公开(公告)号：US20020159568A1

公开(公告)日：2002-10-31

申请号：US09808587

申请日：2001-03-13

Inventor： Paul Andrew Spence ,  Neal Robert Fornaciari ,  Jim Jihchyun Chang

IPC: H01J035/00

CPC classification number: H05G2/003

Abstract: It has been demonstrated that debris generation within an electric capillary discharge source, for generating extreme ultraviolet and soft x-ray, is dependent on the magnitude and profile of the electric field that is established along the surfaces of the electrodes. An electrode shape that results in uniform electric field strength along its surface has been developed to minimize sputtering and debris generation. The electric discharge plasma source includes: (a) a body that defines a circular capillary bore that has a proximal end and a distal end; (b) a back electrode positioned around and adjacent to the distal end of the capillary bore wherein the back electrode has a channel that is in communication with the distal end and that is defined by a non-uniform inner surface which exhibits a first region which is convex, a second region which is concave, and a third region which is convex wherein the regions are viewed outwardly from the inner surface of the channel that is adjacent the distal end of the capillary bore so that the first region is closest to the distal end; (c) a front electrode positioned around and adjacent to the proximal end of the capillary bore wherein the front electrode has an opening that is communication with the proximal end and that is defined by a non-uniform inner surface which exhibits a first region which is convex, a second region which is substantially linear, and third region which is convex wherein the regions are viewed outwardly from the inner surface of the opening that is adjacent the proximal end of the capillary bore so that the first region is closest to the proximal end; and (d) a source of electric potential that is connected across the front and back electrodes.

Abstract translation: 已经证明，用于产生极端紫外线和软X射线的电毛细管放电源内的碎屑产生取决于沿着电极表面建立的电场的大小和分布。 已经开发出沿其表面导致均匀电场强度的电极形状，以最小化溅射和碎片产生。 放电等离子体源包括：（a）限定具有近端和远端的圆形毛细孔的主体; （b）位于毛细管孔的远端周围并与其邻近的背电极，其中所述背电极具有与所述远端连通并且由不均匀内表面限定的通道，所述不均匀内表面具有第一区域，所述第一区域 是凸的，第二区域是凹形的，以及第三区域，其中所述区域从所述通道的与所述毛细孔的远端相邻的所述通道的内表面向外看，使得所述第一区域最靠近所述远端 结束; （c）位于毛细管孔的近端周围并邻近毛细管孔的近端的前电极，其中前电极具有与近端连通并且由不均匀的内表面限定的开口，该不均匀的内表面呈现出第一区域， 凸起的，基本上线性的第二区域和凸起的第三区域，其中从邻近毛细孔的近端的开口的内表面向外观察区域，使得第一区域最接近近端 ; 和（d）连接在前后电极两端的电位源。

公开(公告)号：US20020085674A1

公开(公告)日：2002-07-04

申请号：US09751210

申请日：2000-12-29

Inventor： John Scott Price ,  Bruce M. Dunham ,  Colin R. Wilson

IPC: H01J035/00

CPC classification number: A61B6/563 ,  A61B6/032 ,  A61B6/4488 ,  H01J35/00 ,  H01J35/065 ,  H01J2235/068 ,  H01J2235/163

Abstract: A radiography system (10) has a solid state x-ray source that includes a substrate with a cathode (58) disposed thereon within a vacuum chamber (52). An anode (68) is spaced apart from cathode within vacuum chamber (52). The system may include a computer (36) that controls an x-ray controller (28) and a plurality of detectors elements (20) which provide data acquisition system (32) with predetermined data in response to x-ray submitted at x-ray source (14). Data acquisition system (32) is used in image reconstructor (34) to provide the desired image. An interface (48) may be used to transmit the image to a remote diagnostic facility. The wireless interface (48) is particularly suitable for communication with a remote diagnostic facility.

Abstract translation: 射线照相系统（10）具有固态x射线源，其包括在真空室（52）内设置有阴极（58）的基底。 阳极（68）与真空室（52）内的阴极间隔开。 系统可以包括控制x射线控制器（28）的计算机（36）和响应于在x射线处提交的x射线而向数据采集系统（32）提供预定数据的多个检测器元件（20） 来源（14）。 在图像重构器（34）中使用数据采集系统（32）来提供期望的图像。 可以使用接口（48）将图像发送到远程诊断设备。 无线接口（48）特别适用于与远程诊断设备的通信。

