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公开(公告)号：US20140161290A1
公开(公告)日：2014-06-12
申请号：US14176811
申请日：2014-02-10
Applicant: Wolfson Microelectronics plc
Inventor： Colin Robert Jenkins , Tsjerk Hans Hoekstra , Euan James Boyd
CPC classification number: H04R19/005 , B81B3/0021 , B81B3/0075 , B81B2201/0257 , B81B2201/0264 , B81B2203/0127 , B81C1/00158 , H01L41/09 , H01L41/0926 , H01L2224/16225 , H01L2224/48091 , H01L2924/1461 , H01L2924/16151 , H01L2924/16152 , H04R1/222 , H04R23/006 , H04R2201/003 , Y10T29/49005 , H01L2924/00014
Abstract: A MEMS capacitive transducer with increased robustness and resilience to acoustic shock. The transducer structure includes a flexible membrane supported between a first volume and a second volume, and at least one variable vent structure in communication with at least one of the first and second volumes. The variable vent structure includes at least one moveable portion which is moveable in response to a pressure differential across the moveable portion so as to vary the size of a flow path through the vent structure. The variable vent may be formed through the membrane and the moveable portion may be a part of the membrane, defined by one or more channels, that is deflectable away from the surface of the membrane. The variable vent is preferably closed in the normal range of pressure differentials but opens at high pressure differentials to provide more rapid equalisation of the air volumes above and below the membrane.
Abstract translation: 一种MEMS电容式换能器，具有增强的抗震性能和弹性。 换能器结构包括支撑在第一体积和第二体积之间的柔性膜，以及与第一和第二体积中的至少一个连通的至少一个可变排气口结构。 可变排气结构包括至少一个可移动部分，其可响应于可移动部分上的压差而移动，以便改变通过排气结构的流动路径的尺寸。 可变通气口可以通过膜形成，并且可移动部分可以是由一个或多个通道限定的膜，其可偏离膜的表面偏转。 可变排气口优选在正常的压差范围内封闭，但在高压差下打开以提供膜上方和下方的空气体积的更快速平衡。
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Patent Agency Ranking
公开(公告)号：US08698256B2
公开(公告)日：2014-04-15
申请号：US13902344
申请日：2013-05-24
Applicant: Wolfson Microelectronics plc
Inventor： Anthony Bernard Traynor , Richard Ian Laming , Tsjerk Hans Hoekstra
IPC: H01L29/84
CPC classification number: H04R19/04 , B81B3/0021 , B81B3/0072 , B81B3/0094 , B81B2201/00 , B81B2201/0235 , B81B2201/0257 , B81B2201/0264 , H01L27/00 , H04R19/00 , H04R19/005 , H04R23/00 , H04R31/00 , H04R2499/11
Abstract: A method of fabricating a micro-electrical-mechanical system (MEMS) transducer comprises the steps of forming a membrane on a substrate, and forming a back-volume in the substrate. The step of forming a back-volume in the substrate comprises the steps of forming a first back-volume portion and a second back-volume portion, the first back-volume portion being separated from the second back-volume portion by a step in a sidewall of the back-volume. The cross-sectional area of the second back-volume portion can be made greater than the cross-sectional area of the membrane, thereby enabling the back-volume to be increased without being constrained by the cross-sectional area of the membrane. The back-volume may comprise a third back-volume portion. The third back-volume portion enables the effective diameter of the membrane to be formed more accurately.
Abstract translation: 制造微机电系统（MEMS）换能器的方法包括以下步骤：在衬底上形成膜，并在衬底中形成后体积。 在基板中形成后部体积的步骤包括以下步骤：形成第一后部体积部分和第二后部体积部分，第一后部体积部分与第二背部体积部分分离， 背部体积的侧壁。 第二后部容积部分的横截面面积可以大于膜的横截面面积，从而能够增加后部体积，而不受膜的横截面面积的约束。 背部容积可以包括第三后部体积部分。 第三后部体积部分能够更准确地形成膜的有效直径。
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公开(公告)号：US20130256816A1
公开(公告)日：2013-10-03
申请号：US13902344
申请日：2013-05-24
Applicant: Wolfson Microelectronics plc
Inventor： Anthony Bernard Traynor , Richard Ian Laming , Tsjerk Hans Hoekstra
IPC: B81B3/00
CPC classification number: H04R19/04 , B81B3/0021 , B81B3/0072 , B81B3/0094 , B81B2201/00 , B81B2201/0235 , B81B2201/0257 , B81B2201/0264 , H01L27/00 , H04R19/00 , H04R19/005 , H04R23/00 , H04R31/00 , H04R2499/11
Abstract: A method of fabricating a micro-electrical-mechanical system (MEMS) transducer comprises the steps of forming a membrane on a substrate, and forming a back-volume in the substrate. The step of forming a back-volume in the substrate comprises the steps of forming a first back-volume portion and a second back-volume portion, the first back-volume portion being separated from the second back-volume portion by a step in a sidewall of the back-volume. The cross-sectional area of the second back-volume portion can be made greater than the cross-sectional area of the membrane, thereby enabling the back-volume to be increased without being constrained by the cross-sectional area of the membrane. The back-volume may comprise a third back-volume portion. The third back-volume portion enables the effective diameter of the membrane to be formed more accurately.
