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    MEMS optical mirror array
    41.
    发明授权
    MEMS optical mirror array 失效
    MEMS光学镜阵列

    公开(公告)号：US06784771B1

    公开(公告)日：2004-08-31

    申请号：US10202995

    申请日：2002-07-24

    Applicant: Long-Sheng Fan

    Inventor： Long-Sheng Fan

    IPC: H01H5122

    CPC classification number: G02B26/0841 ,  B81B3/0062 ,  B81B2201/033 ,  B81B2201/042

    Abstract: A compact high aspect ratio MEMS optical switch, and a process for fabricating same, are disclosed. An outer body portion is mounted so as to have a first rotational degree of freedom about a first axis. An inner body portion is coupled mechanically to the outer body portion so as to have a second rotational degree of freedom relative to the outer body portion about a second axis, the second axis being substantially perpendicular to the first axis and in the plane of the outer body portion. The inner body portion is further coupled to the outer body portion in a manner such that the inner body portion rotates with the outer body portion about the first axis if the outer body is rotated about the first axis, such that the second axis remains substantially in the plane of the outer body portion as the outer body portion rotates about the first axis. An outer electrostatic actuator is configured to rotate the outer body portion about the first axis when an electrostatic force is applied to the outer electrostatic actuator. An inner electrostatic actuator is configured to rotate the inner body portion relative to the outer portion about the second axis when an electrostatic force is applied to the inner electrostatic actuator. The outer body portion, inner body portion, outer electrostatic actuator, and inner electrostatic actuator are formed in just two structural layers. In one embodiment, the inner body portion comprises a metal substrate on which a metal payload, such as an optical mirror, is formed.

    Abstract translation: 公开了一种紧凑的高纵横比MEMS光开关及其制造方法。 外主体部分被安装成具有围绕第一轴线的第一旋转自由度。 内部主体部分机械地联接到外部主体部分，以相对于外部主体部分围绕第二轴线具有第二旋转自由度，第二轴线基本上垂直于第一轴线并且在外部平面中 身体部位。 内主体部分还以如下方式联接到外主体部分，使得如果外主体围绕第一轴线旋转，则内主体部分与外主体部分围绕第一轴线旋转，使得第二轴线基本保持在 作为外主体部分的外主体部分的平面绕第一轴线旋转。 外部静电致动器构造成当静电力施加到外部静电致动器时使外部主体部分围绕第一轴线旋转。 内部静电致动器构造成当静电力施加到内部静电致动器时使内部主体部分相对于外部部分围绕第二轴线旋转。 外部主体部分，内部主体部分，外部静电致动器和内部静电致动器形成在两个结构层中。 在一个实施例中，内部主体部分包括其上形成诸如光学镜的金属有效载荷的金属基板。

    Damped micromechanical device
    42.
    发明申请
    Damped micromechanical device 审中-公开
    阻尼微机械装置

    公开(公告)号：US20030218283A1

    公开(公告)日：2003-11-27

    申请号：US10360986

    申请日：2003-02-08

    Inventor： Kevin Y. Yasumura ,  John D. Grade ,  John H. Jerman

    IPC: F16M001/00

    CPC classification number: G02B26/0841 ,  B81B3/0078 ,  B81B2201/033 ,  B81B2201/058

    Abstract: A damped micromechanical device useful for adjusting optical components, positioning transducers, and sensing motion. The micromechanical device includes a top cap that helps create an area of restricted fluid flow to increase mechanical damping of the device and minimize the response of the structure to mechanical perturbations. The micromechanical device is constructed to cause piston-like Poiseuille flow through controlled gaps within the actuator. By controlling the gap dimensions, the amount of damping can be adjusted.

    Abstract translation: 用于调整光学部件，定位传感器和感应运动的阻尼微机械装置。 微机械装置包括顶盖，其有助于产生限制流体流动的面积以增加装置的机械阻尼，并使结构对机械扰动的响应最小化。 微机械装置被构造成使活塞式Poiseuille流动通过致动器内的受控间隙。 通过控制间隙尺寸，可以调节阻尼量。

    Nonlinear mechanical modulator and actuation systems thereof
    44.
    发明申请
    Nonlinear mechanical modulator and actuation systems thereof 审中-公开
    非线性机械调制器及其驱动系统

    公开(公告)号：US20030177853A1

    公开(公告)日：2003-09-25

    申请号：US10357763

    申请日：2003-02-03

    Inventor： Young-Ho Cho ,  Won Chul Lee ,  Young-Hyun Jin

    IPC: F16H021/44

    CPC classification number: F16F3/02 ,  B81B3/0051 ,  B81B2201/033 ,  B81C2201/0132 ,  Y10T74/18856

    Abstract: The nonlinear mechanical modulator of the present invention comprises first and second masses, a first spring connecting the first and second masses, and a second spring connecting the second mass and a fixed end. A motion input is applied to any one of the first and second masses and a resultant motion output is generated from the other one of the masses. Further, at least one of the springs has a nonlinear behavior characteristic that its stiffness varies according to a magnitude of the motion input. At this time, a nonlinear characteristic of the spring is categorized into a nonlinearly increasing characteristic that its stiffness is increased as its deflection becomes greater, and a nonlinearly decreasing characteristic that its stiffness is decreased as its deflection becomes greater. One or both of the two nonlinear characteristics can be applied to and employed in the mechanical modulator of the present invention.

