Abstract:
The object can be attained by the near-field light microchannel structure 61 that comprises a structure 95 provided with a microchannel 41c and a near-field light two-dimensional array 50 arranged inside the microchannel 41c and enabling in-plane near-field light generating, in which the near-field light two-dimensional array 50 comprises an electroconductive layer 6 formed on the inner wall surface of the microchannel 41c, a immobilizing layer 2 immobilized on one surface 6a of the electroconductive layer 6 via chemical bonding, and metal nanoparticle arrays 3 immobilized on one surface 2a of the immobilizing layer 2 via chemical bonding, and in which the metal nanoparticle arrays 3 each comprise multiple metal nanoparticles 4 arrayed at regular intervals and bonded to each other via the modifying part 5 arranged on the surface thereof.
Abstract:
An object of the present invention is to provide an electronic component using a Cu-based conductive material that can suppress oxidization even in a heat treatment in an oxidizing atmosphere and that can suppress an increase in an electrical resistance. In an electronic component having an electrode or a wiring, a ternary alloy made from three elements consisting of Cu, Al, and Co is used as a Cu-based wiring material that can prevent oxidization of the electrode or the wiring. Specifically, part or the whole of the electrode or the wiring has a chemical composition in which an Al content is 10 at % to 25 at %, a Co content is 5 at % to 20 at %, and the balance is composed of Cu and unavoidable impurities, and the chemical composition represents a ternary alloy in which two phases of a Cu solid solution formed by Al and Co being dissolved into Cu and a CoAl intermetallic compound coexist together.
Abstract:
The object can be attained by the near-field light microchannel structure 61 that comprises a structure 95 provided with a microchannel 41c and a near-field light two-dimensional array 50 arranged inside the microchannel 41c and enabling in-plane near-field light generating, in which the near-field light two-dimensional array 50 comprises an electroconductive layer 6 formed on the inner wall surface of the microchannel 41c, a immobilizing layer 2 immobilized on one surface 6a of the electroconductive layer 6 via chemical bonding, and metal nanoparticle arrays 3 immobilized on one surface 2a of the immobilizing layer 2 via chemical bonding, and in which the metal nanoparticle arrays 3 each comprise multiple metal nanoparticles 4 arrayed at regular intervals and bonded to each other via the modifying part 5 arranged on the surface thereof.
Abstract:
A RF electrode for generating, plasma in a plasma chamber comprising an optical feedthrough. A plasma chamber comprising an RF electrode and a counter-electrode with a substrate support for holding a substrate, wherein a high-frequency alternating field for generating the plasma can be formed between the RF electrode and the counter-electrode. The chamber comprising an RF electrode with an optical feedthrough. A method, for in situ analysis or in situ processing of a layer or plasma in a plasma chamber, wherein the layer is disposed on counter-electrode and an RF electrode is: disposed on the side lacing the layer. Selection of an RF electrode having an optical feedthrough, and at least one step in which electromagnetic radiation is supplied through the optical feedthrough for purposes of analysis or processing of the layer or the plasma, and by at least one other step in which the scattered or emitted or reflected radiation is supplied to an analysis unit.
Abstract:
An inorganic field emission device includes a first electrode, a second electrode spaced apart from the first electrode, and a light emitting layer disposed therebetween. A dielectric layer is disposed between the first electrode and the light emitting layer and/or between the second electrode and the light emitting layer. A field reinforcing layer is disposed between a dielectric layer and the light emitting layer and includes carbon nanotubes having a length of about 20 nanometers to about 1 micrometer.
Abstract:
An inorganic field emission device includes a first electrode, a second electrode spaced apart from the first electrode, and a light emitting layer disposed therebetween. A dielectric layer is disposed between the first electrode and the light emitting layer and/or between the second electrode and the light emitting layer. A field reinforcing layer is disposed between a dielectric layer and the light emitting layer and includes carbon nanotubes having a length of about 20 nanometers to about 1 micrometer.
Abstract:
An electrode in a plasma display panel and a fabrication process thereof that is capable of reducing a line width of the electrode without increasing a resistance component of the electrode. In the method, a bus electrode is provided by laminating a metal film on a certain substrate and then patterning it. A transparent electrode is provided on the substrate in a shape of surrounding the bus electrode. Accordingly, the electrode is provided by the metal film such that a limit for a selection in a width or thickness of the electrode, so that a line width of the electrode can be reduced to improve the visible light transmissivity and the electrode is formed into a large thickness instead of making a minute electrode width to lower the resistance component, thereby reducing a power consumption of the PDP.
Abstract:
Methods for making low work function electrodes either made from or coated with an electride material in which the electride material has lattice defect sites are described. Lattice defect sites are regions of the crystal structure where irregularities and deformations occur. Also provided are methods for making electrodes which consist of a substrate coated with a layer of a compound comprised of a cation complexed by an electride former, in which said complex has lattice defect sites. In addition, methods for making electrodes which consist of a bulk metal coated with a layer of an electride former having lattice defect sites are described. The electride former stabilizes the loss of electrons by surface sites on the metal, lowering the work-function of the coated surface.
Abstract:
A field emitter array comprises a plurality of cathode electrodes and an anode electrode disposed opposite to the plurality of cathode electrodes. And the anode electrode is provided with a plurality of protrusions having a cap material disposed on the tip of each protrusion. A voltage below a designated value is applied between a gate electrode and the cathode electrodes, and electrons are released only from a cathode electrode with a low emission start voltage. When the electrons are emitted to the cap material provided on the protrusions, the cap material is sputtering-evaporated and is affixed to the cathode electrode. Then a cap is disposed on the each of the cathode electrodes. Then, the emission properties between each cathode electrode are consequently rendered uniform, thereby increasing the emission start voltage and maximum applied voltage of the overall field emitter array.
Abstract:
The present disclosure relates to an electron generation apparatus including a discharge pin module provided with a support plate, discharge pins coupled to the support plate, and an elastic connection element electrically connecting a group of discharge pins, a discharge plate placed facing the discharge pins, a support structure positioned at an opposite side to the discharge plate with the support plate interposed between, and provided with a coupling plate to which the discharge pin module and the discharge plate are detachably coupled, and a circuit module provided with a main board positioned apart from the coupling plate at an opposite side to the discharge pin module with the coupling plate interposed between and distribution processing boards connected to the main board to apply individual high-voltage high-frequency pulsed power to the group of discharge pins.