公开(公告)号：US20240347306A1

公开(公告)日：2024-10-17

申请号：US18294251

申请日：2022-06-23

Applicant: Denka Company Limited ,  NATIONAL INSTITUTE FOR MATERIALS SCIENCE

Inventor： Hiromitsu CHATANI ,  Daisuke ISHIKAWA ,  Jie TANG ,  Tadakatsu OHKUBO ,  Shuai TANG ,  Jun UZUHASHI ,  Kazuhiro HONO

IPC: H01J1/02 ,  H01J9/02

CPC classification number: H01J1/02 ,  H01J9/02

Abstract: A manufacturing method for an electron source according to the present disclosure includes steps of: (A) cutting out a chip from a block of an electron emission material, (B) fixing a first end portion of the chip to a distal end of a support needle, and (C) sharpening a second end portion of the chip. The step (A) includes forming first and second grooves which constitute first and second surfaces of the chip in the block by irradiating a surface of the block with an ion beam. The first end portion of the chip includes the first surface and the second surface with the surfaces forming an angle α of 10 to 90°. The step (B) includes forming a joint between the distal end of the support needle and the first end portion of the chip.

公开(公告)号：US11915920B2

公开(公告)日：2024-02-27

申请号：US17768017

申请日：2020-10-20

Applicant: NATIONAL INSTITUTE FOR MATERIALS SCIENCE

Inventor： Jie Tang ,  Shuai Tang ,  Ta-Wei Chiu ,  Tadakatsu Ohkubo ,  Jun Uzuhashi ,  Kazuhiro Hono ,  Luchang Qin

IPC: H01J9/02 ,  H01J1/02 ,  H01J37/30

CPC classification number: H01J9/02 ,  H01J1/02 ,  H01J37/30

Abstract: The present invention provides a simpler method for sharpening a tip of an emitter. In addition, the present invention provides an emitter including a nanoneedle made of a single crystal material, an emitter including a nanowire made of a single crystal material such as hafnium carbide (HfC), both of which stably emit electrons with high efficiency, and an electron gun and an electronic device using any one of these emitters. A method for manufacturing the emitter according to an embodiment of the present invention comprises processing a single crystal material in a vacuum using a focused ion beam to form an end of the single crystal material, through which electrons are to be emitted, into a tapered shape, wherein the processing is performed in an environment in which a periphery of the single crystal material fixed to a support is opened.

公开(公告)号：US09685295B2

公开(公告)日：2017-06-20

申请号：US14235380

申请日：2012-07-26

Applicant: William P. King ,  Lane W. Martin ,  Patrick C. Fletcher

Inventor： William P. King ,  Lane W. Martin ,  Patrick C. Fletcher

IPC: H01J1/02 ,  H01J1/30 ,  H01J9/02 ,  B82Y35/00 ,  G01Q60/30

CPC classification number: H01J1/02 ,  B82Y35/00 ,  G01Q60/30 ,  H01J1/30 ,  H01J9/02 ,  H01J2235/06

Abstract: Provided herein are electron emission devices and device components for optical, electronic and optoelectronic devices, including cantilever-based MEMS and NEMS instrumentation. Devices of certain aspects of the invention integrate a dielectric, pyroelectric, piezoelectric or ferroelectric film on the receiving surface of a substrate having an integrated actuator, such as a temperature controller or mechanical actuator, optionally in the form of a cantilever device having an integrated heater-thermometer. Also provided are methods of making and using electron emission devices for a range of applications including sensing and imaging technology.

公开(公告)号：US09153363B2

公开(公告)日：2015-10-06

申请号：US14173868

申请日：2014-02-06

Applicant: Kabushiki Kaisha Toshiba

Inventor： Eishi Tsutsumi ,  Tsutomu Nakanishi ,  Akira Fujimoto ,  Koji Asakawa

IPC: H01L33/38 ,  H01B13/00 ,  H01J1/02 ,  H01J9/02 ,  H01J17/04 ,  H01J63/02

CPC classification number: H01B13/0036 ,  H01J1/02 ,  H01J9/02 ,  H01J17/04 ,  H01J63/02 ,  H01J2217/49207

Abstract: The present invention provides a light-transmitting metal electrode including a substrate and a metal electrode layer having plural openings. The metal electrode layer also has such a continuous metal part that any pair of point-positions in the part is continuously connected without breaks. The openings in the metal electrode layer are periodically arranged to form plural microdomains. The plural microdomains are so placed that the in-plane arranging directions thereof are oriented independently of each other. The thickness of the metal electrode layer is in the range of 10 to 200 nm.

Abstract translation: 本发明提供一种透光性金属电极，其具有基板和具有多个开口部的金属电极层。 金属电极层还具有这样的连续的金属部分，即零件中的任何一个点位置连续连接而不断裂。 周期性地布置金属电极层中的开口以形成多个微区域。 多个微区被放置成使得其面内排列方向彼此独立地取向。 金属电极层的厚度在10〜200nm的范围内。

公开(公告)号：US20150137677A1

公开(公告)日：2015-05-21

申请号：US14414517

申请日：2013-06-27

Applicant: SP TECH CO., LTD.

