公开(公告)号：US08737171B2

公开(公告)日：2014-05-27

申请号：US13974797

申请日：2013-08-23

Applicant: Wolfson Microelectronics plc

Inventor： Colin Robert Jenkins ,  Tsjerk Hans Hoekstra ,  Euan James Boyd

IPC: H02M3/07 ,  H04R19/00 ,  B81B3/00 ,  G05F1/46 ,  H04R29/00

CPC classification number: H04R19/005 ,  B81B3/0021 ,  B81B3/0075 ,  B81B2201/0257 ,  B81B2201/0264 ,  B81B2203/0127 ,  B81C1/00158 ,  H01L41/09 ,  H01L41/0926 ,  H01L2224/16225 ,  H01L2224/48091 ,  H01L2924/1461 ,  H01L2924/16151 ,  H01L2924/16152 ,  H04R1/222 ,  H04R23/006 ,  H04R2201/003 ,  Y10T29/49005 ,  H01L2924/00014

Abstract: A MEMS capacitive transducer with increased robustness and resilience to acoustic shock. The transducer structure includes a flexible membrane supported between a first volume and a second volume, and at least one variable vent structure in communication with at least one of the first and second volumes. The variable vent structure includes at least one moveable portion which is moveable in response to a pressure differential across the moveable portion so as to vary the size of a flow path through the vent structure. The variable vent may be formed through the membrane and the moveable portion may be a part of the membrane, defined by one or more channels, that is deflectable away from the surface of the membrane. The variable vent is preferably closed in the normal range of pressure differentials but opens at high pressure differentials to provide more rapid equalization of the air volumes above and below the membrane.

Abstract translation: 一种MEMS电容式换能器，具有增强的抗震性能和弹性。 换能器结构包括支撑在第一体积和第二体积之间的柔性膜，以及与第一和第二体积中的至少一个连通的至少一个可变排气口结构。 可变排气结构包括至少一个可移动部分，其可响应于可移动部分上的压差而移动，以便改变通过排气结构的流动路径的尺寸。 可变通气口可以通过膜形成，并且可移动部分可以是由一个或多个通道限定的膜，其可偏离膜的表面偏转。 可变排气口优选在正常的压差范围内封闭，但是在高压差下打开以提供膜上方和下方的空气体积的更快速均衡。

公开(公告)号：US20140084396A1

公开(公告)日：2014-03-27

申请号：US13974797

申请日：2013-08-23

Applicant: Wolfson Microelectronics plc.

Inventor： Colin Robert Jenkins ,  Tsjerk Hans Hoekstra ,  Euan James Boyd

IPC: B81B3/00 ,  B81C1/00

CPC classification number: H04R19/005 ,  B81B3/0021 ,  B81B3/0075 ,  B81B2201/0257 ,  B81B2201/0264 ,  B81B2203/0127 ,  B81C1/00158 ,  H01L41/09 ,  H01L41/0926 ,  H01L2224/16225 ,  H01L2224/48091 ,  H01L2924/1461 ,  H01L2924/16151 ,  H01L2924/16152 ,  H04R1/222 ,  H04R23/006 ,  H04R2201/003 ,  Y10T29/49005 ,  H01L2924/00014

Abstract: A MEMS capacitive transducer with increased robustness and resilience to acoustic shock. The transducer structure includes a flexible membrane supported between a first volume and a second volume, and at least one variable vent structure in communication with at least one of the first and second volumes. The variable vent structure includes at least one moveable portion which is moveable in response to a pressure differential across the moveable portion so as to vary the size of a flow path through the vent structure. The variable vent may be formed through the membrane and the moveable portion may be a part of the membrane, defined by one or more channels, that is deflectable away from the surface of the membrane. The variable vent is preferably closed in the normal range of pressure differentials but opens at high pressure differentials to provide more rapid equalisation of the air volumes above and below the membrane.