公开(公告)号：US20150129420A1

公开(公告)日：2015-05-14

申请号：US13582474

申请日：2012-06-22

Applicant: Sang Hyun Park ,  Dong Hyun Lee ,  Hyun Pil Oh ,  Kwang Jin Jeon ,  Jin Haon Kwon ,  Sung Jin Park

Inventor： Sang Hyun Park ,  Dong Hyun Lee ,  Hyun Pil Oh ,  Kwang Jin Jeon ,  Jin Haon Kwon ,  Sung Jin Park

IPC: H01J37/32

CPC classification number: H01J37/32807 ,  B01J3/002 ,  C23C14/06 ,  C23C14/243

Abstract: Disclosed is a substrate processing system with a damage preventing function, comprising: a fluid tank which stores fluid; a chamber which receives the fluid from the fluid tank and provides a space where a substrate is processed; a pipe which connects the fluid tank and the chamber and through which the fluid flows; and a damage preventing unit which allows the fluid tank to be changed in position corresponding to thermal expansion caused in the pipe by receiving heat as the fluid flows in the pipe.With this, the substrate processing system with the damage preventing function for allowing the fluid tank to correspond to change in volume due to the thermal expansion of the pipe and preventing the fluid tank from damage is provided.

Abstract translation: 公开了一种具有防损功能的基板处理系统，包括：存储流体的流体箱; 接收来自流体箱的流体并提供衬底被处理的空间的腔室; 连接流体箱和室的管道，流体流过该管道; 以及损坏防止单元，其允许流体箱在流体在管中流动时通过接受热而在管道中引起的热膨胀相应地改变位置。 由此，提供了具有防止损伤的功能的基板处理系统，用于允许流体槽由于管道的热膨胀而导致体积变化，并且防止流体箱损坏。

公开(公告)号：US08747771B2

公开(公告)日：2014-06-10

申请号：US13873027

申请日：2013-04-29

Applicant: Sanciflex AB

Inventor： Per-Arne Froderberg ,  Melvin R. Madeley ,  Anna-Lena Seedhill

IPC: A61L2/00 ,  A61L9/00 ,  B08B3/00 ,  B07C9/00

CPC classification number: A61L2/07 ,  A61L11/00 ,  B01F9/06 ,  B01J3/002 ,  B01J3/03 ,  B01J3/04

Abstract: A pressure vessel and a drum rotatably arranged inside which has an inner space for material that is introduced into the pressure vessel. In various embodiments, a drive mechanism rotates the drum in relation to the pressure vessel. The drive mechanism can include a motor that can be located inside the pressure vessel in an interspace between the drum and the pressure vessel. Some embodiments include a door to close an opening of the pressure vessel and a part of the door can extend into an open end of the drum when the door is closed to keep the material in the drum and out of the interspace. In particular embodiments, a steam supply conduit extends into the drum at the closed end of the pressure vessel. In some embodiments, a helical agitation blade in the drum moves the material away from or toward the opening.

Abstract translation: 可旋转地布置在其内的压力容器和鼓具有用于引入压力容器的材料的内部空间。 在各种实施例中，驱动机构使滚筒相对于压力容器旋转。 驱动机构可以包括可以在滚筒和压力容器之间的间隙中位于压力容器内部的马达。 一些实施例包括关闭压力容器的开口的门，并且门的一部分可以在门关闭时延伸到滚筒的开口端，以将材料保持在滚筒中并离开间隙。 在特定实施例中，蒸汽供应导管在压力容器的封闭端延伸到滚筒中。 在一些实施例中，滚筒中的螺旋搅拌叶片使材料远离或朝向开口移动。

公开(公告)号：US07968057B2

公开(公告)日：2011-06-28

申请号：US11791413

申请日：2005-11-23

Applicant: Paul Burrows

Inventor： Paul Burrows

IPC: A61L2/00

CPC classification number: B01J3/002 ,  B01J3/03 ,  B01J3/04

Abstract: A waste treatment apparatus having an autoclave that includes a pressure vessel (11) having a first mouth part (20) to receive waste material and a second mouth part (19) to discharge treated material, with the autoclave being rotatable at a longitudinal axis to agitate the waste material during treatment and to discharge waste material from the autoclave.