公开(公告)号：US20040218720A1

公开(公告)日：2004-11-04

申请号：US10427349

申请日：2003-04-30

Inventor： Vance Swanson ,  Zirao Zheng ,  Victor I. Chornenky ,  Eunsung Park ,  Matthew Rust

IPC: H05H001/00 ,  G21G004/00 ,  H01J035/00

CPC classification number: A61N5/1001 ,  A61N5/1002 ,  H01J35/32

Abstract: An apparatus for emitting x-rays comprises a housing which contains an anode having an electron receiving surface and a cathode having an electron emitting surface. A cable couples the anode to a source of high voltage. An optical fiber secured to the cable has a proximal end coupled to a source of optical energy and a distal end configured to direct the optical energy onto the cathode's electron emitting surface. The cathode emits electrons which strike the anode to create x-ray radiation.

Abstract translation: 用于发射X射线的装置包括壳体，其包含具有电子接收表面的阳极和具有电子发射表面的阴极。 电缆将阳极耦合到高电压源。 固定到电缆的光纤具有耦合到光能源的近端和被配置为将光能引导到阴极的电子发射表面上的远端。 阴极发射撞击阳极的电子，以产生X射线辐射。

公开(公告)号：US20040208287A1

公开(公告)日：2004-10-21

申请号：US10757277

申请日：2004-01-14

Inventor： Josef Deuringer

IPC: H01J035/00 ,  H01J035/22

CPC classification number: H05G1/52

Abstract: A power source for the operation of a deflection coil for an electron beam of an x-ray tube has a voltage source and a bridge circuit that is connected with each end of the deflection coil, respectively via one power switch in series connection to opposite poles of the voltage source. A current tap taps a coil current signal proportional to the current through the deflection coil. An activation comparator and a deactivation comparator are connected with the current tap to which an activation current signal Imin and a deactivation current signal Imax are supplied. The power switches are connected with the activation comparator and deactivation comparator such that they are closed in the event that the coil current signal undershoots the activation current signal Imin and opened in the event that the coil current signal overshoots the deactivation current signal Imax.

Abstract translation: 用于操作X射线管的电子束的偏转线圈的电源具有电压源和桥接电路，其分别经由与电极串联连接的一个电源开关连接到偏转线圈的每一端 的电压源。 电流抽头抽头与通过偏转线圈的电流成比例的线圈电流信号。 激活比较器和去激活比较器与提供激活电流信号Imin和去激活电流信号Imax的电流抽头连接。 电源开关与激活比较器和去激活比较器连接，使得它们在线圈电流信号下冲激活电流信号Imin并在线圈电流信号超过去激活电流信号Imax的情况下断开的情况下闭合。

公开(公告)号：US20040174956A1

公开(公告)日：2004-09-09

申请号：US10378174

申请日：2003-03-03

Applicant: Varian Medical Systems, Inc.

Inventor： Charles Lynn Chidester

IPC: H05H001/00 ,  G21G004/00 ,  H01J035/00 ,  H01J035/06

CPC classification number: H01J35/02 ,  H01J9/30

Abstract: An apparatus and method for reducing the incidence of electric field stress on portions of insulating structures within high voltage devices is disclosed. Each of the embodiments disclosed herein modifies the conductive properties of the insulating structure surface in a non-uniform manner such that the distribution of voltage potential along the surface thereof is more fully equalized during operation of the high voltage device. This, in turn, reduces the per unit stress on the insulating structure caused by the electric field of the high voltage device. Though embodiments of the present invention are preferably directed to utilization in x-ray tube devices, a variety of high voltage devices may benefit from application of the disclosed matter.

Abstract translation: 公开了一种用于降低高压装置内的绝缘结构部分上的电场应力的发生的装置和方法。 本文公开的每个实施例以不均匀的方式修改绝缘结构表面的导电性质，使得在高压器件的操作期间，沿着其表面的电压电势的分布更加完全均衡。 这又降低了由高压器件的电场引起的绝缘结构上的每单位应力。 尽管本发明的实施例优选地涉及在x射线管装置中的应用，但是各种高压装置可以受益于所公开的物质的应用。