Inventor： Hee Sik Sohn

IPC: H01J1/88 ,  A61L2/14 ,  A61L9/22 ,  H05H1/24 ,  H01J1/02

CPC classification number: H01J1/88 ,  A61L2/14 ,  A61L9/22 ,  H01J1/02 ,  H01T19/04 ,  H01T23/00 ,  H05H1/2406 ,  H05H2001/2412 ,  H05H2001/2437

Abstract: Provided is a dielectric barrier discharge-type electrode structure for generating plasma. The electrode structure, according to the present invention, comprises: an upper conductive body electrode and a lower conductive body electrode; at least one conductive body electrode protrusion portion, which is formed on at least one surface of the upper conductive body electrode and/or the lower conductive body electrode; a dielectric layer which is formed on at least one of the inner surfaces of the upper conductive body electrode and the lower conductive body electrode that face each other, so as to have a substantially uniform thickness; and a specific gap (d) which is formed between the upper and lower conductive body electrodes and the dielectric layer, or between dielectric layers, due to the protruding effect of the conductive body electrode protrusion portion when the upper conductive body electrode and the lower conductive body electrodes come into close contact, wherein the plasma is generated by applying a pulse power or an alternating power to the upper conductive body electrode and the lower conductive body electrode.

Abstract translation: 提供一种用于产生等离子体的电介质阻挡放电型电极结构。 根据本发明的电极结构包括：上导电体电极和下导电体电极; 形成在上导电体电极和/或下导电体电极的至少一个表面上的至少一个导电体电极突出部分; 形成在所述上导电体电极和所述下导电体电极的至少一个内表面上彼此面对的电介质层，以具有基本均匀的厚度; 以及由上导电体电极和下导电体的导电体电极突出部的突出效果而在上下导电体电极与电介质层之间或电介质层之间形成的特定间隙（d） 体电极紧密接触，其中通过向上导电体电极和下导电体电极施加脉冲功率或交流电力来产生等离子体。

公开(公告)号：US08749178B2

公开(公告)日：2014-06-10

申请号：US13503394

申请日：2010-09-29

Applicant: Christof Metzmacher ,  Jeroen Jonkers ,  Rolf Theo Anton Apetz

Inventor： Christof Metzmacher ,  Jeroen Jonkers ,  Rolf Theo Anton Apetz

IPC: H01B5/00

CPC classification number: H05G2/003 ,  H01J1/02 ,  H05G2/005

Abstract: The present invention relates to an electrode system, in particular of a gas discharge device for generating EUV radiation and/or soft X-rays. The electrode system comprises at least two electrodes (1, 2) formed of an electrode material which contains Mo or W or an alloy of Mo or W as a main component. The electrode material has a fine grained structure with fine grains having a mean size of

Abstract translation: 本发明涉及一种电极系统，特别涉及用于产生EUV辐射和/或软X射线的气体放电装置。 电极系统包括由含有Mo或W的电极材料形成的至少两个电极（1,2）或以Mo或W为主要成分的合金。 电极材料具有细颗粒结构，其具有平均尺寸小于500nm的细晶粒。 利用所提出的电极系统，实现了电极的高热机械和耐热化学性。 因此，电极系统可以在使用液体Sn的已知的EUV光源中使用并且在高温下操作。

公开(公告)号：US20140151326A1

公开(公告)日：2014-06-05

申请号：US14173868

申请日：2014-02-06

Applicant: Kabushiki Kaisha Toshiba

Inventor： Eishi Tsutsumi ,  Tsutomu Nakanishi ,  Akira Fujimoto ,  Koji Asakawa

IPC: H01B13/00

CPC classification number: H01B13/0036 ,  H01J1/02 ,  H01J9/02 ,  H01J17/04 ,  H01J63/02 ,  H01J2217/49207

Abstract: The present invention provides a light-transmitting metal electrode including a substrate and a metal electrode layer having plural openings. The metal electrode layer also has such a continuous metal part that any pair of point-positions in the part is continuously connected without breaks. The openings in the metal electrode layer are periodically arranged to form plural microdomains. The plural microdomains are so placed that the in-plane arranging directions thereof are oriented independently of each other. The thickness of the metal electrode layer is in the range of 10 to 200 nm.

Abstract translation: 本发明提供一种透光性金属电极，其具有基板和具有多个开口部的金属电极层。 金属电极层还具有这样的连续的金属部分，即零件中的任何一个点位置连续连接而不断裂。 周期性地布置金属电极层中的开口以形成多个微区域。 多个微区被放置成使得其面内排列方向彼此独立地取向。 金属电极层的厚度在10〜200nm的范围内。

公开(公告)号：US20140010347A1

公开(公告)日：2014-01-09

申请号：US13893519

申请日：2013-05-14

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Do-yoon KIM ,  Yong-chul KIM ,  Il-hwan KIM ,  Shang-hyeun PARK ,  Tae-won JEONG