Abstract translation: 制造微机电系统（MEMS）换能器的方法包括以下步骤：在衬底上形成膜，并在衬底中形成后体积。 在基板中形成后部体积的步骤包括以下步骤：形成第一后部体积部分和第二背部体积部分，第一后部体积部分与第二背部体积部分分离， 背部体积的侧壁。 第二后部容积部分的横截面面积可以大于膜的横截面面积，从而能够增加后部体积，而不受膜的横截面面积的约束。 背部容积可以包括第三后部体积部分。 第三后部体积部分能够更准确地形成膜的有效直径。
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公开(公告)号：US08987844B2
公开(公告)日：2015-03-24
申请号：US14176811
申请日：2014-02-10
Applicant: Wolfson Microelectronics plc
Inventor： Colin Robert Jenkins , Tsjerk Hans Hoekstra , Euan James Boyd
CPC classification number: H04R19/005 , B81B3/0021 , B81B3/0075 , B81B2201/0257 , B81B2201/0264 , B81B2203/0127 , B81C1/00158 , H01L41/09 , H01L41/0926 , H01L2224/16225 , H01L2224/48091 , H01L2924/1461 , H01L2924/16151 , H01L2924/16152 , H04R1/222 , H04R23/006 , H04R2201/003 , Y10T29/49005 , H01L2924/00014
Abstract: A MEMS capacitive transducer with increased robustness and resilience to acoustic shock. The transducer structure includes a flexible membrane supported between a first volume and a second volume, and at least one variable vent structure in communication with at least one of the first and second volumes. The variable vent structure includes at least one moveable portion which is moveable in response to a pressure differential across the moveable portion so as to vary the size of a flow path through the vent structure. The variable vent may be formed through the membrane and the moveable portion may be a part of the membrane, defined by one or more channels, that is deflectable away from the surface of the membrane. The variable vent is preferably closed in the normal range of pressure differentials but opens at high pressure differentials to provide more rapid equalization of the air volumes above and below the membrane.
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公开(公告)号：US08737171B2
公开(公告)日：2014-05-27
申请号：US13974797
申请日：2013-08-23
Applicant: Wolfson Microelectronics plc
Inventor： Colin Robert Jenkins , Tsjerk Hans Hoekstra , Euan James Boyd
CPC classification number: H04R19/005 , B81B3/0021 , B81B3/0075 , B81B2201/0257 , B81B2201/0264 , B81B2203/0127 , B81C1/00158 , H01L41/09 , H01L41/0926 , H01L2224/16225 , H01L2224/48091 , H01L2924/1461 , H01L2924/16151 , H01L2924/16152 , H04R1/222 , H04R23/006 , H04R2201/003 , Y10T29/49005 , H01L2924/00014
Abstract: A MEMS capacitive transducer with increased robustness and resilience to acoustic shock. The transducer structure includes a flexible membrane supported between a first volume and a second volume, and at least one variable vent structure in communication with at least one of the first and second volumes. The variable vent structure includes at least one moveable portion which is moveable in response to a pressure differential across the moveable portion so as to vary the size of a flow path through the vent structure. The variable vent may be formed through the membrane and the moveable portion may be a part of the membrane, defined by one or more channels, that is deflectable away from the surface of the membrane. The variable vent is preferably closed in the normal range of pressure differentials but opens at high pressure differentials to provide more rapid equalization of the air volumes above and below the membrane.
Abstract translation: 一种MEMS电容式换能器，具有增强的抗震性能和弹性。 换能器结构包括支撑在第一体积和第二体积之间的柔性膜，以及与第一和第二体积中的至少一个连通的至少一个可变排气口结构。 可变排气结构包括至少一个可移动部分，其可响应于可移动部分上的压差而移动，以便改变通过排气结构的流动路径的尺寸。 可变通气口可以通过膜形成，并且可移动部分可以是由一个或多个通道限定的膜，其可偏离膜的表面偏转。 可变排气口优选在正常的压差范围内封闭，但是在高压差下打开以提供膜上方和下方的空气体积的更快速均衡。
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公开(公告)号：US20140084396A1
公开(公告)日：2014-03-27
申请号：US13974797
申请日：2013-08-23
Applicant: Wolfson Microelectronics plc.
Inventor： Colin Robert Jenkins , Tsjerk Hans Hoekstra , Euan James Boyd
CPC classification number: H04R19/005 , B81B3/0021 , B81B3/0075 , B81B2201/0257 , B81B2201/0264 , B81B2203/0127 , B81C1/00158 , H01L41/09 , H01L41/0926 , H01L2224/16225 , H01L2224/48091 , H01L2924/1461 , H01L2924/16151 , H01L2924/16152 , H04R1/222 , H04R23/006 , H04R2201/003 , Y10T29/49005 , H01L2924/00014
Abstract: A MEMS capacitive transducer with increased robustness and resilience to acoustic shock. The transducer structure includes a flexible membrane supported between a first volume and a second volume, and at least one variable vent structure in communication with at least one of the first and second volumes. The variable vent structure includes at least one moveable portion which is moveable in response to a pressure differential across the moveable portion so as to vary the size of a flow path through the vent structure. The variable vent may be formed through the membrane and the moveable portion may be a part of the membrane, defined by one or more channels, that is deflectable away from the surface of the membrane. The variable vent is preferably closed in the normal range of pressure differentials but opens at high pressure differentials to provide more rapid equalisation of the air volumes above and below the membrane.
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