公开(公告)号：US20040062352A1

公开(公告)日：2004-04-01

申请号：US10612409

申请日：2003-07-03

Applicant: TEIKOKU ELECTRIC MFG, CO., LTD

Inventor： Fumio Wake

IPC: H01J035/00

CPC classification number: H05G2/001

Abstract: A laser plasma X-ray generating apparatus that can promptly repair a cryo-target layer on a drum surface held at a very low temperature using a liquid nitrogen is provided, and a drum 122 is fixed to a lower end of a shaft 121, and the drum 122 is arranged so as to be able to be moved in its rotating direction and its axle direction at an inside of the cryo-forming cover 106. And a liquid nitrogen supplying pipe 131 is inserted into the shaft 121, and a conduit 144 for supplying the target gas is connected to the cryo-forming cover 106. Further, a jacket 171 is arranged at the periphery of the cryo-forming cover 106 and a pipe 185 is arranged at the periphery of the conduit 144, resulting in forming a heat exchanger. A vapor gas of liquid nitrogen is drawn from a gap S between the shaft 121 and the pipe for supplying the liquid nitrogen 131, introducing the vapor gas between the conduit 144 and the pipe 185, further introducing the vapor gas into an inside of the jacket 171, resulting in cooling the target gas, so that efficiency of attachment of the target material is improved.

Abstract translation: 提供一种可以使用液氮迅速修复保持在非常低的温度下的滚筒表面上的低温目标层的激光等离子体X射线产生装置，并将滚筒122固定在轴121的下端， 鼓122被布置成能够在冷冻成形盖106的内部沿其旋转方向和其轴向移动。并且液氮供给管131插入到轴121中，并且导管144 用于供应目标气体的装置连接到冷冻成形盖106.此外，护套171布置在冷冻成形盖106的周边处，并且管185布置在导管144的周边处，从而形成 热交换器。 液氮的蒸汽气体从轴121和用于供给液氮131的管道之间的间隙S被抽出，在管道144和管道185之间引入蒸气，进一步将蒸汽气体引入夹套的内部 171，导致目标气体的冷却，从而提高目标材料的附着效率。

公开(公告)号：US20030223542A1

公开(公告)日：2003-12-04

申请号：US10157540

申请日：2002-05-28

Inventor： Henry Shields

IPC: H05H001/00 ,  G21G004/00 ,  H01J035/00

CPC classification number: H05G2/003 ,  H05G2/008

Abstract: A laser-plasma, EUV radiation source (10) that controls the target droplet delivery rate so that successive target droplets (66, 72) are not affected by the ionization of a preceding target droplet. A source nozzle (50) of the source (10) has an orifice (56) of a predetermined size that allows the droplets (54) to be emitted at a rate set by the target materials natural Rayleigh instability break-up frequency as generated by a piezoelectric transducer (58). The rate of the droplet generation is determined by these factors in connection with the pulse frequency of the excitation laser (14) so that buffer droplets (70) are delivered between the target droplets (66, 72). The buffer droplets (70) act to absorb radiation generated from the ionized target droplet (66) so that the next target droplet (72) is not affected.

Abstract translation: 激光等离子体EUV辐射源（10），其控制目标液滴传送速率，使得连续的目标液滴（66,72）不受前面的目标液滴的电离影响。 源（10）的源嘴（50）具有预定尺寸的孔口（56），其允许以由目标材料设定的速率发射液滴（54），所述速率由天然瑞利不稳定性破坏频率设定，如 压电换能器（58）。 液滴产生速率由与激发激光器（14）的脉冲频率相关联的这些因素确定，使得缓冲液滴（70）在目标液滴（66,72）之间传送。 缓冲液滴（70）用于吸收从电离目标液滴（66）产生的辐射，使得下一个靶液滴（72）不受影响。

公开(公告)号：US20030081730A1

公开(公告)日：2003-05-01

申请号：US10283431

申请日：2002-10-29

Inventor： Lijo Joseph Thandiackal ,  Denis Perrillat ,  Balasubramannian Kandankumarath

IPC: H01J035/00

CPC classification number: H05G1/04 ,  H01J35/16 ,  H05G1/025

Abstract: It is an X-ray generating apparatus having an X-ray shielding means superior in thermal conductivity. The X-ray generating apparatus comprises an X-ray tube, an X-ray tube container, and a support member which is constructed of an electrically insulating material and which supports the X-ray tube within the X-ray tube container, the X-ray tube container being constituted by a combination of copper alloy plates with lead incorporated therein and a plate of a composite material, the composite material being formed by laminating lead and epoxy laminated glass cloth sheets so as to include an intermediate layer of lead, the X-ray tube container having an aperture (for X-ray emission and containing the X-ray tube so as to prevent the emission of X-ray from any other portion than the aperture.