Abstract translation: 一种具有高压釜的废物处理装置，该高压灭菌器包括具有用于接收废料的第一口部（20）的压力容器（11）和用于排出经处理的材料的第二口部（19），其中高压釜可在纵向轴线上旋转至 在处理期间搅拌废料并从高压釜中排出废料。

公开(公告)号：US20080317647A1

公开(公告)日：2008-12-25

申请号：US11628104

申请日：2005-05-27

Applicant: Tari Taricco

Inventor： Tari Taricco

IPC: B01J3/04

CPC classification number: B01J3/042 ,  B01J3/002 ,  B01J2219/00085 ,  B01J2219/00159

Abstract: Autoclaves with combined airflow to provide controllable heating or cooling of parts being processed are disclosed. Gas flow along the autoclave is provided in one or more duct areas (48,52), with a plurality of duct valves (50) along the duct (48,52) controllably diverting the gas into the working area of the autoclave. In a fully configured autoclave, duct valves (50) divert gas flowing from the fan or blower (38) from the ceiling, sides and floor of an autoclave to provide a controllable, three dimensional, air flow in the working area of the autoclave. Control of the duct valves (50) may be manual or automatic, with individual or ganged duct valve control. Computer control based on temperature sensor on parts in the working area of the autoclave may be used to provide uniform heating or cooling, or intentional non-uniform heating or cooling rates. Various embodiments are disclosed.

Abstract translation: 公开了具有组合气流的高压灭菌器以对被处理的部件进行可控加热或冷却。 沿着高压釜的气流设置在一个或多个管道区域（48,52）中，沿着管道（48,52）的多个管道阀（50）可控地将气体转移到高压釜的工作区域中。 在完全配置的高压釜中，管道阀（50）将来自风扇或鼓风机（38）的气体从高压釜的天花板，侧面和地板转移，以在高压釜的工作区域中提供可控制的三维空气流。 管道阀（50）的控制可以是手动或自动的，具有单独的或组合的管道阀控制。 可以使用基于温度传感器的在高压釜工作区域中的部件的计算机控制来提供均匀的加热或冷却，或有意的不均匀的加热或冷却速率。 公开了各种实施例。

公开(公告)号：US20050282035A1

公开(公告)日：2005-12-22

申请号：US11154556

申请日：2005-06-17

Applicant: Ivano Evangelisti

Inventor： Ivano Evangelisti

IPC: B01J3/00 ,  B01J19/02 ,  B32B15/00

CPC classification number: B01J3/008 ,  B01J3/002 ,  B01J19/02 ,  B01J2219/0236 ,  B01J2219/0286 ,  Y10T428/12806 ,  Y10T428/12944

Abstract: A lining particularly for performing oxidation processes and especially conventional and unconventional wet oxidation processes, which is substantially characterized by the presence of two separate portions, a first one made of titanium or alloys thereof and a second one made of at least one nickel alloy. The two portions of the lining are constituted by two layers, which are anchored on a substrate, generally steel, which is then shaped so as to provide the final apparatus. Advantageously, the apparatus is a wet oxidation reactor, plated internally with the lining as described above.

Abstract translation: 特别是用于进行氧化工艺，特别是常规和非常规湿式氧化工艺的衬里，其基本上特征在于存在两个分开的部分，第一个由钛或其合金制成，第二个由至少一个镍合金制成。 衬里的两个部分由两层构成，其被锚固在基材上，通常是钢，然后成形为提供最终装置。 有利地，该装置是湿式氧化反应器，其内部镀有如上所述的衬里。