    Abstract translation: 本发明的非线性机械调制器包括第一和第二质量块，连接第一和第二质量块的第一弹簧和连接第二质量块和固定端部的第二弹簧。 将运动输入应用于第一和第二质量块中的任何一个，并且从另一个质量块产生合成的运动输出。 此外，弹簧中的至少一个具有其刚度根据运动输入的大小而变化的非线性行为特性。 此时，弹簧的非线性特性被分类为非线性增加的特性，其刚度随偏转变大而增大，而随着挠度变大，其刚度降低的非线性降低特性。 两种非线性特性中的一种或两种可以应用于本发明的机械调制器中并被应用于本发明的机械调制器。

    Process for producing a micromotion mechanical structure
    46.
    发明授权
    Process for producing a micromotion mechanical structure 失效
    微型机械结构的制造方法

    公开(公告)号：US5554304A

    公开(公告)日：1996-09-10

    申请号：US409990

    申请日：1995-03-24

    Applicant: Kenichiro Suzuki

    Inventor： Kenichiro Suzuki

    IPC: H02N1/00 ,  H01L21/306 ,  B44C1/22

    CPC classification number: B81B3/0021 ,  H02N1/004 ,  H02N1/008 ,  B81B2201/033 ,  B81B2203/051

    Abstract: In a micromotion mechanical structure, such as a vibration-type sensor or a step motor, comprising at least one fixed electrode and at least one movable electrode which is moved by electrostatic power applied to the fixed electrode, at least one of the electrodes is formed essentially by a single crystal semiconductor material. The single crystal semiconductor material has various merits of uniform mechanical properties, small internal stress, etc. for use in such electrodes. Such structure has been realized by attaching patterned electrode made of the material to another substrate and then removing or thinning the original substrate carrying the patterned electrodes.

    Abstract translation: 在诸如振动型传感器或步进电动机的微动机械结构中，包括至少一个固定电极和通过施加到固定电极的静电力移动的至少一个可移动电极，形成至少一个电极 基本上由单晶半导体材料制成。 单晶半导体材料具有在这种电极中使用的各种机械性能，小内应力等的优点。 这种结构已经通过将由该材料制成的图案化电极附着到另一基底上，然后去除或稀薄承载图案化电极的原始基底来实现。

    Self-aligned vertical comb drive assembly
    49.
    发明授权
    Self-aligned vertical comb drive assembly 有权

    公开(公告)号：US12007554B2

    公开(公告)日：2024-06-11

    申请号：US16917399

    申请日：2020-06-30

    Applicant: Lumentum Operations LLC

    Inventor： Wenlin Jin ,  Gonzalo Wills

    IPC: G02B26/08 ,  B81B3/00 ,  H02N1/00

    CPC classification number: G02B26/0841 ,  B81B3/0062 ,  H02N1/008 ,  B81B2201/033 ,  B81B2203/0136 ,  B81B2203/058

    Abstract: A vertical comb drive assembly may include a rotor assembly. The rotor assembly may include a comb anchor to attach the rotor assembly to a base, a comb rotor attached to the comb anchor, and a movable element attached to the comb rotor. The vertical comb drive assembly may include a stator assembly. The stator assembly may include a plate anchor to attach the stator assembly to the base, a plate, wherein the plate forms a comb stator, and a plate hinge to connect the plate to the plate anchor. The plate hinge and the plate may be configured for moving the plate from a first position where the comb rotor and the comb stator are both in a first plane to a second position where the comb rotor is in the first plane and the comb stator is in a second plane.

    Bipolar staggered comb drive for bidirectional MEMS actuation
    50.
    发明授权
    Bipolar staggered comb drive for bidirectional MEMS actuation 有权

    公开(公告)号：US11909332B2

    公开(公告)日：2024-02-20

    申请号：US17395314

    申请日：2021-08-05

    Applicant: BEIJING VOYAGER TECHNOLOGY CO., LTD.

    Inventor： Qin Zhou ,  Youmin Wang ,  Yue Lu ,  Lingkai Kong

    IPC: H02N1/00 ,  B81B3/00 ,  B81B7/00 ,  H02P25/00 ,  H02N1/08

    CPC classification number: H02N1/008 ,  B81B3/0021 ,  B81B3/0043 ,  B81B7/008 ,  H02P25/00 ,  B81B2201/033 ,  H02N1/08

    Abstract: Embodiments of the disclosure provide a comb drive, a comb drive system, and a method of operating the comb drive to rotate bi-directionally in a MEMS environment. An exemplary comb drive system may include a comb drive, at least one power source, and a controller. The comb drive may include a stator comb having a first electrically conductive layer spaced apart from a second electrically conductive layer. The comb drive may also include a rotor comb having a first electrically conductive layer spaced apart from a second electrically conductive layer. The controller may be configured to apply first and second voltage levels having opposite polarities to the first and second electrically conductive layers of the rotor comb, respectively. The controller may also be configured to apply an intermediate voltage level to one of the first or second electrically conductive layers of the stator comb.

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