes.
Abstract:
A micromechanical structure has a first micromechanical element, a second micromechanical element and a torsion spring arrangement having a first torsion spring element, having a first center line, mechanically connected to the first micromechanical element at a first contact region and to the second micromechanical element at a second contact region, and having a second torsion spring element, having a second center line, mechanically connected to the first micromechanical member at a third contact region and to the second micromechanical member at a fourth contact region in order to connect the first micromechanical member and the second micromechanical member to be movable relative to each other. A distance between the first and second center lines, starting from the first and third contact regions toward the second and fourth contact regions, decreases in a first portion and increases in a second portion. In a rest position of the micromechanical structure, the first and second torsion spring elements are arranged without contact to each other.
Abstract:
The invention relates to a microelectromechanical system (10) comprising a drive module (200) comprising:
a fixed drive portion (210), a movable drive portion (220), and a suspension (230),
the movable drive portion (220) being able to be moved relative to the fixed drive portion (210) in a first direction (A), as a result of an electrostatic force, which causes an elastic deformation of the suspension (230), and the movable drive portion (220) being able to be moved relative to the fixed drive portion (210) in a second direction (B), opposite to the first direction (A), as a result of an elastic return force generated by the suspension (230),
the actuator (11) also comprising a stop (24) limiting the movement of the first movable portion (220) in the second direction (B) so that the elastic force generated by the suspension (230) is not cancelled.
Abstract:
A vertical comb drive assembly may include a rotor assembly. The rotor assembly may include a comb anchor to attach the rotor assembly to a base, a comb rotor attached to the comb anchor, and a movable element attached to the comb rotor. The vertical comb drive assembly may include a stator assembly. The stator assembly may include a plate anchor to attach the stator assembly to the base, a plate, wherein the plate forms a comb stator, and a plate hinge to connect the plate to the plate anchor. The plate hinge and the plate may be configured for moving the plate from a first position where the comb rotor and the comb stator are both in a first plane to a second position where the comb rotor is in the first plane and the comb stator is in a second plane.
Abstract:
Embodiments of the disclosure provide a comb drive, a comb drive system, and a method of operating the comb drive to rotate bi-directionally in a MEMS environment. An exemplary comb drive system may include a comb drive, at least one power source, and a controller. The comb drive may include a stator comb having a first electrically conductive layer spaced apart from a second electrically conductive layer. The comb drive may also include a rotor comb having a first electrically conductive layer spaced apart from a second electrically conductive layer. The controller may be configured to apply first and second voltage levels having opposite polarities to the first and second electrically conductive layers of the rotor comb, respectively. The controller may also be configured to apply an intermediate voltage level to one of the first or second electrically conductive layers of the stator comb.