公开(公告)号：US5871813A

公开(公告)日：1999-02-16

申请号：US812006

申请日：1997-03-05

Applicant: Thanh Pham

Inventor： Thanh Pham

IPC: B01J3/00 ,  B01J3/02 ,  C23C16/44 ,  C23C16/00

CPC classification number: C23C16/4412 ,  B01J3/002 ,  B01J3/02

Abstract: The present invention provides an apparatus and methods for controlling gas pressure within a semiconductor process chamber. The apparatus comprises a fluid conduit, and a throttle valve positioned downstream of the process chamber outlet for controlling gas flow therethrough. A filter is disposed between the inlet of the fluid conduit and the throttle valve for collecting gas particles flowing through the fluid conduit to inhibit gas deposition on the throttle valve. In addition, the filter functions as a flow restrictor to reduce the gas flow rate through the fluid conduit. This allows the throttle valve to operate in a more open position for a particular desired gas pressure, which usually reduces the amount of throttle valve surfaces exposed to gas passing therethrough. Accordingly, the amount of gas deposited on these surfaces is further reduced. This configuration minimizes any friction between valve surfaces, which increases the lifetime of the throttle valve and the throughput of the process.

Abstract translation: 本发明提供一种用于控制半导体处理室内的气体压力的装置和方法。 该装置包括流体导管和位于处理室出口下游的节流阀，用于控制气体流过其中。 过滤器设置在流体导管的入口和节流阀之间，用于收集流过流体导管的气体颗粒，以阻止节流阀上的气体沉积。 此外，过滤器用作流量限制器以减少通过流体导管的气体流量。 这允许节流阀在特定所需气体压力的更开放位置操作，这通常减少暴露于通过其中的气体的节流阀表面的量。 因此，沉积在这些表面上的气体的量进一步减少。 这种构造使阀表面之间的任何摩擦力最小化，这增加了节流阀的寿命和过程的吞吐量。

公开(公告)号：US5821438A

公开(公告)日：1998-10-13

申请号：US950081

申请日：1997-10-14

Applicant: Scott Andrew Weaver ,  Raymond Grant Rowe

Inventor： Scott Andrew Weaver ,  Raymond Grant Rowe

IPC: B01J3/00 ,  G01N19/00

CPC classification number: B01J3/002 ,  B01J2219/00162

Abstract: An introduction system for introducing an atmosphere into an interior of an autoclave alters an existing atmosphere. The introduction system comprises at least one source of actuating gas; an actuating mechanism, a pressure barrier that separates an interior of the autoclave from ambient exterior atmosphere; and a containment vessel that is located at least partially in the interior of the autoclave. The containment vessel comprises a plurality of walls, at least one of the walls comprising a release wall structure of the containment vessel, a vapor producing material cavity, where the walls define the vapor producing material cavity; and an opening element. The opening element is movable by the opening actuator device. The release wall structure of the containment vessel is rapidly opened by the opening element to effect a rapid release of vapor producing material in the vapor producing material cavity into the interior of the autoclave. The autoclave is provided with at least an increased pressure, so a rapid release of vapor producing material in the vapor producing material cavity into the interior of the autoclave causes the vapor producing material to vaporize into a vapor, thus altering an atmosphere in the autoclave. The actuating mechanism comprises an opening actuator device. The at least one source of actuating gas in communication with the opening actuator device and flow from the at least one source of actuating gas is controlled by a control device.

Abstract translation: 用于将气氛引入高压釜内部的引入系统改变了现有的气氛。 引入系统包括至少一个致动气体源; 致动机构，将高压釜的内部与周围的外部空气分开的压力屏障; 以及至少部分地位于高压釜内部的容纳容器。 容纳容器包括多个壁，至少一个壁包括容纳容器的释放壁结构，蒸气产生材料腔，其中壁限定产生蒸汽的材料腔; 和开启元件。 打开元件可通过打开致动器装置移动。 容纳容器的释放壁结构由开口元件快速打开，以将蒸气产生材料腔中的蒸气产生物质快速释放到高压釜的内部。 高压釜至少具有增加的压力，因此将蒸气产生材料空气快速释放到高压釜的内部使得蒸汽产生材料蒸发成蒸气，从而改变高压釜中的气氛。 致动机构包括打开致动器装置。 致动气体与打开致动器装置连通的至少一个源和来自至少一个致动气体源的流动由控制装置控制。