Abstract translation: 是具有导热性优异的X射线屏蔽装置的X射线产生装置。 X射线产生装置包括X射线管，X射线管容器和由电绝缘材料构成并支撑X射线管容器内的X射线管的支撑构件，X 射线管容器由其中引入铅的铜合金板和复合材料板的组合构成，复合材料通过层压铅和环氧层压玻璃布片而形成，以包括铅的中间层， 具有孔径的X射线管容器（用于X射线发射并且包含X射线管，以便防止从孔径的任何其它部分发射X射线。

公开(公告)号：US20020186815A1

公开(公告)日：2002-12-12

申请号：US10165998

申请日：2002-06-10

Applicant: PLEX LLC

Inventor： Malcolm W. McGeoch

IPC: H01J035/00

CPC classification number: H05G2/003 ,  G03F7/70033

Abstract: A source of photons or neutrons includes a housing that defines a discharge chamber, a first group of ion beam sources directed toward a plasma discharge region in the discharge chamber, the first group of ion beam sources including a first electrode and an inner shell, and a second electrode spaced from the plasma discharge region. The source of photons or neutrons further includes a first power supply for energizing the first group of ion beam sources to electrostatically accelerate toward the plasma discharge region ion beams which are at least partially neutralized before they enter the plasma discharge region, and a second power supply coupled between the first and second electrodes for delivering a heating current to the plasma discharge region. The ion beams and the heating current form a hot plasma that radiates photons or neutrons. The source of photons or neutrons may further include a second group of ion beam sources. The photons may be in the soft X-ray or extreme ultraviolet wavelength range and, in one embodiment, have wavelengths in a range of about 10-15 nanometers.

Abstract translation: 光子或中子源包括限定放电室的壳体，指向放电室中的等离子体放电区域的第一组离子束源，第一组离子束源包括第一电极和内壳，以及 与等离子体放电区间隔开的第二电极。 光子或中子的源还包括用于激励第一组离子束源的静电加速的等离子体放电区离子束的第一电源，所述离子束在它们进入等离子体放电区域之前至少部分被中和，第二电源 耦合在第一和第二电极之间，用于将加热电流传送到等离子体放电区域。 离子束和加热电流形成辐射光子或中子的热等离子体。 光子或中子的源可以进一步包括第二组离子束源。 光子可以在软X射线或极紫外波长范围内，并且在一个实施例中，波长具有在约10-15纳米的范围内。

公开(公告)号：US20020154739A1

公开(公告)日：2002-10-24

申请号：US09760815

申请日：2001-01-17

Inventor： Victor I. Chornenky ,  Eunsung Park ,  Graham S. Kerslick ,  Ali Jaafar ,  Mark Gailloux

IPC: H01J035/00 ,  H01J035/22 ,  H01J035/32

CPC classification number: A61N5/1001 ,  H01J35/32 ,  H01J2235/164

Abstract: An emitter for a miniature X-ray apparatus comprises an insulating shell, an anode, and a cathode. The insulating shell includes a conical brazing surface, brazed to a conical brazing surface on the anode. The braze consists of a pure titanium layer and a pure tin layer. During brazing, the pure metals react and bond to the insulating shell and create a titanium-tin alloy between the pure layers. Pure tin is sputtered from tin sputter target onto the exposed brazing surfaces of the cathode cap and the anode. The insulating shell is placed in a vacuum chamber of deposition applicator, which deposits an active metal onto the shell brazing surface. In a brazing oven, the anode is placed within insulating shell such that the anode conical brazing surface and the shell conical brazing surface are contacting and aligned with each other. During brazing, the cathode is brought into contact with the insulating shell. The sealed emitters are placed in a sputtering machine's vacuum chamber. A metal is sputtered from a sputtering target to form a metal layer on the exterior of insulating shell.

Abstract translation: 用于微型X射线装置的发射器包括绝缘壳，阳极和阴极。 绝缘壳包括锥形钎焊表面，钎焊到阳极上的锥形钎焊表面。 钎焊由纯钛层和纯锡层组成。 在钎焊过程中，纯金属与绝缘壳反应并结合，并在纯净层之间产生钛 - 锡合金。 将纯锡从锡溅射靶溅射到阴极帽和阳极的暴露的钎焊表面上。 将绝缘壳体放置在沉积涂敷器的真空室中，该真空室将活性金属沉积到壳体钎焊表面上。 在钎焊炉中，将阳极放置在绝缘壳内，使得阳极锥形钎焊表面和壳体锥形钎焊表面彼此接触并对准。 在钎焊过程中，阴极与绝缘壳接触。 将密封的发射器放置在溅射机的真空室中。 从溅射靶溅射金属，在绝缘壳的外部形成金属层。