IPC: H01J19/24 ,  H01J1/02 ,  H01J35/06

CPC classification number: H01J19/24 ,  B82Y99/00 ,  H01J1/02 ,  H01J3/021 ,  H01J9/02 ,  H01J31/127 ,  H01J35/06 ,  H01J35/065 ,  H01J63/02 ,  H01J63/06 ,  H01J2203/0208 ,  H01J2235/062 ,  H01J2235/068 ,  H01J2329/4608 ,  Y10S977/939

Abstract: A mesh electrode adhesion structure includes: a substrate, and an opening defined in the substrate; a mesh electrode on the substrate, and a first combination groove defined in the mesh electrode; and an adhesion layer between the substrate and the mesh electrode. The mesh electrode includes: a mesh region corresponding to the opening defined in the substrate, and an adhesion region in which the first combination groove exposes the adhesion layer.

Abstract translation: 网状电极粘合结构包括：基板和限定在基板中的开口; 基板上的网状电极以及限定在网状电极中的第一组合槽; 以及基板和网状电极之间的粘附层。 网状电极包括：对应于在基板中限定的开口的网格区域，以及第一组合凹槽暴露粘合层的粘合区域。

公开(公告)号：US08525417B2

公开(公告)日：2013-09-03

申请号：US13698747

申请日：2010-10-21

Applicant: Zhijian Li ,  Yi Li ,  Zhubing He ,  Shengming Hu ,  Chunzhu Wang ,  Jianhua Zhou

Inventor： Zhijian Li ,  Yi Li ,  Zhubing He ,  Shengming Hu ,  Chunzhu Wang ,  Jianhua Zhou

IPC: H01J1/02

CPC classification number: H01J1/02 ,  C23C16/517 ,  H01J37/32091 ,  H01J37/32577 ,  H01L31/202 ,  Y02E10/50 ,  Y02P70/521

Abstract: A discharge electrode array for a silicon-based thin film solar cell deposition chamber is provided, relating to solar cell technologies. The discharge electrode array includes a signal feed component having a rectangular-shaped end, a flat waist corresponding to a feed-in port located in a hallowed rectangular area on a center region of a cathode plate having a shielding cover, connecting a feed-in power supply signal by surface contact. The electrode array includes at least a set of cathode plates and an anode plate, with two cathode plates sharing or surrounding one anode plate. Uniform large area and stable discharge driven by the RF/VHF power supply signal can be achieved, and the standing wave and the skin effect can be effectively removed. The production efficiency can be improved and the cost can be reduced.

Abstract translation: 提供了一种与太阳能电池技术相关的用于硅基薄膜太阳能电池沉积室的放电电极阵列。 放电电极阵列包括具有矩形端部的信号馈送部件，平坦的腰部对应于位于具有屏蔽罩的阴极板的中心区域上的仰卧矩形区域中的馈入端口，连接馈入 电源信号通过表面接触。 电极阵列至少包括一组阴极板和阳极板，两个阴极板共享或围绕一个阳极板。 可以实现由RF / VHF电源信号驱动的均匀的大面积和稳定的放电，并且可以有效地消除驻波和皮肤效应。 可以提高生产效率，降低成本。

公开(公告)号：US20130063018A1

公开(公告)日：2013-03-14

申请号：US13698747

申请日：2010-10-21

Applicant: Zhijian Li ,  Yi Li ,  Zhubing He ,  Shengming Hu ,  Chunzhu Wang ,  Jianhua Zhou

Inventor： Zhijian Li ,  Yi Li ,  Zhubing He ,  Shengming Hu ,  Chunzhu Wang ,  Jianhua Zhou

IPC: H01J1/02

CPC classification number: H01J1/02 ,  C23C16/517 ,  H01J37/32091 ,  H01J37/32577 ,  H01L31/202 ,  Y02E10/50 ,  Y02P70/521

Abstract: A discharge electrode array for a silicon-based thin film solar cell deposition chamber is provided, relating to solar cell technologies. The discharge electrode array includes a signal feed component having a rectangular-shaped end, a flat waist corresponding to a feed-in port located in a hallowed rectangular area on a center region of a cathode plate having a shielding cover, connecting a feed-in power supply signal by surface contact. The electrode array includes at least a set of cathode plates and an anode plate, with two cathode plates sharing or surrounding one anode plate. Uniform large area and stable discharge driven by the RF/VHF power supply signal can be achieved, and the standing wave and the skin effect can be effectively removed. The production efficiency can be improved and the cost can be reduced.

Abstract translation: 提供了一种与太阳能电池技术相关的用于硅基薄膜太阳能电池沉积室的放电电极阵列。 放电电极阵列包括具有矩形端部的信号馈送部件，平坦的腰部对应于位于具有屏蔽盖的阴极板的中心区域上的仰卧矩形区域中的馈入端口，连接馈入 电源信号通过表面接触。 电极阵列至少包括一组阴极板和阳极板，两个阴极板共享或围绕一个阳极板。 可以实现由RF / VHF电源信号驱动的均匀的大面积和稳定的放电，并且可以有效地消除驻波和皮肤效应。 可以提高生产效率，降低成本。