公开(公告)号：US5601745A

公开(公告)日：1997-02-11

申请号：US421158

申请日：1995-04-10

Applicant: Andreas Schalk ,  Peter Kettisch ,  Helmut Sinabell ,  Johannes Zach

Inventor： Andreas Schalk ,  Peter Kettisch ,  Helmut Sinabell ,  Johannes Zach

IPC: B01J3/00 ,  B01J3/04 ,  B01J19/12 ,  G01N1/44 ,  H05B6/68

CPC classification number: G01N1/44 ,  B01J19/126 ,  B01J3/002 ,  B01J3/04 ,  B01J2219/1218

Abstract: The present invention concerns a device for measuring the pressure and temperature in at least one pressure-tight analysis vessel, that has been sealed by means of a lid, whereby heat is supplied to the analysis vessel by means of a microwave oven. The device comprises a measurement device that is connected to a unit for controlling the microwave oven. In this regard, the measurement device is arranged in a microwave-tight housing inside the microwave field that is produced by the microwave oven. The housing is constructed in such a way that it forms a shield that is impermeable for the microwave field. A microwave-free zone is produced inside the housing. Electronic, current-carrying components can be arranged in the microwave-tight housing without, as a result, generating interference in the microwave field.

Abstract translation: 本发明涉及一种用于测量已经通过盖子密封的至少一个耐压分析容器中的压力和温度的装置，由此通过微波炉将热量供应到分析容器。 该装置包括连接到用于控制微波炉的单元的测量装置。 在这方面，测量装置布置在由微波炉产生的微波场内的微波绝缘壳体中。 壳体构造成使得其形成对微波场不透气的屏蔽。 在外壳内部产生无微波的区域。 电子载流部件可以布置在微波外壳中，而不会在微波场产生干扰。

公开(公告)号：US5366693A

公开(公告)日：1994-11-22

申请号：US822939

申请日：1992-01-21

Applicant: Mel-Angeli M. Burgos ,  Charles H. Feathers, III ,  John C. Schmoegner

Inventor： Mel-Angeli M. Burgos ,  Charles H. Feathers, III ,  John C. Schmoegner

IPC: A61L2/07 ,  A61L2/24 ,  B01J3/00 ,  A61L2/00

CPC classification number: A61L2/24 ,  A61L2/07 ,  B01J3/002

Abstract: A pressure vessel in which the air steam and liquid exhaust systems are combined and wherein all exhaust systems are directed through a water reservoir, using a single control valve and a temperature/pressure sensor in the system.

Abstract translation: 一种压力容器，其中空气蒸汽和液体排放系统被组合，并且其中所有排气系统通过系统中的单个控制阀和温度/压力传感器引导通过储水器。

公开(公告)号：US5219007A

公开(公告)日：1993-06-15

申请号：US802936

申请日：1991-12-06

Applicant: Peter Ebbing

Inventor： Peter Ebbing

IPC: B01J3/00 ,  B01J3/03

CPC classification number: B01J3/002 ,  B01J3/03

Abstract: An inner lid is attached to a vacuum chamber, covering an inner region of the vacuum chamber. An outer lid, also attached to the vacuum chamber, covers the inner lid, leaving a region between the inner lid and the outer lid. A gas conduit allows gas to flow between the inner region of the vacuum chamber and the region between the inner lid and the outer lid. A filter is placed in or immediately outside the gas conduit to prevent particles from entering the inner region of the vacuum chamber from the region between the inner lid and the outer lid. Since the pressure is the same on the top and bottom of the inner lid, the inner lid does not flex and thus does not rub against the vacuum chamber when the vacuum chamber is pumped down or vented up.

Abstract translation: 内盖附接到真空室，覆盖真空室的内部区域。 也附接到真空室的外盖覆盖内盖，留下内盖和外盖之间的区域。 气体导管允许气体在真空室的内部区域和内部盖和外部盖之间的区域之间流动。 将过滤器放置在气体管道的外部或其外部，以防止颗粒从内盖和外盖之间的区域进入真空室的内部区域。 由于内盖的顶部和底部的压力相同，所以当真空室被抽吸或排出时，内盖不会弯曲，因此不会摩擦真空室。